KR101653325B1 - ta-C coating method for protective layer of infrared ray optical lens - Google Patents

ta-C coating method for protective layer of infrared ray optical lens Download PDF

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KR101653325B1
KR101653325B1 KR1020150084527A KR20150084527A KR101653325B1 KR 101653325 B1 KR101653325 B1 KR 101653325B1 KR 1020150084527 A KR1020150084527 A KR 1020150084527A KR 20150084527 A KR20150084527 A KR 20150084527A KR 101653325 B1 KR101653325 B1 KR 101653325B1
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South Korea
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protective film
optical lens
coating
filter plate
infrared ray
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KR1020150084527A
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Korean (ko)
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장영준
최주현
김동식
김정호
김혜정
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한국광기술원
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • G02B1/105—

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  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present invention relates to a tetrahedral amorphous carbon (ta-C) coating method for a protective film of an infrared ray optical lens and, more specifically, to a ta-C coating method for a protective film of an infrared ray optical lens, which can form a ta-C thin film with high hardness and excellent optical performance without a loss of an infrared ray penetration ratio as a single layer in an infrared ray optical lens. According to the present invention, the ta-C coating method for a protective film of an infrared ray optical lens comprises a coating step of forming a ta-C protective film in an infrared ray optical lens. The coating step forms a protective film by a vacuum arc evaporation method of a filtered cathodic vacuum arc way.

Description

Ta-C coating method for protective layer of infrared optical lens {ta-C coating method for protective layer of infrared ray optical lens}

More particularly, the present invention relates to a ta-C coating method for an infrared optical lens protective film, and more specifically, a ta-C thin film having high hardness and excellent in optical performance without loss of infrared ray transmittance is formed into a single layer And more particularly to a ta-C coating method for an infrared optical lens protective film.

Diamond-like carbon (hereinafter referred to as DLC) thin films are widely used industrially because of their excellent mechanical properties such as high hardness, abrasion resistance, lubricity and smooth surface roughness, electrical insulation, chemical stability and high optical transparency have.

Most of the carbon-based thin films are mainly composed of RF-CVD, sputtering, and ion beam deposition using hydrocarbon as a reactive gas, and a device for coating DLC using argon and acetylene gas is disclosed in Korean Patent Laid- -2011-0115291.

However, since such a DLC formation method causes a change in the physical properties of the thin film due to the influence of hydrogen, recently, attention has been paid to the coating of a thin film containing no hydrogen by using solid carbon. It is a big problem that DLC contains hydrogen. It is of great significance to exclude hydrogen content from the source.

Conventional chemical and physical vapor deposition methods such as CVD and PVD have a disadvantage in that the infrared transmittance is reduced by about 10% on average regardless of the hydrogen content and the hardness of the coating film is not high. Further, as shown in FIG. 1, since the film is formed in a multi-layer structure in consideration of adhesion and optical characteristics, the film is thick (1 μm or more) and the coating process becomes complicated, thereby reducing the process efficiency.

In contrast, the vacuum arc vapor deposition is a high energy of the ions generated compared to other physical vapor deposition method, a high ionization rate also ion flux (flux) that is high increases the sp 3 / sp 2 fraction having a high hardness and a density close to diamond , It is possible to deposit a DLC thin film having good adhesion with a substrate, excellent optical properties such as permeability and refractive index, and high thermal stability. In addition, it is possible to form a thin film by coating with a single layer. DLC thin films deposited by vacuum arc evaporation are called amorphous diamond thin films or ta-C (tetrahedral amorphous carbon) thin films.

Since the vacuum arc evaporation method uses solid graphite as the carbon source, the hydrogen content can be originally prevented, and the third element can be easily added through the atmospheric gas injection.

However, the vacuum arc evaporation method has a problem that non-ionized macron-sized macroparticles in addition to ionized particles enter the coating film and deteriorate the film quality. To solve these problems, a vacuum arc evaporation method using a filtered cathodic vacuum arc (FCVA) method has been developed in which large particles are filtered using a magnetic field.

