KR101133641B1 - Method of inspecting three-dimensional shape - Google Patents
Method of inspecting three-dimensional shape Download PDFInfo
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- KR101133641B1 KR101133641B1 KR1020100008689A KR20100008689A KR101133641B1 KR 101133641 B1 KR101133641 B1 KR 101133641B1 KR 1020100008689 A KR1020100008689 A KR 1020100008689A KR 20100008689 A KR20100008689 A KR 20100008689A KR 101133641 B1 KR101133641 B1 KR 101133641B1
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Abstract
The three-dimensional shape inspection method for a predetermined element formed on a printed circuit board may include generating a shadow template that abstracts a shadow of a predetermined element, irradiating a grid image light to a measurement object in a plurality of directions, and each pixel of the measurement object. Obtaining a shadow information of each star, merging shadow information of each pixel photographed from a plurality of directions, generating a shadow map, and comparing the shadow map of the measurement object with the shadow template, and corresponding to the shadow template on the measurement object. Obtaining information of the. Therefore, it is possible to accurately extract the elements on the printed circuit board.
Description
The present invention relates to a three-dimensional shape inspection method, and more particularly to a three-dimensional shape inspection method for a device on a printed circuit board.
In general, at least one printed circuit board (PCB) is provided in an electronic device, and includes a device such as a chip on the printed circuit board.
Extracting an element such as the chip from the printed circuit board is necessary to determine whether the element mounted on the printed circuit board is defective or whether the pad connected to the element is defective.
Conventionally, the image taken by taking a two-dimensional image for the above extraction operation has been used. However, the task of extracting a specific device from a two-dimensional image is sensitive to the color or illumination of the device, making it difficult to distinguish the device from the surroundings, and it is difficult to distinguish the device even when the dimension of the device is changed. In addition, when there is noise in an image, for example, when a pattern or silk is formed on a substrate other than the device, it may be difficult to distinguish the device, and noise may be generated by a camera inside the device. It can also be confused with adjacent parts.
Therefore, a three-dimensional shape inspection method using an element extraction method that can prevent the above problems is required.
Therefore, the problem to be solved by the present invention is to provide a three-dimensional shape inspection method that can accurately extract the desired device.
In accordance with an exemplary embodiment of the present invention, a three-dimensional shape inspection method includes generating a shadow template that abstracts a shadow of a predetermined device, irradiating a grid image light to a measurement object in a plurality of directions, and each pixel of the measurement object. Obtaining star shadow information, merging the shadow information for each pixel photographed from a plurality of directions, generating a shadow map, and comparing the shadow map of the measurement object with the shadow template to measure the measurement. Obtaining information of the device corresponding to the shadow template from an object.
In one embodiment, the three-dimensional shape inspection method may further include obtaining the visibility information for each pixel of the measurement object by irradiating the grid image light in a plurality of directions to the measurement object, The generating of the shadow map may include generating a preliminary shadow map according to the shadow information for each pixel, excluding the device portion from the preliminary shadow map by using the visibility information, and removing the device portion. And determining the gripper map.
In an embodiment, the obtaining of information of the device corresponding to the shadow template from the measurement object may include determining whether the device corresponding to the shadow template exists on the measurement object and the device is the If present in the object to be measured may include obtaining the size, position and rotation angle information of the device. In this case, determining whether the device corresponding to the shadow template is present in the measurement object, setting a predetermined inspection area on the printed circuit board on which the device is formed and initializing the position of the shadow template And sequentially comparing from the gripper map while moving sequentially. In this case, the step of comparing the position of the shadow template with the shadow map while sequentially moving from the initial position, the value set to 0, 1 according to the pixel coordinates on the shadow template on the portion overlapping with the gripper map Multiplying the values set by 0 and 1 according to the pixel coordinates and multiplying each other, setting a position representing the maximum value according to the sequential movement of the position of the shadow template as a preliminary position where the device exists and the maximum value If the reference value is more than the reference value may include determining that the device corresponding to the shadow template.
In an embodiment, the three-dimensional shape inspection method may further include determining whether the device corresponding to the shadow template is defective after acquiring information of the device corresponding to the shadow template from the measurement object. It may include. In this case, when the device includes a chip formed on a printed circuit board, the determining of whether the device corresponding to the shadow template is defective may include extracting a chip body which is a body of the chip. The method may include: removing chip body information about the chip body from chip information about the chip and determining whether the chip formed on the printed circuit board is defective from chip information from which the chip body information is removed. It may include.
