KR100859642B1 - Apparatus for measuring straightness in addition to differences of step and angle of two objects and shaft alignment method using same - Google Patents

Abstract

An apparatus for measuring differences of steps and angles of two objects as well as straightness of an object and a shaft alignment method using the same are provided to calibrate a zero point without a reference flat plate. A strain gage(R2e) is attached to the outer side of a first leaf spring(130) spaced apart from the center of the first leaf spring. A first strain gage(R1e) is attached to the inner side of a second leaf spring(130'). A second strain gage(R4e) is attached to the outer side of the second leaf spring spaced apart from the center of the second leaf spring. A third strain gage(R4i) is attached to the inner side of the second leaf spring. A fourth strain gage(R3e) is attached to the outer side of the second leaf spring opposite to the second strain gage. A fifth strain gage(R3i) is attached to the inner side of the second leaf spring.

Description

Measuring device for measuring the straightness of the object and the difference between the step angle and the inclination angle of the two objects and the axis alignment method using the same

1 and 2 are schematic diagrams showing a device for measuring a conventional straightness.

3 shows axial alignment tolerance guidelines.

4 is a view showing the life of the rotating machine according to the axis alignment error

5 to 8 are views showing the configuration according to the conventional axis alignment method.

9 and 10 are schematic diagrams showing the principle of operation of the measuring device according to the first embodiment of the present invention;

11 is a front view showing the appearance of a measurement state of the measurement apparatus according to the first embodiment of the present invention;

12 is a front view showing the internal configuration of FIG.

FIG. 13 is a circuit diagram of a Wheatstone bridge for measuring the difference in inclination angles of the first and second surfaces with the strain gauge of FIG.

FIG. 14 is a circuit diagram of a Wheatstone bridge measuring the step difference between the first and second surfaces with the strain gauge of FIG.

15 is an exploded perspective view showing the configuration of a measuring apparatus according to a first embodiment of the present invention;

Fig. 16 is a perspective view of the engaged state of the measuring device of Fig. 15, seen from the bottom;

FIG. 17 is a cross-sectional view taken along a cutting line A-A of FIG.

18 is a cross-sectional view taken along the line B-B of FIG. 17;

Figure 19 is a perspective view of the cut along the cutting line C-C of Figure 17

20 is an exploded perspective view of the first probe of FIG.

FIG. 21 is a perspective view showing a configuration of the detachable auxiliary unit of FIG. 15; FIG.

FIG. 22 is a perspective view showing a state where the detachable auxiliary unit of FIG. 21 is mounted on a case; FIG.

FIG. 23 is a perspective view showing a state of measuring a tilt angle difference and a step difference between a first axis and a second axis using the measuring device of FIG.

Figure 24 is a front view of Figure 23

25 is a perspective view showing the configuration of an adapter attached to the measuring apparatus of FIG.

FIG. 26 is a perspective view showing a state in which the tilt angle difference and the step difference between the first axis and the second axis are measured at three places using the measuring device of FIG.

Figure 27 is a side view of Figure 26

FIG. 28 is a front view showing the display unit of FIG.

29 is a perspective view from the bottom of the measuring device according to the second embodiment of the present invention;

30 and 31 are cross sectional views of a measuring device according to a third embodiment of the present invention;

32 is a perspective view from above of FIG. 30;

FIG. 33 is a perspective view showing the structure of the wire tension direction adjusting section of FIG.

34 is a schematic diagram showing a method of measuring a degree of curvature using the measuring device of FIG.

** Description of symbols for the main parts of the drawing **

20: first axis 30: second axis

100,100 ', 200: measuring device 110,210: first probe

110 ', 210': second probe 110a, 210a: first probe hinge

110a ', 210a': second probe hinge 111,111 ', 211,211': contact roller

1111: contact roller 1112,1112 ': contact hole

112,112 ', 212,212': Magnetic roller 113,113 ': Leaf spring fixed clamp

114,114 ': hinge bearing 114a: hinge bearing

114b: spherical member 115: pin

120,220: case 120a, 120a ': fixed part

130,230: 1st leaf spring 130 ', 230': 2nd leaf spring

140: detachable auxiliary unit 141: moving body

142: axis of rotation 142a: handle

143: cam 144: plate

150: display unit 190: adapter

191: coupling plate 192: contact member

260: zeroing unit 261: wire

262: locking member 263: guide roller

R1e, R2e: Outer first strain gauge R1i, R2i: Inner first strain gauge

R3e, R4e: Outer Second Strain Gauge R3i, R4i: Inner Second Strain Gauge

The present invention relates to a measuring device for measuring the straightness, step height and inclination angle difference of the object and a measuring method using the same, and precisely connected to the step of the rail, high-speed rotating shaft, precision machine, etc. It is related with the measuring apparatus which can measure the straightness of the raw material processed by the process of drawing, extrusion, and rolling, and its measuring method.

1 and 2 are schematic diagrams showing a device for measuring a conventional straightness. As shown in the figure, the conventional straightness measuring device was measured by sliding the probe 10 along the surface 88 to be measured in order to measure the flatness or straightness of the surface. However, the measuring method in this manner limits the measurement accuracy such as the flatness of the surface 88, such that the movement accuracy of the slide moving unit itself is heavy, expensive and results in limiting the size of the measurement object. Caused. Therefore, there is a demand for a measuring device that is easy to carry and easy to use even in the field where the actual product is processed, assembled and installed.

In general, in order to measure the degree of curvature of a product manufactured by drawing, extrusion, and rolling, after assembling a mold or a jig, a measuring method of grasping the quality state through three-dimensional measurement in a precision measuring room should be performed continuously. There was a problem of greatly lowering the productivity of the process. Therefore, in the field, it is possible to identify the manufactured product with the naked eye and to continue the production process without measuring the exact quality of the product, and to seek a solution for product defects in the production process or to implement better process control. There was a limit as well.

Similarly, at the rail assembly and installation site, the measurement of the stepped angle and the inclination angle of the connecting portion is mainly grasped with the naked eye or the straight bar and the like, and the level of the gap between the rail and the straight bar is roughly determined. However, in the case of the elevator rail when the connection angle is shifted by 1/100 degrees 1mm is shifted on the opposite side of the 5m rail, there was a problem that the entire connection is installed in a zigzag. Therefore, the rail installation quality can be grasped only after the conveyance moving along the rail is installed, and the rail connecting part can be adjusted again and again. Accordingly, the assembly quality is often poor in terms of the straightness of the rail, the quality of assembly and the process management is difficult because the assembly quality is largely dependent on the working skill of the operator.

