KR101544192B1 - control system for pneumatic control vavle of temperature control - Google Patents

control system for pneumatic control vavle of temperature control Download PDF

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KR101544192B1
KR101544192B1 KR1020140029489A KR20140029489A KR101544192B1 KR 101544192 B1 KR101544192 B1 KR 101544192B1 KR 1020140029489 A KR1020140029489 A KR 1020140029489A KR 20140029489 A KR20140029489 A KR 20140029489A KR 101544192 B1 KR101544192 B1 KR 101544192B1
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temperature
displacement
control
link
relay
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KR1020140029489A
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Korean (ko)
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이정환
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(주)세양기전
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Abstract

The present invention relates to a control system of a pneumatic control valve for temperature control and, more specifically, relates to a system capable of controlling a displacement of a valve rod by controlling the pneumatic pressure applied to a diaphragm of a pneumatic control valve, and controlling a temperature of a rear thermostatic part at a set reference temperature by controlling an amount of fluids through the control valve. To achieve this purpose, the present invention comprises: a reference temperature input tool part; an error generation link tool part converting an error between a set reference temperature and a current temperature into a flapper displacement; a nozzle-flatter single stage amplification tool part making a change of a nozzle back pressure in accordance to a change of the flapper displacement; a pneumatic relay double stage amplification tool part generating control pressure applied to the pneumatic control valve; the pneumatic control valve controlling a flux of fluid by controlling the displacement of the valve rod; a temperature-changeable rear thermostatic part; a Bourdon tube temperature measurement tool part mechanically measuring the temperature of the temperature-changeable rear thermostatic part; an output temperature indication tool part converting each displacement of the Bourdon tube into an output temperature on a linear scale; and a proportion-integral calculus-differentiation operation tool part controlling a temperature change section, in proportion to a flapper operation displacement, to control a response speed for changing the nozzle pressure.

Description

[0001] The present invention relates to a control system for pneumatic control,

The present invention relates to an air pressure control valve for temperature control, and more particularly, to an air pressure control valve for controlling the displacement of a valve rod by controlling an air pressure applied to a diaphragm of an air pressure control valve and adjusting the amount of fluid flowing through the control valve And a control system of an air pressure control valve for temperature control for controlling a temperature of a rear end temperature sensing part such as an engine or a mixed liquid to a set reference temperature.

Generally, the air pressure control valve controls the temperature by controlling the amount of fluid flowing in the air pressure control valve by using the air pressure to be applied. The air pressure control valve is applied to shipyard, onshore plant piping line, and the like.

However, such a conventional air pressure control valve uses a valve to adjust the air pressure, or a mechanical integral control device or the like, which can not easily and easily adjust the air pressure in the air pressure control valve, The performance of the pneumatic control valve is deteriorated due to the inability to control the amount of the fluid flowing through the pneumatic control valve, and thus the temperature of the pneumatic control valve can not be accurately controlled.

Korean Patent Registration No. 10-1291236 (Jul.

The present invention has been proposed in order to solve the above-described problems in the prior art, and it is an object of the present invention to provide a control system for an air pressure control valve for temperature control, And controls the displacement of the valve rod by controlling the applied air pressure to control the amount of fluid flowing through the control valve so that the temperature of the rear end temperature sensing part such as the engine or the mixed liquid can be easily and easily controlled to the set reference temperature.

According to an aspect of the present invention, there is provided a temperature control apparatus including: a reference temperature input mechanism for inputting an existing temperature; An error generation link mechanism unit for converting the error between the reference temperature and the current temperature, which are connected to the reference temperature input mechanism unit, into a flapper displacement; A nozzle-flapper one-stage amplifier unit connected to the error generation link mechanism unit to generate a change in nozzle back pressure according to a change in flapper displacement generated in the error generation link mechanism unit; And a small amount of the supply air is supplied to the nozzle of the nozzle-flapper one-stage amplifier bite through the orifice installed inside and connected to the nozzle-flapper one-stage amplifier bite, A pneumatic relay two-stage amplifier for generating a control pressure to be applied to the pneumatic control valve by controlling the displacement of the inner valve stem by taking the back pressure as the working pressure of the upper diaphragm and controlling the cross- An air pressure control valve connected to the pneumatic relay two-stage amplifier section to receive a control pressure output from the pneumatic relay two-stage amplifier section under the action pressure of the diaphragm provided at the upper portion, and to control the displacement of the valve stem to control the flow rate of the emulsion; A temperature variable rear end temperature sensing unit connected to the air pressure control valve and having a temperature variable when the flow rate of the fluid is controlled by the air pressure control valve; A bourdon tube temperature measuring mechanism part connected to the temperature variable rear end temperature sensing part and mechanically measuring the temperature of the changed temperature rear end temperature sensing part and converting the temperature into angular displacement of the bourdon tube; A link mechanism connected to the bourdon tube temperature measuring mechanism for converting an angular displacement of the bourdon tube to an output temperature on a linear scale and generating a flapper displacement to reduce an error with a reference temperature generated on a linear scale An output temperature indicator mechanism coupled to the reference temperature input mechanism via a link; The proportional-differential operation unit is connected to the air-pressure relay two-stage amplifier bender and controls the response speed at which the nozzle back pressure is changed by adjusting the temperature change interval proportional to the flapper operation displacement using the proportional band adjuster. Wherein the proportional-integral operation unit increases the relative stability of the control operation by generating a negative feedback flapper displacement in a direction opposite to the flapper error displacement generated by the simple feedback of the temperature error, and the proportional- And a proportional-integral-differential operation mechanism for generating a displacement to increase a response speed and to eliminate a steady-state error. The control system for an air-pressure control valve for temperature control is provided.

According to the present invention as described above, there are provided a reference temperature input mechanism, an error generation link unit, a nozzle-flapper first stage amplifier, an air pressure relay second stage amplifier, a proportional-integral-differential operation mechanism, And a control system of an air pressure control valve for temperature control composed of a variable rear end warming part, a bourdon tube temperature measuring mechanism part, and an output temperature instruction part, the control system of the air pressure control valve controls the air pressure To control the displacement of the valve rod to control the amount of the fluid flowing through the control valve, thereby easily and easily controlling the temperature of the rear end temperature sensing part such as the engine or the mixed liquid to the set reference temperature.

