KR101579709B1 - Pressure sensor, method of fabricating the same, and management system using the same - Google Patents
Pressure sensor, method of fabricating the same, and management system using the same Download PDFInfo
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- KR101579709B1 KR101579709B1 KR1020150108221A KR20150108221A KR101579709B1 KR 101579709 B1 KR101579709 B1 KR 101579709B1 KR 1020150108221 A KR1020150108221 A KR 1020150108221A KR 20150108221 A KR20150108221 A KR 20150108221A KR 101579709 B1 KR101579709 B1 KR 101579709B1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/247—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet using distributed sensing elements, e.g. microcapsules
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
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Abstract
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor, a method of manufacturing the same, and a management system using the pressure sensor. The pressure sensor has a light amount adjusted according to the distance between the metal complex and the light emitting complex controlled by external pressure, ≪ / RTI >
A pressure sensor refers to a device that measures pressure within a process or system. It senses whether the pressure exerted from the outside is applied and the magnitude of the pressure, using physical deformation, magnetic-thermal conductivity, and frequency.
Recently, as the demand for wearable devices increases, various pressure sensors applicable to the human body are being studied. For example, Korean Patent Registration No. 10-0651639 (patented by Sogang University, Industry & Academy Collaboration Group) includes a silicon pad attached to the upper and lower surfaces of a foot plate on which an air tube is mounted, and an outlet tube of an air tube drawn to one end of the silicone pad A sole pressure sensor of an intelligent muscle force and a walking assist robot is disclosed. For example, Korean Patent Registration No. 10-1455269 (Vision-Scape Co., Ltd.) discloses a wrist-type blood pressure measurement device using a capacitive pressure sensor including an elastic induction insulator provided between conductors.
SUMMARY OF THE INVENTION It is an object of the present invention to provide a highly reliable pressure sensor, a manufacturing method thereof, and a management system including the pressure sensor.
It is another object of the present invention to provide a pressure sensor having a simplified manufacturing process and a reduced manufacturing cost, a manufacturing method thereof, and a management system including the pressure sensor.
Another aspect of the present invention is to provide a pressure sensor having improved sensing sensitivity, a method of manufacturing the pressure sensor, and a management system including the pressure sensor.
Another object of the present invention is to provide a flexible pressure sensor, a manufacturing method thereof, and a management system including the same.
Another aspect of the present invention is to provide a pressure sensor that is easy to apply to a wearable device, a method of manufacturing the pressure sensor, and a management system including the pressure sensor.
It is another object of the present invention to provide a pressure sensor that is easy to adhere to a human body, and a method of manufacturing the pressure sensor.
In order to solve the technical problems, the present invention provides a pressure sensor.
According to one embodiment, the pressure sensor may include a first substrate structure including a light emitting composite that absorbs a base light to emit a sensing light to re-emit a sensing light, and a second substrate structure disposed to face the light emitting composite The light amount of the sensing light can be adjusted according to the distance between the metal complex and the light emitting complex controlled by the pressure externally applied.
According to an embodiment, the light emitting complex absorbs the base light to generate excitons, and the closer the distance between the metal complex and the light emitting complex is, the smaller the number of the excitons of the light emitting complex decreases, Can be reduced.
According to one embodiment, the sensing unit may further include a spacer between the first substrate structure and the second substrate structure.
According to one embodiment, the spacer may be in the form of a mesh, or a particle.
According to one embodiment, the first substrate structure comprises a first exposed surface from which at least a portion of the light emitting composite is exposed, and the second substrate structure comprises a second exposed surface And the first exposed surface and the second exposed surface may face each other.
According to one embodiment, the first substrate structure comprises a first substrate, the light emitting composite on the first substrate, and a binder layer covering the light emitting composite, wherein the second substrate structure comprises a second substrate, And the metal composite within the second substrate.
According to one embodiment, the first substrate and the second substrate may be flexible.
According to one embodiment, the light emitting complex and the metal complex may be nano-sized.
According to an exemplary embodiment, the light emitting unit may further include a light emitting unit that generates the base light, and a light receiving unit that measures a light amount of the sensing light.
According to an aspect of the present invention, there is provided a method of manufacturing a pressure sensor.
According to one embodiment, the method of manufacturing the pressure sensor comprises the steps of: fabricating a first substrate structure having a first exposed surface from which at least a portion of the light emitting composite is exposed, exposing at least a portion of the metal complex to a second exposed surface And arranging the first substrate structure and the second substrate structure such that the exposed light emitting composite and the metal complex face each other, and the first substrate structure and the second substrate structure And spacers disposed between the first and second electrodes.