On the other hand, in an optical product such as a lens, an anti-reflection coating (AR) is formed on the surface to increase the amount of light passing through the lens by reducing the amount of light that is reflected from the surface and disappears. Such an anti-reflective coating film has a low hardness, and thus scratches easily occur when exposed to the outside. Therefore, in order to prevent scratches, a cover made of a glass material is generally used.

Korea Patent Publication No. 10-2011-0115291: DLC coating apparatus

The present invention has been made in order to overcome the above problems, and it is possible to form a single layer of ta-C thin film having excellent hardness in an infrared optical lens by a magnetic field filtering arc method so that it is not necessary to attach a separate lens protective cover, The present invention has been made to provide a ta-C coating method for an infrared optical lens protective film which is excellent in optical performance without loss.

In order to accomplish the above object, the ta-C coating method for an infrared optical lens protective film of the present invention includes a coating step of forming a tetrahedral amorphous carbon (ta-C) protective film on an infrared optical lens, and the protective film is formed by a vacuum arc evaporation method of a filtered cathodic vacuum arc method.

The protective film is formed on an anti-reflection coating film formed on the surface of the infrared optical lens.

The protective film has a thickness of 5 to 130 nm.

The protective film is formed directly on the surface of the infrared optical lens.

The protective film has a thickness of 60 to 120 nm.

The optical lens is formed of chalcogenide or germanium.

Wherein the coating step comprises the steps of: a) generating an arc plasma by generating a spark in a target of graphite material mounted in a vacuum chamber, and b) measuring a ratio of the plasmaized ions generated in the arc plasma generation step And a magnetic field filtering step of removing the ionized particles by a magnetic force and forming the protective film on the optical lens.

Wherein the magnetic field filtration step is performed by a filter unit connected to the vacuum chamber and the filter unit includes a transfer tube for providing a transfer path through which the plasmaized ions generated in the vacuum chamber are transferred to the optical lens, A magnetic force generating unit for magnetizing the non-ionized particles among the substances to be conveyed through the transfer pipe by magnetic force; and a magnetic force generating unit installed in the transfer pipe in the direction crossing the transfer pipe, And at least one filter plate formed in a net shape.

Wherein a plurality of the filter plates are provided so as to be spaced apart from each other along the conveyance direction of the conveyance pipe and the filter plates are coupled to each other by a coupling bar which couples the filter plates along the edge along the extending direction of the filter plate, A guide protrusion for guiding the entry / exit of the filter plate is formed along the longitudinal direction of the transfer tube, and a guide groove is formed in the filter plate or the coupling bar, , And the adjacent filter plates are formed to have mutually different mesh formation patterns such that the transmission forming areas of the net are mutually shifted along the conveying direction of the conveyance pipe.

As described above, since the ta-C protective film is coated on the infrared optical lens by the magnetic field filtering arc method, the hardness of the protective film is excellent and the optical performance is excellent because there is no decrease in the infrared transmittance.

In addition, since the ta-C protective film has a single-layer structure of a very thin film, the coating process is simple and the process efficiency can be improved.

The ta-C protective film formed by the present invention can prevent the occurrence of scratches on the optical lens, so that it is not necessary to mount a separate lens protective cover.

1 is a photograph showing a DLC coating film according to a conventional technique,
FIG. 2 is a view showing a coating apparatus of a magnetic field filtration arc type applied to the present invention,
FIG. 3 is an exploded perspective view of the filter plate inserted in the transfer tube of FIG. 2,
FIG. 4 is a perspective view showing an example of the network formation pattern of the filter plates applied to FIG. 2,
FIG. 5 is a graph showing infrared ray measurement results of a 60 nm thick ta-C protective film before and after the coating of Example 1,
FIG. 6 is a graph showing infrared ray measurement results of the 60 nm thick ta-C protective film of Example 2 before and after coating,
FIG. 7 is a graph showing the infrared ray measurement results of the 130 nm thick ta-C protective film before and after the coating of Example 2,
FIG. 8 is a graph of infrared ray measurement results of a germanium material lens before and after the coating of the ta-C protective film.

