KR101577767B1 - In-Line Moving Stage Apparatus - Google Patents

Abstract

The present invention relates to an in-line moving stage apparatus, comprising: a first transfer unit including a plurality of transfer rolls equipped at regular intervals by every roll shaft disposed in parallel at regular intervals in a transfer direction of a transfer target object, including a first driving unit which provides power rotating the roll shafts in one direction, including a second driving unit which provides the power to vertically move a roll frame unit which supports the roll shafts to be rotated so as to vertically move the transfer rolls, and including a support frame unit for supporting the roll frame unit via the second driving unit, in order to transfer the transfer target object put on the transfer rolls in one direction; and a second transfer unit arranged in the transfer direction of the transfer target object and disposed between the transfer rolls adjacent to each other so as not to be interfered, including a plurality of transfer plates having the transfer target object put thereon, including a plate frame unit for supporting the transfer plates disposed not to be interfered with the transfer rolls adjacent to each other, including a base having a plurality of rails which are assembled in an upper surface having a lower end of the support frame unit installed and fixed to slidably move a plurality of guiders which are equipped at a lower end of the plate frame unit, and including a third driving unit for providing the power which slidably reciprocates the plate frame unit along the rails so as to reciprocate the transfer target object which is put on the transfer plate by being spaced apart from the transfer rolls when the first transfer unit descends.

Description

[0001] In-Line Moving Stage Apparatus [0002]

The present invention relates to an inline moving stage device, and more particularly, to a conveyor conveyance device and a vacuum suction conveyance device for conveying inspection objects in different driving methods, To an in-line moving stage device capable of enhancing the inspection efficiency of an inspection object.

Generally, as a result of the rapid development of information and communication technology and the expansion of the market, a flat panel display device is attracting attention as a display device.

Such flat panel display devices include liquid crystal display devices, plasma display panels, and organic light emitting diodes.

Among these organic electroluminescent devices, for example, OLEDs are mainly used for displays and lighting devices of small-sized devices such as cellular phones, car audio systems, and digital cameras. Recently, OLEDs have been widely used in displays, Has attracted attention as a display device.

Particularly, OLED has very good advantages such as fast response speed, lower power consumption than conventional LCD, light weight, no need for separate backlight device and can be made very thin, and high brightness, .

In such a display device, a scratch or various kinds of unevenness may be formed on a substrate in a manufacturing process, and a display substrate inspecting apparatus is used for the purpose of inspecting scratches and various kinds of unevenness and reducing a defective rate.

For example, an in-line FPD automatic optical inspection apparatus captures an image of an object to be inspected using an optical lens and a CCD camera while guiding a display substrate such as a TFT LCD substrate, a PDP, and a color filter, It is a device that detects various defects that users want to find by applying a processing algorithm.

In order to fulfill its role as an inspection system, such an inspection apparatus can accurately detect the position and size of the detected defect, and can repair the defect by searching for and repairing the detected defect.

Meanwhile, an apparatus for transferring an object to be inspected such as a substrate or a glass is usually carried by using an air slide system. The object to be inspected is loaded on the transfer stage by the loader arm at the loading / unloading position of the transfer apparatus, , The object to be inspected is scanned by a plurality of vision cameras installed in the camera installation frame and the pattern defect is inspected.

At this time, a gripper is provided in the longitudinal direction at the center of the conveyance stage. The gripper includes a conveyance guide installed at the center of the conveyance stage, And a driving module connected to the vacuum generating part to move the inspected object to be vacuum-attracted, and a driving module for moving the vacuum pad.

On the other hand, in the process of inspecting the surface of the object to be inspected while conveying the object to be inspected continuously in one direction in the conveyor facility, it is necessary to design a combination of the conveyor equipment and the vacuum adsorption equipment in order to bypass the specific object to be inspected by vacuum suction Respectively.

However, since the moving and driving method of the object to be inspected by the conveyor equipment and the moving and driving methods of the object to be inspected by the vacuum suction method are different from each other, there is a limitation in increasing the efficiency of the surface inspection of the object to be inspected.

 (Patent Document 1) KR10-1186632 B1

SUMMARY OF THE INVENTION Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and it is an object of the present invention to provide a conveyor conveyance system and a vacuum suction conveyance system, The present invention provides an inline moving stage device capable of bypassing a specific inspection object during an operation so as to enhance the transfer efficiency with respect to an abnormal object.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention, unless further departing from the spirit and scope of the invention as defined by the appended claims. It will be possible.