According to one embodiment, the step of fabricating the first substrate structure may include the steps of forming a light emitting complex on the first auxiliary substrate, coating the light emitting composite on the first auxiliary substrate with a binder to form a binder layer, Forming a first substrate by a solution process on the binder layer, and separating the first auxiliary substrate from the first substrate structure comprising the first substrate, the binder layer, and the light emitting composite can do.
According to one embodiment, the step of fabricating the second substrate structure may include forming a metal complex on the second auxiliary substrate, forming a second substrate by a solution process on the metal complex on the second auxiliary substrate And separating the second auxiliary substrate from the second substrate structure including the second substrate and the metal complex.
According to an aspect of the present invention, there is provided a management system using a pressure sensor.
According to an embodiment, the management system using the pressure sensor may include a pressure sensing unit including a pressure sensor that senses an external pressure to generate a sensing signal, and a sensing unit that receives the sensing signal from the pressure sensing unit, And a terminal for transmitting the sensing signal to the server, wherein the pressure sensor includes a light emitting unit for emitting a base light, a sensing light absorbing the base light, And a light receiving portion for absorbing the sensing light re-emitted from the light emitting composite, wherein the light emitting portion of the light emitting composite and the light emitting portion Depending on the distance between the composites, the amount of light of the sensing light can be adjusted.
According to an embodiment of the present invention, the pressure sensing unit may further include a control unit for generating the sensing signal in accordance with the amount of the sensing light, and a communication unit for transmitting the sensing signal to the terminal.
According to one embodiment, the pressure sensing part may be attached to a part of the human body.
A pressure sensor according to an embodiment of the present invention includes a first substrate structure including a light emitting composite that absorbs a base light to emit a sensing light and re-emits a sensing light, And a second substrate structure including the metal complex. The light amount of the sensing light is adjusted according to the distance between the metal complex and the light emitting complex controlled by the pressure externally applied so that the degree of pressure applied and the magnitude of the applied pressure can be easily measured, A pressure sensor may be provided.
1 is a flowchart illustrating a method of manufacturing a pressure sensor according to an embodiment of the present invention.
2 is a view for explaining a method of manufacturing a first substrate structure included in a pressure sensor according to an embodiment of the present invention.
3 is a view illustrating a method of manufacturing a second substrate structure included in a pressure sensor according to an embodiment of the present invention.
4 is an exploded perspective view illustrating a pressure sensor according to an embodiment of the present invention.
5 and 6 are views for explaining a method of operating a pressure sensor according to an embodiment of the present invention.
7 is an exploded perspective view illustrating a pressure sensor according to a modification of the embodiment of the present invention.
8 is a view for explaining a pressure sensing unit including a pressure sensor according to an embodiment of the present invention.
9 is a view for explaining a management system using a pressure sensor according to an embodiment of the present invention.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to the embodiments described herein but may be embodied in other forms. Rather, the embodiments disclosed herein are provided so that the disclosure can be thorough and complete, and will fully convey the concept of the invention to those skilled in the art.
In this specification, when an element is referred to as being on another element, it may be directly formed on another element, or a third element may be interposed therebetween. Further, in the drawings, the thicknesses of the films and regions are exaggerated for an effective explanation of the technical content.
Also, while the terms first, second, third, etc. in the various embodiments of the present disclosure are used to describe various components, these components should not be limited by these terms. These terms have only been used to distinguish one component from another. Thus, what is referred to as a first component in any one embodiment may be referred to as a second component in another embodiment. Each embodiment described and exemplified herein also includes its complementary embodiment. Also, in this specification, 'and / or' are used to include at least one of the front and rear components.
The singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. It is also to be understood that the terms such as " comprises "or" having "are intended to specify the presence of stated features, integers, Should not be understood to exclude the presence or addition of one or more other elements, elements, or combinations thereof. Also, in this specification, the term "connection " is used to include both indirectly connecting and directly connecting a plurality of components.
In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.
FIG. 1 is a flowchart illustrating a method of manufacturing a pressure sensor according to an embodiment of the present invention. FIG. 2 is a view illustrating a method of manufacturing a first substrate structure included in a pressure sensor according to an embodiment of the present invention FIG. 3 is a view for explaining a method of manufacturing a second substrate structure included in a pressure sensor according to an embodiment of the present invention, and FIG. 4 is an exploded perspective view illustrating a pressure sensor according to an embodiment of the present invention.