1 is a configuration diagram of a control system of an air pressure control valve for temperature control of the present invention.
2 is a configuration diagram showing a nozzle-flapper one-stage amplifier bend of a control system of an air pressure control valve for temperature control of the present invention.
FIGS. 3 and 4 are views showing a state in which a displacement of an error generating link is varied according to a rotation angle of a proportional band dial of a nozzle-flapper single-stage amplifier of the present invention. FIG.
The present invention relates to a control system for an air pressure control valve for controlling the temperature of an air conditioner, and more particularly,
6 is a configuration view showing a pneumatic relay two-stage amplifier bend of a control system of an air pressure control valve for temperature control of the present invention.
FIG. 7 and FIG. 8 are operating states showing the respective configurations of the Bourdon tube temperature measuring mechanism of the control system of the air pressure control valve for temperature control of the present invention and the temperature measurement by the rotation angle of the Bourdon tube.
FIG. 9 and FIG. 10 are operating states showing the operating state of the error generating link mechanism portion of the control system of the air pressure control valve for temperature control of the present invention. FIG.
11 is a graph showing a relationship between a flapper displacement and an error occurrence link displacement and a nozzle back pressure in a control system of an air pressure control valve for temperature control according to the present invention.
12 is a configuration view showing a proportional-integral-differential action mechanism of the control system of the air pressure control valve for temperature control of the present invention.
13 is a block diagram showing a proportional-integral operation unit of the proportional-integral-differential action mechanism of the present invention.
FIG. 14 is a block diagram showing the structure of the integral gain control unit and the differential gain control unit of the proportional-integral-differential action mechanism according to the present invention. FIG.

Hereinafter, a control system for an air pressure control valve for temperature control according to the present invention will be described in more detail with reference to FIGS. 1 to 14.

The present invention controls the displacement of the valve rod by controlling the air pressure applied to the diaphragm of the air pressure control valve and regulates the amount of fluid flowing through the control valve so that the temperature of the rear end temperature sensing part such as engine or mixed liquid is controlled A control system for an air pressure control valve for temperature control is provided.

As shown in FIG. 1, the control system for the air pressure control valve for temperature control includes a link mechanism having a function of indicating on a scale indicating an existing temperature to be set, And a reference temperature input mechanism unit 10 which is coupled to the output temperature indicating mechanism 80 through a link to generate a temperature error.

The reference temperature input mechanism unit 10 is provided with an error generation link mechanism unit 20 having a function of converting an error between the set reference temperature and the current temperature into a flapper displacement of a nozzle- .

The error generating link mechanism unit 20 is provided with a mechanical flapper displacement which is changed by a change in the air pressure called a nozzle back pressure so as to cause a change in the nozzle back pressure according to the change of the flapper displacement generated by the error generation link mechanism unit 20, And a nozzle-flapper single-stage amplifier 30 having an amplifying function is connected.

 In the nozzle-flapper single-stage amplifier unit 30, a small amount of air supplied from the outside through the orifice 404 provided in the air pressure relay two-stage amplifier unit 40, which will be described later, The air pressure relay two-stage amplifier bulb 40 is connected to the air supply port 304 of the nozzle unit 302 through a pressure space 401a, which is an internal space of the upper body 401, Stage amplifier section 30 and the nozzle back pressure adjusted by the nozzle-flapper one-stage amplifier section 30 is supplied to the pressure space 401a of the pneumatic relay two-stage amplifier section 40 To control the displacement of the relay valve rod 412 provided therein to adjust the cross-sectional area of the passage through which the supply air passes, thereby controlling the pressure in the air pressure control valve 50 Authorized Control The pressure force can relay a two-stage amplifier bend 40 is provided to connect to produce. The air pressure relay two-stage amplifier unit 40 is internally configured to control the pressure of the air to be discharged by discharging a part of the supplied air to the outside.

The control pressure output from the pneumatic relay two-stage amplifier section 40 is received in the pneumatic relay two-stage amplifier section 40 by receiving the operating pressure of the upper diaphragm 405 installed in the upper part, and the displacement of the relay valve rod 412 And an air pressure control valve 50 for controlling the flow rate of the fluid is connected. That is, the pneumatic control valve 50 changes the opening cross-sectional area of the pneumatic control valve 50 according to the displacement of the relay valve rod 412, and the temperature-variable rear end temperature sensing unit 60, which will be described later, The flow rate of the flow rate is adjusted.

The air pressure control valve 50 is connected to a temperature variable rear end temperature sensing unit 60 that changes its temperature when the flow rate of the fluid is controlled by the air pressure control valve 50.

The Bourdon tube temperature measuring instrument (60) is a sensor for measuring the temperature of the changed variable temperature rear end temperature sensing part (60) mechanically and converting it into an angular displacement of the Bourdon tube (703) (70) are connected.

The bourdon tube temperature measuring mechanism 70 is provided with a link mechanism for converting the angular displacement of the bourdon tube 703 to an output temperature on a linear scale. In order to reduce an error with the reference temperature generated on the linear scale, An output temperature indicator mechanism unit 80 connected to the reference temperature input mechanism unit 10 via a link is connected.

The air pressure relay two-stage amplifier 40 includes a proportional-integral-differential function in a mechanical temperature controller having simple feedback, and a proportional band controller is used to adjust a temperature variation period proportional to the flapper operation displacement, And a proportional-integral-differential action mechanism 90 for controlling the response speed of the back pressure is connected and coupled.

The proportional-integral-differential operation mechanism unit 90 is provided with a proportional-differential operation unit 91 for increasing the relative stability of the control operation by generating a negative feedback flapper displacement in the direction opposite to the flapper error displacement generated by the simple feedback of the temperature error And a proportional-integral operation unit 94 for generating a positive feedback displacement to increase a response speed and to eliminate a steady-state error. The proportional-differential operation unit 94 comprises a proportional-integral operation unit 91, respectively.

