KR101605718B1 - Liquid supplying unit and Apparatus for treating substrate with the unit - Google Patents

Abstract

An embodiment of the present invention provides a liquid supply unit and a substrate processing apparatus for supplying a liquid. The liquid supply unit includes a bottle having a storage space for storing a process liquid therein and having a top surface opened and a valve assembly for opening and closing the top surface, the unit supplying the process liquid to the nozzle, And a drive unit for moving the drive shaft to a first position and a second position, wherein the first position is a position where the drive shaft is in contact with the main shaft, And the second position is a position for opening the supply passage. The valve assembly that opens and closes the bottle has a valve function, and can control the inflow and outflow of the processing liquid into the bottle.

Description

[0001] The present invention relates to a liquid supply unit and a substrate processing apparatus having the liquid supply unit,

The present invention relates to an apparatus for supplying a liquid onto a substrate.

2. Description of the Related Art In recent years, liquid crystal display devices have been widely used in display portions of electronic devices such as portable telephones and portable computers. Such a liquid crystal display device has a structure in which liquid crystal is injected into a space between a black matrix, a color filter, a color filter substrate on which a common electrode and an alignment film are formed, a thin film transistor (TFT), a pixel electrode and an alignment film- To obtain a visual effect.

As an apparatus for applying a treatment liquid such as an alignment liquid or a droplet onto the color filter substrate and the array substrate, an inkjet type coating apparatus is used. Such a coating apparatus includes a discharge head and a liquid supply member. The liquid supply member supplies the processing liquid to the discharge head, and the discharge head supplies liquid droplets of micro size or nano size onto the substrate. 1 is a view showing a general liquid supply member. Referring to Fig. 1, the liquid supply member includes a bottle 2, a liquid filling line 4, and a liquid supply line 6. The first processing liquid is stored in the bottle 2, and the stored first processing liquid is supplied to the discharging head through the liquid supply line 6. When the processing liquid in the bottle 2 is exhausted, the liquid filling line 4 fills the first processing liquid in the bottle 2. Valves 8a and 8b are provided in each of the liquid supply line 6 and the liquid filling line 4 to open and close the lines to supply and fill the first process liquid.

2 is a cross-sectional view showing a typical valve. Referring to FIG. 2, the valve 8 includes a body 7 and a sealing member 9. The body (7) has an inflow passage and an outflow passage formed therein, and the sealing member (9) opens or closes a point where the inflow passage and the outflow passage meet to supply or stop the process solution. However, in the course of supplying the first treatment liquid, the first treatment liquid remains in the body or remains on the sealing member. Especially, when the point where the inflow channel and the outflow channel meet in the body is provided by the orifice structure, the surplus space 7a is formed and the first processing solution can remain in the surplus space 7a.

Thereafter, when supplying the second processing liquid different from the first processing liquid, the bottle storing the first processing liquid is replaced with the bottle 2 storing the second processing liquid, and the second processing liquid is supplied and filled. In this case, the first process liquid and the second process liquid remaining in the valve 8 are mixed to cause a process failure.

To solve this problem, a cleaning liquid is supplied to each of the liquid filling line 4 and the liquid supply line 6 to clean the processing liquid remaining in the valve 8, but the remaining processing liquid can not be completely cleaned. In addition, since the valve 8 is complicated in its structure, it is difficult to disassemble it, and even if the valve is disassembled and its interior is cleaned, it is difficult to reassemble the valve.

Also, as shown in FIG. 3, bubbles are generated when the treatment liquid filled in the bottle 2 and the stored treatment liquid collide with each other at a predetermined impact amount or more, which adversely affects the discharge pressure of the treatment liquid .

The present invention intends to provide a liquid supply unit of a new structure.

The present invention also provides a valve assembly that is easy to disassemble and assemble.

The present invention also provides an apparatus capable of minimizing the generation of bubbles in the treatment liquid.

An embodiment of the present invention provides a liquid supply unit and a substrate processing apparatus for supplying a liquid. The liquid supply unit includes a bottle having a storage space for storing a process liquid therein and having a top surface opened and a valve assembly for opening and closing the top surface, the unit supplying the process liquid to the nozzle, And a drive unit for moving the drive shaft to a first position and a second position, wherein the first position is a position where the drive shaft is in contact with the main shaft, And the second position is a position for opening the supply passage.