As a specific means for achieving the above object, a preferred embodiment of the present invention is an inline moving stage device for conveying a conveying object in one direction, the inline moving stage device comprising: a plurality of rollers arranged in parallel at a predetermined interval in the conveying direction of the conveying object And a plurality of roll rolls having a plurality of roll rolls at predetermined intervals for providing a power for rotationally driving the plurality of roll rolls in one direction, wherein the plurality of roll rolls are rotated And a supporting frame part for supporting the roll frame part via the second driving part, so that the conveyed object placed on the plurality of conveying rolls can be conveyed in one direction To the first conveying unit; A plurality of conveying plates which are arranged in the conveying direction of the conveying object and are arranged so as not to interfere with each other between the conveying rolls adjacent to each other and on which the conveying target is placed, And a base provided with a plurality of rails on which a plurality of guiders provided at a lower end of the plate frame part are slidably mounted on an upper surface of the plate frame part for supporting the conveying plate, And a third driving unit for providing a power for reciprocally sliding the plate frame part along the rail, and a second conveying part for reciprocatingly conveying the conveyed object, which is separated from the conveying roll and moved on the conveying plate, during the lowering operation of the first conveying part The present invention also provides an inline moving stage device comprising:

Preferably, the first driving unit includes a driving shaft having a predetermined length, the driving shaft having a plurality of driven gears and a plurality of driving gears meshed with gears, the driving shaft being disposed at each end of the plurality of roll shafts, And a first drive motor for rotating the driven bevel gear and the driven bevel gear engaged with the gear.

Preferably, the roll frame portion includes a plurality of shaft frames extending in a predetermined length in a feeding direction orthogonal to the plurality of roll shafts and rotatably supporting the roll shaft, and a plurality of shaft frames extending perpendicularly to a line and a rear end of the plurality of shaft frames, respectively And a fixed frame for fixing a plurality of axial frames.

The second driving unit may include a plurality of vertical screw shafts connected to an upper end of the roll frame unit and a plurality of second driving motors for moving up and down the roll frame unit by simultaneously rotating the plurality of vertical screw shafts in a forward or reverse direction, .

Preferably, the support frame portion includes a pair of left and right horizontal bars fixedly installed with the second driving portion raised and extending in a conveying direction, and a lower frame bent downward from both ends of the horizontal frame, And may include a pair of vertical bars to be installed.

Preferably, the conveying plate may be a plate-like assembly structure in which the jet is upwardly discharged toward the conveying object so as to raise the conveying object at a predetermined height.

More preferably, the transfer plate has a plate body formed through a connection hole communicating with the jet flow supply line, an ejection body formed with a discharge hole communicating with the connection hole and discharging the jet from the inner chamber filled with the jet flow, And a pad for depressing a curved portion through which the jet discharged from the discharge hole is guided and fixing the discharging body to the plate body.

Preferably, the plate frame portion is connected to the lower surface of the conveying plate so as to support a plurality of conveying plates arranged so as not to interfere with conveying rolls of a plurality of rows adjacent to each other, And a horizontal plate frame to which the lower ends of the plurality of vertical plate frames are connected.

More preferably, the plate frame portion includes a pair of left and right upper horizontal plates arranged on the upper end of the vertical plate frames on both the left and right sides where the conveyance plate is not installed, the first horizontal plate and the second plate corresponding to the first and second edges of the conveyance object, And a first cylinder member reciprocating the contact roll back and forth.

More preferably, the plate frame portion is provided with a second cylinder member for vertically reciprocating a second contact roll corresponding to a line and a trailing edge of the conveyed object, And at the rear end.

More preferably, the plate frame portion includes a pair of left and right upper horizontal plates disposed on the upper end of the vertical plate frames on both left and right sides where the conveyance plate is not provided, the upper horizontal plate and the lower horizontal plate corresponding to the lower side edges of the conveyance object And a plurality of vacuum adsorption blocks formed on the upper horizontal plate by forming vacuum suction holes connected to the vacuum suction lines on the upper surface.