As shown in FIG. 2, the nozzle-flapper single-stage amplifier unit 30 is installed on a nozzle fixing body 301, which is a part of a basic body, and the nozzle fixing body 301 is provided with an air pressure relay two- An air supply port 304 that can be connected by a hose or a tube is installed so that a small amount of air having passed through the orifice 404 of the first relay 40 and the pressure space 401a of the second relay of the relay stage is supplied to the nozzle 303 And a nozzle unit 302 having a nozzle 303 for discharging the amount of air supplied through the air supply port 304 to the outside depending on the displacement of the flapper 306 is provided. 4, the proportional constant between the error generating link 203 and the displacement of the flapper 306 can be varied to adjust the proportional interval, The band dial 308 is integrally formed with the nozzle unit 302 so that the nozzle unit 302 itself is rotatably coupled on the nozzle fixing body 301. The hinge unit 302 310 are coupled to the hinge unit 310. The hinge unit 310 is coupled to the error generating link mechanism unit 20 for generating a flapper displacement to which an error displacement generated by the error generating link mechanism unit 20 and a displacement fed back by the proportional- An auxiliary lever 305 is rotatably coupled to one side of the auxiliary link 305 and an auxiliary lever 309 is provided on one side of the auxiliary link 305. The auxiliary link 309 is provided at one side of the auxiliary link 309, (Not shown) Standing and the flapper 306 to be converted into displacement of the flapper linked to the nozzle 303 is formed, there is installed, the O-ring 307 between the nozzle fixing body 301 and nozzle portion 302.

The nozzle-flapper single stage amplifier section 30 is proportional to the flapper displacement generated by the combination of the error displacement generated by the error generation link mechanism section 20 and the displacement feedback by the proportional-integral-differential action mechanism section 90 Thereby regulating the nozzle back pressure. The air supplied from the orifice 404 in the relay upper body 401 of the pneumatic relay second stage amplifier 40 is applied to the air supply port 304 of the nozzle fixing body 301, It is discharged to the outside through the nozzle 303 of the nozzle unit 302. [

2, the error displacement generated by the error generation link mechanism unit 20 and the proportional-integral-differential operation mechanism unit 90 are compared with each other, The feedback displacement is applied to the auxiliary link 305 for generating the flapper displacement and is rotated and the flapper 306 is rotated about the hinge 310 together with the auxiliary link 305 to finally interlock with the nozzle 303 The flapper displacement is converted by conversion between the flapper 306 and the nozzle 303. In other words,

The sensitivity that the nozzle back pressure varies according to the flapper displacement is controlled by the diameter of the nozzle 303 and the orifice 404 of the pneumatic relay second stage amplifier 40 that supplies air to the nozzle 303 ) Diameter. ≪ / RTI > Normally, this ratio should be designed to be greater than 1 so that the nozzle back pressure is changed according to the displacement of the flapper. That is, if the above ratio is too large, the change sensitivity of the nozzle back pressure becomes too high even with small flapper displacement, If the ratio is too small, the sensitivity of the change in the nozzle back pressure is lowered, thereby causing a problem in responsiveness. Therefore, the ratio is set to 2.5 to 5. For example, when the diameter of the nozzle 303 is 0.5 mm, the diameter of the orifice 404 is preferably 0.1 to 0.2 mm.

As shown in FIGS. 5 and 6, the air pressure relay two-stage amplifier unit 40 outputs the supply air from the outside and the supplied air to the outside, as well as the relay upper body And a relay lower body 402 to which supply air is supplied from the outside is coupled to one side of the relay upper body 401. The relay upper body 401 and the relay lower body 401 402, a relay central body 403 is coupled.

An orifice 404 through which the supply air passes is provided in the relay upper body 401 to reduce the amount of supply air supplied to the relay upper body 401 and to transfer the air to the pressure space 401a of the relay upper body 401, And an upper diaphragm 405 operated by a change in the nozzle back pressure is installed on one surface of the relay upper body 401. The upper diaphragm 405 is provided on the upper diaphragm 405 A first nozzle back pressure transmitting mechanism 407 for transmitting a force is provided.

A lower diaphragm 406 operated by the first nozzle back pressure transfer mechanism 407 is installed on one surface of the relay central body 403. On one surface of the lower diaphragm 406, And a second nozzle back pressure transmitting mechanism 408 for transmitting a force by the second nozzle back pressure force transmitting mechanism 408 are provided.

A variable opening cross-sectional area port 411 having an insertion engaging portion 411a is inserted into one surface of the relay lower body 402 and an insertion opening 411a of the variable opening cross- And a relay valve rod 412 for regulating the control pressure is movably coupled.

The relay lower body 402 is provided at its other side with a support spring 410 for supporting the relay valve rod 412. The relay lower body 402 is provided on the other side thereof with a relay valve body 412, And an elastic spring 409 for generating a proportional displacement for generating a displacement change is provided.

5 and 6, air supplied from the outside passes through the orifice 404 provided in the relay upper body 401, and the amount of the air is reduced, Flapper is provided to the nozzle 303 of the nozzle-flapper single-stage amplifier bulb 30, and is delivered to the pressure space 401a of the nozzle-

In a normal state, the nozzle back pressure changed by the nozzle-flapper first-stage amplifier unit 30 and the pressure in the pressure space 401a of the relay upper body 401 become equal to each other. When a change occurs in the nozzle back pressure, A change in the force acting on the upper diaphragm 404 of the upper body 401 and ultimately a difference from the elastic force of the resilient spring 409 for generating a proportional displacement generates a displacement change of the relay valve rod 412 .

The generated displacement of the relay valve rod 412 can adjust the pressure of the output air, that is, the control pressure of the relay, by increasing or decreasing the sectional area of the valve opening degree of the supplied supply air output to the outside of the relay upper body 401 . At this time, the valve opening degree is designed so that the sectional area of the valve opening degree is increased or decreased in proportion to the displacement of the relay valve rod 412.

As a result, the relay control pressure output from the air pressure relay two-stage amplifier 40 is proportional to the displacement of the relay valve rod 412 and the displacement of the relay valve rod 412 is proportional to the nozzle back pressure The control pressure output from the pneumatic relay second stage amplifier 40 is proportional to the displacement of the relay valve rod 412 by designing the respective components of the pneumatic relay two-stage amplifier bend 40.

As shown in FIGS. 7 and 8, the bourondon tube temperature measuring mechanism 70 is provided with a liquid tank 701 containing a liquid whose volume changes in proportion to a temperature change. The liquid tank 701 is provided with A capillary tube 702 containing a liquid of a liquid.

