KR100919569B1 - Separation module - Google Patents

Abstract

A separation module is provided having a housing, a filter inside the housing and at least one outlet and inlet. The outlet and inlet are positioned to mate with the fit of the pump housing. The receptor located between the pump housing and the separation module has two shelves on its outer surface that allow fitting the separation module in the receptor in the proximity of the pivot line and the pump housing.

Description

 Separation Module {SEPARATION MODULE}

The present invention relates to a separation module for purifying a fluid. Fluid separation devices with easily replaceable and disposable fluid separation modules have long been used to control contamination in industrial processes. Such devices are an integral part of the manufacture of many products including pharmaceuticals, food ingredients and beverages. However, the need for effective pollution control is greatest in the semiconductor manufacturing industry. As the circuit is detailed to the ultra-micron range and feature size reduction is inevitable, the need for control of particles, ions, tissues and other contaminants in semiconductor process fluids is essential. In addition, since semiconductor devices are manufactured in clean rooms, it is important to reduce the potential for contaminating the manufacturing environment. For this reason, it is desirable for a disposable fluid separation device to be in the semiconductor manufacturing process to reduce contamination of the process line as well as the clean room.

Examples of semiconductor process fluids that are processed at the point of use (POU) include chemicals used for photolithographic processing (photochemicals). Photochemicals include materials such as primers, adhesion promoters, photoresists, edge bead removers, antireflective coatings, developers, dielectrics, and the like. Such chemicals are typically dispensed on silicon wafers by special pumps and are continuously dispersed into a uniform, thin film using a process called spin coating. The purity of these chemicals in the POU is essential to achieving a satisfactory product yield.

Fluid separation devices are generally of two types. In a first form, the separating element, such as a strainer, is a replaceable part, while the pressure vessel, ie the housing, containing the element is reusable. The housing also includes a suitable fluid connection to the remainder of the fluid treatment system. Replacing the fluid separation element requires opening the housing, removing the separation element, installing a replacement separation element inside the housing, and closing the housing. This type of fluid separation device has many disadvantages. Firstly, the replacement operation is time consuming, especially if access to the housing is restricted. Secondly, fluid outflow typically occurs because the housing contains a large amount of fluid to be treated and the fluid separation element is generally filled with a fluid. In the case of hazardous fluids, spillage can not only potentially damage nearby equipment and installations, but also threaten the health of individuals in the field. Finally, the opening in the housing exposes the inner surface of the fluid treatment system to unwanted contamination from the surrounding environment.

The separation device of the second type is also permanently attached to the housing, wherein the separation element comprises a suitable fluid connection to the remainder of the fluid treatment system to form an integral module. In such a case, the replacement includes disconnecting the entire separation module from the fluid treatment system and reconnecting the replacement module to the system. In this way, replacement is easier, the worker is minimized exposure to hazardous chemicals, and the connection reliability is significantly improved. The entire module is referred to as a disposable module, since the entire module is always removed and placed when a replacement is needed, regardless of which connector design the separation element used. Disposable modules require a plurality of connections, at least two connections, typically three or four connections, to be made in succession. Screw fasteners are inconvenient and sometimes difficult to join factors involving the continuous consumption of additional time and effort. In addition, the module must be held in place while the connection is made, which is necessary because at the same time it is necessary to perform two operations (ie to hold the module in place and attach each connector in succession). Makes it more difficult. Finally, in applications where the permanent connection to the fluid treatment system is not rigid, for example when a flexible tube is used, the liquid tends to drain when the connection is disconnected. All these problems add to the time and effort required to replace disposable modules, as well as the need for personal exposure to hazardous materials and contamination of the manufacturing environment.

For this reason, some disposable separation modules have been designed to have features that allow them to be quickly and easily connected to a fluid treatment system in a "quick-connect" manner. This type of quick connect module is provided for a set of connectors that tightly engage in a single, simple stroke or operation to a mating pair of connectors attached to a reusable substrate. Various types of instruments have been designed to achieve rapid connection retention, all of which have so far required some form of relative movement between the male connector and its female connector, generally most of the screwing action.