Preferably, the third driving unit includes a pizza stone part fixed to the horizontal plate frame of the plate frame part so as to provide power for reciprocally sliding movement of the plate frame part connected to the conveyance plate along a rail provided on the base, And an electromagnet for generating a magnetic force for relatively moving the piston stone when power is applied, by forming an insertion groove into which the piston stone is inserted.

The present invention as described above has the following effects.

The conveying object is conveyed in one direction by the rotational driving of the plurality of conveying rolls and the conveying object which is raised to the conveying plate of the second conveying portion by the up and down operation of the first conveying portion is contactively bypassed or conveyed by the conveying plate It is possible to carry out the conveying object floating by the jet flow in a non-contact manner, so that the conveying efficiency by the conveying roll and the contact / non-contact conveying method can be improved.

1 is an overall perspective view showing an inline moving stage device according to a preferred embodiment of the present invention.
2 is an overall perspective view of an in-line moving stage device according to a preferred embodiment of the present invention, viewed from another angle.
3 is a cross-sectional view of an inline moving stage device according to a preferred embodiment of the present invention.
4 is a plan view showing an inline moving stage device according to a preferred embodiment of the present invention.
FIG. 5 is a perspective view showing a first conveying unit employed in an inline moving stage apparatus according to a preferred embodiment of the present invention. FIG.
6 is an exploded perspective view showing an inline moving stage device according to a preferred embodiment of the present invention.
7 is a partial detail view of a first transfer part employed in an inline moving stage device according to a preferred embodiment of the present invention.
FIG. 8 is an exploded perspective view of a first transfer part employed in an inline moving stage device according to a preferred embodiment of the present invention, viewed from the bottom.
FIG. 9 is a perspective view of the second conveying unit employed in the inline moving stage apparatus according to the preferred embodiment of the present invention. FIG.
FIG. 10 is a perspective view of a second transfer unit employed in an inline moving stage apparatus according to a preferred embodiment of the present invention, as viewed from below.
11A and 11B are perspective views showing a transfer plate employed in an inline moving stage apparatus according to a preferred embodiment of the present invention.
12 is an operational state view of a transfer plate employed in an inline moving stage apparatus according to a preferred embodiment of the present invention.
13A to 13C are perspective views illustrating first and second cylinder members and a vacuum adsorption block employed in an inline moving stage device according to a preferred embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, a detailed description of known functions and configurations incorporated herein will be omitted when it may obscure the subject matter of the present invention.

The same reference numerals are used for portions having similar functions and functions throughout the drawings.

In addition, in the entire specification, when a part is referred to as being 'connected' to another part, it may be referred to as 'indirectly connected' not only with 'directly connected' . Also, to include an element does not exclude other elements unless specifically stated otherwise, but may also include other elements.

As shown in FIGS. 1 to 12, the inline moving stage apparatus 100 according to the preferred embodiment of the present invention includes a first conveying unit 100a for conveying a conveyed object placed on a plurality of conveying rolls in one direction, And a second transfer unit (100b) that reciprocates the transfer object spaced apart from the transfer roll and is mounted on the transfer plate during a lowering operation of the first transfer unit.

The first conveyance unit 100a includes a first driving unit 120 that provides power to rotate the conveyance roll 110 on which the conveyance object is mounted and a second driving unit 120 that provides power for moving the roll frame unit 130 up and down. (140) and a support frame part (150) for supporting the roll frame part (130).

The feed roll 110 is a roll member installed at a predetermined interval for each of a plurality of roll axes 112 arranged at regular intervals in a feeding direction of a conveying object such as a substrate to be conveyed.

The feed roll 110 may be a circular roll member or a circular wheel member that is assembled to rotate together with the roll shaft 112 in one direction.

Accordingly, since a plurality of roll shafts 112 provided at a predetermined distance from the plurality of feed rolls 110 are arranged at regular intervals in the conveying direction of the conveyed objects, the plurality of conveying rolls provided on the plurality of roll shafts A plurality of transfer rolls 110 arranged in a plurality of rows in a plurality of rows in the transfer direction are arranged so as not to interfere with the transfer rolls.

The first driving part 120 may include a driven gear 124 such as a worm wheel provided at each end of the plurality of roll axes so as to provide power for rotating the plurality of feeding rolls in one direction simultaneously with a plurality of roll axes, And a driving gear 123 such as a worm gear to be meshed with gears and a driven bevel gear 125 provided at the middle of the drive shaft 122 arranged to be perpendicular to one end of the roll shaft 125 And a first drive motor 121 for driving and driving the driven bevel gear 126 to be gear-engaged.