On the other hand, when the coupling precision of the rotating shaft is poor in the coupling connecting the motor and the compressor driving the high speed, high load, it is accompanied by bearing damage, breaking of the shaft, excessive vibration and noise, excessive power consumption. The rotational alignment of the shaft and the service life of the plant are closely related as shown in Fig. 4. Thus, the correct alignment of the rotating shaft is one of the important tasks for plant maintenance of the plant or plant.

In this aspect, the method mainly applied in the field is using the dial gauge or the laser measuring device 50 to accurately align the rotating shaft. That is, when the two drive shafts 20 and the driven shaft 30 are to be aligned as shown in FIG. 5, as shown in FIG. 6, the fixed portion 40 of the dial gauge 42 is driven by the driven shaft. 30, and while rotating the probe 41 of the dial gauge in contact with the outer circumferential surface of the drive shaft 20 at the same time, by reading the scale of the dial gauge 42, The step difference which appeared was measured. However, the misalignment of the two axes is not only expressed by the step d'-d of the respective axes 20 and 30, but also by the inclination angle component θ. The component of the tilt angle of, 30 appears relatively small, and the value indicated by the scale of the dial gauge 42 reflects both the step difference between the two axes 20 and 30 and the difference of the tilt angle. On the basis of the value indicated by the scale of (42), the user is required to infer the spatial component of the step difference and the tilt angle difference into his head. Therefore, unless you are a very skilled worker, it is very difficult to determine the correct alignment by adjusting the step and tilt angles of the axes 20 and 30 based on the values indicated by the dial gauge 42 scale. Therefore, there is a problem in that it is difficult to align the axes accurately.

In order to overcome such a difficulty, a measuring device using a laser is commercially available. The measuring device using a laser is a method of converting a step and an angle using a change in the amount and angle of movement of the laser light while rotating the drive shaft 20 and the driven shaft 30. However, such a laser measuring device is expensive, costing tens of thousands of won, and is only applied to some extremely important fields, and it has a limitation that various field workers cannot use.

In summary, the conventional measuring method adopts an indirect measuring method using only the relative error value obtained by directly rotating two axes without measuring the absolute value of the step and angle, so that various jigs on the axis to be aligned After attaching, the hassle of having to rotate the shaft with the signal line or power supply line connected. Moreover, even if you want to measure the angle of inclination as important as the step, it is displayed only with the information reflecting both the step and the angle of inclination, so it is not only difficult for the skilled worker to perform correct alignment, but even if the skilled worker There was a problem that it takes a long time.

The present invention has been made to solve the problems described above, to provide a measuring device that can directly measure the step and the tilt angle of the two sides of the object to be measured.

In addition, another object of the present invention is to enable the alignment of two axes without the rotation of the axis by directly measuring the step difference and the inclination angle difference between two surfaces of the object.

In addition, another object of the present invention is to directly measure the step angle, the inclination angle of the rail, etc. to an absolute value and to measure the degree of bending (flatness) of the material.

In addition, the present invention, by making it easy to carry a measuring device for measuring the step and the tilt angle of the object to be measured in a simple configuration at a low cost, so that it can be used universally in various work sites.

Another object of the present invention is to enable the measurement of the step difference and the slope angle difference of an object to be measured directly by only the bridge voltage difference of the Wheatstone bridge by simple signal processing through calibration.

In addition, another object of the present invention is to enable zero adjustment without carrying a reference plate for zero adjustment prior to the measurement process.

The present invention to achieve the object as described above, the first probe to rotate in accordance with the inclination of the first surface of the object to be measured; A second probe rotating according to the inclination of the second surface of the object to be measured; Including, measuring the rotational displacement of the first probe and the second probe, the step difference between the first surface and the second surface from the measured rotational displacement of the first probe and the second probe, the inclination angle difference, It provides a measuring device characterized by measuring any one or more of the straightness.

This is based on the new principle that if only the inclination angles of two surfaces of the object to be measured are measured, the step and inclination angles, straightness (flatness), etc. of the first and second surfaces can be calculated therefrom. By measuring the angles of rotation of the first and second probes using means such as strain gauges or lasers, the measured angles of rotation are based on the measured angles of rotation, even if the first and second surfaces or the measuring device are not In order to measure the step, the angle of inclination, the straightness of the first surface and the second surface to be measured as.

More specifically, the angle of rotation θ1 of the first probe which is in direct contact with the first surface or rotates in the same manner as the inclination of the first surface is measured by means of an adapter or the like, and similarly in direct contact with the second surface. By measuring the rotation angle θ2 of the second probe that rotates in the same manner as the inclination of the second surface by means of an adapter or the like, the inclination angle difference between the first surface and the second surface is obtained as the sum of θ1 and θ2. The step d between the first surface and the second surface is obtained by the following equation (1).

In other words, even if the first and second surfaces are not rotated or moved, the step difference between the first and second surfaces, the inclination angle difference, and the straightness from the rotation angles θ1 and θ2 of the first and second probes. It is possible to measure the back.

In this case, the first probe is in contact with the first surface in two positions so that the first probe and the second probe accurately reflect the inclination of the first surface and the second surface, and the second probe is the Contact with the second surface at two positions. Here, the contact portion of one of the four contact portions of the first and second probes is a roller-shaped contact roller having a relatively large column height so that the first probe and the second probe are stably in close contact with the first and second surfaces. And the remaining three contacts of the four contacts are formed as spherical contacts. Through this, one contact roller is in line contact with the surface to be measured, and the other three contact holes are in point contact with the surface to be measured, regardless of the degree or direction of inclination of the first and second surfaces. The first probe and the second probe can maintain a stable close contact with the first surface and the second surface.

In addition, in general, the object to be measured is formed of a steel material, and magnets are provided on the first and second probes, respectively, to improve the degree of close contact with the object.

In addition, having a case for rotatably supporting the first probe and the second probe, the first probe and the second probe is formed as a body around the case to facilitate handling.

In addition, a rotating shaft having an extended handle, a cam eccentrically installed on the rotating shaft, a moving body contacting with an outer circumferential surface of the cam according to the rotation of the cam and reciprocating in the case by the eccentricity of the cam, and the moving body A detachable auxiliary unit having a magnet mounted to the case and installed in the case; In order to attach the measuring device to the object to be measured, the magnet is coupled to the moving body or integrated with the moving body so as to approach the object by rotating the cam with a rotating shaft. When it is to be separated from the object, the cam is rotated in reverse so that the magnet coupled to the moving body or integrated with the moving body is separated from the object, thereby making it easier to detach the measuring device from the object.