The body further includes a first filling flow path communicating with the main flow path and a liquid filling line connected to the body to fill the first filling flow path with the treatment liquid, And the third position may be a position where the drive shaft opens the first filling channel. Wherein the valve assembly further includes a cover mounted on the upper surface and formed with a supply hole communicating with the supply passage, the cover being coupled to each of the body and the bottle, And a liquid replenishing line extending from the plate so as to be positioned in the storage space, wherein a filling hole for spraying the processing liquid and a second filling flow path connecting the main flow path and the filling hole are formed, May be provided to face the inner surface of the bottle. The first filling passage may be provided so as to be inclined downwardly as the main filling passage approaches the main passage. The point where the first filling passage and the main passage communicate with each other may be located lower than a point where the supply passage and the main passage communicate with each other. The main passage may be provided with a hollow portion passing through both sides of the body, the drive shaft may have a diameter corresponding to the main passage, and a shaft portion having an annular ring-shaped connection groove formed on an outer surface thereof. The second position may be a position where the connection groove and the supply passage communicate with each other. The second position may be a position where the shaft portion blocks the first filling flow path. An annular ring-shaped surplus groove is formed on an inner surface of the body forming the main flow passage, and the surplus groove may be formed on the supply passage and the first filling passage. The shaft portion may have a length corresponding to or longer than the main flow path, and the drive shaft may include a guide portion extending from an upper end of the shaft portion, and the guide portion may have a larger diameter than the shaft portion. The first position may be a position where the guide portion is placed on the body, and the shaft portion blocks the first filling passage and the supply passage.

The substrate processing apparatus includes a substrate holding unit for holding a substrate, a discharge head for supplying a processing liquid supported by the substrate holding unit, and a liquid supply unit for supplying the processing liquid to the discharge head, And a liquid supply line connecting the valve assembly and the discharge head, wherein the valve assembly has a storage space for storing a process liquid therein, a bottle having an open top surface, a valve assembly for opening and closing the top surface, A main body having a main passage and a supply passage connected to the main passage, a drive shaft disposed in the main passage, and a driver moving the drive shaft to a first position and a second position, Is a position for blocking the supply passage, and the second position is a position for opening the supply passage.

The body further includes a first filling flow path communicating with the main flow path and a liquid filling line connected to the body to fill the first filling flow path with the treatment liquid, And the third position may be a position at which the drive shaft opens the first filling passage. Wherein the valve assembly further includes a cover mounted on the upper surface and formed with a supply hole communicating with the supply passage, the cover being coupled to each of the body and the bottle, And a liquid replenishing line extending from the plate so as to be positioned in the storage space, wherein a filling hole for spraying the processing liquid and a second filling flow path connecting the main flow path and the filling hole are formed, May be provided to face the inner surface of the bottle. The main passage may be provided with a hollow portion passing through both sides of the body, the drive shaft may have a diameter corresponding to the main passage, and a shaft portion having an annular ring-shaped connection groove formed on an outer surface thereof. The second position may be a position where the connection groove and the supply passage communicate with each other. An annular ring-shaped surplus groove is formed on an inner surface of the body forming the main flow path, and the excess groove may be formed on the supply path and the first filling path.

According to the embodiment of the present invention, the valve assembly for opening and closing the bottle has a valve function, and can control the inflow and outflow of the processing liquid into the bottle.

Further, according to the embodiment of the present invention, it is possible to selectively open and close the filling channel into which the process liquid flows into the bottle and the supply flow channel through which the process liquid flows using the single driving member.

According to an embodiment of the present invention, the valve assembly includes a body and a drive shaft, and the drive shaft is positioned to be inserted into the body, thereby facilitating assembly and disassembly between the drive shaft and the body.

Further, according to the embodiment of the present invention, when the processing liquid is filled in the bottle, the processing liquid is sprayed on the inner wall of the bottle so as to flow on the inner wall of the bottle, thereby minimizing the generation of bubbles in the processing liquid.

1 is a view showing a general liquid supply member.
2 is a cross-sectional view showing a typical valve.
3 is a cross-sectional view showing a process of filling a process liquid into a bottle.
4 is a view showing a configuration of an inkjet type substrate processing apparatus according to an embodiment of the present invention.
5 is a perspective view showing the liquid crystal discharge unit of FIG.
Figure 6 is a front view showing the gantry moving unit of Figure 5;
Figure 7 is a perspective view showing the head assembly and head moving unit of Figure 5;
Figure 8 is a cross-sectional view of the support body of Figure 7;
Fig. 9 is a cross-sectional view showing the head assembly and the liquid supply unit of Fig. 7;
10 is a cross-sectional view of the valve assembly of FIG.
11 is a perspective view showing the body of Fig.
12 is a cutaway perspective view of the body showing the supply flow path of the body of FIG.
13 is a perspective view of the body showing the first filling channel of the body of FIG.
14 is a perspective view showing the cover of Fig.
15 is a cross-sectional view showing the drive shaft positioned at the first position in FIG.
16 is a cross-sectional view showing the drive shaft positioned at the second position in Fig.
17 is a cross-sectional view showing the drive shaft positioned at the third position in Fig.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The above and other objects, features, and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. Each drawing has been partially or exaggerated for clarity. It should be noted that, in adding reference numerals to the constituent elements of the respective drawings, the same constituent elements are shown to have the same reference numerals as possible even if they are displayed on different drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

In this embodiment, a substrate processing apparatus for applying a treatment liquid to an object by an inkjet method for ejecting droplets will be described. The object liquid may be a color filter (CF) substrate or a thin film transistor (TFT) substrate of a liquid crystal display panel. The liquid may be a liquid crystal, an alignment liquid, red (R) Green (G), or blue (B) ink. As the alignment liquid, polyimide may be used.

