KR101203890B1 - Transferring system - Google Patents

Abstract

A transport system is disclosed. The conveying system of the present invention includes a conveying frame provided along a conveying line of the object to be conveyed; A plurality of pallets mounted on the transfer object and transported along the transfer frame together with the transfer object on the transfer frame; And an individual control unit provided in the transport frame and the pallet to individually control the traveling and stopping operations for the pallet on the transport frame. According to the present invention, a simple and simple structure can be applied under various working environments in which continuous conveyance of the object to be conveyed is required, so that the object can be easily and efficiently conveyed. The stop operation can be controlled more simply and easily than in the prior art, thereby preventing damage due to collision between the objects to be conveyed.

Description

Transport system {TRANSFERRING SYSTEM}

The present invention relates to a conveying system, and more particularly, to be conveyed in a variety of working environments that have a simple and simple structure, but requires continuous conveyance of the object to be conveyed easily and efficiently In particular, the present invention relates to a transport system that can easily and easily control the traveling and stopping operation of the object to be transported, thereby preventing damage due to collision between the objects to be conveyed.

A conveying system is a series of systems for conveying a conveyed object to a desired place. Here, the object to be transported includes a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for semiconductors, a tray for receiving and supporting a substrate or a wafer. In addition to being able to be a cassette or a variety of logistic products including a general box (box), for the convenience of the following description, 11th generation LCD substrate for the length and width of the vertical / 3 meters (m) (glass) will be described as a transfer object.

These LCD substrates are largely released as products through TFT process, Cell process, and Module process.

The TFT process is very similar to the semiconductor manufacturing process, in which thin film transistors are arranged on a glass substrate by repeating deposition, photolithography, and etching.

The Cell process is a process of forming an alignment film so that a liquid crystal can be aligned with the TFT lower plate manufactured by the TFT process, and the upper plate which is a color filter, and sealing printing the upper and lower plates together.

The module process attaches a polarizing plate to the completed LCD panel, mounts an integrated circuit (Drive-IC), assembles it with a PCB (Printed Circuit Board), and then back-lights the unit. Point out a series of steps to assemble the tool.

A transfer system for receiving the LCD substrate from the previous process and transferring the substrate to the subsequent process is provided between the lines connecting the processes so that these processes or the processes in the processes can be sequentially performed.

As an embodiment of a transfer system for transferring a substrate, a transfer system using a magnetic conveyor that can not only continuously transfer a substrate but also control driving and stopping of the substrate for each section has been disclosed. .

Magnetic conveyors can be used to transfer substrates continuously, and can also be used to transfer fragile workpieces, such as LCD substrates, because the transfer of substrates can be stopped when the preceding substrate is stopped for work. It is advantageous in that it can be applied, especially in a clean room environment.

However, the conveying system with this type of magnetic conveyor requires higher precision than the general conveyor, and the larger the substrate, the larger the number of roller shafts and rollers. Not only is it complicated, but also increases the manufacturing cost, and there is a disadvantage in that a large number of rollers directly contact the substrate, causing a potential risk of damage to the substrate.

As another embodiment of the transfer system for transferring the substrate, the substrate is fixed on the pallet to avoid direct contact between the substrate and the drive roller, and then the transfer system is implemented by continuous conveying using the pallet, the drive roller being the friction roller. A transfer system using a configured friction conveyor has been disclosed.

Friction conveyor is a roller coupled to the roller shaft can be freely rotated relative to the roller shaft, or optionally the roller can be driven to rotate with the roller shaft, if the roller holding the substrate is not loaded and supported on the roller Is rotated freely with respect to the roller shaft, but when the pallet holding the substrate contacts the roller and the contact friction occurs, that is, when the contact friction between the roller and the roller shaft is greater than the contact friction between the pallet and the roller, the roller Has a structure that rotates accordingly. Such friction conveyors are now known to be used when continuous conveyance of conveyed goods is required in an automated line.

However, in order to individually control the traveling and stopping operations for the object to be conveyed, such as an LCD substrate, by using a conveying system having a friction conveyor having such a structure, expensive communication equipment, which is not only complicated but also difficult to control, is additionally added. The disadvantage is that it must be used, which is practically undesirable for application to automation lines under various working environments.