In addition, since the first probe has to be accurately measured rotational displacement, a hinge bearing formed of any one of a gemstone and a ceramic in a through hole formed through the first probe and having a receiving space therein; A spherical member inserted into a receiving space of the hinge bearing such that a spherical groove is exposed to both outer sides of the hinge bearing; Pins are formed on both sides of the hinge bearing so that the front end surface is formed into a spherical surface so that the front end surface is in contact with the spherical groove; It is provided in the rotation center of the said 1st probe. Through this, the first probe is rotatably supported by a hinge bearing made of gem or ceramic material having high hardness with respect to the case, and pins on both sides of the hinge bearing press the spherical grooves of the spherical member accommodated in the hinge bearing. The center of rotation of the probe is installed in a self-alingment state, and the wear of the probe can be minimized to maintain a precise rotation state for a long time.

Similarly, the second probe is also rotationally supported in the same way as the first probe.

The measuring device may further include: a first wire formed at one end thereof so as to pull the first probe in a direction away from the first surface, the first wire being inserted into the receiving portion of the first probe; A second wire formed at one end thereof so as to pull the second probe in a direction away from the second surface and inserted into the receiving portion of the second probe; An adjusting body formed at the other end of the first wire and the other end of the second wire to be fixed and movable; In addition, a tension force is applied to the first wire and the second wire in accordance with the movement of the adjusting body is configured to zero-point the first probe and the second probe in a state arranged in a predetermined position. That is, even if a separate reference block is not carried, the first probe and the second wire are pulled by the first probe and the second probe to stably implement a state arranged in a predetermined predetermined position and shape. Zero adjustment can be performed using the reference position of the first probe and the second probe.

At this time, the contact surface of the locking body and the receiving portion is formed with a constant inclined surface such that the locking body maintains a constant contact with the wall surfaces of the receiving portions of the first and second probes. And, the adjusting body may be formed of the above-described moving body.

On the other hand, the present invention, the case; A first probe contacting the first surface of the object to be measured and rotating according to the inclination of the first surface; A second probe contacting the second surface of the object to be measured and rotating according to the inclination of the second surface; A first leaf spring having an end portion fixed to the first probe and a center portion fixed to the case in a rotational direction of the first probe; A second leaf spring having an end portion fixed to the second probe and a center portion fixed to the case along a rotational direction of the second probe; A first strain gauge attached to the first leaf spring; A second strain gauge attached to the second leaf spring; And measuring rotational displacements of the first probe and the second probe from resistance change values of the first strain gauge and the second strain gauge, and measuring the first surface and the second surface from the measured rotational displacement. Provided is a measuring device, characterized in that any one or more of measuring the level difference, the inclination angle difference, the straightness.

This utilizes a leaf spring and a strain gauge attached thereto to detect rotational displacements of the first and second probes. That is, by the first leaf spring and the second leaf spring coupled to both ends of the first probe and the second probe, the rotational displacement of the first probe and the second probe is the bending deformation of the first leaf spring and the second leaf spring And detecting the rotational displacement of the first probe and the second probe through the first strain gauge and the second strain gauge attached to the first leaf spring and the second leaf spring. The rotational displacement of can be detected more cheaply and reliably.

In particular, the first strain gauge is attached to the outer side and the inner side of the position spaced apart from the center portion of the first leaf spring, the second strain gauge is outside the position spaced from the center portion of the second leaf spring A pair is attached to the side and the inner side; The strain gauge compressed in the first strain gauge forms a whistle bridge facing each other in the strain gauge stretched in the second strain gauge, so that the bend is proportional to the inclination angle difference between the first surface and the second surface. The bridge voltage difference of the stone bridge is obtained as an output value signal. Therefore, even if a separate complicated signal processing control circuit is not provided, the inclination angle difference between the first surface and the second surface can be detected simply by correcting the output bridge voltage difference. That is, by measuring the output bridge voltage difference of the Wheatstone bridge circuit and immediately compensating from the bridge voltage difference to a constant gain value according to the intended use, it is possible to easily obtain the inclination angle difference between the first and second surfaces.

In this regard, the step and angle correction can be easily set automatically in the manufacturing process using a standard measuring sphere having a reference angle and step. Specifically, it is possible to store the gain value of the characteristic state in the ROM of the hardware to have the standard angle and the step in the standard measuring sphere state. In other words, if only the linearity of the leaf spring is guaranteed, the slope value of the linear characteristic corresponds to the corresponding gain value using the value of the standard measurement sphere. Such a method is widely used in electronic scales, temperature and humidity measurement, etc., and has an excellent mass productivity.

At this time, the first strain gauge and the second strain gauge are attached to the first plate spring and the second plate spring at a position where the deformation amount of the first strain gauge is equal to the deformation amount of the second strain gauge. For example, the thickness of the first leaf spring and the second leaf spring is constant throughout, and the distance from the center of the first leaf spring to the first strain gauge spaced apart from the center of the second leaf spring. The condition may be satisfied by being located equal to the distance to the second strain gauge. In this way, the resistance values of the Wheatstone bridge circuit are arranged to be symmetrical with each other, thereby making it easier to compensate for the bridge voltage difference output from the Wheatstone bridge circuit.

On the other hand, a pair of the first strain gauge is attached to the outer surface and the inner surface of the position spaced apart from the center portion of the first leaf spring, the second strain gauge outside the position spaced from the center portion of the second leaf spring A pair is attached to the side and the inner side; The strain gauges being compressed in the first strain gauge face each other with the strain gauges being compressed in the second strain gauge, and the strain gauges being stretched in the first strain gauge face each other with the strain strains being stretched in the second strain gauge. A boston stone bridge is formed so that a bridge voltage difference of the wheatstone bridge proportional to the step difference between the first surface and the second surface is obtained as an output value signal. Therefore, even if no complicated signal processing control circuit is provided, the step d of the first and second surfaces can be easily detected by simply correcting the output bridge voltage difference. That is, by measuring the output bridge voltage difference of the Wheatstone bridge circuit and immediately compensating from the bridge voltage difference to a constant gain value according to the intended use, the step between the first and second surfaces can be easily obtained.

Similarly, in this case, the first strain gauge and the second strain gauge are attached to the first leaf spring and the second leaf spring at a position where the deformation amount of the first strain gauge becomes equal to the deformation amount of the second strain gauge. It is preferable to be.