Accordingly, the roll shaft having the driving gear of the driving shaft rotationally driven in one direction during the rotation driving of the first driving motor 121 and the driven gear engaged with the gear is rotated in one direction together with the feeding roll, The same conveying object can be conveyed in one direction.

The roll frame unit 130 includes a plurality of shaft frames 132 extending in a predetermined length in a feeding direction perpendicular to the plurality of roll axes 112 and rotatably supporting the roll axes, And a fixed frame 134 that is provided to be orthogonal to the rear end and fixes the plurality of shaft frames.

The second driving part 140 includes a plurality of vertical screw shafts 143 connected at an upper end to the roll frame part 130 so as to provide power for vertically moving the roll frame part 130 along with the transfer roll, And a plurality of second drive motors 141 that provide power to simultaneously rotate the plurality of vertical screw shafts 143 in a forward or reverse direction, and between the adjacent second drive motors, And a horizontal connecting shaft 142, respectively.

Accordingly, when the vertical screw shaft is rotated in the normal direction by the forward rotation driving of the second driving motor 141, the roll frame unit 130 is moved upwards at the fall standby position together with the feed roll 110, When the second driving motor 141 is driven to rotate in the reverse direction, the roll frame unit 130 returns to the lower standby position together with the transport roll.

The support frame part 150 is interposed between the roll frame part 130 and a base 180 to be described later so that the roll frame part is spaced apart from the upper surface of the base by a predetermined distance It is a frame structure that is supported in a spaced apart position.

The support frame unit 150 includes a pair of left and right horizontal bars 152 fixedly installed with a second driving motor 141 of the second driving unit 140 and extending in the feeding direction by a predetermined length, And a pair of vertical bars 154 bent downward from both ends and fixed to the upper surface of the base 180 at the lower ends thereof.

Accordingly, the roll frame portions 130, which rotatably support a plurality of roll axes having the plurality of conveying rollers, are spaced apart from each other by a predetermined distance above the base by the support frame portion 150, 2 movable by the power source of the second drive motor 141 of the second drive unit. .

The second conveyance unit 100b includes a plurality of conveyance plates 160 for conveying a conveyed object such as a substrate in a contact manner or ejecting jet streams supplied from the outside to raise the conveyance target to a predetermined height, 170, a base 180 on which the support frame part is mounted, and a third driving part 190 for horizontally moving the plate frame part.

The plurality of conveying plates 160 may be arranged in a conveying direction of the conveying object, and may be formed of a substantially rectangular plate-like plate structure disposed between adjacent conveying rollers so as not to interfere with the conveying rollers.

The conveyance plate 160 is formed of a planar structure in which the conveyed object to be conveyed is brought into contact with the upper surface in a contact manner or connected to a not shown jet feed line to eject the jet from the lower portion of the conveyed object upward So that the conveyed object is horizontally conveyed by the power source of the third driving unit 190 in a noncontact state in which the conveyed object is brought into contact with the upper surface or the conveyed object is lifted up to a certain height from the upper surface according to the shape of the conveying plate.

At this time, when the conveyed object is conveyed to the inspection section in a state in which the conveyed object is in contact with the conveyor plate, the inspection accuracy can be improved due to no warpage of the conveyed object. On the other hand, A failure may occur.

In addition, in the case where the object to be transferred is transported to the inspection section in a state in which the object to be transported is non-contactly mounted on the transport plate, no contact occurs between the transport object and the transport plate and thus surface defects can be fundamentally prevented. On the other hand, So that the inspection precision can be lowered.

Here, the conveyance plate 160 for discharging the jets to convey the object to be conveyed in a non-contact manner includes a plate body 161 having a substantially rectangular plate shape formed through a connection hole 161a communicating with the jet supply line, (163a) in which a jet discharged from the discharging hole is guided and discharged is formed in the discharging body (162), and the discharging body And a pad 163 for fixing the plate member to the plate member.

Accordingly, the jet discharged at a high speed through the discharge hole of the discharging body 162 fixed to the plate by the pad is brought into contact with the conveying plate by the jet jet discharged at high speed along the curved portion And the gap can be stably maintained while the jet is discharged at a high speed along the curved portion due to the vacuum pressure generated between the transported object and the plate body.

