KR101493331B1 - Angle positioning device - Google Patents

Angle positioning device Download PDF

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Publication number
KR101493331B1
KR101493331B1 KR20140137328A KR20140137328A KR101493331B1 KR 101493331 B1 KR101493331 B1 KR 101493331B1 KR 20140137328 A KR20140137328 A KR 20140137328A KR 20140137328 A KR20140137328 A KR 20140137328A KR 101493331 B1 KR101493331 B1 KR 101493331B1
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KR
South Korea
Prior art keywords
slider
arm
rotation
ball screw
guide groove
Prior art date
Application number
KR20140137328A
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Korean (ko)
Inventor
신정욱
Original Assignee
주식회사 재원
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Priority to KR20140137328A priority Critical patent/KR101493331B1/en
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Publication of KR101493331B1 publication Critical patent/KR101493331B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel

Abstract

A rotation displacement positioning device of the present invention comprises: a table installed in order to be rotatable; an arm fixated to one side of the table; a slider united in order to be moveable along a turning radius direction of the arm and the table; and a driver to linearly move the slider in order to translate the slider and rotate the table by pushing the arm. By using the rotation displacement positioning device of the present invention, a structure of controlling the rotational displacement of the table as the nanometer unit is minutely improved such that the device can be more structurally minimized and lightened, and the response rate and precision be improved.

Description

ANGLE POSITIONING DEVICE [0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotational displacement positioning apparatus, and more particularly, to a rotational displacement position determining apparatus used in a flat panel display (FPD) and semiconductor processing equipment.

In general, the stage used in flat panel display (FPD) and semiconductor processing equipment is a structure that linearly or rotationally moves a short distance in order to precisely determine the position and attitude of a semiconductor device for manufacturing or inspection of semiconductor devices It is widely used.

1 to 3 are views 2, 3, and 5 of JP2002-341076.

1 to 3, a conventional rotary position determining apparatus includes a bed 1, a cross roller bearing 15, a table 2, a plate-like arm 4, and a drive device 3 .

The driving device 3 includes a motor 8 and a screw shaft 11, a nut 12, a first slider 23, a first linear guide unit 6, a moving base 5, and a connecting device 35 ).

The connecting device 35 is composed of a bearing 30, a rotating shaft 13, and a second linear guide unit 7. The second linear guide unit (7) is composed of a second track rail (22) and a second slider (24).

The rotational displacement position determining apparatus according to the prior art operates as follows.

When the screw shaft 11 is rotationally driven by the motor 8, the movable table 5 is guided by the first operation guide unit 6 and linearly moved. The plate arm 4 moves together with the moving table 5 to rotate the table 2 by a small angle. At this time, due to the rotation of the table 2, a longitudinal directional deviation occurs along the second track rail 22. The deviation of the second slider 24 on the second track rail 22, The table 2 is smoothly rotated.

In recent technological trends, FPD and semiconductor processing equipments are becoming smaller, lighter, and more responsive.

However, since the plate-shaped arm 4 is moved along the first orbital rail 21 and moved along the second orbit rail 22 according to the conventional art, 23 and the second slider 24, there is a limitation in meeting the trend of downsizing and weight saving.

The table 2 and the plate arm 4 move along the rotation orbit while the second track rail 22 cancels the deviation in the longitudinal direction. Since each of the two track rails 22 is a linear movement path, the track deviation can not be completely canceled. In addition, in the process of rotating the table 2 by the driving force of the motor 8, too many component parts are involved, so that the errors between the parts accumulate, resulting in a large error. Therefore, there is a limit in improving the rotational responsiveness of the table 2. In particular, there is a problem that there is a limit in finely adjusting the rotational displacement of the table 2 in units of nanometers.

Japanese Unexamined Patent Publication No. 2002-341076 (titled invention; angle adjustment table device) is a related art.

SUMMARY OF THE INVENTION An object of the present invention is to provide a rotational displacement positioning device capable of satisfying miniaturization, weight reduction, and response improvement by improving a structure for finely adjusting rotational displacement of a table.

According to an aspect of the present invention, there is provided a rotary displacement positioning apparatus including: a table rotatably installed; An arm fixed to one side of the table; A slider coupled to the arm and the table so as to be movable along the rotation radial direction; And a driving unit that linearly moves the slider so that the table can be rotated by pushing the arm while translating the slider.

The arm may protrude from the outer circumferential surface of the table in the radial direction of rotation of the table, and may have a guide groove in which the slider is fitted and relatively movable in the radial direction of rotation of the table.