The alignment liquid can be applied to the entire surface of the color filter (CF) substrate and the thin film transistor (TFT) substrate, and the liquid crystal can be applied to the entire surface of the color filter (CF) substrate or the thin film transistor (TFT) substrate. The ink may be applied to the interior area of the black matrix arranged in a lattice pattern on a color filter (CF) substrate.

The substrate processing apparatus 1 of this embodiment is an apparatus for applying liquid crystal (liquid crystal) to a substrate by an inkjet method for ejecting droplets.

The substrate may be a color filter (CF) substrate or a thin film transistor (TFT) substrate of a liquid crystal display panel, and the liquid crystal may be applied to an entire surface of a color filter (CF) substrate or a thin film transistor (TFT) substrate.

4 is a view showing a substrate processing apparatus of an inkjet method. 4, the substrate processing apparatus 1 includes a liquid crystal discharge unit 10, a substrate transfer unit 20, a loading unit 30, an unloading unit 40, a liquid crystal supply unit 50, and a main controller 90 ). The liquid crystal discharge portion 10 and the substrate transfer portion 20 are arranged in a line in the first direction I and can be positioned adjacent to each other. A liquid crystal supply part 50 and a main control part 90 are disposed at positions facing the substrate transfer part 20 with the liquid crystal discharge part 10 as a center. The liquid crystal supply part 50 and the main control part 90 may be arranged in a line in the second direction II. The loading unit 30 and the unloading unit 40 are disposed at positions facing the liquid crystal discharge unit 10 with the substrate transfer unit 20 as a center. The loading section 30 and the unloading section 40 may be arranged in a line in the second direction II.

Here, the first direction I is an arrangement direction of the liquid crystal discharge portion 10 and the substrate transfer portion 20, the second direction II is a direction perpendicular to the first direction I on the horizontal plane, (III) is a direction perpendicular to the first direction (I) and the second direction (II).

The substrate to which the liquid crystal is to be applied is brought into the loading section 30. The substrate transferring unit 20 transfers the substrate loaded into the loading unit 30 to the liquid crystal discharging unit 10. The liquid crystal discharge portion 10 receives the liquid crystal from the liquid crystal supply portion 50 and discharges the liquid crystal onto the substrate by an inkjet method. When the liquid crystal discharge is completed, the substrate transfer section 20 transfers the substrate from the liquid crystal discharge section 10 to the unloading section 40. The substrate coated with the liquid crystal is taken out of the unloading portion 40. The main control unit 90 controls the overall operations of the liquid crystal discharge unit 10, the substrate transfer unit 20, the loading unit 30, the unloading unit 40, and the liquid crystal supply unit 50.

5 is a perspective view showing the liquid crystal discharge unit of FIG. 5, the liquid crystal discharging unit 10 includes a base B, a substrate supporting unit 100, a gantry 220, a gantry moving unit 300, a head moving unit 500, a head assembly 600, A head control unit 450, a cleaning unit 700, a measuring unit 800, an inspection unit 900, and a liquid supply unit 1000.

The base (B) may be provided in a rectangular parallelepiped shape having a constant thickness. A substrate supporting unit 100 is disposed on the upper surface of the base B. The substrate supporting unit 100 has a supporting plate 110 on which the substrate S is placed. The support plate 110 may be a rectangular plate. The rotation driving member 120 is connected to the lower surface of the support plate 110. The rotation drive member 120 may be a rotary motor. The rotation driving member 120 rotates the support plate 110 around a rotation center axis perpendicular to the support plate 100. [

When the support plate 110 is rotated by the rotation drive member 120, the substrate S can be rotated by the rotation of the support plate 110. [ When the long-side direction of the cell formed on the substrate to which the liquid crystal is to be applied faces the second direction II, the rotation driving member 120 can rotate the substrate such that the long-side direction of the cell is in the first direction I.

The support plate 110 and the rotation driving member 120 may be linearly moved in the first direction I by the linear driving member 130. The linear driving member 130 includes a slider 132 and a guide member 134. The rotation driving member 120 is provided on the upper surface of the slider 132. [ The guide member 134 is elongated in the first direction I in the center of the upper surface of the base B. A linear motor (not shown) may be incorporated in the slider 132 and the slider 132 is linearly moved in the first direction I along the guide member 134 by a linear motor (not shown).

The gantry 220 is provided at an upper portion of a path through which the support plate 110 is moved. The gantry 220 is spaced upwardly from the upper surface of the base B and the gantry 220 is disposed such that its longitudinal direction is in the second direction II.