And, the adapter is formed to match the shape of the first surface is coupled to the contact surface of the first probe; In addition, the first probe according to the shape of the first surface to assist in close contact.

On the other hand, according to another field of the invention, the present invention, a method for aligning the first axis and the second axis, the first probe installation step of installing the first probe to rotate in accordance with the inclination of the circumferential surface of the first axis; A second probe installation step of installing a second probe on the second shaft to rotate according to the inclination of the circumferential surface; A first probe rotation angle measuring step of measuring a rotation angle of the first probe according to the inclination of the circumferential surface of the first axis; A second probe rotation angle measuring step of measuring a rotation angle of the second probe according to the inclination of the circumferential surface of the second axis; A display step of calculating and displaying at least one of an inclination angle difference between the first axis and the second axis and a step from the rotation angle of the first probe and the rotation angle of the second probe; An axis alignment step of adjusting and aligning the first axis and the second axis while checking an inclination angle difference and a step between the first axis and the second axis displayed in the display step; It provides an axis alignment method comprising a.

That is, when the first probe and the second probe are provided on the first axis and the second axis, respectively, the inclination angle difference and the step of the first axis and the second axis are calculated from the rotational displacement of the first probe and the second probe, and displayed. Therefore, even if the first and second axes are not rotated, the first and second axes are simply aligned by adjusting the first and second axes so that the inclination angle difference between the first and second probes becomes zero and the step becomes zero. Can be implemented.

For more accurate axis alignment, it is preferable to perform the axis alignment operation by providing three measuring devices including the first probe and the second probe in three places so as to include a diagonal direction in addition to the vertical direction and the left and right directions. This is because the outer diameters of the first axis and the second axis to be aligned are not exactly the same, and even if the step value of the probe attached to the up and down direction and the left and right directions is 0, the axis center may not be aligned. For this purpose, step information of the remaining probes is required. Therefore, when the step values of all the measuring devices attached to the three places are the same, even if the outer diameters of the first axis and the second axis are not exactly the same, the step can be easily aligned in a stepped state.

In this case, calculating the inclination angle difference θ1 + θ2 between the first axis and the second axis may include a first end portion fixed to the first probe and a center portion fixed to the case along the rotation direction of the first probe. 1 leaf spring; A second leaf spring having an end portion fixed to the second probe and a center portion fixed to the case along a rotational direction of the second probe; A pair of first strain gauges attached to the outer side and the inner side of the position spaced one way from the center portion of the first leaf spring, and the outer side and the inner side of the position spaced apart from the center portion of the second leaf spring; A second strain gauge attached in pairs; Including, the first strain gauge of the outer surface and the second strain gauge of the outer surface facing each other, the first strain gauge of the inner surface and the second strain gauge of the inner surface facing each other A whistle bridge may be formed to calculate a tilt angle difference between the second axis and the second axis in proportion to the bridge voltage difference of the whistle bridge.

The step (d) of calculating the step (d) between the first shaft and the second shaft includes: a first leaf spring having an end portion fixed to the first probe and a center portion fixed to the case along a rotation direction of the first probe; ; A second leaf spring having an end portion fixed to the second probe and a center portion fixed to the case along a rotational direction of the second probe; A pair of first strain gauges attached to the outer side and the inner side of the position spaced apart from the center portion of the first leaf spring, and the outer side and the inner side of the position spaced one side from the center portion of the second leaf spring; A second strain gauge attached in pairs; The first strain gauge of the outer side and the second strain gauge of the inner side face each other, and the first strain gauge of the inner side and the second strain gauge of the outer side face each other. A whistle bridge is formed, and a step difference between the first axis and the second axis is calculated in proportion to the bridge voltage difference of the whistle bridge.

At this time, before the step of installing the first probe and the step of installing the second probe, zero balancing the first probe and the second probe using a reference block having a reference plane; In addition, the rotational displacement of the first and second probes to be measured can be accurately measured.

In this regard, zero adjustment should be set periodically, as frequent instrument operation and drift characteristics in the circuit change. To achieve precise measurements, it is best to perform zeroing just before the measurement. To this end, calibration is possible by means of a reference block having flatness below the precision of the meter at the contacts of both probes of the measuring device according to the invention.

 However, performing a zeroing operation immediately before measurement using the reference block is not preferable in terms of ease of carrying because the reference block must be carried.

Therefore, before the first probe installation step and the second probe installation step, by pulling the first probe and the second probe by a wire in a direction away from the first surface and the second surface, The method may further include zeroing the first probe and the second probe in a predetermined position. This enables zero adjustment of the first probe and the second probe without carrying the reference block.

More specifically, when the detachable auxiliary unit having a magnet for easily attaching the measuring device according to the present invention to the measuring surface is capable of vertical movement, the magnet of the detachable auxiliary unit is separated from the surface to be measured. In this state, if the position state of both probes is set to a state in which the step and the angle become zero, auto zero balance is possible without a reference block.

To this end, the inner wall of the receiving portion formed just above the rotation axis of the probe is formed in a V-groove shape, and forms a hole through which the wire can pass in the center of the receiving portion formed by the inner wall of the V-groove shape. Then, the end of the wire is inserted into the hole and the engaging body of the shape engaging with the inner wall of the V groove is fixed to the end of the wire. At the same time, the wire passes through the inner through groove of the case and the leaf spring fixing part 120a, and this path is adjusted by the guide roller.

As a result, tension is applied to the wire in a state where the magnet of the detachable auxiliary unit is separated from the measurement surface, so that the locking body of the wire end is in close contact with the inner wall of the accommodation portion of the probe. In such close contact, a tension (about 1 kgf) acting on the wire is generated, and accordingly, the probe maintains a predetermined predetermined position and state. Zero adjustment in this state enables precise measurement because the probe is always reproducible with the probe set to a specific position prior to measurement.

Of course, due to the manufacturing error of the probe and the case, it is necessary to precisely adjust the arrangement of the locking body of the probe and the wire end. To this end, it is possible to adjust the arrangement of the probe and the wire path by making one side of the inclined surface of the adjustment plate to which the guide roller is fixed and the head inclined surface of the countersunk screw abut so that the adjustment plate can be finely adjusted laterally. .

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

However, in describing the present invention, a detailed description of known functions or configurations will be omitted to clarify the gist of the present invention.