The other end of the capillary 702 on the side of the capillary 702 is fixed by a fixing plate 704, and one end is formed in a free-end state. The liquid is injected so as to fill the space without bubbles therein and is proportional to the temperature of the injected liquid. A bourdon tube 703 of a spirally curved shape is provided so as to generate a rotation angle at the free end due to the varying volume.

The first rotating link 705 is coupled to one end of the bourdon tube 703 by a rotation angle generated by the volume change of the bourdon's view 703, And a transmission link 706 which is moved by a rotating first rotation link 705 is coupled to an end of the transmission link 706. The end of the transmission link 706 is connected to a second rotation link 706, (Not shown).

An indicator bed 708 is coupled to the end of the second rotary link 707 to indicate the actual temperature to the temperature instrument panel 709 while rotating around the hinge together with the rotating second rotary link 707.

As shown in FIGS. 5 and 6, the bourdon tube temperature measuring mechanism 70 includes a liquid tank 701 containing a liquid whose volume changes in proportion to a temperature change in the temperature-variable trailing edge temperature sensing unit 60 And the liquid is injected into the capillary tube 702 as well as to the inside of the bourdon tube 703 to fill with no air bubbles.

At this time, when a temperature change occurs in the temperature-variable rear end temperature sensing unit 60, the volume of the liquid in the liquid tank 701 is increased in proportion to the temperature change, and the spiral bourdon tube 702 is passed through the capillary tube 702 (703).

The other end of the bourondon tube 703 is fixed by the fixed end 704 to one end of the bourondon tube 703 in proportion to the volume of the liquid delivered to the bourondon tube 703, At one end of the inbondon tube 703, a rotation angle is generated

The generated rotation angle is transmitted to the indication bed 708 indicating the measurement temperature through the transmission link 706 and the second rotation link 707 via the first rotation link 705 and the indication bed 708, The temperature of the temperature-variable rear end temperature sensing unit 60 can be measured by observing the state where the temperature sensor 707 is rotated and positioned on the temperature instrument panel 709.

That is, as shown in FIG. 8, in the intermediate temperature guide of the temperature measurement span, the first rotation link 705 on the side of the Bourdon tube 703 and the second rotation link 707 on the indication bed 708 side are tangential That is, by providing a vertical position, the cosine value can be minimized within a small rotational angle deviation.

Thus, by causing the displacement of the transmission link 706, which transmits the rotation angle, to occur in proportion to the rotation angle, the rotation angle of the Bourdon tube 703 measured by the temperature information of the temperature- The bourdon tube temperature measuring mechanism 70 can accurately measure the rotation angle of the Bourdon tube 703 according to the temperature change to the measurement temperature indication bed 708 Thereby reducing the measurement error in the temperature instrument panel 709. [

9 and 10, the error generating link structure 20 is coupled to a guide rotation pivot 201 on the rear end side of the indicator bed 708 of the Bourdon tube temperature measuring mechanism 70, The instruction rotating pivot 201 is coupled to an instruction temperature rotating link 202 that rotates in accordance with the rotation of the indicator bed 708. A center portion of the instruction temperature rotating link 202 is connected to the rotating instruction temperature rotating link 202 202 is coupled with an error generating link 203 which stops displacement with respect to a temperature error while the indicator bed 708 is provided with an instruction dial 204 for instructing the temperature gauge board 709 to reference temperature, Respectively.

In order to obtain a large displacement of the error generating link with respect to the same temperature error, the indicated temperature rotating link 202 forms a short length L of the indicated temperature rotating link 202. In order to obtain a small displacement of the error generating link, The length L of the indicated temperature rotating link 202 is formed to be long.

9 and 10, the error-generating link structure 20 has a current temperature measured angularly by the Bourdon tube 703 of the Bourdon tube temperature measuring mechanism 70, Is transmitted to the link of the current temperature indicator bed 708 and the indicator bed 708 is rotated about the indicator rotation pivot 201 of the error generation link structure section 20 to be directed to the temperature instrument panel 709 do.

On the other hand, the reference temperature is indicated on the temperature gauge board 709 by rotating the reference temperature instruction dial 204 rotating in agreement with the reference temperature instruction bed 708. [

As shown in FIG. 9, the shape of the error generating link mechanism 20 is shown when the reference temperature indicating instruction and the current temperature indicating instruction coincide with each other at an arbitrary temperature. The connection point connecting the link 203 is located at the point exactly coinciding with the current temperature-indicated instruction rotary pivot 201, so that the displacement of the error generating link 203 becomes zero.

As shown in FIG. 10, the reference temperature indicating instruction is set to a high temperature and has a positive temperature error. The instruction temperature rotating link 202 connected to the reference temperature indicating instruction is linked to the current temperature indicating instruction And the displacement of the error generating link 203 caused by the temperature error is obtained by rotating around the guide rotating pivot 201 located at one point on the axis.

In order to obtain a large displacement of the error generating link 203 with respect to the same temperature error, the length L of the instruction temperature rotating link 202 is shortened, and in order to obtain a small displacement of the error generating link 203, The length L of the temperature rotating link 202 is set to be longer than the length of the temperature rotating link 202. The length l of the temperature rotating link 202 is determined by the relationship between the displacement of the error generating link 203 and the flapper displacement, And the relative proportions of the resources.

11 is a graph showing the relationship between the flapper displacement and the error occurrence link displacement and the nozzle back pressure in the control system of the air pressure control valve for temperature control according to the present invention. The output of the air pressure relay two- The pressure is changed in accordance with the displacement of the flapper 306 approaching the nozzle 302 of the nozzle-flapper single-stage amplifier bulb 30. When the displacement of the flapper 306 is at least 0 in the nozzle-flapper single-stage amplifier unit 30, the nozzle back pressure becomes maximum and the opening of the air pressure relay two-stage amplifier unit 40 is fully opened, .

When the displacement of the flapper 306 reaches a predetermined value or more at the nozzle-flapper 1 stage amplifier 30, the nozzle back pressure becomes atmospheric pressure and the opening of the air pressure relay two-stage amplifier bend 40 is completely closed The control pressure becomes zero.