The gantry moving unit 300 moves the gantry 220 in a first direction I or moves the gantry 220 such that the longitudinal direction of the gantry 220 is inclined in the first direction I . The gantry drive unit 300 includes a first drive unit 310 and a second drive unit 320. The second drive unit 320 is provided at one end of the gantry 220 as a center of rotation and the first drive unit 310 is provided at the other end of the gantry 220.

6 is a cross-sectional view showing the gantry moving unit of Fig. Referring to FIG. 6, the first drive unit 310 includes a guide rail 315 and a slider 317. The guide rail 315 is disposed in the other side edge of the upper surface of the base B with the guide member 134 of the substrate supporting unit 100 as the center, with the longitudinal direction thereof facing the first direction I. A slider 317 is movably coupled to the guide rail 315. The slider 317 is coupled to the bottom surface of the gantry. The slider 317 may include a linear motor (not shown). The slider 317 linearly moves in the first direction I along the guide rail 315 by the driving force of a linear motor (not shown).

The second drive unit 320 is positioned symmetrically with the first drive unit 310 about the center axis of the gantry. Since the second drive unit 320 has the same configuration as the first drive unit 310, a description thereof will be omitted.

The head moving unit 500 includes a first moving unit 520, a second moving unit 540, and a supporting body 560. The first moving unit 520 linearly moves the head assembly 600 in the longitudinal direction of the gantry or in the second direction II and the second moving unit 540 moves the liquid supplying member 600 in the third direction III.

Fig. 7 is a perspective view showing the head assembly and the head moving unit of Fig. 5, and Fig. 8 is a sectional view showing the support body of Fig. Referring to FIGS. 7 and 8, the first moving unit 520 includes guide rails 522, sliders 524, and a moving plate 526. The guide rails 522 may extend in the second direction II and be spaced apart from the gantry 220 in the third direction III. Sliders 524 are movably coupled to the guide rails 522, and a linear actuator such as a linear motor (not shown) may be incorporated in the sliders 524. The moving plate 526 is coupled to the sliders 524. The upper region of the moving plate 526 is coupled to the upper slider 524 and the lower region of the moving plate 526 is coupled to the lower positioned slider 524. The moving plate 526 linearly moves along the guide rails 522 in the second direction II by the driving force of a linear motor (not shown). Thus, as the liquid supplying members 600 are individually moved along the second direction II, the distance between the liquid supplying members 600 can be adjusted.

The second moving unit 540 includes a guide member 542 and a slider 544. The guide member 542 is engaged with the moving plate 526 of the first moving unit 520 and guides the linear movement of the slider 544 in the third direction III. The slider 544 is coupled to the guide member 542 so as to be linearly movable. A linear actuator such as a linear motor (not shown) may be incorporated in the slider 544. The support body 560 is coupled to the slider 544 and is moved in the third direction III by a linear movement of the slider 544 in the third direction III.

The support body 560 is linearly movable in the second direction II and the third direction III by the first moving unit 520 and the second moving unit 540. The support body 560 supports the head assembly 600 and is movable with the head assembly 600. A plurality of support bodies 560 may be provided. In this embodiment, each of the three support bodies 560 supports the three head assemblies 410, 420, and 430. However, the present invention is not limited thereto. Each of the support bodies 560 is arranged in a line in a row along the second direction II and is coupled to the gantry 220. The support body 560 includes a support frame 570, an upper plate 580, and a lower plate 590. The support frame 570 is provided in a plate shape whose longitudinal direction faces the third direction III. The support frame 570 is fixedly coupled to the slider 544 of the second moving unit 540.

The top plate 580 extends in a vertical direction from the support frame 570. The upper plate 580 is positioned on the opposite side of the slider 544 with respect to the support frame 570. On the upper surface of the upper plate 580, an injection hole 584 and a mounting groove 582 are formed. A gas supply member 586 is connected to the injection hole 584. The gas supply member 586 supplies gas to the injection hole 584. For example, the gas may be an inert gas. The inert gas may be nitrogen gas (N ₂ ). The mounting groove 582 is provided with a groove into which a part of the head assembly can be inserted.

The lower plate 590 is provided in a region where the reservoir 630 of the head assembly is seated. The lower plate 590 extends in a vertical direction from the support frame 570. The lower plate 590 is positioned below the upper plate 580. The lower plate 590 is positioned opposite the upper plate 580.