 The plate frame part 170 is connected to the lower surface of the conveyance plate so as to support a plurality of conveyance plates 160 arranged so as not to interfere with conveyance rolls 110 of a plurality of adjacent columns, A plurality of vertical plate frames 172 arranged in parallel to each other at intervals between the rolls and a horizontal plate frame 174 to which the lower ends of the plurality of vertical plate frames are connected.

The base 180 is fixed to the upper surface of the vertical frame 154 of the support frame unit 150 and includes a plurality of guiders 175 provided on the horizontal frame frame 174 of the frame frame unit 170. [ May have a substantially rectangular parallelepiped box structure having a plurality of rails 185 on the upper surface thereof.

The base 180 may include a plurality of vertical frames 182 and a plurality of horizontal frames 181 and may be installed on top of a frame support provided on the floor.

The third driving unit 190 is configured to move the plate frame 170 connected to the conveyance plate 160 in parallel with the conveyance direction so as to provide power for reciprocally sliding along the rail 185 installed on the base, An electromagnet 192 for generating a magnetic force for relatively moving the pegetail 194 when power is applied and an insertion groove in which the pegetail is inserted and formed, . ≪ / RTI >

The electromagnet 194 is disposed in a recess 184 formed on the upper surface of the base so as to engage with a leg portion protruding from a lower portion of the plate frame portion. And a stopper 187 which interferes with the line and the rear end of the susupun frame frame portion 174 so as to limit the movement of the plate frame portion reciprocating along the rail by the third driving portion.

A plurality of vertical frames disposed inside the vertical frame except for the vertical plate frames disposed on the left and right sides of the plurality of vertical plate frames are provided to prevent the interference with the horizontal axis of the second driving unit, It is preferable that incisions are formed so as to secure sufficient space.

The plate frame part 170 includes a pair of right and left upper and lower plates 160 disposed on the upper end of the vertical plate frame 172 disposed on the left and right sides of the plate frame part 170, A first contact roll 176a reciprocally moving forward and backward along a first contact roll 176a corresponding to both sides of a conveyed object that is brought into contact with the upper surface of the conveyance plate 160, Member (176).

The plate frame part 170 is provided with a second contact roll 177a which is in contact with the upper surface of the conveyance plate 160 or which is in contact with the front and rear edges of the conveyed object, And a plurality of vertical plate frames 172 on the upper end of which the conveyance plate 160 is installed.

Accordingly, the first contact roll 176a is brought into contact with both sides of the conveyed object parallel to the pair of left and right upper horizontal plates when the first cylinder member fixed to the upper surface of the upper horizontal plate 179 is advanced, At the same time, the second contact roll 177 is brought into contact with the remaining line and rear edge of the moving object during the lifting operation of the second cylinder member 177 fixed to the vertical frame, It is possible to restrain the movement of the conveying object which is raised in a contact manner or raised in a non-contact manner on the upper surface of the conveying plate.

The upper horizontal plate 179 is provided with a plurality of vacuum adsorption blocks 178 having vacuum suction holes 178a connected to vacuum suction lines on the upper surface corresponding to lower sides of both sides of the object to be conveyed, The lower surfaces of both side edges of the conveying object, the movement of which is primarily constrained by the conveying plate, are secondarily adsorbed and fixed to the vacuum adsorption holes of the vacuum adsorption block by the first and second contact rolls 176a and 177a, It is possible to completely prevent movement during surface inspection after transport and transport.

 It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the inventions. It will be apparent to those of ordinary skill in the art.

100a: first transfer part 100b: second transfer part
110: feed roll 112: roll shaft
120: first driving part 122: driving shaft
123: drive gear 124: driven gear
130: roll frame part 132: shaft frame
134: fixed frame 140: second driving part
142: Horizontal connection shaft 143: Vertical screw shaft
150: Support frame part 152:
154: Vertical stand 160: Feed plate
161: valve body 162: discharge body
163: Pad 170: Plate frame part
172: vertical plate frame 174: horizontal plate frame
175: guider 176: first cylinder
177: second cylinder 178: vacuum adsorption block
180: Base 190: Third driving part

Claims (12)