The guide groove of the arm may have a shape in which a free end of the arm is open in the radial direction of the table or may be slit-shaped along the rotation radius direction of the table.

The slider may include a pin inserted into the guide groove of the arm, and a head which is in surface contact with one surface of the arm.

The head may be configured such that the driving unit is coupled to a lower end of a pin of the slider and the bottom surface of the head is in surface contact with an upper surface of the arm at an upper end of the pin of the slider.

The linear movement path of the slider may be parallel to a reference line passing through the center of the table.

The driving unit may include a ball screw rotated around an axis of the slider in a linear direction, and a ball nut inserted in the ball screw and linearly moved by a spiral engagement with the ball screw and engaged with the slider.

The ball nut may be installed below the slider.

The driving unit may further include an elastic member for pressing the ball screw to the ball nut in one direction of rotation of the ball screw.

The present invention is a structure in which a slider and an arm are coupled to each other so that the slider and the guide groove of the arm can be moved relative to each other along the rotation radial direction of the table and the slider is linearly moved in only one direction along the rotation axis direction of the ball screw Therefore, the coupling structure between the slider and the arm is very simple, which is advantageous in terms of miniaturization and weight reduction, and the response is excellent.

In addition, since the slider and the arm are in direct surface contact with each other, the present invention is not only superior in responsiveness but also prevented from shaking the table.

In addition, according to the present invention, since the thread of the ball screw can be pressed against the thread of the ball nut by the elastic force, the micro-tolerance of the spiral engagement of the ball screw and the ball nut can be canceled.

1 to 3 are drawings attached to Japanese Patent Laid-Open No. 2002-341076.
4 is a perspective view of an assembled state of a rotational displacement positioning device according to an embodiment of the present invention.
5 is an exploded perspective view of a rotational displacement positioning device according to an embodiment of the present invention;
6 is a front sectional view showing a part of a rotational displacement positioning device according to an embodiment of the present invention.
7 and 8 are plan views of a rotational displacement positioning device according to an embodiment of the present invention.
9 is a perspective view of an arm of a rotational displacement positioning device according to another embodiment of the present invention.
10 is a schematic plan view showing a rotational displacement adjusting process of a rotational displacement positioning device according to another embodiment of the present invention;

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, well-known functions or constructions are not described in order to avoid unnecessarily obscuring the subject matter of the present invention.

4 to 8, the apparatus for determining rotational displacement according to an embodiment of the present invention includes a table 110 installed to be rotatable, an arm 120 fixed to one side of the table 110, A slider 130 coupled to the arm 120 so as to be movable along a rotation radius direction of the table 110 and a slider 130 slidably coupled to the table 120 by sliding the arm 120, And a driving unit 150 for linearly moving the slider 130 so that the slider 130 can be rotated.

The table 110 may be installed on the base plate 200 so as to be rotatable around the axis of the axis of rotation. The table 110 may be of any shape as long as it is rotated, for example, as shown in FIG. Meanwhile, the table 110 may be integrally rotated with the cover plate 210 covering the table 110.

The arm 120 may be part of a power transmission line for transmitting the driving force of the driving unit 150 to the table 110 for rotating the table 110. The arm 120 is basically configured such that one side thereof is fixed to one side of the table 110 so as to rotate integrally with the table 110. The arm 120 may be integrally formed with the table 110, (110), and then joined to the table (110) by welding or bolting. For example, a fastening hole 120a for fastening a bolt with the table 110 may be formed at an end of the table 110 of the arm 120. [

In particular, the arm 120 may be a plate protruding from the outer circumferential surface of the table 110 in the radial direction of rotation of the table 110. That is, the arm 120 is formed to be long in the rotation radius direction of the table 110 like a flat rectangular bar, and one end of the arm 120 can be bound to the table 110. The structure in which the arm 120 protrudes sideways from the table 110 without protruding in the direction of the axis of rotation is advantageous in that the overall thickness of the rotary displacement positioning device of the present invention can be minimized, can do.

A guide groove 122 may be formed at the other end of the arm 120 in the rotational radius direction of the table 110 so that the slider 130 is inserted in the rotational axis direction. Particularly, the guide groove 122 of the arm 120 is formed at a free end side of the arm 120 so that the relative movement between the slider 130 and the arm 120 can be performed along the rotation radius direction of the table 110 It is possible to adopt a structure in which the end is opened. That is, the free end of the arm 120 may be formed in a substantially horseshoe shape. The slider 130 may be completely inserted into the guide groove 122 of the arm 120 according to the relative rotational displacement of the table 110 and the slider 130 may be inserted into the guide groove 122 of the arm 120, It may be partially inserted into the guide groove 122 and spread. Therefore, since the arm 120 and the slider 130 are coupled to each other in a fitting manner, the coupling structure is very simple and the coupling method is also very easy. Also, since the slider 130 is fitted in the guide groove 122 of the arm 120, the table 110 can be rotated clockwise / counterclockwise at every reciprocation of the slider 130. Since the length of the guide groove 122 of the arm 120 can be set to be smaller than the diameter of the pin 132 of the slider 130, it is advantageous in that the length of the arm 120 can be minimized .