 The head assembly 600 discharges the processing solution onto the substrate. A plurality of head assemblies 600 may be provided. Fig. 9 is a cross-sectional view showing the head assembly and the liquid supply unit of Fig. 7; Referring to FIG. 9, the head assembly 600 is detachably provided to the support body 560. The head assembly 600 includes a holder 610, a level sensor 620, a gas supply line 618, a reservoir 630, a discharge head 640, a pressure reducing member 650, and a heating member 660 do. The holder 610 includes a support 612 and a support block 614. The support frame 612 is provided so as to have a plate shape corresponding to the support frame 570. The support base 612 is provided such that its longitudinal direction faces the third direction III. The support block 614 is provided extending from one side of the support 612. The support block 614 is positioned toward the support body 560 at the support 612. On the upper surface of the support block 614, a seating groove 616 is formed. The seating groove 616 is provided in a space where the bottle 620 is seated. The inner diameter of the seating groove 616 may correspond to or slightly larger than the bottle 620. A gas supply line 618 is formed in the support block 614. The gas supply line 618 functions as a flow path through which gas supplied from the injection hole 584 is supplied. The gas supply line 618 is provided extending from the bottom surface of the support block 614 to the top surface. On the bottom surface of the support block 614, a projection 619 is formed. The projection 619 is provided so as to protrude downward from the bottom surface of the support block 614. According to one example, the head assembly 600 can be positioned so that the protrusions 619 are inserted into the mounting grooves 582, and the support plate 612 and the top plate 580 are in contact with each other. The gas supply line 618 formed in the support block 614 may also be positioned to face the injection hole 584. The head assembly 600 is fixed in position by the protrusion 619 and the support 612 and the gas supplied from the injection hole 584 can be supplied to the gas supply line 618. [

The level sensor 620 senses the level of the processing liquid filled in the bottle 620. The level sensor 620 is provided on the other surface of the support frame 570. The level sensor 620 is positioned in position relative to the top plate 580. The level sensor 620 may be positioned to face the bottle 620 mounted on the support body.

The reservoir 630 is provided to have a rectangular parallelepiped shape. The reservoir 630 is fixedly coupled to one surface of the support table 612. The reservoir 630 is located under the support block 614. The reservoir 630 is positioned to face the support block 614. The reservoir 630 is positioned so that the distance between the reservoir 630 and the support block 614 corresponds to the gap between the top plate 580 and the bottom plate 590. [ When the head assembly 600 is mounted on the support body, the support block 614 is seated on the upper plate 580 and the reservoir 630 is seated on the lower plate 590. A buffer space 632 is formed in the reservoir 630 to provide a treatment liquid. The buffer space 632 is provided in a space that is temporarily stored for supplying the processing liquid to the nozzles. The buffer space 632 and the inner space of the bottle 620 are connected by a liquid supply line. Thus, when the inside of the bottle 620 is pressurized by the gas, the processing liquid can be supplied to the buffer space 632 along the liquid supply line 634 by the pressurized force.

The discharge head 640 is coupled to the bottom of the reservoir 630. The ejection head 640 is positioned adjacent to the support 612. Thus, when the head assembly 600 is mounted on the support body 560, the ejection head 640 is positioned to face the side of the lower plate 590. The ejection head 640 includes a plurality of nozzles (not shown). Each of the nozzles is provided to communicate with the buffer space 632. The processing liquid provided in the buffer space 632 can be supplied to each nozzle. According to one example, the nozzles may be provided in 128 or 256 nozzles. Each of the nozzles may be arranged in a line at intervals of a predetermined pitch. Each of the nozzles can eject the liquid crystal in an amount of μg. The number of piezoelectric elements corresponding to the nozzles (not shown) may be provided in the ejection head 640, and the amount of droplets to be ejected from the nozzles (not shown) may be independently controlled by controlling the voltage applied to the piezoelectric elements Lt; / RTI >

The pressure-reducing member 650 prevents the processing liquid filled in the buffer space 632 from being supplied to the nozzle by gravity, thereby preventing the processing liquid from falling from the nozzle. The pressure-reducing member 650 decompresses the buffer space 632.

The heating member 660 heats the process liquid provided in the buffer space 632 to the process temperature. The heating member 660 is provided in the lower plate 590. The heating plate 660 heats the reservoir 630 seated on the lower plate 590 to heat the processing liquid filled in the buffer space 632. For example, the heating member 660 may be a heater.

Referring again to Fig. 5, the cleaning unit 700 cleans the head assembly 600 of the liquid supply unit. The cleaning unit 700 provides a negative pressure to the discharge end of the head assembly to remove the treatment liquid remaining in the discharge end. For example, the cleaning unit 700 may be a suction nozzle.

The measurement unit 800 measures the amount of the processing solution discharged from each of the head assemblies 610, 620, and 630. Specifically, the measurement unit 800 measures the flow rate discharged from all of the nozzles (not shown) for each of the head assemblies 610, 620 and 630. 630, and 630 can be confirmed macroscopically through the measurement of the amount of the processing liquid discharged from each of the head assemblies 610, 620, and 630. In other words, it can be seen that there is an error in at least one of the nozzles (not shown) if the amount of process liquid discharge of the individual head assemblies 610, 620, 630 is out of the reference value. (Not shown). The measurement unit 800 may have first to third measurement units 800a, 800, and 800c.

The inspection unit 900 confirms whether or not the individual nozzles provided to the head assemblies 610, 620, 630 through the optical inspection are abnormal. If it is determined that there is an abnormality in the unspecified nozzle, the inspection unit 900 can perform the complete inspection of the nozzle while confirming the abnormality of the individual nozzle have.