Hereinafter, a ta-C coating method for an infrared optical lens protective film according to a preferred embodiment of the present invention will be described in detail.

As an example of the present invention, a ta-C coating method for an infrared optical lens protective film includes a coating step of forming a tetrahedral amorphous carbon (ta-C) protective film on an infrared optical lens.

To do this, first prepare an infrared optical lens. The optical lens means a lens having an optical function. For example, a camera lens, a telescope lens, a lens for a spectroscope, and the like.

An anti-reflection (AR) coating film may be formed on one surface or both surfaces of the optical lens. It goes without saying that a bare lens having no anti-reflective coating film can be applied.

Chalcogenide or germanium can be used as the material of the optical lens.

When the optical lens is prepared, coat the ta-C protective film. The present invention applies a vacuum arc evaporation method as a coating method for forming a ta-C protective film. Preferably, a ta-C protective film is formed by vacuum arc evaporation using a filtered cathodic vacuum arc (FCVA) method.

An example of a coating apparatus for performing the coating by the magnetic field filtration arc method is shown in Figs. 2 to 4. Fig.

2 to 4, the coating apparatus 100 includes an arc plasma generator 110 for generating plasma ions by generating a spark in a graphite target body 20 mounted in a vacuum chamber 111, And a filter unit for removing the non-ionized particles among the plasmaized ions generated in the arc plasma generating step by a magnetic force and forming a ta-C protective film on the optical lens.

The arc plasma generator 110 generates sparks in the graphite target body 20 mounted in the vacuum chamber 111 to generate plasmaized ions. The vacuum chamber is mainly formed in a cylindrical shape and a rectangular shape, and preferably a rectangular vacuum chamber can be used.

The arc plasma generating unit 110 includes a vacuum pump 113, a bias applying unit 114, a spark generating unit 116, an operating unit 117, a display unit 118, and a control unit 119.

The vacuum pump 113 is controlled by the control unit 119 and is connected to the inside of the vacuum chamber 11 to evacuate the inside of the vacuum chamber 111.

The spark generating unit 116 is controlled by the control unit 119 to apply a voltage to the arc electrode 115 which is capable of varying the distance to the target 20 within the vacuum chamber 111. Here, a positive voltage is applied to the arc electrode 115, and a negative electrode potential is applied to the holder in which the target body 20 is mounted.

The bias applying unit 114 is controlled by the control unit 119 to apply a negative potential to the optical lens 10 for which the ta-C protective film is to be formed.

The operation unit 117 is capable of setting functions supported by the control unit 119 and the display unit 118 is controlled by the control unit 119 to display the display information.

The filter unit includes a transfer tube 120 for providing a transfer path through which the plasmaized ions generated in the vacuum chamber 111 are transferred to the optical lens 10, and a non-ionized particle in the material transferred through the transfer tube 9120 A magnetic force generating unit 130 for magnetizing the magnetic particles on the inner wall side by a magnetic force, a magnetic force generating unit 130 installed in the transfer tube 120 in the direction crossing the transfer tube 120, And at least one filter plate 140 formed of at least one filter plate.

Although the illustrated filter unit shows the X-bend type, the types of the double bend, T-bend, and S-bend can be applied.

The transfer tube 120 may be configured to provide a transfer path for transferring the plasmaized carbon ions generated from the target body 20 to the optical lens 10 in the vacuum chamber 111 by the arc plasma generating unit 110 It is extended to have a hollow tube shape.

Reference numeral 122 denotes a sight window provided so as to visually observe the inside of the conveyance pipe 120.

An optical lens 10 for forming a ta-C protective film is mounted at the end of the transfer tube 120.