Referring to FIGS. 1-4, a first substrate structure SUB1 having a
As shown in FIG. 2 (a), the first
The light emitting composite 110 may be disposed on the first
According to one embodiment, the light emitting composite 110 includes a semiconductor quantum dot (for example, CdSe, CdS, CdTe, PbS, PbSe, HgS, HgSe, HgTe, InP, GaAs, GaN, InAs, InGaAs, ZnS, ZnSe, ZnTe, TiO 2, SnO2, ZnO), carbon-based material (for example, graphene, CNT, C 60), or a polymer material (e.g., poly (maleic anhydride alt-1-tetradecene), poly (maleic anhydride 1-tetradecene, polymethylmethacrylate, poly (phenylene ether), and polydimethylsiloxane), or a compound having at least one of these groups bonded thereto.
According to one embodiment, a pretreatment process is performed to reduce the surface energy of the upper surface of the first
According to one embodiment, a release layer may be further formed on the first
A
As shown in FIG. 2 (c), the
As shown in FIG. 2 (d), from the first substrate structure SUB1 including the
The first
1 to 4, a second substrate structure SUB2 having a
1, the second substrate structure SUB2 is fabricated after the first substrate structure SUB1 is manufactured. However, in the embodiment of the present invention, the first substrate structure SUB1 and the second substrate structure SUB2 2 substrate structure (SUB2) is not limited.
Hereinafter, a method of manufacturing the second substrate structure SUB2 will be described.
As shown in FIG. 3 (a), a second
The
(E.g., Au-Ag, Mg-Ag, or the like), metal alloy (e.g., Au-Ag, (E.g., graphene, graphite, CNT, amorphous carbon, C 60, and the like), Pt-Co, Pd-Mn, Cu-Al and Al-Li.
According to one embodiment, before the
2 (a), before the
The
The second
The second
1 to 4, the first substrate structure SUB1 and the second substrate structure SUB2 are disposed so that the exposed light emitting
The
The method of operation of the pressure sensor comprising the first substrate structure SUB1, the second substrate structure SUB2, and the
5 and 6 are views for explaining a method of operating a pressure sensor according to an embodiment of the present invention.
5 and 6, a pressure sensor according to an embodiment of the present invention includes, in addition to the above-described first substrate structure SUB1, the second substrate structure SUB2, and the
The
The
The
5, the
Alternatively, when external pressure is applied, the distance between the
In contrast to the above-described embodiment of the present invention, in the case of a pressure sensing element for sensing whether a pressure is applied and a pressure by using a piezoelectric material, There is a problem in that the reliability is deteriorated. In addition, in the case of a pressure sensing device that senses whether a pressure is applied or a pressure is measured by measuring a change in resistance or capacitance according to a pressure, there is a problem in that the sensing sensitivity is low. In addition, in the case of a pressure sensing element that senses the magnitude of the pressure applied and the pressure applied by measuring the resistance change by applying the graphene oxide to the polymer foam, the graphene is coated on the polymer foam and reduced High temperature treatment and chemical treatment are required, which complicates the process. In addition, in the case of the above-described pressure sensing elements, a process for manufacturing the electrode is essential because it senses whether the pressure is applied and the magnitude of the pressure through the amount of change in resistance or capacitance.
However, as described above, in the pressure sensor according to the embodiment of the present invention, the distance between the
The pressure sensor according to an embodiment of the present invention may further include a first substrate structure SUB1 having the light emitting
In the above-described embodiment of the present invention, the
7 is an exploded perspective view illustrating a pressure sensor according to a modification of the embodiment of the present invention.
Referring to FIG. 7, a first substrate structure SUB1 and a second substrate structure SUB2 described with reference to FIGS. 1 to 6 are provided. The
The
In FIG. 4, the
As described above, the pressure sensor according to the embodiment of the present invention may have a simple structure in which the first substrate structure SUB1 and the second substrate structure SUB2 are laminated, . Hereinafter, a pressure sensing portion including a pressure sensor according to an embodiment of the present invention will be described.
8 is a view for explaining a pressure sensing unit including a pressure sensor according to an embodiment of the present invention.
Referring to FIG. 8, the
The
The
The
The
9 is a view for explaining a management system using a pressure sensor according to an embodiment of the present invention.