The head control unit 450 controls the liquid crystal discharge of each of the head assemblies 610, 620, 630. The head control unit 450 may be disposed in the liquid crystal discharge portion 10 adjacent to the head assemblies 610, 620, For example, the head control unit 450 may be disposed at the top of the gantry 220. In this embodiment, the case where the head control unit 450 is disposed at the upper end of the gantry 220 is described as an example, but the position of the head control unit 450 is not limited thereto.

The head control unit 450 is electrically connected to the respective head assemblies 610, 620, 630 and applies control signals to the respective head assemblies 610, 620, 630. Each of the head assemblies 610, 620 and 630 may be provided with a number of piezoelectric elements (not shown) corresponding to the nozzles (not shown), and the head control unit 450 may control the voltage applied to the piezoelectric elements, (Not shown) can be adjusted.

The liquid supply unit 1000 supplies the treatment liquid to the head assembly. The liquid supply unit 1000 includes a bottle 1100, a valve assembly 1200, a liquid supply line 1300, a liquid filling line 1400, and a gas supply line 1500.

The bottle 1100 is provided in a cylindrical shape whose upper surface is opened. The bottle 1100 is provided so that its longitudinal direction faces the third direction. Inside the bottle 1100, a storage space 1110 for storing the processing solution is formed. The bottle 1100 is inserted into the seating groove 616 of the holder 614 and its position is fixed.

The valve assembly 1200 opens and closes the open top surface of the bottle 1100. The valve assembly 1200 includes a body 1210, a cover 1220, a driving member 1240, and a controller 1260. FIG. 10 is a cross-sectional view of the valve assembly of FIG. 9, and FIG. 11 is a perspective view of the body of FIG. 10. 10 and 11, the body 1210 is provided so as to have a cylindrical shape having a longitudinal direction parallel to the bottle 1100. The body 1210 is provided to have a diameter corresponding to, or larger than, the open top surface of the bottle 1100. The body 1210 is formed with a main flow path 1212, a supply flow path 1214, a first filling flow path 1216, and gas flow paths 1218 and 1218. The main flow path 1212 is provided to penetrate the bottom surface from the upper surface of the body 1210. The main flow path 1212 is provided with a hollow toward the third direction III. Residual grooves 1213 are formed on the inner surface of the body 1210 forming the main flow path 1212. The excess groove 1213 is provided so as to have an annular ring shape.

The supply flow path 1214 is provided so as to penetrate the bottom surface from one surface of the body 1210. Here, one surface may be the outer surface or the upper surface of the body 1210 excluding the bottom surface. According to one example, one side may be the outer surface of the body 1210. 12 is a cutaway perspective view of the body showing the supply flow path of the body of FIG. Referring to FIG. 12, the supply passage 1214 is provided so as to communicate with the main passage 1212 through the main passage 1212. The supply flow path 1214 functions as a flow path in which the processing liquid stored in the storage space 1110 is supplied to the liquid supply line 1300. The supply flow path 1214 may be formed to be lower than the excess groove 1213. The supply passage 1214 may be provided so as to pass through the main flow path 1212 from the outer surface of the body 1210 and penetrate the bottom surface of the body 1210.

The first filling passage 1216 is provided as a branch passage branched from the main passage 1212. The first filling channel 1216 branches from the main channel 1212 and is extended to one side of the body 1210. 13 is a cutaway perspective view of the body 1210 showing the first filling channel of the body of FIG. Referring to FIG. 13, the first filling passage 1216 functions as a flow passage through which the process liquid filled from the liquid filling line 1400 is supplied to the main flow passage 1212. The first filling passage 1216 may be formed lower than the supply passage 1214 passing through the main passage 1212 from one side of the body 1210. [ The first filling flow path 1216 may be provided so as to be inclined downwardly as it approaches the main flow path 1212. Therefore, the process liquid filled from the liquid filling line 1400 is provided to pass through the first filling flow path 1216 and the main flow path 1212.

The gas flow path 1218 is provided as a flow path independent of the main flow path 1212, the supply flow path 1214, and the first filling flow path 1216. The gas flow path 1218 serves as a flow path for supplying the gas supplied from the gas supply line 1500 to the storage space 1110.