1. An in-line moving stage device for transferring a conveying object in one direction,
And a first driving unit provided with a plurality of conveying rolls at predetermined intervals for each of a plurality of roll axes arranged at regular intervals in the conveying direction of the conveying object and for providing power for rotationally driving the plurality of roll axes in one direction, And a second driving unit for moving up and down the roll frame unit for rotatably supporting the plurality of roll axes so that the plurality of transport rolls can be moved up and down. A first conveying unit for conveying a conveyed object placed on the plurality of conveying rollers in one direction by having a supporting frame part for supporting the conveying rollers;
A plurality of conveying plates which are arranged in a conveying direction of the conveying object and are arranged so as not to interfere with each other between conveying rolls adjacent to each other and on which the conveying target is placed, A base provided with a plate frame portion for supporting the conveying plate and having a plurality of rails on which a plurality of guiders provided at the lower end of the plate frame portion are slidably moved, And a third driving unit for providing a power for reciprocally sliding the plate frame part along the rail, and a second conveying part for reciprocatingly conveying the conveyed object placed on the conveying plate away from the conveying roll in the lowering operation of the first conveying part Including,
The support frame part includes a pair of left and right horizontal bars fixedly installed with the second driving part raised and extending in a predetermined direction in the conveying direction and a pair of upper and lower ends bent downward from both ends of the horizontal band, Of the vertical axis,
The plate frame portion is connected to the lower surface of the conveying plate so as to support a plurality of conveying plates arranged so as not to interfere with conveying rolls of a plurality of rows adjacent to each other and arranged in parallel to each other at intervals between adjacent conveying rolls And a horizontal plate frame having a plurality of vertical plate frames and guiders connected to lower ends of the plurality of vertical plate frames and slidably moved along the rails. The method according to claim 1,
The first driving unit may include a driving shaft having a predetermined length and including a plurality of driving gears meshed with a driven gear provided at each end of the plurality of roll shafts and a driving shaft disposed at a middle portion of a driving shaft disposed perpendicularly to one end of the roll shaft And a first drive motor for rotationally driving the driven bevel gear and the driven bevel gear engaged with the gear. The method according to claim 1,
Wherein the roll frame portion includes a plurality of shaft frames extending in a predetermined length in a feeding direction orthogonal to the plurality of roll shafts and rotatably supporting the roll shaft, And a stationary frame for fixing the frame. The method according to claim 1,
The second driving unit may include a plurality of vertical screw shafts connected to an upper end of the roll frame unit and a plurality of second driving motors moving up and down the roll frame unit by simultaneously rotating the plurality of vertical screw shafts in a forward or reverse direction In-line moving stage device. delete The method according to claim 1,
Wherein the conveying plate comprises a plate body assembly structure in which the jet is upwardly discharged toward the conveying object so that the conveying object can be lifted at a predetermined height. The method according to claim 6,
Wherein the transfer plate includes: a plate body formed through a connection hole communicating with a jet supply line; an ejection body formed with an ejection hole communicating with the connection hole to eject the jet from the inner chamber filled with the jet stream; And a pad for depressing the curved portion to which the discharged jet is guided, and fixing the discharge body to the plate body. delete The method according to claim 1,
Wherein the plate frame portion includes a pair of left and right upper horizontal plates disposed on the upper end of the vertical plate frames on both left and right sides where the conveyance plate is not installed and aligned with the conveyance plate, Wherein the first cylinder member reciprocates in a reciprocating manner. The method according to claim 1,
Wherein the plate frame portion is provided with a second cylinder member for vertically reciprocating a second contact roll corresponding to a line and a trailing edge of the conveyed object on one of a plurality of straight plate frames provided on the upper end of the conveying plate Wherein the inline moving stage device comprises: The method according to claim 1,
Wherein the plate frame portion includes a pair of left and right upper horizontal plates disposed at the upper end of the vertical plate frames on both left and right sides where the conveyance plate is not installed and aligned with the conveyance plate, And a plurality of vacuum adsorption blocks formed on the upper horizontal plate by forming vacuum suction holes connected to the suction lines. The method according to claim 1,
The third driving part includes a pizza stone part fixed to the horizontal plate frame of the plate frame part so as to provide power for reciprocally sliding movement of the plate frame part connected to the conveyance plate along a rail provided on the base in parallel with the conveyance direction, And an electromagnet for generating a magnetic force for relatively moving said piston stone when power is applied, said electromagnet comprising:

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