The object of the present invention is to apply a variety of working environment that has a simple and simple structure, but continuous conveyance of the object to be conveyed can be easily and efficiently conveyed, particularly traveling to the object And it is possible to control the stop operation more simply and easily than conventional to provide a transport system that can prevent damage due to collision between the object to be conveyed.

The object is, according to the present invention, a transport frame provided along the transport line of the object to be conveyed; A plurality of pallets on which the object to be conveyed is mounted and transported along the conveying frame together with the object to be conveyed on the conveying frame; And a separate control unit provided on the conveying frame and the pallet to individually control the traveling and stopping operations for the pallet on the conveying frame.

The individual control unit may include: a traveling unit provided on the transfer frame and the pallet to drive the pallet on the transfer frame; A sensing unit provided at one side of the pallet to sense a distance from the previous pallet; And a unit controller configured to turn on / off an operation of the driving unit based on a detection signal of the detector.

The detection unit, a front sensor provided on one side of the front of the pallet for detecting the distance to the pallet in advance when the pallet is running (+ X); And a rear sensor provided on one side of the rear side of the pallet to sense a distance to the previous pallet when the pallet is reversed (-X).

The front and rear sensors may be laser sensors, and the pallet further includes a plurality of reflecting plates provided at positions corresponding to the front and rear sensors provided on adjacent pallets to reflect lasers from the front and rear sensors. Can be.

The individual control unit may further include a speed control sensor provided at one side of the pallet and transmitting a speed control signal to the unit control unit so that the unit control unit accelerates or decelerates the speed of the pallet through the traveling unit. Can be.

The individual control unit is provided on one side of the pallet, the direction control signal to the unit control unit so that the unit control unit can select the running direction of the pallet in the forward direction (+ X) or reverse direction (-X) through the traveling unit It may further include a direction sensor for transmitting.

The traveling unit may include a power supply unit provided at the transfer frame and the pallet to supply power for driving the pallet; And a driving unit configured to drive the pallet on the transport frame based on the power supplied by the power supply unit.

The power supply unit may be a non-contact power supply unit for supplying power in a non-contact manner.

The non-contact power supply unit, the induction rail is provided along the transfer line in the upper portion of the transfer frame; And a pickup unit provided below the pallet so as to be adjacent to the induction rail and supplying power to the driving part by receiving a constant current in a non-contact state by an electromagnetic induction law.

The guide rail may include a pair of rail blocks spaced apart from each other and arranged side by side, and the pickup unit may have an uppercase E letter having an electromotive force generating protrusion disposed between and outside the pair of rail blocks, respectively. It may have a shape.

The driving unit may be a magnetic linear driving unit that linearly drives by electromagnetic force.

The magnetic linear running unit, the stator provided on the upper portion of the transfer frame; And a mover provided under the pallet to selectively drive power from the power supply unit to drive the pallet, and to move the pallet with electromagnetic force by interaction with the stator.

The stators may be provided by a plurality of permanent bar magnets that are separated from each other but arranged in a line with each other, and the mover may be provided by an electromagnet.

The plurality of permanent bar magnets may be arranged in a row with a constant inclination at the top of the transfer frame.

The magnetic linear driving unit may include: a plurality of free-rotating rollers which are in rolling contact with a lower portion of the transfer frame and rotate along the pallet when the pallet is driven; And a roller connecting portion rotatably connecting the free-rotating roller with respect to the pallet while maintaining a constant distance between the stator and the mover.

In order to maintain the level of the pallet being transferred, horizontal rollers may be provided at four corners of the pallet, and a plurality of vertical rollers may be provided at both sides.

The object to be transferred may be a liquid crystal display (LCD) substrate.

A plurality of substrate supporting pins for supporting the LCD substrate may be further provided on an upper portion of the pallet, and an elastic buffer cap may be further provided on an upper end of the plurality of substrate supporting pins.

According to the present invention, a simple and simple structure can be applied under various working environments in which continuous conveyance of the object to be conveyed is required, so that the object to be conveyed can be easily and efficiently conveyed. The stop operation can be controlled more simply and easily than in the prior art, thereby preventing damage due to collision between the objects to be conveyed.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings which illustrate preferred embodiments of the present invention and the contents described in the accompanying drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

Prior to the description of the drawings, the object to be described below is a substrate including a liquid crystal display (LCD), a plasma display panel (PDP) and organic light emitting diodes (OLED), a wafer for a semiconductor, a substrate, and the like. In addition, it can be a tray or a cassette for accommodating and supporting a wafer, as well as various logistic products including a general box. However, for convenience of description, the following example will be described as a substrate to be transported.