For example, the shadow template may be defined by a template determinant including dimensions of the device and an irradiation angle of grid image light irradiated to the measurement object. In this case, the shadow map and the shadow template may be compared within a predetermined allowance of the template determinant.
According to the present invention, since the desired device is extracted by using the shadow map according to the shadow of the device, the device is not sensitive to the color or illumination of the device as compared with the case of extracting the device using a 2D image, and is easy even when the dimension of the device is changed. The device can be discriminated.
In addition, the image may not be affected by noise such as a pattern or silk around the device, or noise caused by a camera inside the device, and compared with the template even when there are other devices around the device such as pad areas. Since the device is discriminated, the device can be extracted accurately.
In addition, even when the height of the device exceeds a predetermined measurable range, the shadow is generated regardless of the measurable range of the device, so that the position, size, rotation information, etc. of the device can be obtained more clearly regardless of the height of the device. Can be.
1 is a conceptual diagram illustrating an exemplary three-dimensional shape measuring apparatus used in the three-dimensional shape measuring method according to an embodiment of the present invention.
2 is a flowchart illustrating a three-dimensional shape inspection method according to an embodiment of the present invention.
3 is a schematic diagram illustrating an example of a shadow template.
4 is a flowchart illustrating an embodiment of a method of generating a shadow map using visibility information.
FIG. 5 is a flowchart illustrating an embodiment of a method of obtaining information of a device in FIG. 2.
FIG. 6 is a conceptual diagram illustrating an embodiment of a method of comparing whether a target device corresponds to a shadow template.
As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.
Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and that one or more other features It should be understood that it does not exclude in advance the possibility of the presence or addition of numbers, steps, actions, components, parts or combinations thereof.
Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art.
Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art, and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.
1 is a conceptual diagram illustrating an exemplary three-dimensional shape measuring apparatus used in the three-dimensional shape measuring method according to an embodiment of the present invention.
Referring to FIG. 1, the three-dimensional shape measuring apparatus used in the three-dimensional shape measuring method according to the present embodiment includes a
The
The
The
The
The
The
Meanwhile, in the present exemplary embodiment, only the first and
The
The
The
Hereinafter, a method of inspecting a predetermined device mounted on a printed circuit board employed as the
2 is a flowchart illustrating a three-dimensional shape inspection method according to an embodiment of the present invention, Figure 3 is a schematic diagram showing an example of a shadow template.
2 and 3, in order to inspect a predetermined device mounted on a printed circuit board, first, a
For example, the
The
Subsequently, the grid image light is irradiated to the measurement object in a plurality of directions to obtain shadow information for each pixel of the measurement object (S220).
Shadow information for each pixel of the measurement object may be easily obtained from data obtained by measuring the measurement object by the three-dimensional shape measuring apparatus illustrated in FIG. 1.
Next, a shadow map is generated by merging the shadow information for each pixel photographed from a plurality of directions (S230). For example, in the case of a three-dimensional shape measuring apparatus which forms a predetermined inclination angle and measures the measurement object in four directions, a comparison target element located on the measurement object in four directions (hereinafter referred to as a "target element") The shadow of is formed, and when merged, a shadow map that surrounds the target device may be obtained. For example, the shadow map may be configured to be set to 1 if a shadow exists or 0 if a shadow does not exist according to the presence or absence of a shadow according to pixel coordinates.
remind The shadow map is independent of the height measurement range even when the
In this case, since the shadow map is created according to the shadow of the target element, the shadow map is independent of the color of the target element, letters or graphics printed on the target element, and also independent of the color, print shape, etc. of the surroundings of the target element. . That is, since the target device displays only light and dark levels depending on the presence of shadows, it is possible to determine the shape of the target device more clearly than a general two-dimensional image.
Meanwhile, in order to more clearly inspect the target device, visibility information for each pixel of the measurement object may be obtained and used.
The Visionary Stability is according to the brightness signal of the video it means a ratio of the amplitude average (A i (x, y) ) of (B i (x, y) ) , and there is generally a tendency to increase as the reflectance increases. The Visionary Stability (V i (x, y) ) is defined as follows:
V i (x, y) = B i (x, y) / A i (x, y)
Lattice pattern light may be irradiated onto the printed circuit board in various directions to capture various types of pattern images. As illustrated in FIG. 1, N patterns of the
For example, when N = 3 and when N = 4, viability can be calculated as follows, respectively.