It is also proposed to provide a separation module in a system for dispensing a filtered fluid mixture, which is introduced inside a housing having a moving part to act as a preferred connection. Housing assemblies of this type are expensive and prone to breakage over time due to excessive use.

It would therefore be desirable to provide a separation module that can be replaced in a fluid separation system without the need for a pivotable housing.

1 is a perspective view of a separation module of the present invention.

2 is a perspective view of a receptor used in conjunction with the separation module of FIG.

3A, 3B, 3C, and 3D are side views illustrating the use of the latch of the separation module of FIG.

4 is a side view of the separation module of FIG. 1 in the receptor of FIG.

5 is a perspective view of the apparatus of FIG. 4 attached to a pump housing.

Figure 6 shows another separation module of the present invention.

Figure 7 shows another separation module of the present invention.

8 is a perspective view of the portable receptor and separation module of the present invention.

The separation module of the present invention fits inside the receptor, the receptor having a shelf that acts as a receptor pivot surface and an opening to receive and hold the latch of the separation module. The separation module includes a curved surface that fits on the pivot surface of the receptor and a latch that interacts with the opening of the receptor to hold the separation module inside the receptor. The separation module includes a filter located inside the housing of the separation module and a fitting connecting the fluid source to be purged at the point of use for the fluid to be purified inside the separation module. In one embodiment, the separation module is located in a portable manifold having a fluid fit that allows the use of the separation module in a fluid transfer system with various functions.

The separation module of the present invention is useful for purifying fluid from a fluid distribution system comprising a pump. The fluid dispensing system may include a plurality of pumps, such as a single pump or two pump systems including a dispensing pump and a feed pump. Such a system includes a separation module of the present invention having a separation element that separates the components of the unwanted fluid from the desired fluid mixture when the fluid is dispensed.

The present invention is specifically described herein with reference to a fluid dispensing system having two pumps including a feed pump, a dispensing pump, and a dispensing module having a specific configuration of inlet and outlet means. However, it will be appreciated that the present invention can be used in a fluid distribution system having a separation module regardless of the outer surface configuration of the inlet and outlet means on the surface of the separation module.

Referring to Figure 1, the separation module 10 of the present invention includes a housing 12 for a filter structure, such as a pleated filter, a depth filter, a hollow fiber, or the like. Ports 14 and 18 (fluid connectors) are fitted on mating fittings 15 and 19 (matching fluid connectors) (FIG. 4). The port 16 (third fluid connector) is fitted on the mating fit 17 (third mating fluid connector). Housing 66 (FIG. 5) includes a feed pump and a dispensing pump as disclosed in US Pat. No. 5,263,069, which is incorporated herein by reference. Port 14 may be an inlet for fluid to be filtered. Port 16 may be a vent for retentate. Port 16 may be parallel to ports 14 and 18. Port 18 may be an outlet for the fluid to be filtered towards the POU. Separation module 10 is a separation module pivot surface 20 that extends substantially the full width of separation module 10 and two attachments located on opposite surfaces of separation module 10 and attached to walls 24, 26. A flange 22 (only one shown).

The separation module 10 is provided with a latch 31 having a vertical arm 32, a hook 33 and a lever 35. The latch 31 is fixed to the separation module 10 by casting together with the wall of the slot 37. The slot 37 allows the latch 31 to move when a force, such as a manual force, is applied to the lever 35.

Referring to Fig. 2, the receptor 36 includes an upper surface 38 having holes 40, 42 and 44, and fittings 15, 17 and 19 that mate from the manifold through the holes. 4) extends. Receptor 36 includes a flange 46 with an opening 47 that interacts with the vertical arm 32 and the hook 33 of the latch 31. Receptor 36 also includes a receptacle pivot surface 54 to which the separator module pivot surface 20 fits, as well as shelves 50 and 52 on which the flange 22 of the separator module 10 slides.