The slider 130 basically includes a pin 132 that is inserted into the guide groove 122 of the arm 120 in the direction of the rotational axis. The pin 132 of the slider 130 may have various shapes, for example, a cylindrical shape having a predetermined diameter as shown in FIG. The pin 132 of the slider 130 may be bound to the ball nut 156 of the driving unit 150 so that the slider 130 can be linearly moved by the driving unit 150. The ball nut 156 of the driving unit 150 may be coupled to the lower side of the pin 132 of the slider 130 along the rotation axis direction of the table 110. [ For example, the slider 130 is stacked on the ball nut 156 of the driving unit 150 along the direction of the rotation axis of the table 110, and the slider 130 is mounted on the ball nut 156 of the driving unit 150, And a fastening hole 130a can be formed so as to be coupled by a bolt.

The slider 130 may further include a head 134 that is in surface contact with one of the upper and lower sides of the arm 120 along the rotation axis direction of the table 110. For example, the head 134 of the slider 130 may be formed as a disk having a diameter larger than that of the pin 132 of the slider 130, which is concentric with the pin 132 of the slider 130. The head 134 of the slider 130 may be formed at the upper end of the pin 132 of the slider 130 so that the bottom surface of the head 134 of the slider 130 contacts the upper surface of the arm 120 And is in surface contact with the upper surface. Since the head 134 of the slider 130 is directly in surface contact with the arm 120 without passing through a bearing or the like, the organic coupling of each component in the power transmission process between the slider 130 and the arm 120 Can be minimized, and the rotational displacement of the table 110 can be adjusted precisely in units of nanometers. Since the head 134 of the slider 130 and the arm 120 are in direct surface contact with each other, the rotation of the table 110 as well as the rotational radius of the table 110, The arm 120 and the table 110 can be prevented from shaking in the direction of the rotation axis of the table 110. [ Also, even if the arm 120 is very thin, the arm 120 can be supported by the slider 130, so that the arm 120 can be prevented from being warped.

The slider 130 and the arm 120 may be formed by heat treatment or the like so as to prevent frictional resistance, abrasion, and corrosion caused by surface contact between the head 134 of the slider 130 and the arm 120 Can be surface treated with a hard coating that enhances the mechanical properties of the film.

The driving unit 150 may be any mechanism as long as it can linearly move the slider precisely in units of nanometers. The driving unit 150 is a mechanism for switching the rotational force of the motor 152 into a linear reciprocating motion and transferring the rotational force to the motor 152 as is well known in the linear motor 152 and the like. A ball screw 154 rotatable about the linear movement direction of the slider 130 by a rotational driving force of the ball screw 154 and a ball screw 154 inserted in the outside of the ball screw 154, And a ball nut 156 linearly moved along the ball screw 154 and engaged with the pin 132 of the slider 130 by a spiral engagement with the slider 130.

Both ends of the ball screw 154 in the longitudinal direction may be installed to be rotatable through bearings or the like on the bracket 220 supporting the driving unit 150.

The ball screw 154 may be disposed in parallel with the table 110 in the radial direction of rotation of the table 110. The rotation axis C2 of the ball screw 154 is parallel to the reference line passing through the center of the table 110 so that the rotation axis C2 of the ball screw 154 and the rotation axis C2 of the table 110 The distance L between the reference lines C1 is constant. Since the linear movement path C3 of the slider 130 is aligned with the longitudinal direction of the ball screw 154, the rotation axis C2 of the ball screw 154 and the reference line C1 of the table 110 are parallel to each other, . At this time, the rotation axis C2 of the ball screw 154 and the linear movement path C3 of the slider 130 may be aligned or spaced a certain distance in the parallel direction as shown in FIG.

The ball nut 156 is formed in a square block shape and is installed on the lower side of the pin 132 of the slider 130. The ball nut 154 is inserted into the through hole through which the ball screw 154 passes, A thread may be formed so as to be engaged. The ball nut 156 may have a fastening hole 156a for fastening the bolt with the slider 130.