9 to 22 are diagrams showing the configuration and principle of operation of the measuring apparatus according to the first embodiment of the present invention. 9 and 12, the measuring device 100 according to the first embodiment of the present invention includes a first probe 110 on two different first and second surfaces 20 and 30. And the second probe 110 ′ are in contact with each other at two points, such that the first probe 110 and the second probe 110 ′ are hinged according to the inclination of the first surface 20 and the second surface 30. Rotate around the points 110a and 110a ', and detect the rotational displacements θ1 and θ2 of the first probe 110 and the second probe 110', thereby detecting the first probe 110 and the second probe. The tilt angle difference and the step (d) of the probe 110 ′ may be directly measured.

More specifically, as shown in Figs. 15 to 22, the measuring device 100 according to the first embodiment of the present invention, the probe (rotating at the inclination angle of the surface (20, 30) of the object to be measured ( 110, 110 ′, the case 120, which rotatably supports the probes 110, 110 ′, and forms a contour of the measuring device, and clamps the ends to the probes 110, 110 ′ to measure rotational displacement of the probes 110, 110 ′. And the 'C' shaped leaf springs 130 and 130 'having a central portion fixed to the case 120, and moving or retracting toward the object surfaces 20 and 30 while the magnetic force acts in the direction of the object surfaces 20 and 30. Detachable auxiliary unit 140 is installed on the case 120 and the strain gauges (R1i, R1e, R2i, attached to the outer and inner surfaces of the position spaced one and the other from the center of the leaf springs 130, 130 ') R2e, R3i, R3e, R4i, R4e) and streaks according to the rotational displacement of the probes 110, 110 '. And a display unit for displaying a difference d and an angle of inclination between the first surface 20 and the second surface 30 calculated from the change in the resistance value of the rain gauge.

The probes 110 and 110 ′ may include a pair of first probes 110 and second probes 110 ′ that contact the first and second surfaces 20 and 30, respectively. The first probe 110 and the second probe 110 ′ are configured in the same manner. Referring to the configuration of the first probe 110 as an example, as shown in FIG. 20, the first probe 110 and the second probe 110 ′ are in contact with the first surface at two points. A fixed contact roller 111, a magnet roller 112 to assist the first probe 110 to be in close contact with the surface 20 of the object, and a clamp bolt for fixing the end of the first leaf spring 130 ( 113 and a hinge bearing 114 provided at a position of the rotation center of the first probe 110.

Here, the magnet roller 112 is installed so as not to contact the surfaces 20 and 30, and assists the lower end of the first probe 110 to be in close contact with the first surface to be measured. In addition, pressure bolts 111b and 112b for slightly pressing the contact roller 111 and the magnet roller 112 are installed in the probes 110 and 110 'to firmly position the contact roller 111 and the magnet roller 112. Fix it. At this time, the contact roller 111 is formed of heat-treated steel or ceramic material, so as to have a sufficient wear resistance even for frequent use.

When the probes 110 and 110 'are rotatably supported by a general bearing, since the bearing clearance is higher than the allowable value, precise measurement is impossible, and the probe 110 and 110' is pivotally supported by the hinge bearing 114 made of gemstone or ceramic material having a very high hardness. That is, the hinge bearing 114 is manufactured by strict dimensional tolerance management and has a bearing space with a receiving space around the inner partition wall, and the inside of the bearing 114a so that the spherical grooves are exposed to both outer sides of the bearing 114a. It consists of a pair of spherical members 114b respectively inserted in the receiving space of the. At this time, as shown in Fig. 18, the hinge bearing (by the pin 115 is fixed to the case 120 so that the front end surface is formed into a spherical surface and the spherical front end surface is in contact with the spherical groove of the spherical member 114b) 114 is always self-aligned with respect to the shaft hole. Here, the pin 115 is fixed to the case 120 by screwing, so that the flow of the thread by the external force is possible, so that the pin 115 is firmly fixed with the clamping screw 116 to prevent this. As a result, not only the play of the fine tilt motion of the probes 110 and 110 ′ can be eliminated, but also the friction property acting in the rotary motion can be greatly reduced, and the fine rotary motion with high accuracy can be measured.

The case 120 accommodates the first probe 110 and the second probe 110 'to be rotatable, and fixes the central portions of the leaf springs 130 and 130' connected to the first probe 110 and the second probe 110 '.

The leaf springs 130 and 130 'have a main cross section formed in a' c 'shape so that both ends of the rotation of the probes 110 and 110' are fixed to the probes 110 and 110 'by clamp bolts 113, and a center portion of the cross section is fixed to the probes 110 and 110'. 120a and 120a 'are fixed to the case 120 in a fitted state.

At this time, as shown in Figure 9, the first gauge plate (130) fixed to the first probe 110, the strain gauge (R2e) is attached to the outer surface of the position spaced one way from the center portion and the inner surface The strain gauge R2i is attached to the strain gauge, and the strain gauge R1e is attached to the outer surface of the position spaced apart from the center of the first leaf spring 130, and the strain gauge R1i is attached to the inner surface thereof. As shown in FIG. 9, a strain gauge R4e is attached to an outer side surface of the second plate spring 130 ′ fixed to the second probe 110 ′ at a position spaced one way from the center portion thereof, and the inside of the second plate spring 130 ′ fixed to the second probe 110 ′. Strain gauge (R4i) is attached to the side, strain gauge (R3e) is attached to the outer surface of the position spaced apart from the center portion of the second leaf spring (130 ') and strain gauge (R3i) on the inner surface do. At this time, all the distances from the fixing parts 120a and 120a 'which are located in the center part to the strain gauges are constantly arranged.

Although not shown in the drawings, stoppers are formed around the probes 110 and 110 'such that rotational displacements outside the elastic ranges of the leaf springs 130 and 130' and the strain gauge are not generated. In this case, the stopper may be configured by a gap between the case 120 and the probes 110 and 110 ', even if there is no additional configuration, and by the additional configuration, the rotational displacement of the probes 110 and 110' by a predetermined value or more. It may also be configured to restrain.

The detachable auxiliary unit 140, as shown in Figures 19, 21 and 22, the movable body 141 is formed of a permanent magnet or including a permanent magnet to enable close contact with the object of steel material, The rotating shaft 142 is installed to penetrate the moving body 141 and the handle 142a is exposed to the outside at one end, the cam 143 eccentrically installed on the rotating shaft 142, the cam 143 The plate 144 is disposed between the moving body 141 and the lower surface of the moving body 141.