9, a management system according to an embodiment of the present invention may include a
The
The bio-signal measured by the
The
The
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It will also be appreciated that many modifications and variations will be apparent to those skilled in the art without departing from the scope of the present invention.
100: first auxiliary substrate
110: light emitting complex
120: Binder layer
130: first substrate
150, 160: Spacer
200: second auxiliary substrate
210: metal complex
220: second substrate
SUB1, SUB2: a first substrate structure, a second substrate structure
310, and 420:
312: base light
320, 430:
322: sensing light
400: pressure sensing unit
410: Pressure sensor
440:
450:
500: portable terminal
600: Server
Claims (15)
And a second substrate structure including a metal complex disposed to face the light emitting complex,
Wherein the light amount of the sensing light is adjusted in accordance with a distance between the metal complex and the light emitting composite controlled by an externally applied pressure.
Wherein the light emitting composite absorbs the base light to generate excitons,
Wherein the closer the distance between the metal complex and the light emitting complex is, the smaller the number of excitons of the light emitting complex is and the light amount of the sensing light is reduced.
And a spacer between the first substrate structure and the second substrate structure.
Wherein the spacer comprises a mesh or particle.
Wherein the first substrate structure comprises a first exposed surface from which at least a portion of the light emitting composite is exposed,
Wherein the second substrate structure includes a second exposed surface from which at least a portion of the metal composite is exposed,
The first exposed surface and the second exposed surface facing each other.
Wherein the first substrate structure comprises a first substrate, the light emitting composite on the first substrate, and a binder layer covering the light emitting composite,
Wherein the second substrate structure comprises a second substrate, and the metal composite within the second substrate.
Wherein the first substrate and the second substrate are flexible.
Wherein the light emitting complex and the metal complex are nano-sized.
A light emitting unit for generating the base light; And
And a light receiving unit for measuring a light amount of the sensing light.
Metal composite having a second exposed surface on which at least a portion of the exposed second exposed surface is exposed; And
Disposing the first substrate structure and the second substrate structure such that the exposed light emitting composite and the metal complex face each other and disposing a spacer between the first substrate structure and the second substrate structure A method of manufacturing a sensor.
Wherein the step of fabricating the first substrate structure comprises:
Forming a light emitting complex on the first auxiliary substrate;
Coating a light emitting composite on the first auxiliary substrate with a binder to form a binder layer;
Forming a first substrate by a solution process on the binder layer;
And separating the first auxiliary substrate from the first substrate structure comprising the first substrate, the binder layer, and the light emitting composite.
Wherein the step of fabricating the second substrate structure comprises:
Forming a metal complex on the second auxiliary substrate;
Forming a second substrate by a solution process on the metal complex on the second auxiliary substrate;
And separating the second auxiliary substrate from the second substrate structure including the second substrate and the metal composite.
A terminal receiving the sensing signal from the pressure sensing unit, generating specific information using the sensing signal, and transmitting the sensing signal to the server,
The pressure sensor includes:
A light emitting portion for irradiating a base light;
A light emitting complex for absorbing the base light and emitting a sensing light again, and a metal complex; And
And a light receiving unit for absorbing the sensing light re-emitted from the light emitting composite,
Wherein the light amount of the sensing light is adjusted according to a distance between the metal complex and the light emitting complex controlled by a pressure externally applied.
The pressure sensing unit includes:
A control unit for generating the sensing signal according to an amount of the sensing light, and a communication unit for transmitting the sensing signal to the terminal.
Wherein the pressure sensing unit is attached to a part of a human body.
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KR1020150108221A KR101579709B1 (en) | 2015-07-30 | 2015-07-30 | Pressure sensor, method of fabricating the same, and management system using the same |
PCT/KR2016/000471 WO2017018621A1 (en) | 2015-07-30 | 2016-01-15 | Pressure sensor, manufacturing method therefor, and management system using same |
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KR20190020443A (en) * | 2017-08-21 | 2019-03-04 | 울산과학기술원 | Tactile sensor, method for manufacturing the same, three-dimensional mapping method |
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CN112213005B (en) * | 2020-10-13 | 2022-04-29 | 新余学院 | Titanium dioxide/carbon dot composite film pressure sensor and preparation method thereof |
CN114923627A (en) * | 2022-04-19 | 2022-08-19 | 重庆川仪自动化股份有限公司 | Pressure transmitter monitoring system, method, electronic device and readable storage medium |
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