The driving unit 150 may further include an elastic member for pressing the ball screw 154 against the ball nut 156 in one direction of rotation of the ball screw 154. The elastic member may be any mechanism capable of exerting a pressing force by an elastic force, more preferably a coil spring 160. The spring 160 is fitted to the outside of the ball screw 154. One end of the spring 160 in the longitudinal direction may be bound to the ball screw 154 and the other end thereof may be bound to the ball nut 156. Therefore, the spring 160 pushes the ball screw 154 to the ball nut 156 by the elastic force in the clockwise or counterclockwise direction, When the thread of the ball nut 156 contacts the ball nut 154, the thread of the ball screw 154 is urged in the direction of the elastic force of the spring 160 in the clockwise direction and the counterclockwise direction, As shown in Fig. Therefore, since the shaking due to the fine tolerance of the helical coupling between the ball screw 154 and the ball nut 156 can be prevented by the spring 160, the precision in adjusting the rotational displacement of the table 110 is improved .

Hereinafter, the operation of the rotational displacement position determining apparatus according to an embodiment of the present invention will be described.

The reference position may be a state in which the arm 120 is perpendicular to the linear movement path C3 of the slider 130 as shown in FIG.

When the motor 152 is driven in the reference position state, the rotational displacement of the table 110 can be adjusted as shown in FIG.

That is, the ball screw 154 is rotated in a clockwise or counterclockwise direction, and the slider 130 is rotated together with the ball nut 156 in synchronism with the rotation of the ball screw 154 And is linearly moved along the linear movement path C3.

The arm 120 is pushed in the direction of linear movement of the slider 130 while the slider 130 is linearly moved so that the arm 120 moves along the slider 130 together with the table 110. [ As shown in Fig. At this time, the movement center P1 of the slider 130 and the movement center P2 of the guide groove 122 of the arm 120 may be aligned at the reference position. When the table 110 is rotated at a predetermined angle from the reference position, the movement center P2 of the guide groove 122 of the arm 120 relative to the movement center P1 of the slider 130 moves toward the table 110 Since the slider 130 can be relatively moved toward the open end of the guide groove 122 of the arm 120 in the guide groove 122 of the arm 120, Even if the movement path C4 of the movement center P2 of the guide groove 122 of the slider 120 is different from the linear movement path C3 of the movement center P1 of the slider 130, The slider 130 can be smoothly rotated and linearly moved without interfering with each other in the course. Therefore, the rotational displacement of the table 110 can be smoothly and precisely controlled. At this time, the range of adjustment of the rotational displacement of the table 110 does not cover the entire range of 360 degrees but is within a range of, for example, +/- 10 degrees for the purpose of precise adjustment. Therefore, even if the table 110 is rotated from the reference position by a predetermined angle The slider 130 can be partially extended to the guide groove 122 of the arm 120 without being completely detached from the guide groove 122 of the arm 120. [

9 and 10, in the rotational displacement position determining apparatus according to another embodiment of the present invention, the guide grooves 522 of the arm 520 are positioned at both ends of the table along the radial direction of rotation It may be a slit shape in which the length of the guide groove 522 of the arm 520 is larger than the diameter of the pin of the slider 30 along the rotation radius direction of the table. Accordingly, when the slider 30 linearly moves along the linear movement path C3 and pushes the arm 520, the arm 520 makes a rotation C4 of a certain radius based on the center P0 of the table Wherein the slider 30 can be moved relative to the arm 520 along the radial direction of rotation of the table. Therefore, even if the slider 30 is linearly moved and the arm 520 is rotated, the slider 30 and the arm 520 can smoothly move without interfering with each other's course.

The rotary displacement position determining device according to the present invention constituted, operated and operated as described above is integrally combined with a linear displacement position determining device for controlling the linear displacement of the table, and the entirety thereof is connected to the linear displacement positioning device And can be linearly moved along any one direction such as the X axis or the Y axis. At this time, the linear displacement position determining device may be constituted by the same driving mechanism as the driving part of the rotational displacement positioning device of the present invention described above, and may be constructed as a laminated structure below the rotational displacement positioning device of the present invention.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments. It should also be understood that many modifications and variations are possible without departing from the scope of the invention, as would be understood by one of ordinary skill in the art.