By such a configuration, according to the rotation 142d of the rotation shaft 142, the cam 143 eccentrically installed on the rotation shaft 142 pushes or lowers the plate 144 and the moving body 141 in the direction 141d. By allowing the permanent magnet of the moving body 141 to move away from or close to the object to be measured, it is possible to stably secure a constant adhesion force that closely attaches the measuring device 100 to the object, thereby enabling accurate measurement. In addition, the distance between the permanent magnet and the surface of the measurement object can be adjusted by manipulating the handle 142a extending to the end of the rotating shaft 142 to facilitate the detachable operation.

The display unit includes a display unit casing incorporating a circuit for applying a reference voltage to a strain gauge, a step display portion and a tilt angle difference display portion for displaying the step d and the tilt angle difference θ calculated as described above, and a reference. And a power cable extending from the outside to apply a voltage or the like.

On the other hand, using only such a measuring device 100, it is possible to measure the step and angle of the rail, the precision assembly, but in the case of measuring the step and angle when the surface of the measurement object is a curved surface, such as the axis of rotation, the axis of rotation It is preferable to use the adapter 190 shown in Fig. 25 which assists in close contact with. Of course, the adapter 190 is mounted in a state where the parallelism and the height are accurately calibrated to be less than or equal to the measurement accuracy between the contact member 192 in close contact with the shaft and the coupling plate 191 engaging with the measuring device 100.

Hereinafter, the operation principle which measures the inclination angle and the step | step of the 1st surface and the 2nd surface of an object using the measuring apparatus 100 comprised in this way is explained in full detail.

The rotational displacement of the probes 110 and 110 'by the above configuration induces the resistance change of the same signal to the strain gauges attached to the leaf springs 130 and 130' fixed to both sides, and to the center of the center of the leaf springs 130 and 130 '. Since one and the other strain gauges have different deformation states (tensile or compressive), if the first surface 20 and the second surface 30 of the object to be measured have the same inclination in the same direction, Table 1 The resistance value of the strain gauge is changed as shown in FIG.

Strain gauge Resistance value R1e + △ R1 R1i -△ R1 R2i + △ R1 R2e -△ R1 R3e + △ R2 R3i -△ R2 R4i + △ R2 R4e -△ R2

That is, the strain gauges attached to the outer and inner surfaces of the leaf spring 130 are all the same in the resistance value by the symmetrical arrangement, but the change in the sign of the resistance value depends on the tension and compression state.

The step and the angle of the first surface 20 and the second surface 30 are the rotation angle θ1 of the first probe 110 and the case 120, the second probe 110 ′ and the case from the geometrical characteristics of the link. Conversion is possible with reference to Equation 1 using the rotation angle θ2 of 120. That is, since the strain gauge strain signals of ΔR1 and ΔR2 measured as described above are proportional to their respective rotation angles θ1 and θ2, the first strain gauges R1i, R1e, R2i, and R2e attached as described above and the second strain signal are thus proportional to each rotation angle θ1 and θ2. By using strain gauges R3i, R3e, R4i, and R4e, a Wheatstone bridge circuit as shown in Fig. 13 is constructed, and the slope angle difference is immediately obtained by correcting the bridge voltage difference of the Wheatstone bridge. From the bridge voltage difference of the Wheatstone bridge circuit as shown in Fig. 1, a step can be immediately obtained by a simple signal processing method.

For example, when the rotation directions of the first probe 110 and the second probe 110 'are opposite, the resistance values of the respective strain gauges are as follows.

Strain gauge Resistance value R1e R + △ R12 R1i R- △ R12 R2i R + △ R12 R2e R- △ R12 R3e R- △ R34 R3i R + △ R34 R4i R- △ R34 R4e R + △ R34

DELTA R12 is a change value of the resistance value of the strain gauge attached to the first plate spring 130, and DELTA R34 is a change value of the resistance value of the strain gauge attached to the second plate spring 130 '. 13, the current i2 flowing from R2e to R2i and the current i3 flowing from R3i to R3e are represented by Equation 2 below.

Therefore, the bridge voltage difference V is derived as in Equation 3 below.

therefore,

That is, the bridge voltage difference is derived in proportion to the resistance change value of each strain gauge. Similarly, in the case of the step d between the first probe 110 and the second probe 110 ', it is similarly determined.

For this purpose, the measuring device 100 should be zeroed in the initial state of measurement. To this end, a reference block (not shown) having a flatness of less than or equal to the measurement accuracy is prepared by high-precision polishing with heat-treated steel or granite (stone), and the zero point adjustment is performed after closely contacting the reference block before using the measuring device 100. After the measurement, high precision measurement is possible. In addition, the leaf springs 130 and 130 ', strain gauges, and the like allow only elasticity deformation in the use area, so that signals proportional to the rotation angles of the probes 110 and 110' are output from each Wheatstone bridge. The bridge output voltage does not become zero due to the manufacturing error of strain gauge or plate spring (130,130 ') in the initial zeroing state, and it is configured by calibrating with resistance having the same temperature characteristics as strain gauge in the same way as a general bridge type sensor. A measurement with high precision can be implemented. Finally, the magnitude of the bridge voltage due to the rotational displacement due to the manufacturing errors of the leaf springs (130, 130 ') and other instruments, which can be accurately corrected through a calibration operation after the completion of production. In other words, after the reference object having the correct step and angle is produced in advance, the measuring gauge contacts the reference object and measures it, and the software adjusts the software or circuit gain value so that the value becomes the determined step and angle. When displaying signals proportional to the angle, high accuracy measurements can be reliably implemented.

Hereinafter, a process of aligning two axes using the measuring device 100 according to the first embodiment of the present invention as described above will be described in detail.

23 and 24 are graphs for measuring the inclination angle difference and the step difference d between the first surface 20 and the second surface 30 using the measuring device 100 according to the first embodiment of the present invention. The first probe 110 and the second probe 110 ′ are installed in close contact with the outer circumferential surfaces 20a and 30a of the first shaft 20 and the second shaft 30.

In this manner, as shown in Figs. 26 and 27, the measuring device 100 is installed in three positions in the vertical, horizontal and diagonal directions on the rotation shafts 20 and 30. Through this, when the outer diameters 20a and 30a of the first axis 20 and the second axis 30 to be aligned are not exactly the same, even if the step value of the probe attached to the up and down direction and the left and right directions is 0, It can solve the problem that the axis center is not aligned. That is, when all the stepped values of all the probes of the measuring apparatus 100 are the same, even if the outer diameters of the first axis and the second axis are not exactly the same, the stepped state is aligned.