On the other hand, the displacement of the flapper 306 depends on the displacement of the error generating link 203, which generates a temperature error between the reference temperature indicating instruction and the current temperature indicating needle as displacement of the flapper 306. 11, the maximum displacement of the flapper 306 occurs at a point above the positive maximum displacement (+ maximum displacement) of the error generating link 203, and at the point where the error becomes zero, Resulting in a minimum displacement of the flapper 306 below the negative maximum displacement (minus the maximum displacement).

As shown in FIG. 2, whenever the displacement of the flapper 306 approaching the nozzle 303 has the same value, the control pressure corresponding to the displacement always exhibits the same value. In this case, the displacement of the error generating link 303 for generating the displacement of the same flapper 306 can be varied so as to have various values, that is, the proportional interval between the flapper displacement and the nozzle back pressure is always The displacement interval of the error generating link 303 that causes a constant flap displacement can be varied.

2 shows the case where the rotational angle of the variable proportional band dial 308 of the nozzle-flapper single-stage amplifier unit 30 is fixed to zero, that is, when the error generating link 303 and the flapper auxiliary lever 309 ) Of the auxiliary lever 309 is maintained at 90 degrees, a flapper displacement is generated in response to the displacement of the error generating link 303. The displacement of the auxiliary lever 309 fixed on the error generating link 303 y causes the displacement x of the auxiliary link 305 for generating the flapper displacement as shown in Fig.

Assuming that the variable proportional band dial 308 is rotated counterclockwise by &thetas; degree, the displacement x of the auxiliary link 305 which is the same as that in Fig. 3 in which the rotation angle of the variable proportional band dial 308 is 0 degrees The auxiliary displacement y a displacement of the error generating link 303 required to generate

Figure 112014024246984-pat00001
(cos?> 1), and y a becomes larger than y. This result means that the displacement of the error generating link 303 necessary for generating the same flapper displacement can be varied by rotating the variable proportional band dial 308, and consequently, the nozzle back pressure can be varied in proportion to the flapper displacement It means that the proportional interval of the temperature error can be varied corresponding to the proportional interval.

12 to 14, the proportional-integral-differential operation mechanism 90 includes an integral gain controller (feedback controller) 90, which receives feedback of the control pressure of the output air output from the pneumatic relay two- The feedback gain control unit 92 is connected to the integral gain control unit 92 so that the output air having passed through the integral gain control unit 92 is inputted and the positive feedback link displacement is controlled by the control pressure of the introduced output air. The generated key is provided with a proportional-integral operation section 91 provided with an integral control feedback bellows 93. The proportional-integral operation section 91 is provided at one side thereof with the integral gain control section 92 And a differential gain control unit 95 connected to the differential gain control unit 95 to receive the output air that has passed through the differential gain control unit 95, The feedback link is combined with the displacement to produce an excessive amount of blood Differential operation portion 94 provided with a differential feedback control bellows 96 for generating a negative feedback link displacement by the control pressure of the introduced output air so as to prevent back link displacement from occurring .

14, the integral gain adjusting unit 91 of the proportional-integral operation unit is provided with an integral gain main body 921 and the air pressure relay two-stage amplifier bend unit 40 is provided on the side of the integral gain main body 921, And an integral gain control dial 922 is rotatably formed on the integral gain main body 921. The integral gain control dial 922 is rotatably mounted on the integral gain control dial 922, An integral gain shifting member 923 reciprocating in the direction of rotation of the integral gain adjusting dial 922 is coupled to the end of the integrated gain shifting member 923. The end of the integral gain shifting member 923 is gradually smaller The integral gain adjusting member 924 is formed inside the integral gain main body 921 and the integral gain adjusting member 924 is inserted into the integral gain main body 921. In addition, Location And the control pressure is adjusted through the integral gain control hole 926 to the lower portion of the integral gain main body 921. The control gain control unit 926 controls the output gain of the output gain control unit 926, An integral gain output hole 927 for supplying output air to the feedback control bellows 93 for controlling the integral is formed and a part of the output air is connected to the differential gain adjusting unit 95 at a lower portion of the integral gain main body 921, An output air discharge hole 928 communicating with the communicating tube 97 is formed.

The differential gain adjusting unit 95 of the proportional-differential operation unit is provided with a differential gain main body 951 as shown in FIG. 14, and the differential gain adjusting unit 95 is provided on the side of the differential gain main body 951 A differential gain inlet hole 955 communicating with the communicating tube 97 is formed to allow a part of the output air to be sent in. A differential gain adjusting dial 952 is rotatably formed on the differential gain body 951 The differential gain adjusting dial 952 is coupled to a differential gain shifting member 953 reciprocating in accordance with the rotation direction of the differential gain adjusting dial 952. An end of the differential gain shifting member 953 is connected to the differential gain adjusting dial 952, And a differential gain adjusting member 954 having a shape gradually decreasing in diameter toward the end side is formed in the differential gain main body 951. The differential gain adjusting member 954 is inserted into the differential gain main body 951, The gain- And a differential gain adjusting hole 956 for adjusting an amount of the output air passing through the differential gain adjusting body 954 is formed in accordance with the insertion position of the ash 954, And a differential gain ejection hole 957 for feeding the output air whose control pressure has been adjusted to the differential feedback control bell rose 96 is formed.

In order to eliminate the temperature error in the steady state in the proportional-integral-differential action mechanism 90, a proportional-integral controller can be used as shown in FIG. 13, and an air pressure control system The output of the air pressure regulator, that is, the control pressure remains unchanged and remains constant even though the temperature error is continuously generated around the reference temperature in the steady state. In this case, the control pressure There is no change in the opening degree of the pneumatic control valve controlled by the temperature sensor, and the flow rate of the fluid required to change the temperature of the short-circuited temperature section after the temperature change is constant, the present temperature of the short- The steady-state temperature error for constant temperature is inevitable.

In order to eliminate such a steady-state error, a proportional-integral controller, which is a type 1 system, is used as the type of the air pressure control system. In the proportional-integral controller, Has a positive feedback operation to be equal to the effect of generating the displacement of the auxiliary link 305. [ By applying the control pressure to the positive feedback bellows 93 as shown in FIG. 13, the same effect as the direction in which the auxiliary lever 309 is moved by the error generating link 203 according to the sign of the temperature error is exerted, 305) to eliminate the steady-state error.