In other words, when N = 3,
Can be calculated as
If N = 4,
It can be calculated as
The visibility information may be obtained by irradiating the measurement object with the grid image light in a plurality of directions in the same manner as in operation S220 of obtaining shadow information for each pixel of the measurement object. That is, the visibility information for each pixel can also be easily obtained from the data measured by the measurement object by the three-dimensional shape measuring apparatus shown in FIG. 1 as an example.
4 is a flowchart illustrating an embodiment of a method of generating a shadow map using visibility information.
Referring to FIG. 4, in order to generate the shadow map, first, a preliminary shadow map according to the shadow information is generated for each pixel (S232). Subsequently, the
In general, in the case of a device whose reflectance is larger than its surroundings, the visibility is much larger than its surroundings. Therefore, when the visibility information is reflected in the shadow map, the color of the
Referring back to FIG. 2, next, the shadow map of the measurement object and the
FIG. 5 is a flowchart illustrating an embodiment of a method of obtaining information of a device in FIG. 2.
2 and 5, in order to obtain information of the
For example, a predetermined inspection region (or region of interest) is set to check whether there is a target element, and then the existence of the target element is checked. In this case, the inspection area may be set by using CAD information that records the shape of the measurement object. The CAD information includes design information of the measurement object. In another embodiment, the inspection area may be set using learning information obtained by the learning mode. The learning mode is to obtain the design reference information of the printed circuit board by learning the bare board of the printed circuit board, it can be used to set the inspection area by obtaining the learning information through the learning mode.
FIG. 6 is a conceptual diagram illustrating an embodiment of a method of comparing whether a target device corresponds to a shadow template.
Referring to FIG. 6, in order to compare whether a
For the comparison, first, a value set to 0, 1 according to pixel coordinates, for example, on the
The
Referring back to FIG. 5, when the
On the other hand, after acquiring the information of the
For example, it may be determined whether the device corresponding to the
That is, it is possible to determine whether the device is defective by checking whether the device is properly disposed on the measurement object using the size information, the rotation information, and the like. Alternatively, the information of another device or part may be obtained by excluding the information about the device from the information of the measurement object by using the information of the device.
Meanwhile, a part of the device may be extracted and removed from the information of the device, and the remaining information of the removed device may be used to determine whether the device is defective.
For example, when the device is a chip formed on a printed circuit board, information of a terminal extending from the chip body except for the body of the chip and information of a pad connected to the terminal of the chip may be obtained without noise. It may be. Therefore, it is also possible to determine whether these parts are defective by using the information thus obtained.
In an embodiment, when the device is a chip formed on a printed circuit board, first, a chip body which is a body of the chip is extracted, and then chip body information for the chip body is removed from chip information for the chip. Next, from the chip information from which the chip body information is removed, it is possible to determine whether the chip formed on the printed circuit board is defective, that is, a connection state between the terminal of the chip and the pad.
As described above, according to the present invention, since the desired device is extracted using the shadow map according to the shadow of the device, the device is not sensitive to the color or lighting of the device as compared with the case of extracting the device using the 2D image, and the dimension of the device is changed. The device can be easily identified.
In addition, the image may not be affected by noise such as a pattern or silk around the device, or noise caused by a camera inside the device, and compared with the template even when there are other devices around the device such as pad areas. Since the device is discriminated, the device can be extracted accurately.
In addition, even when the height of the device exceeds a predetermined measurable range, the shadow is generated regardless of the measurable range of the device, so that the position, size, rotation information, etc. of the device can be obtained more clearly regardless of the height of the device. Can be.
While the present invention has been described in connection with what is presently considered to be practical and exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Therefore, the above description and the drawings below should be construed as illustrating the present invention, not limiting the technical spirit of the present invention.
10: measuring object 100: measuring stage part
200: image capturing unit 300: first lighting unit
400: second lighting unit 500: image acquisition unit
600: module control unit 700: central control unit
900: shadow template 910: device
920 target element ROI: inspection area
Claims (8)
Irradiating grating image light to a measurement object in a plurality of directions to obtain shadow information for each pixel of the measurement object;
Merging the shadow information of each pixel photographed from a plurality of directions to generate a shadow map; And
And comparing the shadow map of the measurement object with the shadow template to obtain information of the device corresponding to the shadow template in the measurement object.