1 is a configuration diagram to which a transport system according to an embodiment of the present invention is applied.

As shown in this figure, the transfer system of this embodiment can be applied to the structure as shown in FIG. 1 as an embodiment. That is, when the substrate is supplied at position (A) and mounted on the pallet 130 on the transfer frame 110, the pallet 130 moves along the first transfer line in the positive + X direction on the transfer frame 110 ( B) Transfer the substrate to the position.

When the pallet 130 on which the substrate is mounted reaches the position (B), the substrate is taken out by a robot or the like at the position (B). After the substrate is taken out, the pallet 130 is moved down in the -Z direction by the first lifter 101 and then moved in the reverse -X direction along the second transfer line to return to the position (A). .

After returning to the position (A), it is up (up) by the second lifter 102 in the + Z direction, and then receives a new substrate and performs a series of operations for transferring the substrate. Such a transfer system can be applied primarily under working environments where continuous conveyance to the substrate is required.

On the other hand, when the previous pallet 130 on which the substrate is mounted due to an abnormal factor or a separate working environment factor in the process of transferring the substrate continuously, the following pallet 130 should also stop. Otherwise, the subsequent pallet 130 may hit the previous pallet 130 and damage the pallet 130 or the substrate mounted thereon.

To this end, in the prior art, a transfer system using a magnetic conveyor or a friction conveyor has been proposed, but in view of the fact that it is difficult to apply in reality, as described above, in the present embodiment, It has a simple and simple structure and is applied under various working environments requiring continuous conveyance to the substrate, so that the substrate can be easily and efficiently transferred, and in particular, the driving and stopping operations of the substrate can be easily and easily controlled. Therefore, it is proposed a transfer system that can prevent damage due to collision between pallets or substrates.

2 is a perspective view of a conveying system according to an embodiment of the present invention, FIG. 3 is an enlarged perspective view of the pallet shown in FIG. 2, FIG. 4 is an enlarged view of main parts of FIG. 2, and FIG. 5 is V- of FIG. 2. Schematic cross section along line V, and FIG. 6 is a plan view of a pallet for explaining the operation of the front and rear sensors.

As shown in these figures, the transfer system of this embodiment includes a transfer frame 110 provided along a transfer line of the substrate (see FIG. 1), a substrate mounted thereon, and a substrate on the transfer frame 110. A plurality of pallets 130a to 130c conveyed along the conveying frame 110 together with the conveying frame 110 and the pallets 130a to 130c are provided for traveling on the pallets 130a to 130c on the conveying frame 110. And an individual control unit 140 for individually controlling the stop operation.

The conveying frame 110, as shown in Figure 2, forms a conveying line for conveying the pallet (130a ~ 130c). As shown in FIG. 1, the transfer frame 110 may form a first transfer line spaced upwardly with respect to the ground and a second transfer line positioned below the first transfer line.

In addition, the conveying line by the conveying frame 110 may be in a form circulating as a structure such as Hangul 'ㅁ' apart from the simple straight form shown in FIG. Regardless of the structure, shape, or size, the transfer frame 110 is sufficient to form a transfer line for transferring the pallets 130a to 130c or the pallets 130a to 130c on which the substrate is mounted. Do.

As shown in FIG. 3, the pallets 130a to 130c are provided on the transfer frame 110 to be transferred along the transfer frame 110. Since the transfer system of this embodiment transfers a board | substrate as an Example, a board | substrate is mounted in the upper part of pallet 130a-130c.

Since the substrate is made of glass, it is very sensitive to scratches. Therefore, a plurality of substrate supporting pins 131 supporting the substrate are further provided on the pallets 130a to 130c. An elastic buffer cap 132 is provided at the upper end of the substrate supporting pins 131 to prevent scratches on the substrate while the substrate mounted on the pallets 130a to 130c is separated from the pallets 130a to 130c during transportation. Stop being.