The cover 1220 opens and closes the open top surface of the bottle 1100. The cover 1220 is coupled to the upper surface of the bottle 1100 and the body 1210, respectively. The cover 1220 is coupled to the bottle 1100 so that the storage space 1110 is provided in an enclosed space from the outside. 14 is a perspective view showing the cover of Fig. The cover 1220 includes a plate 1230 and a liquid replenishment pipe 1240. The plate 1230 is provided so as to have a disk shape. The plate 1230 is provided to have a diameter corresponding to or greater than the body 1210. The plate 1230 is coupled to the bottom surface of the body 1210. A plurality of holes are formed in the plate 1230. The holes are provided in the number of one-to-one correspondence with the flow paths formed on the bottom surface of the body 1210. According to one example, a supply hole 1232, a main hole 1234, and a gas hole 1236 may be formed in the plate 1230. The supply hole 1232 is positioned opposite to the supply passage 1214 of the body 1210. The main hole 1234 is positioned opposite to the main flow path 1212 of the body 1210. The gas hole 1236 is positioned opposite to the gas flow path 1218. The liquid replenishing pipe 1240 is provided to extend from the bottom surface of the plate 1230. The liquid replenishing pipe 1240 extends downward from an area where the main hole 1234 is formed. Therefore, the liquid replenishment pipe 1240 is located in the storage space 1110 of the bottle 1100. A filling hole 1242 is formed in the liquid replenishing pipe 1240. The filling hole 1242 is formed to face the inner wall of the bottle 1100. A second filling channel 1244 connecting the filling hole 1242 and the main hole 1234 is formed in the liquid replenishing pipe 1240. Therefore, the processing liquid filled through the liquid filling line 1400 flows through the first filling passage 1216, the main passage 1212, the main hole 1234, and the second filling passage 1244 sequentially through the storage space 1110 ). The processing liquid sprayed from the filling hole 1242 flows through the inner wall of the bottle 1100 and is stored in the storage space 1110 of the bottle 1100. The treatment liquid to be filled can minimize the collision force between the previously stored treatment liquids and minimize the generation of bubbles in the treatment liquid.

Referring again to FIG. 10, the driving member 1240 blocks the main flow path 1212 or opens a part of the main flow path 1212. The driving member 1240 includes a driving shaft 1250 and a driver 1260. The drive shaft 1250 has a shaft portion 1252 and a guide portion 1254. The shaft portion 1252 is provided so as to have a cylindrical shape whose longitudinal direction faces the third direction. The shaft portion 1252 is located in the main flow path 1212. The shaft portion 1252 is provided so that its diameter corresponds to the main flow path 1212. The length of the shaft portion 1252 corresponds to or longer than the length of the main flow path 1212. On the outer surface of the shaft portion 1252, a connection groove 1253 is formed. The connection groove 1253 is formed above the middle region of the shaft portion 1252. The connection groove 1253 is provided in an annular ring shape surrounding the shaft portion 1252. The guide portion 1254 extends from the upper end of the shaft portion 1252. The guide portion 1254 has a larger diameter than the shaft portion 1252. Therefore, the guide part 1254 is hooked on the upper surface of the body 1210 to prevent the shaft part 1252 from descending below a certain height.

The driver 1260 moves the drive shaft 1250 in the vertical direction. The driver 1260 moves the drive shaft 1250 to the first position, the second position, and the third position. Here, the first position is a position at which the shaft portion 1252 blocks the main flow path 1212. The shaft portion 1252 located at the first position cuts off the supply passage 1214 and the first filling passage 1216. The second position is a position where the shaft portion 1252 blocks the first filling flow path 1216 and opens the supply flow path 1214. The shaft portion 1252 located at the second position is positioned so that the connection groove 1253 is opposed to the supply passage 1214. [ The lower end of the shaft portion 1252 located at the second position is positioned below the first filling passage 1216. The shaft portion 1252 is positioned so that the connection groove 1253 corresponds to a point where the supply flow path 1214 passes through the main flow path 1212. Therefore, the treatment liquid flowing in the supply passage 1214 can pass through the main passage 1212 through the space formed by the connection groove 1253. [ The third position is a position where the shaft portion 1252 blocks the supply flow path 1214 and opens the first filling flow path 1216. The lower end of the shaft portion 1252 located at the third position is positioned between the supply passage 1214 and the first filling passage 1216.

The controller 1260 controls the driver 1260 so that the position of the drive shaft 1250 is different according to the processing process. The controller 1260 controls the driver 1260 such that the shaft portion 1252 is located at either the first position, the second position, or the third position according to the processing process. The controller 1260 moves the drive shaft 1250 to the first position to block the entire area of the main flow path 1212 during the process standby. The controller 1260 moves the drive shaft 1250 to the second position to open the supply passage 1214 when the processing liquid is supplied to the discharge head 640. When the supply flow path 1214 is opened, the storage space 1110 is pressurized by the gas, and the pressurized force causes the processing liquid to be supplied to the discharge head 640 through the supply flow path 1214. The controller 1260 moves the drive shaft 1250 to the third position to open the first filling passage 1216 when filling the storage space 1110 with the process liquid. When the treatment liquid filling member is connected to the first filling flow path 1216, the first filling flow path 1216 is opened. Thereafter, the processing liquid filling member fills the first filling flow path 1216 with the processing liquid, and the processing liquid flows through the first filling flow path 1216, the main flow path 1212, the second filling flow path 1244, and the filling hole 1242 ), And is filled in the storage space 1110.