In the proportional-integral controller, when the reference temperature is higher than the current temperature and there is a positive steady state error, an integral operation is performed to eliminate the positive steady state error. Referring to FIG. 13, a temperature error having a positive sign is generated However, when it is assumed that the steady state error is expressed by no occurrence of the displacement of the error generating link 203 in the steady state, the output of the pneumatic relay second stage amplifier 40, that is, the control pressure, Is fed back through the gain adjuster 92 to the positive feedback bellows 93 for integral control for integral control and the pressure in the positive feedback bellows 93 is gradually increased and the proportional- The feedback link of the portion 91 causes the auxiliary lever 309 to fall away from the auxiliary link 305. On the other hand, the error generating link 203 according to the temperature error operates horizontally according to the sign of the temperature error, and the feedback link by the integral control operation operates vertically. Only the auxiliary lever 309 of the error generating link 203, The feedback by the integral control operation is ultimately positively fed back, and if the feedback link is gradually generated by the integral control operation, the feedback control is performed such that the amount of the feedback displacement of the flapper 306 When the nozzle back pressure gradually rises, the output of the air pressure relay two-stage amplifier 40 gradually increases, that is, the control pressure gradually increases, and the opening degree of the air pressure control valve 50 is gradually increased Slowly increase.

When the opening degree of the pneumatic control valve 50 gradually increases, the flow rate of the temperature controlling fluid flowing through the pneumatic control valve gradually increases and the temperature of the temperature variable rear end temperature sensing unit 60 is slowly increased. When the temperature gradually increases, the steady-state temperature error gradually decreases, and the steady-state error is completely eliminated by repeating the above process.

If the steady-state error remains unremoved, the integral control operation is performed until the nozzle back pressure and the resulting control pressure become maximum. At this time, the opening of the air pressure control valve 50 is fully opened, State is reached. Nevertheless, if the steady-state temperature error is not removed, the valve must be replaced because the rated flow rate of the air-pressure control valve 50 is small.

Thus, by using the proportional-integral controller to continuously integrate the control pressure into the positive feedback bellows 93, the displacement of the feedback link must be varied in the direction of eliminating the steady-state error. In the proportional-integral controller, when the integral gain is increased by increasing the opening degree of the integral controller, the pressure within the positive feedback bellows 93 is rapidly reached due to the short integration time. At this time, The rise time at which the current temperature reaches the reference temperature is very short and chattering is caused by repeatedly generating large overshoot and undershoot around the reference temperature. On the other hand, if the opening degree of the integrating regulator is made small in order to prevent overshoot and frequent chattering, the integral time required for the pressure inside the positive feedback bellows 93 to reach the control pressure becomes longer, The longer the rise time it takes. In this case, the proportional-integral controller is not suitable for a controller for an air-pressure control system that allows the temperature of the temperature-variable rear end temperature sensing unit 70 to reach the mood temperature quickly.

Therefore, the proportional-integral-differential operation mechanism unit 90 is used to suppress the overshoot and the frequent chattering phenomenon while the present temperature of the temperature-variable rear end temperature sensing unit 60 reaches the reference temperature with a fast rise time.

As shown in FIGS. 12 and 14, the proportional-integral-differential operation mechanism 90 includes a differential feedback control bellows 96 for generating a displacement of the feedback link in a direction opposite to the integral control operation, Operation.

Here, since the feedback control pressure is passed through the integral gain control unit 92 and then passed through the differential gain control unit 95, the differential control operation is configured to be dependent on the integral control operation. Therefore, It is preferable to increase the gain and to adjust the differential gain by judging the overshoot to occur. If the differential gain is made too large, overshoot hardly occurs but the rise time becomes long.

The operation of the proportional-integral-differential operation mechanism 90 will now be described. Assuming that the reference temperature is higher than the current temperature and a positive temperature error is generated as shown in FIGS. 12 and 14, the error proportional to the temperature error The control pressure in the air pressure relay two-stage amplifier section 40 also increases and the control pressure is increased by the integral gain control section 92. In this case, Control feedback bellows 93 to generate a positive feedback link displacement, thereby further increasing the nozzle back pressure and the control pressure.

A part of the control pressure that has passed through the integral gain control unit 92 is sent to the differential gain control unit 95 through the communicating pipe 97 and is fed through the feedback gain control unit 95, Is applied slowly to the rose 96 to generate a negative feedback link displacement and is summed with the positive feedback link displacement generated by the integral control, thereby inhibiting an excessive amount of feedback link displacement from being generated.

The nozzle back pressure and the control pressure corresponding to the displacements of the auxiliary link 305 for generating the flapper displacement generated by the proportional-integral-differential operation mechanism unit 90 are finally outputted. While the above process is repeated, The temperature is reached with a fast rise time without excessive overshoot.

It should be noted that when the differential control gain is set too high, the integral control operation is excessively limited so that overshoot does not occur but the over-damped state occurs when the steady state, that is, the time at which the current temperature reaches the reference temperature becomes too long, The differential gain can be adjusted by paying due attention to the fact that the operation of the air pressure control system having the characteristics of the proportional-integral-differential operating mechanism 90 is completely disposed to the purpose and effect of using the proportional-integral-differential operating mechanism 90.

14, the control pressure, which is the output of the pneumatic-relay two-stage amplifier section 40, is fed back to the integral-differential-differential operation mechanism section 90 to control the integral gain and the differential gain. When the gain control unit 92 is inputted, the air pressure passing through the gain-controlled gain adjustment unit 92 is applied to the feedback control bellows 93 for the integral control by turning the integral gain control dial 921, And is input to the differential gain control unit 95 which is dependent on the integral gain control unit 92.

When air pressure is input into the differential gain control unit 95, the differential gain control dial 952 is turned to apply the air pressure through the differential gain control unit 95 to the negative feedback bellows 96, A feedback link is used to generate the nant.

Therefore, it is possible to prevent an excessive amount of feedback displacement from occurring by summing up the feedback link displacement and the negative feedback link displacement that are generated, as well as prevent the current temperature of the temperature variable posterior temperature sensor 60 from rapidly rising to the reference temperature Overshoot and frequent chattering are suppressed while reaching.

Although the control system of the pneumatic control valve for temperature control according to the present invention has been described with reference to the drawings, the present invention is not limited to the embodiments and drawings described in the present specification, Various modifications may be made by those skilled in the art, so that they should not be individually understood from the technical idea or viewpoint of the present invention.