The magnetic force generating unit 130 may be formed in the shape of a coil 133a along the extending direction of the transfer tube 120 so that the non-ionized particles among the materials transferred through the transfer tube 120 can be concentrated on the inner wall side by the magnetic force A wound coil section 133 and a magnetic force generating section 131 for generating a magnetic force by applying electric power to the coil section 133. [

The filter plate 140 is installed in the transfer pipe 120 in a direction crossing the extending direction of the transfer pipe 140 and is formed in a circular net shape so as to prevent the transfer of the non-ionized particles.

The filter plate 140 is made of stainless steel, more preferably made of SUS 304.

3 and 4, when the plurality of filter plates 140 are installed apart from each other along the conveying direction of the conveyance pipe 120, the filter plates 140 are disposed along the edges of the filter plate 140 And are coupled to each other by a coupling bar 144 which mutually couples along the extending direction.

When the plurality of filter plates 140 are connected to the coupling bars 144 for ease of replacement and repair, a guide protrusion 124 for guiding the entry / exit of the filter plate 140 is formed in the transfer tube 120, A guide groove 146 is formed in the filter plate 140 or the coupling bar 144 to receive the guide protrusion 124 to guide the sliding of the filter plate 140 or the coupling bar 144, It is preferable that it is formed with a structure in which

As shown in FIG. 4, the filter plates 140 are formed such that the permeation forming regions 140a, 140b and 140c of the net are disposed between the adjoining filter plates 140 along the conveying direction of the conveyance pipe 120, The mesh formation patterns are formed differently from each other.

In other words, the first filter plate 140 and the fourth filter plate 140 have a first net line inclined at an angle of less than 45 degrees to the right with respect to a horizontal line, The second filter plate 140 is formed by horizontally dividing the line connecting the vertexes of the upper and lower ends by the second mesh lines formed at equally spaced intervals, A first net line formed by equally spaced lines inclining 45 degrees to the right and a second net line formed by equally spaced lines inclining 45 degrees to the left with respect to a horizontal line, And the third filter plate 140 is formed with a rhomboidal transmission forming region 140b. In the third filter plate 140, the lines inclined at a greater angle than 45 degrees in the rightward direction with respect to the horizontal line, A rhomboidal transmission forming region 140a is formed in such a manner that a line connecting the vertexes of the upper and lower ends is shifted to the left with respect to the vertical direction by the second net lines formed by equally spaced lines inclining less than 45 degrees in the left direction with respect to the horizontal line .

According to the network formation pattern, when the filter plate 140 passes through the permeation forming region of the filter plate 140 at the front end of the adjacent filter plate 140 and then goes straight, the probability of collision with the filter plate 140 at the rear end can be increased The non-ionized particles can be prevented from being transported.

On the other hand, the surface of the filter plate 140 has a center line average roughness of 1 nm to 5 nm through the surface treatment of the ion beam. In this case, the adsorption rate of the non-ionized particles is improved. In the surface treatment of the ion beam, argon gas is injected into the ion beam generator equipped with the filter plate 140, a drive voltage of 1350 V is applied in a state of being evacuated to 2 10 -1 Pa, Processing for 300 seconds results in a centerline average roughness of about 1 nm.

The coating apparatus described above can prevent the transfer of the non-ionized macromolecule by the net-like filter plate provided in the direction transverse to the extending direction of the transfer tube, thereby improving the film quality of the ta-C protective film.

On the other hand, although not shown, a transfer chamber may be further provided adjacent to the vacuum chamber. A transfer chamber may be provided to transfer the target body from the vacuum chamber to the transfer chamber via the transfer rod arm. Through such a transfer chamber, it is possible to prevent dust or particles from the outside from being introduced into the vacuum chamber or adhering to the target body, thereby preventing a reduction in the infrared transmittance of the protective film. In the absence of a transfer chamber, infiltration of impurities may reduce the infrared transmittance of the protective film by about 3%.