The pallets 130a to 130c have a rectangular structure in a plane projection. Each of the pallets 130a to 130c has one horizontal roller 133 and four vertical rollers 134 on both sides thereof. It is prepared. The horizontal rollers 133 and the vertical rollers 134 are both in contact with both inner and lower surfaces of the transfer frame 110 to serve to help the rolling movement of the pallet (130a ~ 130c).

In this case, both the horizontal roller 133 and the vertical roller 134 of the present embodiment are applied as non-powered free-rotating rollers. That is, as the operation in detail, the pallets (130a ~ 130c) in this embodiment is moved (transfer, driven) by the electromagnetic force according to the non-contact power supply, so there is virtually no horizontal roller 133 and vertical rollers 134 If not, there is no problem in the movement of the pallets 130a to 130c.

However, when the horizontal rollers 133 and the vertical rollers 134 are provided as in the present embodiment, there is an advantage of maintaining the horizontality of the pallets 130a to 130c being transferred.

On the other hand, the individual control unit 140 is provided in the conveyance frame 110 and the pallets 130a to 130c to travel the pallets 130a to 130c in the forward direction (+ X) or in the reverse direction (-X) on the transport frame 110. Traveling unit 150 to be provided on one side of the pallet (130a ~ 130c), the sensing unit (181, 182) for detecting the distance between the previous pallet (130a ~ 130c), and based on the detection signal of the detection unit (181, 182) A unit control unit (not shown) for controlling the operation of the operation 150 (on / off) is provided.

Prior to the description of the traveling unit 150, the sensing units 181 and 182 will be described first. The sensing units 181 and 182 according to the present exemplary embodiment may be provided at one front side of the pallets 130a to 130c to provide the pallets 130a to 130c. The front sensor 181 detects the distance from the front pallets 130a to 130c when forward driving (+ X), and is provided on one side of the rear side of the pallet 181, and also when the pallet 181 is reverse driving (-X). And a rear sensor 182 for sensing a distance from the pallet.

In the present embodiment, both the front and rear sensors 181 and 182 are applied to the laser sensor, so that the operation of the sensor can be performed on the pallets 130a to 130c, the front and rear sensors provided on the adjacent pallets 130a to 130c. First and second reflecting plates 181a and 182a are further provided at positions corresponding to the 181 and 182 to reflect the laser beams from the front and rear sensors 181 and 182.

Accordingly, in the case where the previous pallets 130a to 130c are stopped due to an abnormal factor or a separate working environment factor, for example, a predetermined distance from the preceding pallets 130a to 130c where the subsequent pallets 130a to 130c are stopped. When approaching, any one of the front and rear sensors 181 and 182 as the sensing units 181 and 182 senses the distance through the laser reflected from the first and second reflecting plates 181a and 182a, and the unit controller then moves the driving unit 150. By turning off the operation of ()) to follow the palette (130a ~ 130c). Therefore, it is possible to prevent a phenomenon in which the pallets 130a to 130c or the substrate are damaged by collision between the pallets 130a to 130c or the substrates mounted on the pallets 130a to 130c. For reference, the distance that can be detected by the front and rear sensors 181 and 182 may be set to approximately 200 mm, but the scope of the present invention is not necessarily limited to the numerical values thereof.

In addition to the front and rear sensors 181 and 182, the individual control unit 140 of the present exemplary embodiment may further include a speed control sensor 183 and a direction sensor 184.

The speed control sensor 183 is provided on the side surfaces of the pallets 130a to 130c and the unit controller controls the speed control signal to the unit controller so that the speed of the pallets 130a to 130c can be accelerated or decelerated through the traveling unit 150. It serves to transmit.

The direction sensor 184 is also provided on the side surfaces of the pallets 130a to 130c and the unit controller controls the driving direction of the pallets 130a to 130c in the forward direction (+ X) or the reverse direction (−) through the travel unit 150. X) detects the driving direction of the pallet (130a ~ 130c) to select, and transmits the detected signal to the unit controller.

In the present embodiment, the speed control sensor 183 and the direction sensor 184 are provided adjacent to each other along the vertical direction on the side surfaces of the pallets 130a to 130c, but their positions are not necessarily as shown in the drawings. The speed control sensor 183 and the direction sensor 184 may be laser sensors like the front and rear sensors 181 and 182 described above.