Thus, since the angle (theta) and the step (d) information of right, left, up and down, and diagonal directions are displayed on the display unit of the measuring apparatus 100, an operator can intuitively recognize an error and the adjustment work becomes easy. In addition, unlike the conventional measuring method, since the step (d) of the axis to be aligned can be immediately known even if the rotating shaft is not rotated, it is possible to implement an easier operation because the adjustment result is immediately displayed on the instrument.

29 is a perspective view as seen from the bottom of the measuring device according to the second embodiment of the present invention. In the measurement apparatus 100 ′ according to the second exemplary embodiment of the present invention illustrated in FIG. 29, the probes 110 and 110 ′ may have the first surface 20 and the first surface 20 as compared with the configuration 100 of the first exemplary embodiment. There is a difference only in the configuration of two-point contact with the second surface 30.

In other words, as shown in FIG. 29, the first probe 110 and the second probe 110 ′ are stably in close contact with the first surface 20 and the second surface 30. And a contact portion of one of the four contact portions of the second probe 110 ′ is formed by a roller-shaped contact roller 1111 having a relatively large column height, and the other three contacts of the four contacts are spherical contact holes 1112. , 1112 '). Through this, one contact roller 1111 is in line contact with the surface to be measured, and the other three contact holes 1112 and 1112 'are in point contact with the surface to be measured. The first probe 110 and the second probe 110 ′ may maintain a stable close contact with the first surface 20 and the second surface 30 regardless of the degree or direction of inclination of the two surfaces.

30 and 31 are sectional views of another measuring device according to the third embodiment of the present invention, FIG. 32 is a perspective view as seen from the top of FIG. 30, and FIG. 33 is a perspective view showing the structure of the wire tension direction adjusting unit of FIG. to be.

The measuring device 200 according to the third embodiment of the present invention is different from the measuring device 100 according to the first embodiment of the present invention in that it is configured to perform zero adjustment by the wire 261 even if there is no reference block. There is. Therefore, in describing the measuring device 300 according to the third embodiment of the present invention, the same or similar functions or configurations of the measuring device 100 according to the first embodiment are given the same reference numerals, and The detailed description will be omitted in order not to disturb the gist of the present invention.

One end of the measuring device 300 according to the third embodiment of the present invention is attached to the locking body 262 inserted into the receiving portion 210b positioned above the hinge shafts 210a and 210a 'of the probes 210 and 210'. Is fixed, the other end 260a is fixed to the moving body 240, the wire to pull or release the first probe 210 in a direction away from the first surface 20 in accordance with the vertical movement of the moving body 240 261. In addition, the guide rollers 263 are disposed to guide the wires 261 to be tensioned in a predetermined path according to the movement of the moving body 240 so as to precisely move the probes 210 and 210 'in the vertical direction. At this time, as shown in Fig. 32, a small diameter groove is formed in the center portion of the guide roller 263 to guide the wire 261 to move only in a predetermined path.

In addition, the upper outer circumferential surface of the locking body 262 and the upper inner wall of the receiving portion 210b are mutually supported such that a constant contact state of the locking body 262 is repeatedly implemented with respect to the inner wall of the receiving portion 210b of the probes 210 and 210 '. It is formed as an inclined surface to engage.

More specifically, as shown in FIG. 30, when the moving body 240 moves upward 240d, the wire 261 is tensioned in the direction 260d, and thus the first probe 210 and the first probe 210 are moved. The two probes 210 'are lifted up by the locking body 262 to be in a constant arrangement state. Based on this state, the strain gauges attached to the leaf springs 230 and 230 'are zeroed.

In addition, in order to contact the target surfaces 20 and 30 to be measured by the measuring device 200, as shown in FIG. 31, the moving body 240 is moved downwardly 240d ′, and the wire 261 is used. Relieves tension. Accordingly, the first probe 210 and the second probe 210 'of the zero-adjusted measuring device 200 are freely rotated according to the contact surfaces 20 and 30 in contact with each other, and the tilt angle of the target surface is adjusted. , The tilt angle difference and the step can be measured.

Meanwhile, the manufacturer of the measuring apparatus 200 needs to constantly fine-tune the state in which the wire 261 pulls the first probe 210 and the second probe 210 '. To this end, the adjustment mechanism 270 shown in FIG. 33 is fixed to the case 220. That is, the adjustment mechanism 270 is a guide plate 263 for adjusting the path of the wire 261 is fixed, and the adjustment plate 271 and the adjustment plate (movable in the lateral direction in the case 220 is installed) One side of the inclined surface 271a of 271 and the head portion is made of a countersunk head screw 272 fastened to the case 220. Accordingly, as the countersunk screw 272 is deeply fastened in the case 220, the adjustment plate 271 in contact with the inclined surface of the head of the countersunk screw 272 of Fig. 31 moves to the left, and conversely, As the countersunk head screw 272 is tightened shallowly in the case 220, the adjustment plate 271 which contacts the head inclined surface of the countersunk head screw 272 of FIG. 31 moves to the right, and the guide roller 263 By fine position adjustment, the path of the wire 261 can be adjusted.

In addition to the methods described above, the measuring device according to the invention may be used to align the axes in other ways. That is, when only one measuring device is in close contact with the surface, the two shafts are connected by a coupling, and the rotation of the two shafts shows the step and angle change. This information can also be used to determine the alignment of the axes. That is, when using the existing dial gauge, only the error of the step is measured, and the step and angle information are compared with the method of estimating using the change of the dial gauge value including both the step and angle information through the two dial gauge values. Because they appear separately, it's an easy way for non-experts to sort.

Meanwhile, when the first probe 110 and the second probe 110 'are brought into close contact with the surface 97 having a predetermined curvature using the measuring device according to the present invention, the bone curvature and the measured angle The following relation holds.

Radius of curvature = meter pitch (P) / sinβ

Therefore, the desired degree of curvature (flatness) can also be measured by the above relational expression.

In the above, the preferred embodiments of the present invention have been described by way of example, but the scope of the present invention is not limited to these specific embodiments, and may be appropriately changed within the scope described in the claims.

As described above, the present invention includes a first probe which is rotated according to the inclination of the first surface in contact with the first surface of the object to be measured; A second probe which contacts the second surface of the object to be measured and rotates according to the inclination of the second surface; Including, by measuring the rotational displacement of the first probe and the second probe, even if the first surface and the second surface or the measuring device does not rotate or move, the first surface to be measured based on the measured rotation angle It provides a measuring device that can measure the step difference, the tilt angle difference, the straightness of the second surface.