3A, 3B and 3C and 3D, the latch 31 is shown in its initial position in FIG. 3A. As shown in FIG. 3B, the force in the direction of the arrow causes the hook 33 to move away from the flange 46. As shown in FIG. 3C, the latch 31 is moved upward by moving the separation module 10 upward so that the hook 33 is fitted on the flange 46. The latch position secures the separation module 10 to the receptor 36. As shown in FIG. 3D, the hook 33 is removed from the flange 46 by applying a force to the lever 35 as shown by the arrow. When the latch 31 is in the position shown in FIG. 3D, the separation module 10 may be removed from the receptor 36.

As shown in FIGS. 2 and 4, the separation module 10 moves into the receptor 36 on the shelves 50, 52 until the separation module pivot surface 20 is positioned on the receptor pivot surface 54. Slides. When the separation module 10 is positioned as described above, when the separation module 10 is rotated upwards as indicated by the arrow 55, the ports 14, 16 and 18 are fitted with fittings 15 and 17. And 19) to fit on. By this upward movement, the arm 32 is locked on the flange 46 and the hook 33 extends through the opening 47. This in turn locks the separation module 10 into the receptor 36 so that a leak-free fluid transfer can be made between the fittings 15, 17 and 19 that mate with the ports 14, 16 and 18.

As shown in Figure 5, the receptor 36 is attached to a pump housing that includes one or a plurality of pumps in a known manner. The ports 14, 16 and 18 are sealed as mating fittings as described above.

As shown in FIG. 6, the separation module 10 is provided with a latch 28 comprising two arms 30, 31. Arm 31 is provided with a lip 34 that interacts with the receptor of FIG. 2 as described above. The arms 30, 31 have sufficient flexibility that the arm 31 can be pressed by the arm 30, and the arm 30 lifts the arm 31 from contact with the flange 46 of the receptor 36. Continuously pressurized in sequence to allow removal of the separation module 10 from the receptor 36 by engaging or removing it.

An alternative embodiment of the separation module of the invention is shown in FIG. Separation module 10a having ports 14a, 16a and 18a is provided with two flanges 22 and separation module pivot surface 20 in the manner described above with reference to FIG. 1. The latch 70 includes a lip 72 and a lever 74. The lip 72 is configured to fit inside the receptor and the lever 74 allows the application of a manual force to remove the lip 72 from the receptor, thereby removing it from the receptor in the manner described above with reference to FIGS. 3A-3D. Install and remove the separation module 10a.

Referring to FIG. 8, an embodiment of the present invention is shown that includes a portable unit having a portable receptor 78 and a separation module 76. Separation module 76 and receptor 78 are coupled by latch 31 in the manner described above with reference to FIGS. 3A-3D. Receptor 78 is provided with fittings 80, 82, and 84 that can be mated with a pump device (not shown). Receptor 78 is coupled to mount 88, which may be mounted to wall 90 by latch 92. This embodiment facilitates the installation of the receptor 78. Receptor 78 includes a valve 81 having a device lever 83 that is manually operated to open or close valve 81 to allow or prevent fluid from being transferred through the fitting.

Claims (14)

A separation module configured to lock and unlock a receptor having a mating fluid connector, Housings, Fluid inlets and outlets that are mutually exclusive and located at one end of the housing, A separating element in the housing in fluid communication with the inlet and the outlet, A latch fixed to the housing, And the latch supports the housing such that the inlet and outlet are in fluid communication with the mating fluid connector when the housing is in the locked position. The separation module of claim 1, further comprising a lever to which a force can be applied to move the latch. The separation module of claim 1, further comprising a separation module pivot surface disposed in contact with the receptor pivot surface of the receptor while the separation module is locked with the receptor. delete delete delete delete The separation module of claim 1, wherein the latch is cast in a housing. A receptor configured to receive a separation module, An opening configured to receive a latch secured to the separation module; At least two mating fluid connectors mutually exclusive and complementary to the fluid connectors in the separation module; Includes a receptor pivot surface, And the structure forming the opening is further configured to support the separation module when the separation module is locked to the receptor. 10. The receptor of claim 9 wherein the receptor pivot surface is disposed in contact with the separation module pivot surface of the separation module while the separation module is received within the receptor. delete delete delete delete