The necessity of the speed control sensor 183 and the direction sensor 184 will be described with reference to FIG. 1 again. For example, when the pallets 130a to 130c on which the substrate is mounted travel forward (+ X) from the position (A) to the position (B) along the first transfer line, the substrate may be shaken or the board may be separated. Because of this, it may be safe to transfer the pallets 130a to 130c at a constant speed or a speed slightly lower than the constant speed.

However, when the empty pallets 130a to 130c from which the substrate is taken out return from the position (B) to the position (A) along the second transfer line, increasing the speed is advantageous to reduce the tact time. Therefore, the speed control sensor 183 is provided for use in such a case.

In the case of the direction sensor 184, it is difficult to rotate the pallets 130a to 130c that have reached the position (B) to be transferred to the position (A), that is, the position (B) from the position (A). The pallets 130a to 130c may be reciprocated without changing the furnace direction. However, if there is no need for speed control and direction change, the speed control sensor 183 and the direction sensor 184 may not necessarily be applied.

On the other hand, the travel unit 150 is provided in the transfer frame 110 and the pallets 130a to 130c and to the power supply unit 160 and power supply unit 160 for supplying power for traveling of the pallets 130a to 130c. It is provided with a running unit 170 for running the pallet (130a ~ 130c) on the transfer frame 110 based on the power supplied by the.

The power supply unit 160 is applied to the non-contact power supply unit 160 that supplies power in a non-contact manner.

The non-contact power supply unit 160 is adjacent to the induction rail 161 and the induction rail 161 is formed long along the transfer line in the upper portion of the transfer frame 110, and in contact with the induction rail 161. The pickup unit 162 is provided below the pallets 130a to 130c so as to be supplied with a constant current in a non-contact state by the law of electromagnetic induction to supply power to the driving unit 170.

4 and 5, the guide rail 161 is provided with a pair of rail blocks 161a spaced apart from each other and arranged side by side. In addition, the pickup unit 162 has an English capital letter E shape corresponding to the induction rail 161, that is, provided with an electromotive force generating protrusion 162a disposed between and outside the pair of rail blocks 161a, respectively. Accordingly, when a high frequency AC power is applied to the induction rail 161, electromotive force may be generated by the electromagnetic induction law to the pickup unit 162 adjacent to the induction rail 161, and the electromotive force may be a power source of the driving unit 170. Can be used as

The traveling part 170 is applied to the magnetic linear traveling part 170 which linearly drives by electromagnetic force.

The magnetic linear driving unit 170, the stator 171 is provided on the upper portion of the transport frame 110, and is provided below the pallets (130a ~ 130c) and the power supply unit for running the pallets (130a ~ 130c) And a mover 172 that selectively receives power from 160 to drive the pallets 130a to 130c by electromagnetic force by interaction with the stator 171.

As shown in FIG. 4, the stator 171 is provided by a plurality of permanent bar magnets that are separated from each other and arranged in a line with each other, and the mover 172 is provided by an electromagnet. At this time, the plurality of permanent bar magnets as the stator 171 is arranged in a row with a constant inclination in the upper portion of the transfer frame (110). The permanent bar magnets may be disposed to be inclined so that one side thereof is in contact with the transfer frame 110 and the other side of the one side opposite to the contacted side is spaced apart from the transfer frame 110. As such, when a plurality of permanent bar magnets are arranged in a row with a constant inclination, driving of the pallets 130a to 130c may be more flexible. That is, the traveling of the pallets 130a to 130c by the magnetic linear driving unit 170 is performed by the repulsive force of the movable member 172 with respect to the stator 171, and a plurality of permanent bar magnets are spaced apart in the form of straight lines. When not arranged, and arranged in a line with a constant inclination as in the present embodiment, the repulsive force required for running the pallets 130a to 130c can act more flexibly and continuously, so that the pallets 130a to 130c travel more. It will be more flexible.

In addition, the magnetic linear running unit 170 of the present embodiment is a plurality of rotating rollers that rotate in contact with the lower portion of the transfer frame 110 and rotate along the pallets 130a to 130c when the pallets 130a to 130c travel. 173 and the roller connection part 174 which rotatably connects the rotating roller 173 with respect to the pallets 130a-130c, keeping the space | interval of the stator 171 and the mover 172 constant. In this embodiment, the rotary roller 173 is also applied as a free-rotating roller that does not require a separate power.