In addition, the present invention, by directly measuring the step difference and the inclination angle of the two sides of the object to be measured, it is possible to align the two axes even without rotating the axis, and at the same time simple configuration to carry the measuring device It is manufactured at low cost and provides a measuring device that can be used universally at various work sites.

In addition, the present invention properly configures the Wheatstone bridge by using a strain gauge bonded to both sides of the leaf spring so that the difference between the step difference and the inclination angle of the object to be measured from the bridge voltage difference of the Wheatstone bridge can be determined by simple calibration. Make your own measurements.

Claims (21)

delete delete delete delete delete delete delete A case; A first probe rotating according to the inclination of the first surface of the object to be measured; A second probe rotating according to the inclination of the second surface of the object to be measured; A first leaf spring having an end portion fixed to the first probe and a center portion fixed to the case along a rotational direction of the first probe; A second leaf spring having an end portion fixed to the second probe and a center portion fixed to the case along a rotational direction of the second probe; A first strain gauge attached to the first leaf spring; A second strain gauge attached to the second leaf spring; And measuring rotational displacements of the first probe and the second probe from resistance change values of the first strain gauge and the second strain gauge, and measuring the first surface and the second surface from the measured rotational displacement. Measuring device characterized in that any one or more of the step, the angle of inclination of the surface, the straightness is measured. The method of claim 8, The first strain gauge is attached to the outer surface and the inner surface of the position spaced apart from the center portion of the first leaf spring, the second strain gauge and the outer surface of the position spaced apart from the center portion of the second leaf spring A pair is attached to the inner surface; The strain gauge compressed in the first strain gauge according to the rotation of the first probe and the second probe forms a Wheatstone bridge facing each other with the strain gauge being stretched in the second strain gauge, And a tilt angle difference between the first surface and the second surface is calculated from the bridge voltage difference. The method of claim 8, The first strain gauge is attached to the outer surface and the inner surface of the position spaced apart from the center portion of the first leaf spring, the second strain gauge and the outer surface of the position spaced apart from the center portion of the second leaf spring A pair is attached to the inner surface; The strain gauge compressed in the first strain gauge according to the rotation of the first probe and the second probe faces each other with the compressed strain gauge of the second strain gauge, and the strain gauge tensioned in the first strain gauge A measurement device for forming a first stone bridge facing each other with the strain gauge of the second strain gauge facing each other, and calculating a step difference between the first surface and the second surface from a bridge voltage difference of the wheatstone bridge. . The method according to claim 9 or 10, Wherein the deformation amount of the first strain gauge is equal to the deformation amount of the second strain gauge, and the first strain gauge and the second strain gauge are attached to the first leaf spring and the second leaf spring. Measuring device. The method according to claim 9 or 10, The first probe is in contact with the first surface at two positions, and the second probe is in contact with the second surface at two positions. The method of claim 12, The first probe has one contact roller and one contact hole, and the first surface and one point contact with one line contact, and the second probe has two contact holes with the second surface. Measuring device characterized in that two point contact. The method according to claim 9 or 10, A first wire formed at one end thereof so as to pull the first probe in a direction away from the first surface, the first wire being inserted into and held by the receiving portion of the first probe; A second wire formed at one end thereof so as to pull the second probe in a direction away from the second surface and inserted into the receiving portion of the second probe; An adjusting body formed at the other end of the first wire and the other end of the second wire to be fixed and movable; Including, the tensioning device is applied to the first wire and the second wire in accordance with the movement of the adjusting body is configured to zero the first probe and the second probe is arranged in a predetermined position . The method according to claim 9 or 10, A hinge bearing formed of any one of jewels and ceramics in a through-hole formed through the first probe and having a receiving space therein; A spherical member inserted into a receiving space of the hinge bearing such that a spherical groove is exposed to both outer sides of the hinge bearing; Pins are formed on both sides of the hinge bearing so that the front end surface is formed into a spherical surface so that the front end surface is in contact with the spherical groove; It is provided in the rotation center of a said 1st probe, The measuring apparatus characterized by the above-mentioned. The method according to claim 9 or 10, An adapter having a surface corresponding to the shape of the first surface and coupled to the contact surface of the first probe; Measuring device, characterized in that it further comprises. As a method of aligning the first axis and the second axis, A first probe installation step of installing the first probe to rotate according to the inclination of the circumferential surface of the first shaft; A second probe installation step of installing a second probe on the second shaft to rotate according to the inclination of the circumferential surface; A pair of first strain gauges R 2i are formed on the outer and inner surfaces of the position spaced apart from the central portion of the first leaf spring whose end portion is fixed to the first probe and the center portion is fixed to the case along the rotation direction of the first probe. R2e) and a pair of outer and inner surfaces at positions spaced apart from the central portion of the second leaf spring whose end portion is fixed to the second probe and the center portion is fixed to the case along the rotational direction of the second probe. In a state in which the second strain gauges R3i and R3e are attached, the strain gauges compressed in the first strain gauges according to the rotation of the first probe and the second probes are tension strains in the second strain gauges. Forming a first Wheatstone bridge facing each other, the inclination angle difference (θ1 + θ2) between the first axis and the second axis in proportion to the bridge voltage difference of the first Wheatstone Bridge Calculating and; A pair of first strain gauges R1i and R1e are attached to the outer and inner surfaces of the position separated from the center of the first leaf spring, and the outer and inner surfaces of the position separated from the center of the second leaf spring. In a state in which the second strain gauges R4i and R4e are attached in pairs, the strain gauges that are compressed among the first strain gauges according to the rotation of the first probe and the second probes are compressed of the second strain gauges. The strain gauges facing each other with the strain gauges, and the strain gauges stretched among the first strain gauges form a second piston bridge facing the strain strains of the second strain gauges to form a bridge voltage of the second piston bridge. Calculating a step d of the first axis and the second axis proportional to the difference; A display step of calculating and displaying at least one of the calculated inclination angle difference and the step between the first axis and the second axis; An axis alignment step of adjusting and aligning the first axis and the second axis while checking an inclination angle difference and a step between the first axis and the second axis displayed in the display step; An axis alignment method comprising a. The method of claim 17, The first probe and the second probe is installed in three places on the circumferential surface of the first axis and the second axis, axis alignment method characterized in that installed in the vertical direction, left and right direction and diagonal direction. delete delete delete

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