The coating step using the above-described coating apparatus will be described.

The coating step comprises the steps of: a) generating an arc plasma by generating a spark in a target of graphite material mounted in a vacuum chamber, and b) ionizing the plasmaized ions generated in the arc plasma generating step And a magnetic field filtering step of removing the removed particles by a magnetic force and forming the protective film on the optical lens.

In the arc plasma generating step, a spark is generated in the graphite target body mounted in the vacuum chamber to generate plasmaized ions. Then, the plasmaized ions generated at this time are removed by magnetic force by the magnetic field filtration step.

The plasmaized ions flow into the transfer tube and move along the transfer tube. During the movement along the transfer tube, the non-ionized particles are removed, and the ionized particles are attached to the surface of the optical lens mounted on the end of the transfer tube to form the ta-C protective film.

When an optical lens having an anti-reflective coating film is used, the ta-C protective film is formed on the anti-reflective coating film. When an optical lens having no anti-reflective coating film is used, a ta-C protective film is directly formed on the surface of the optical lens.

As described above, the ta-C protective film formed on the optical lens by the magnetic field filtration arc method has a very thin film (thickness of 10 to 200 nm) in a single layer structure. Further, the hardness is 25 GPa or more and the scratches can be prevented from occurring. Therefore, it is not necessary to mount a separate lens protecting cover for protecting the optical lens. In addition, the ta-C protective film is excellent in optical performance because there is no loss of infrared transmittance.

Meanwhile, in another embodiment of the present invention, an infrared optical lens is prepared, and after the ultrasonic cleaning, an ion beam treatment is performed to remove the oxide film on the surface, and then the coating step can be performed.

The ion beam treatment process can use an ion beam irradiation device. A commercialized product (LFI-6X, NanoFilm, Singapore) using an end-hole ion gun as an ion beam source with an ion beam irradiator can be used.

Although not shown, the ion beam irradiation apparatus includes a chamber, a fixing jig installed inside the chamber, an ion beam source installed inside the chamber to generate an ion beam, and a gas injection unit for injecting ionized gas into the chamber.

Thereby fixing the optical lens to the fixing jig of the chamber. The optical lens is fixed to the fixing jig, and then the ionizing gas is injected into the chamber through the gas injection unit. Argon can be used as the ionizing gas. Ionization gas is injected into the chamber at a rate of 25 to 26 sccm to maintain the internal pressure of the chamber at 2.1 × 10 -1 Pa. Then, a voltage of 1350 V is applied to the ion beam source, and the optical lens is irradiated with the ion beam for 300 seconds.

Hereinafter, the present invention will be described by way of examples. However, the following examples are intended to illustrate the present invention in detail, and the scope of the present invention is not limited to the following examples.

(Example)

The chalcogenide lens used in the experiment was divided into two types depending on whether an antireflection film was formed on the surface or not. That is, experiments were conducted using a lens having no anti-reflective coating film formed thereon and a lens having anti-reflection coating films formed on both surfaces thereof.

After the prepared lens is first ultrasonic cleaning an ion beam irradiation device, the internal pressure of the after injection with 25sccm of argon and then into the ionized gas mounted on a fixing jig of the vacuum chamber of (LFI-6X, NanoFilm, Singapore ) vacuum chamber 2.1 × 10 - The ion beam was irradiated to the surface of the lens for 300 seconds by applying a voltage to the ion beam source (end hole ion gun type) while maintaining 1 Pa, thereby removing the oxide film.

Then, various coating thicknesses of ta-C were coated on one side of the lens using the coating apparatus of the magnetic field filtering arc type shown in FIG. 2 at different deposition times. The working pressure during coating was 3.0 × 8.0 10 -4 Pa, and the coating temperature was 50 ° C. or less. The DC bias voltage was applied from 0V to 1200V. The coating thickness was adjusted with time. A voltage of 15V was applied to the outer wall of the filter part of the X-bend to prevent the collision with the outer wall when pure carbon ions were transferred, thereby suppressing the coating efficiency deterioration.