Illuminating the measurement object with the grid image light in a plurality of directions to obtain visibility information for each pixel of the measurement object,
Generating the shadow map,
Generating a preliminary shadow map according to the shadow information for each pixel;
Excluding the device portion from the preliminary shadow map using the visibility information; And
And determining the gripper map from which the device portion is excluded.
Determining whether the element corresponding to the shadow template exists in the measurement object; And
And obtaining the size, position, and rotation angle information of the device when the device is present in the measurement object.
Setting a predetermined inspection area on a printed circuit board on which the device is formed; And
And comparing the position of the shadow template with the gripper map while sequentially moving the position of the shadow template from an initial position.
Adding values obtained by multiplying a value set to 0 and 1 according to pixel coordinates on the shadow template by multiplying the value set to 0 and 1 according to pixel coordinates on a portion overlapping with the gripper map;
Setting a position indicating a maximum value as a preliminary position in which the device exists according to the sequential movement of the position of the shadow template; And
And determining that the device corresponds to the shadow template when the maximum value is greater than or equal to the reference value.
And determining whether the device corresponding to the shadow template is defective.
The shadow template is defined by a template determinant including dimensions of the device and an irradiation angle of grid image light irradiated to the measurement object.
And the shadow map and the shadow template are compared within a predetermined allowable value of the template determinant.
Priority Applications (11)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020100008689A KR101133641B1 (en) | 2010-01-29 | 2010-01-29 | Method of inspecting three-dimensional shape |
US12/829,670 US8369603B2 (en) | 2009-07-03 | 2010-07-02 | Method for inspecting measurement object |
JP2010151711A JP5256251B2 (en) | 2009-07-03 | 2010-07-02 | Inspection method of measurement object |
DE102010030859.5A DE102010030859B4 (en) | 2009-07-03 | 2010-07-02 | A method of inspecting a target mounted on a substrate |
TW099121806A TWI432699B (en) | 2009-07-03 | 2010-07-02 | Method for inspecting measurement object |
TW102148712A TWI467128B (en) | 2009-07-03 | 2010-07-02 | Method for inspecting measurement object |
DE102010064635.0A DE102010064635B4 (en) | 2009-07-03 | 2010-07-02 | Method for examining a measurement object |
CN201010224622.4A CN101943572B (en) | 2009-07-03 | 2010-07-05 | Method for inspecting measurement object |
CN201210445858.XA CN102980533B (en) | 2009-07-03 | 2010-07-05 | Method for inspecting measurement object |
US13/679,390 US8548224B2 (en) | 2009-07-03 | 2012-11-16 | Method for inspecting measurement object |
US13/936,065 US8724883B2 (en) | 2009-07-03 | 2013-07-05 | Method for inspecting measurement object |
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KR1020100008689A KR101133641B1 (en) | 2010-01-29 | 2010-01-29 | Method of inspecting three-dimensional shape |
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KR101784276B1 (en) | 2015-02-27 | 2017-10-12 | 주식회사 고영테크놀러지 | Board inspection method and system |
WO2016137130A1 (en) * | 2015-02-27 | 2016-09-01 | 주식회사 고영테크놀러지 | Substrate inspection method and system |
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JPH11307567A (en) | 1998-02-20 | 1999-11-05 | Fujitsu Ltd | Manufacture of semiconductor device containing bump inspection process |
JP2003085565A (en) | 2001-09-07 | 2003-03-20 | Dainippon Screen Mfg Co Ltd | Constract pattern matching device and method |
KR20050045511A (en) * | 2003-11-11 | 2005-05-17 | 박승한 | Apparatus and method for measuring three-dimensional shape |
KR20080027616A (en) * | 2006-09-25 | 2008-03-28 | 주식회사 고영테크놀러지 | System and method for measuring three dimension shape using multiple interferometry |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH11307567A (en) | 1998-02-20 | 1999-11-05 | Fujitsu Ltd | Manufacture of semiconductor device containing bump inspection process |
JP2003085565A (en) | 2001-09-07 | 2003-03-20 | Dainippon Screen Mfg Co Ltd | Constract pattern matching device and method |
KR20050045511A (en) * | 2003-11-11 | 2005-05-17 | 박승한 | Apparatus and method for measuring three-dimensional shape |
KR20080027616A (en) * | 2006-09-25 | 2008-03-28 | 주식회사 고영테크놀러지 | System and method for measuring three dimension shape using multiple interferometry |
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