10: reference temperature input mechanism section 20: error generation link section
30: nozzle-flapper one-stage amplifier bend 40: air pressure relay two-stage amplifier bend
50: air pressure control valve 60: temperature variable rear end touching part
70: Bourdon tube temperature measuring mechanism 80: Output temperature indicator
90: Proportional-integral-differential operation mechanism section 91: Proportional-integral operation section
92: integral gain control unit 93: positive feedback bellows for integration control
94: proportional-differential operation unit 95: differential gain control unit
96: feedback control signal for differential control bellows 97: communicating tube
201: Instructions Rotating Pivot 202: Instruction Temperature Rotating Link
203: error generation link 204: reference temperature instruction dial
301: nozzle fixing body 302: nozzle part
303: nozzle 304: air supply port
305: auxiliary link for generating flapper displacement 306: flapper
307: O-ring 308: Variable proportional band dial
309: Auxiliary lever 401: Relay upper body
401a: Pressure space 402: Relay lower body
403: Relay central body 404: Orifice
405, 406: upper and lower diaphragms 407, 408: first and second nozzle back pressure regulating mechanisms
409: elastic spring 410: relay valve rod supporting spring
411: Variable opening cross-sectional area port 411a:
412: Relay valve rod 701: Liquid link
702: capillary tube 703: Bourdon tube
704: Fixing plate 705, 707: First and second rotating links
706: delivery link 708: indicator bed
709: Temperature instrument panel 921: Integral gain body
922: Integral gain control dial 923: Integral gain shift member
924: Integral gain adjustment member 925: Integral gain inflow ball
926: Integral gain control ball 927: Integral gain ejection ball
928: Output air discharge hole 951: Differential gain body
952: differential gain control dial 953: differential gain shifting member
954: differential gain control member 955: differential gain inlet ball
956: differential gain control ball 957: differential gain ejection ball

Claims (8)