The results are summarized in Table 1 according to whether the anti-reflective coating layer is formed on the lens or the thickness of the ta-C protective layer.

division Deposition time (min) ta-C Shielding Thickness (nm)

Example 1
(Lens not formed with an anti-reflection coating film)

0.5 5 One 10 2 20 6 60 9 90 12 120 18.5 185

Example 2
(Lens having a non-reflective coating film)
0.5 5 One 10 2 20 4 40 6 60 8 80 13 130

Table 2 shows the transmittance of infrared rays (wavelength band 8 to 12 占 퐉) before and after the coating of the ta-C protective film of Example 1 and the change of the infrared transmittance and the peeling of the ta-C protective film. When the protective film was peeled off, the infrared transmittance after coating was not measured. The infrared transmittance was measured using Perkin-Elemer spectrum paragon model.

ta-C Shielding Thickness (nm) Infrared transmittance (%) before coating Infrared Transmittance (%) after Coating Transmittance change Whether or not peeling 5 65 - - ○ 10 65 - - ○ 20 65 - - ○ 60 65 65 0 × 90 65 65 0 × 120 65 63 -2% × 185 65 - - ○

FIG. 5 shows the measurement results of the infrared transmittance before and after the coating in the case of the thickness of the ta-C protective film of 60 nm. In FIG. 5, 'bare chacogenide' means a lens before coating, and 'ta-C / bare chacogenide' means a lens after coating.

Referring to the results of Table 2, peeling of the protective film did not occur when the thickness of the ta-C protective film was 60 to 120 nm, but peeling was observed when the thickness was 20 nm or less and 185 nm. It is presumed that peeling occurs due to an increase in compressive residual stress generated in coating as the thickness increases.

When the ta-C protective film was not peeled and the thickness was 60 to 120 nm, there was almost no change in the infrared transmittance after coating. However, when the thickness is 120 nm, the infrared transmittance is decreased by about 2% after coating, but it is very good compared with the reduction rate (average 10% reduction) of the DLC coating formed by other physical vapor deposition methods (CVD, PVD).

Table 3 shows the transmittance of infrared rays (wavelength band 8 to 12 占 퐉) before and after the coating of the ta-C protective film in Example 2 and the change in the infrared transmittance and the peeling of the ta-C protective film.

ta-C Shielding Thickness (nm) Infrared transmittance (%) before coating Infrared Transmittance (%) after Coating Transmittance change Whether or not peeling 5 92.92 92.92 0 × 10 92.92 92.92 0 × 20 92.92 92.92 0 × 40 92.92 92.92 0 × 60 92.92 92.26 -0.66% × 80 92.92 92.26 -0.66% × 130 92.92 90.59 -2.33% ×

6 and 7 show the results of measurement of the infrared transmittance before and after the coating in the case of the ta-C protective film thickness of 60 and 130 nm, respectively, In FIGS. 6 and 7, 'AR / chalcogenide / AR' means a lens before coating, and 'ta-C / AR / chalcogenide / AR' means a lens after coating.

Referring to the results of Table 3, peeling of the protective film did not occur regardless of the thickness of the ta-C protective film. And there was little change in the infrared transmittance before and after the coating of the ta-C protective film. However, when the thickness was 130 nm, the infrared transmittance was decreased by about 2% after coating.

On the other hand, ta-C protective coating was coated on one surface of the germanium lens. A lens having no anti-reflective coating film was used. The results of the infrared transmission measurement are shown in Fig.

Referring to FIG. 8, even in the case of a germanium-based lens, the infrared transmittance hardly changes, but the transmittance slightly increases at 30 nm and 200 nm and decreases slightly at 50, 100 and 150 nm. Thus, it is confirmed that the ta-C protective film formed on the germanium-based lens has excellent optical characteristics.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, and that various modifications and equivalent embodiments may be made by those skilled in the art. Accordingly, the true scope of protection of the present invention should be determined only by the appended claims.