110; Table 120; Arm
122; Guide grooves 130; Slider
132; Pin 134; head
150; A driving unit 152; motor
154; Ball screw 156; Ball nut
160; spring

Claims (10)

A rotatably installed table;
An arm fixed to one side of the table;
A slider coupled to the arm and the table so as to be movable along the rotation radial direction;
And a driving unit for linearly moving the slider so that the table can be rotated by pushing the arm by translating the slider,
Wherein the arm is protruded from the outer circumferential surface of the table in a radial direction of rotation of the table and has a guide groove in which the slider is fitted and which is relatively movable in a radial direction of rotation of the table,
Wherein the slider includes a pin that is fitted in the guide groove of the arm and a head that is in surface contact with one surface of the arm. delete The method according to claim 1,
Wherein the guide groove of the arm has a shape in which a free end side end of the arm is open with respect to a rotation radius direction of the table. The method according to claim 1,
Wherein the guide groove of the arm is in a slit shape extending along the rotation radial direction of the table. delete The method according to claim 1,
Wherein the head is configured such that the driving unit is coupled to the lower end of the pin of the slider and the bottom surface of the head is in surface contact with the upper surface of the arm at the upper end of the pin of the slider. The method according to any one of claims 1 to 7,
Wherein the linear movement path of the slider is parallel to a reference line passing through the center of the table. The method according to any one of claims 1 to 7,
Wherein the driving unit includes a ball screw rotated around an axis of the slider in a linear direction and a ball nut engaged with the ball screw and linearly moved by a spiral engagement with the ball screw, Device. The method of claim 8,
Wherein the ball nut is disposed on the lower side of the slider. The method of claim 8,
Wherein the driving unit further comprises an elastic member for pressing the ball screw to the ball nut in one direction of rotation of the ball screw.
KR20140137328A 2014-10-13 2014-10-13 Angle positioning device KR101493331B1 (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101608625B1 (en) * 2015-07-30 2016-04-11 주식회사 재원 Positioning apparatus
KR101901824B1 (en) * 2018-04-20 2018-09-27 삼승테크(주) Apparatus for Precision Controlling Rotating Angle of Test Stage
KR102156245B1 (en) * 2019-08-21 2020-09-15 삼승테크(주) Rotating Stage for Inspection
KR20220031177A (en) * 2020-09-04 2022-03-11 삼승테크(주) Apparatus for Precision Controlling Rotating Angle of Test Stage
CN114566564A (en) * 2022-02-10 2022-05-31 浙江晶盛机电股份有限公司 Solar cell high-speed tile stacking and arranging device and arranging mechanism thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09199519A (en) * 1996-01-17 1997-07-31 Hitachi Ltd Rotary positioning mechanism and semiconductor manufacturing method and apparatus employing the mechanism
JPH10303224A (en) * 1997-04-30 1998-11-13 Hitachi Ltd Rotary positioning mechanism and semiconductor manufacturing device using it
JP2004347099A (en) * 2003-05-26 2004-12-09 Kss Kk Backlash eliminated nut
KR101184424B1 (en) * 2011-10-11 2012-09-20 주식회사 재원 Goniostage

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09199519A (en) * 1996-01-17 1997-07-31 Hitachi Ltd Rotary positioning mechanism and semiconductor manufacturing method and apparatus employing the mechanism
JPH10303224A (en) * 1997-04-30 1998-11-13 Hitachi Ltd Rotary positioning mechanism and semiconductor manufacturing device using it
JP2004347099A (en) * 2003-05-26 2004-12-09 Kss Kk Backlash eliminated nut
KR101184424B1 (en) * 2011-10-11 2012-09-20 주식회사 재원 Goniostage

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101608625B1 (en) * 2015-07-30 2016-04-11 주식회사 재원 Positioning apparatus
WO2017018592A1 (en) * 2015-07-30 2017-02-02 주식회사 재원 Hybrid alignment
KR101901824B1 (en) * 2018-04-20 2018-09-27 삼승테크(주) Apparatus for Precision Controlling Rotating Angle of Test Stage
KR102156245B1 (en) * 2019-08-21 2020-09-15 삼승테크(주) Rotating Stage for Inspection
KR20220031177A (en) * 2020-09-04 2022-03-11 삼승테크(주) Apparatus for Precision Controlling Rotating Angle of Test Stage
KR102447890B1 (en) * 2020-09-04 2022-09-27 삼승테크(주) Apparatus for Precision Controlling Rotating Angle of Test Stage
CN114566564A (en) * 2022-02-10 2022-05-31 浙江晶盛机电股份有限公司 Solar cell high-speed tile stacking and arranging device and arranging mechanism thereof
CN114566564B (en) * 2022-02-10 2023-09-05 浙江晶盛机电股份有限公司 Solar cell piece high-speed tile stacking regularization device and solar cell piece high-speed tile stacking regularization mechanism

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