The operation of the transport system having such a configuration will be described with reference to FIGS. 1 and 6 as follows.

First, when a substrate is supplied at position (A) and subsequently mounted on pallets 130a, 130b, 130c (see FIG. 6) on the transport frame 110, the pallets 130a, 130b, 130c are removed on the transport frame 110. 1 Move the substrate in the positive + X direction along the transfer line to transfer the substrate to position (B).

Referring to this, when a high frequency AC power is applied to the induction rail 161, electromotive force is generated by the electromagnetic induction law to the pickup unit 162 adjacent to the induction rail 161, and the generated electromotive force is the magnetic linear driving unit 170. The magnetic force is generated in the mover 172 by being provided as a coil of the mover 172. The generated magnetic force of the movable member 172 generates a repulsive force with the stator 171, so that the pallet (130a, 130b, 130c) is moved in the positive + X direction on the transfer frame (110). At this time, the plurality of rotating rollers 173, the horizontal roller 133 and the vertical rollers 134 provided on the pallets (130a, 130b, 130c) are freely rotated at the corresponding position, so that the pallets (130a, 130b, 130c) ) Move smoothly, and maintain horizontality.

As described above, the first pallet 130a on which the substrate is mounted is stopped due to an abnormality factor or a separate working environment factor in the process of transferring the substrate continuously. Then, the following second pallet 130b continues to travel and stops, that is, the front sensor 181 provided in the second pallet 130b receives the laser reflected from the first reflecting plate 181a of the first pallet 130a. 6, the second pallet 130b is stopped by turning off the operation of the driving unit 150 when the distance is shortened to a predetermined reference value or less as shown in FIG. 6. That is, the electromotive force generated by the pickup unit 162 provided in the second pallet 130b is not provided to the coil of the mover 172 of the magnetic linear traveling unit 170 provided in the second pallet 130b. The second pallet 130b that follows is stopped by the unit controller turning off the operation of the travel unit 150.

Accordingly, the first and second pallets 130a and 130b or the substrate are collided by the collision between the first and second pallets 130a and 130b or the substrates mounted on the first and second pallets 130a and 130b. It is possible to prevent the phenomenon of damage. Of course, even when the second pallet 130b is stopped, as shown in FIG. 6, the third pallet 130c still being transported is moved in the + X direction which is still in the forward direction.

When all of these stop operations are released and the pallets 130a, 130b, and 130c on which the substrates are mounted reach the position (B) in turn, the substrates mounted by the robot or the like are sequentially taken out at the position (B).

After the substrate is taken out, the pallets 130a, 130b, and 130c are sequentially down by the first lifter 101 in the -Z direction, and then moved in the reverse direction along the second transfer line in the -X direction (A ) Is returned to the position. In order to return to the position (A), the direction detecting sensor 184 is configured to detect a direction change signal so that the unit controller controls the operation of the traveling unit 150 in the reverse direction of -X to control the pallets 130a and 130b, 130c) generate a signal to move in the reverse direction -X. In this case, as described above, since the empty pallets 130a, 130b, and 130c on which the substrate is not mounted are moved, the speed control sensor 183 generates a signal to cause the unit controller to control the traveling unit 150. Through this, the speed of the pallets 130a, 130b, and 130c may be increased.

After the pallets 130a, 130b, and 130c are sequentially returned to the position (A), they are respectively lifted up in the + Z direction by the second lifter 102, and then a series of new substrates is supplied to transfer the substrates. Will perform the operation of.

As described above, according to the present embodiment, the substrate can be easily and efficiently transferred under various working environments having a simple and simple structure but requiring continuous conveyance of the substrate to be conveyed, and in particular, traveling on the substrate. And it is possible to control the stop operation more simply and easily than before, it is possible to prevent damage due to collision between the substrate.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

1 is a configuration diagram to which a transport system according to an embodiment of the present invention is applied.

2 is a perspective view of a transfer system according to an embodiment of the present invention.

3 is an enlarged perspective view of the pallet shown in FIG. 2.

4 is an enlarged view illustrating main parts of FIG. 2.