110: arc plasma generator 120: transfer tube
130: magnetic force generator 140: filter plate

Claims (9)

A coating step of forming a tetrahedral amorphous carbon (ta-C) protective film on an infrared optical lens,
The coating step forms the protective film by a vacuum arc evaporation method using a filtered cathodic vacuum arc method,
Wherein the coating step comprises the steps of: a) generating an arc plasma by generating a spark in a target of graphite material mounted in a vacuum chamber, and b) measuring a ratio of the plasmaized ions generated in the arc plasma generation step And a magnetic field filtering step of removing the ionized particles by a magnetic force and forming the protective film on the optical lens,
Wherein the magnetic field filtering step is performed by a filter unit connected to the vacuum chamber,
Wherein the filter unit comprises: a transfer tube for providing a transfer path through which the plasmaized ions generated in the vacuum chamber are transferred to the optical lens; and a non-ionized particle in the material transferred through the transfer tube, And at least one filter plate provided in the conveyance pipe in a direction crossing the conveyance pipe and formed in a net shape so as to block the conveyance of the nonionized particles,
Wherein a plurality of filter plates are provided so as to be spaced apart from each other along a conveying direction of the conveyance pipe and the filter plates are coupled with each other by a coupling bar which couples the filter plates along the edge along the extending direction of the filter plate,
Wherein a guide protrusion for guiding the entry / exit of the filter plate is formed in the conveyance pipe along the longitudinal direction of the conveyance pipe, and the guide plate is inserted into the filter plate or the coupling bar, Is formed,
The method according to any one of claims 1 to 3, wherein the adjacent filter plates are formed such that the net-forming patterns are different from each other such that the transmission forming areas of the netting are mutually shifted along the conveying direction of the conveying tube. The method according to claim 1, wherein the protective film is formed on an anti-reflective coating film formed on a surface of the optical lens. 3. The method according to claim 2, wherein the protective film has a thickness of 5 to 130 nm. The method according to claim 1, wherein the protective film is formed directly on the surface of the optical lens. 5. The method according to claim 4, wherein the protective film has a thickness of 60 to 120 nm. The method according to claim 1, wherein the optical lens is formed of chalcogenide or germanium.

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180055043A (en) * 2016-11-16 2018-05-25 한국생산기술연구원 ta-C composite coating layer, apparatus for manufacturing ta-C composite coating layer and method for manufacturing using the same
KR101902778B1 (en) * 2016-12-08 2018-10-02 한국생산기술연구원 Arc Ion Plating Apparatus Having Nest Unit
KR20190010221A (en) * 2017-07-21 2019-01-30 한국광기술원 Infrared optical lens equipped with ta-C and yttrium oxide thin film
KR20210066060A (en) * 2019-11-27 2021-06-07 한국재료연구원 ta-C protective film for infrared optical lens protection and its coating method
WO2021172682A1 (en) * 2020-02-24 2021-09-02 한국재료연구원 Mold for forming glass lens and manufacturing method of same
CN114000105A (en) * 2021-10-15 2022-02-01 科汇纳米技术（深圳）有限公司 Preparation method and application of Ta-C diamond-like coating

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KR102342322B1 (en) * 2017-07-21 2021-12-23 한국광기술원 Infrared optical lens equipped with ta-C and yttrium oxide thin film
KR20210066060A (en) * 2019-11-27 2021-06-07 한국재료연구원 ta-C protective film for infrared optical lens protection and its coating method
KR102284890B1 (en) * 2019-11-27 2021-08-04 한국재료연구원 ta-C protective film for infrared optical lens protection and its coating method
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CN114000105A (en) * 2021-10-15 2022-02-01 科汇纳米技术（深圳）有限公司 Preparation method and application of Ta-C diamond-like coating

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