A reference temperature input mechanism for inputting an existing temperature;
An error generation link mechanism unit for converting the error between the reference temperature and the current temperature, which are connected to the reference temperature input mechanism unit, into a flapper displacement;
A nozzle-flapper one-stage amplifier unit connected to the error generation link mechanism unit to generate a change in nozzle back pressure according to a change in flapper displacement generated in the error generation link mechanism unit;
A small amount of air supplied from the outside through an orifice provided inside is passed through a pressure space inside the upper body and then connected to an air supply port of the nozzle-flapper one-stage amplifier bulb by a tube or a hose, The nozzle back pressure regulated by the nozzle-flapper one-stage amplifier bend acts on the normal state with the pressure in the pressure space inside the upper body connected by the tube or hose, as well as supplying the supply air to the nozzle of the amplifier bend. And the pressure of the upper diaphragm forming one side of the pressure space is converted into the force of moving the valve rod to control the displacement of the inner valve rod so that the cross sectional area of the passage through which a large amount of supply air passes is controlled, An air-pressure relay two-stage amplifying unit for generating a control pressure to be applied to the air pressure relay;
The control pressure output from the air pressure relay two-stage amplifier is connected to the air pressure relay two-stage amplifier and controlled by the diaphragm installed on the upper portion of the control valve through a tube or a hose to control the displacement of the control valve inner rod An air pressure control valve for controlling the flow rate of the fluid;
A temperature variable rear end temperature sensing unit connected to the air pressure control valve and having a temperature variable when the flow rate of the fluid is controlled by the air pressure control valve;
A bourdon tube temperature measuring mechanism part connected to the temperature variable rear end temperature sensing part and mechanically measuring the temperature of the changed temperature rear end temperature sensing part and converting the temperature into angular displacement of the bourdon tube;
A link mechanism connected to the bourdon tube temperature measuring mechanism for converting an angular displacement of the bourdon tube to an output temperature on a linear scale and generating a flapper displacement to reduce an error with a reference temperature generated on a linear scale An output temperature indicator unit coupled to the reference temperature input unit via a link;
Wherein the proportional-differential operation unit is connected to the air-pressure relay two-stage amplifier, and the proportional band adjuster is used to adjust the temperature change interval proportional to the flapper operation displacement to adjust the response speed at which the nozzle back pressure changes, Wherein the proportional-integral operation unit increases the relative stability of the control operation by generating a negative feedback flapper displacement in a direction opposite to the flapper error displacement generated by the simple feedback of the temperature error, and the proportional- And a proportional-integral-differential operation mechanism for generating a displacement to increase a response speed and to eliminate a steady-state error.
The method according to claim 1,
The nozzle-flapper single-stage amplifier bend includes a nozzle fixing body, an air supply port provided in the nozzle fixing body and supplied with supply air sent to the air pressure relay two-stage amplifier bore, and supply air supplied through the air supply port A variable proportional band dial rotatably coupled to an upper portion of the nozzle fixing body, a hinge portion coupled to a lower portion of the nozzle fixing body, and a hinge portion rotatably coupled to the hinge portion. An auxiliary link for generating a flapper displacement to which a displacement compensated by the proportional-integral-differential action mechanism is applied, an auxiliary lever provided on one side of the auxiliary link, And a flapper which is formed on one side and rotates about the hinge part like the auxiliary link to be converted into a flapper displacement interlocking with the nozzle The control system comprising: a control system for controlling the air pressure of the air pressure control valve for temperature control.
The method according to claim 1,
The air pressure relay two-stage amplifier bend includes a relay upper body having an internal space as well as supplying air supplied from outside and supplying the supplied supply air to the outside, A relay central body provided between the relay upper body and the relay lower body, and a control unit for reducing the amount of supply air supplied to the relay upper body and reducing the amount of supply air supplied to the relay upper body, An upper diaphragm installed on one surface of the upper body of the relay and operated by a change in nozzle back pressure; and an upper diaphragm installed on one surface of the upper diaphragm, A first nozzle back pressure transfer mechanism for transferring the first nozzle back pressure to the relay main body, A second nozzle back pressure force transmitting mechanism installed on one surface of the lower diaphragm and transmitting a force by a lower diaphragm, and a second nozzle back pressure force transmitting mechanism provided on one surface of the lower diaphragm, A relay valve rod movably coupled to the insertion coupling portion of the variable opening cross sectional area port to adjust the control pressure of the output air, and a relay valve plug inserted into the other surface of the relay lower body, And a resilient spring for generating a proportional displacement, which is provided on the other surface of the relay lower body, for generating a displacement change of the relay valve rod.
The method according to claim 1,
The bourdon tube temperature measuring mechanism includes a liquid tank containing a liquid whose volume changes in proportion to a temperature change, a capillary tube communicating with the liquid tank and containing the liquid, and a capillary tube communicating with the capillary tube, And is fixed by a fixing plate and has one end formed in a free-end state, as well as being spirally wound so as to generate a rotation angle at the free end by a volume which is injected so that the liquid is filled with no bubbles therein and which changes in proportion to the temperature of the injected liquid A first rotatable link that rotates by a rotation angle generated by being coupled to one end of the bourdon tube, and a second rotatable link which is coupled to an end of the first rotatable link and rotates by a first rotatable link A second rotary link that rotates about a hinge by a transmission link that moves in conjunction with an end of the transmission link; And a second rotary link coupled to an end of the second rotary link, the second rotary link being rotated about the hinge and indicating an actual temperature to the temperature gauge board.
5. The method of claim 4,
In the error generating link structure section 20, a guide rotation pivot 201 is coupled to a rear end side of the indicator bed 708 of the Bourdon tube temperature measurement mechanism section 70, The instruction temperature rotation link 202 is rotated in accordance with the rotation of the bed 708 and the center temperature of the instruction temperature rotation link 202 is shifted by the rotation instruction temperature rotation link 202, And an indicator dial (204) coupled to the indicator bed (708) for directing a reference temperature to the temperature instrument panel (709) is integrally coupled to the indicator bed (708) Control system for pneumatic control valve for control.
6. The method of claim 5,
In order to obtain a large displacement of the error generating link with respect to the same temperature error, the length L of the indicated temperature rotating link is formed to be short and the length L of the indicated temperature rotating link is formed long to obtain a small displacement of the error generating link. And a control system for controlling the air pressure of the air pressure control valve for temperature control.
The method according to claim 1,
The proportional-integral-differential action mechanism section includes:
An output of the air pressure relay is fed back to the control pressure of the output air outputted from the air pressure relay, and an output signal of the air pressure relay is inputted to the input gain control unit, A proportional-integral operation part provided with a positive feedback bellows for generating a positive feedback link displacement by a control pressure of the output air;
A differential gain control unit provided at one side of the proportional-integral operation unit and receiving a part of the output air output from the integral gain control unit; and a differential gain control unit connected to the differential gain control unit, And a feedback feedback bell for the differential control sound generating a negative feedback link displacement by the control pressure of the introduced output air so as to prevent an excessive amount of feedback link displacement from being added together with the positive feedback link displacement And a proportional-differential operation unit provided in the control unit.
8. The method of claim 7,
The integral gain control unit of the proportional-integral operation unit includes an integral gain main body, an integral gain inflow hole formed at the side of the integral gain main body and through which the output air sent from the air pressure relay two-stage amplifier unit flows, An integral gain shifting member coupled to the integral gain adjusting dial and reciprocating according to a rotation direction of the integral gain adjusting dial, and an integrating gain adjusting member formed at an end of the integrating gain shifting member, And an integrated gain adjusting member formed inside the integral gain main body, wherein the integrated gain adjusting member is inserted, and an amount of output air passing through the integrated gain adjusting member is adjusted according to the insertion position of the integrated gain adjusting member And an integration gain adjusting hole formed in the lower portion of the integral gain main body, And an output-air bellows formed in the lower part of the integral-gain main body for communicating a part of the output air to the differential gain control unit, And a discharge hole,
The differential gain control section of the proportional-differential operation section includes a differential gain main body, a differential gain inflow hole formed in the side of the differential gain main body and in communication with the communication pipe so that some output air sent from the integral gain control section flows, A differential gain adjusting dial rotatably formed on an upper portion of the differential gain adjusting dial, a differential gain shifting member coupled to the differential gain adjusting dial and reciprocating according to a rotation direction of the differential gain adjusting dial, Wherein the differential gain adjusting member is formed inside the differential gain main body and inserts the differential gain adjusting member into the differential gain adjusting member so that the output air flows in accordance with the insertion position of the differential gain adjusting member. A differential gain control means for controlling the amount of passing through the differential gain main body, Control system of the pressure control valve for temperature control of the passes through the control 02 controls the air pressure adjusting output characterized by a differential gain ejecting balls adapted to be supplied to the feedback bellows negative differential control.
KR1020140029489A 2014-03-13 2014-03-13 control system for pneumatic control vavle of temperature control KR101544192B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102068704B1 (en) 2019-07-09 2020-01-21 김준현 Proportional pneumatic control system and method for processing of chemical mechanical polishing
CN116251432A (en) * 2023-02-15 2023-06-13 北京中投润天环保科技有限公司 Waste gas treatment system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5439026A (en) 1992-12-11 1995-08-08 Tokyo Electron Limited Processing apparatus and flow control arrangement therefor
US6363958B1 (en) 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
KR101291236B1 (en) 2003-01-17 2013-08-01 어플라이드 머티어리얼스, 인코포레이티드 A pressure insensitive mass flow controller, a process fluid control assembly, a fluid control panel, a combination manual/pneumatic valve for a fluid control assembly, and a method of preventing a mass flow controller from participating in crosstalk in an array of mass controllers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5439026A (en) 1992-12-11 1995-08-08 Tokyo Electron Limited Processing apparatus and flow control arrangement therefor
US6363958B1 (en) 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
KR101291236B1 (en) 2003-01-17 2013-08-01 어플라이드 머티어리얼스, 인코포레이티드 A pressure insensitive mass flow controller, a process fluid control assembly, a fluid control panel, a combination manual/pneumatic valve for a fluid control assembly, and a method of preventing a mass flow controller from participating in crosstalk in an array of mass controllers

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102068704B1 (en) 2019-07-09 2020-01-21 김준현 Proportional pneumatic control system and method for processing of chemical mechanical polishing
CN116251432A (en) * 2023-02-15 2023-06-13 北京中投润天环保科技有限公司 Waste gas treatment system
CN116251432B (en) * 2023-02-15 2024-04-26 北京中投润天环保科技有限公司 Waste gas treatment system

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