600: Head assembly 1200: Valve assembly
1210: Body 1212: Main flow path
1214: Supply flow path 1216: First filling flow path
1240: driving member 1250: driving shaft
1252: shaft portion 1254: guide portion
1260: driver 1400: liquid filling line
1300: liquid supply line

Claims (17)

A liquid supply unit for supplying a treatment liquid to a nozzle,
A bottle having a storage space for storing a treatment liquid therein and having an open upper surface;
And a valve assembly for opening and closing the upper surface,
Wherein the valve assembly comprises:
A main body having a main flow path and a supply flow path connected to the main flow path;
A drive shaft positioned in the main passage;
And a driver for moving the drive shaft to a first position and a second position,
Wherein the first position is a position at which the drive shaft blocks the supply passage, and the second position is a position at which the supply passage is opened. The method according to claim 1,
The body further includes a first filling flow path communicating with the main flow path,
And a liquid filling line connected to the body to fill the first filling flow path with the treatment liquid,
Wherein the actuator moves the drive shaft to a third position,
And the third position is a position at which the drive shaft opens the first filling passage. 3. The method of claim 2,
Wherein the valve assembly comprises:
And a cover mounted on the upper surface and formed with a supply hole communicating with the supply passage,
The cover
A plate coupled to each of the body and the bottle and having a supply hole communicating with the supply passage;
And a liquid replenishing line extending from the plate so as to be positioned in the storage space, wherein a filling hole for spraying the processing liquid and a second filling flow path connecting the main flow path and the filling hole are formed,
Wherein the filling hole is provided so as to face the inner surface of the bottle. 3. The method of claim 2,
Wherein the first filling passage is provided so as to be directed downwardly inclined as the main filling passage approaches the main passage. The method of claim 3,
Wherein a point where the first filling flow path and the main flow path communicate is positioned lower than a point where the supply flow path and the main flow path communicate with each other. 6. The method according to any one of claims 2 to 5,
Wherein the main flow path is provided with a hollow penetrating both sides of the body,
The drive shaft
And a shaft portion having a diameter corresponding to the main flow path and having an annular ring-shaped connection groove formed on an outer surface thereof. The method according to claim 6,
And the second position is a position where the connection groove and the supply passage communicate with each other. 8. The method of claim 7,
And the second position is a position at which the shaft portion blocks the first filling flow path. The method according to claim 6,
An annular ring-shaped surplus groove is formed on the inner surface of the body forming the main flow path,
Wherein the excess groove is formed above the supply passage and the first filling passage. The method according to claim 6,
Wherein the shaft portion has a length corresponding to or longer than the main flow passage,
The drive shaft
And a guide portion extending from an upper end of the shaft portion,
And the guide portion has a larger diameter than the shaft portion. 11. The method of claim 10,
Wherein the first position is that the guide portion is placed on the body, and the shaft portion is a position to block the first filling passage and the supply passage. A substrate supporting unit for supporting the substrate;
An ejection head for supplying a processing liquid supported by the substrate supporting unit;
Wherein the branch supplying the treatment liquid to the discharge head includes a liquid supply unit,
The liquid supply unit includes:
A bottle having a storage space for storing a treatment liquid therein and having an open upper surface;
A valve assembly for opening and closing the upper surface;
And a liquid supply line connecting the valve assembly and the discharge head,
Wherein the valve assembly comprises:
A main body having a main flow path and a supply flow path connected to the main flow path;
A drive shaft positioned in the main passage;
And a driver for moving the drive shaft to a first position and a second position,
Wherein the first position is a position at which the drive shaft blocks the supply passage, and the second position is a position at which the supply passage is opened. 13. The method of claim 12,
The body further includes a first filling flow path communicating with the main flow path,
And a liquid filling line connected to the body to fill the first filling flow path with the treatment liquid,
Wherein the actuator moves the drive shaft to a third position,
And the third position is a position at which the drive shaft opens the first filling passage. 14. The method of claim 13,
Wherein the valve assembly comprises:
And a cover mounted on the upper surface and formed with a supply hole communicating with the supply passage,
The cover
A plate coupled to each of the body and the bottle and having a supply hole communicating with the supply passage;
And a liquid replenishing line extending from the plate so as to be positioned in the storage space, wherein a filling hole for spraying the processing liquid and a second filling flow path connecting the main flow path and the filling hole are formed,
Wherein the filling hole is provided so as to face the inner surface of the bottle. 15. The method according to any one of claims 12 to 14,
Wherein the main flow path is provided with a hollow penetrating both sides of the body,
The drive shaft
And a shaft portion having a diameter corresponding to the main flow path and having an annular ring-shaped connection groove formed on an outer surface thereof. 16. The method of claim 15,
And the second position is a position where the connection groove and the supply passage communicate with each other. 16. The method of claim 15,
An annular ring-shaped surplus groove is formed on the inner surface of the body forming the main flow path,
Wherein the excess groove is formed above the supply passage and the first filling passage.

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