FIG. 5 is a schematic cross-sectional view taken along the line VV of FIG. 2.

6 are plan views of pallets for explaining the operation of the front and rear sensors.

DESCRIPTION OF THE REFERENCE NUMERALS

110: transfer frame 130a to 130c: pallet

133: horizontal roller 134: vertical roller

140: individual control unit 150: driving unit

160: power supply unit 161: induction rail

162: pickup unit 170: driving unit

171: stator 172: mover

181: front sensor 182: rear sensor

183: speed control sensor 184: direction detection sensor

Claims (18)

A conveying frame provided along a conveying line of the object to be conveyed; The transported object is mounted in an upper portion, and is transported along the transport frame along with the transported object on the transport frame, and horizontal rollers are provided at four corner regions to maintain horizontality, and a plurality of vertical planes provided at both sides. A plurality of pallets having mold rollers; And An individual control unit provided on the conveying frame and the pallet to individually control the traveling and stopping operation of the pallet on the conveying frame, The individual control unit, A traveling unit provided on the transfer frame and the pallet to drive the pallet on the transfer frame; A front sensor provided on one side of the pallet and detecting a distance to the pallet in front of the pallet when forward running (+ X), and a pallet provided on one side of the rear of the pallet in front of the pallet when the pallet is reversed (-X); Detecting unit having a rear sensor for detecting the distance of; A unit controller configured to turn on / off an operation of the driving unit based on a detection signal of the detector; A speed control sensor provided on one side of the pallet and transmitting a speed control signal to the unit controller so that the unit controller accelerates or decelerates the speed of the pallet through the traveling unit; And It is provided on one side of the pallet and includes a direction sensor for detecting the driving direction of the pallet so that the unit control unit to select the driving direction of the pallet in the forward (+ X) or reverse (-X) through the travel unit , The front and rear sensors are laser sensors, and the pallet is provided with a plurality of reflecting plates provided at positions corresponding to the front and rear sensors provided on adjacent pallets to reflect the laser from the front and rear sensors. Conveying system. delete delete delete delete delete The method of claim 1, The traveling unit, A power supply unit provided to the transfer frame and the pallet to supply power for driving the pallet; And And a traveling unit for driving the pallet on the transport frame based on the power supplied by the power supply unit. The method of claim 7, wherein The power supply unit is a transfer system, characterized in that the non-contact power supply for supplying power in a non-contact manner. 9. The method of claim 8, The contactless power supply unit, An induction rail provided along the transfer line at an upper portion of the transfer frame; And And a pickup unit provided at a lower portion of the pallet so as to be adjacent to the induction rail and supplied with a constant current in a non-contact state by an electromagnetic induction law to supply power to the driving unit. 10. The method of claim 9, The guide rail has a pair of rail blocks spaced apart from each other and arranged side by side, And said pick-up unit has a capital letter E shape with an electromotive force generating protrusion disposed respectively between and outside said pair of rail blocks. The method of claim 7, wherein And the traveling portion is a magnetic linear traveling portion that linearly drives with electromagnetic force. 12. The method of claim 11, The magnetic linear running unit, A stator provided on an upper portion of the transfer frame; And And a mover provided below the pallet to move the pallet with electromagnetic force by interaction with the stator, by selectively receiving power from the power supply for traveling the pallet. The method of claim 12, The stator is provided by a plurality of permanent bar magnets are separated into a single but arranged in a line with each other, And the mover is provided by an electromagnet. 14. The method of claim 13, The plurality of permanent bar magnets, the one side is in contact with the transfer frame and the other side of the opposite side of the one side is in contact with the conveying frame, characterized in that arranged inclined apart from the conveying frame. The method of claim 12, The magnetic linear running unit, A plurality of free-rotating rollers which are in rolling contact with the lower part of the conveying frame and rotate along the pallet when the pallet is driven; And And a roller connecting portion for rotatably connecting the free-rotating roller with respect to the pallet while maintaining a constant distance between the stator and the mover. delete The method of claim 1, The transfer system is characterized in that the liquid crystal display (LCD) substrate. 18. The method of claim 17, The upper portion of the pallet is further provided with a plurality of substrate support pins for supporting the LCD substrate, The upper end of the plurality of substrate support pins transfer system, characterized in that the buffer cap further provided with an elastic material.

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