KR100612933B1 - 3d image measuring apparatus and method thereof - Google Patents

Abstract

The three-dimensional shape measuring apparatus of the present invention XY stage; A projection unit comprising a plurality of illumination and condensing / projecting lenses, a grating plate, and a conveying means; A light path converter having a plurality of mirrors, filters, third and fourth illuminations; An imaging unit; The control unit is divided into a first control unit and a second control unit. In addition, the three-dimensional shape measuring method of the present invention selectively turns on the first and second illumination, and measures the reference phases for the first and second illumination, respectively, using a grating, projection lens, mirror, and filter, and checks the inspection object. Move to a predetermined position and obtain three-dimensional information of the inspection object by using the difference between the reference phases of the first and second illuminations, and calculate the average Calculate a single two-dimensional image of the inspection object without additional illumination, and grasp the shadow position and the brightly shining area by using the gray brightness value, and acquire the portion corresponding to the shadow position of the first illumination by the second illumination. The 3D information is replaced with the 3D information, and the 3D information is finally obtained using the 3D information corrected by the second illumination.

3D, Measuring Device, Multiple Lighting, Filters, Grid, Shadow Area

Description

3D Shape Measuring Apparatus and Method

1 is a schematic diagram of a conventional three-dimensional shape measuring apparatus,

2 is an explanatory diagram illustrating a conventional measuring process;

3 is a perspective view of a three-dimensional shape measuring apparatus of the present invention,

4 is a perspective view of an XY stage which is a main part of the present invention;

5 is a perspective view of a projection that is a main part of the present invention;

6 is a perspective view of an optical path converter which is a main part of the present invention;

7 is a perspective view of an image forming unit, which is a main part of the present invention;

8 is a perspective view showing another embodiment of the imaging unit of the present invention;

9 is a block diagram showing a control unit of the present invention;

10 is a block diagram showing another embodiment of a control unit of the present invention.

Explanation of symbols on the main parts of the drawings

100: XY stage 112, 114: first and second recognition mark

200: projection 210,212: first and second illumination

230,232: first and second grid 250: actuator

260, 262: first and second projection lens 256: feedback sensor

300: optical path converter 310, 312, 320, 322: first to fourth mirror

340: third light 350: fourth light

360: beam splitter 400: imaging part

440, 450: third and fourth motor 500: the first control unit

600: second control unit

The present invention relates to an apparatus and method for measuring a three-dimensional shape, and more particularly, by scanning one side and the other side of an object to be measured alternately by using a plurality of lights and filters to remove the shadow area generated when measuring the three-dimensional shape. It relates to a three-dimensional shape measuring apparatus and method that can be.

Conventional three-dimensional shape measuring device is configured as shown in Figure 1, which is described in Korean Patent Publication No. 389017. The conventional three-dimensional shape measuring apparatus is composed of a projection grid projection unit 12a, an image acquisition unit 12k, a control module unit 12t, and a central control unit 12o.

The projection grid projection unit 12a includes a light source 12b, a condenser lens 12c, a projection grid 12d, a driving PZT unit 12e for driving the projection grid, a projection lens 12f, and a reflection mirror 12g. do. In addition, the image acquisition unit 12k includes an image lens 12n and a CCD camera 12m.

The control module unit 12t includes a motor driver 12u for driving the motor, a camera power supply 12v, an illumination power supply 12w, and a PZT drive driver 12x for driving the PZT.

Meanwhile, the central controller 12o for controlling the control module unit 12t includes an image board 12r for acquiring an image of a CCD camera, a motor control board 12s, and an interface board for interfacing with control modules. 12q).

Then, the measurement object 12j is placed on the transfer table 12h conveyed by the drive motor 12i, and the measurement object 12j is moved to the drive motor 12i to match the portion to be measured to the image acquisition unit 12k. Transfer. As the light source 12b, a halogen lamp is generally used, but a method of irradiating the projection grid 12d may be employed.

2 is a flowchart illustrating a measurement process of a conventional three-dimensional shape measuring apparatus.

First, the step of obtaining a reference phase corresponding to the reference plane is described. The reference plane is placed on the transfer table 12h and the light of the light source 12b is projected to the reference plane through the projection grid 12d and the projection lens 12f. (S100 step). In order to apply the four-bucket algorithm, the projection grid is projected to the reference plane while being micro-transferred to the driving PZT unit 12e and acquired through the CCD camera 12m and the image board 12r (step S110). A reference phase for the reference plane is obtained from the obtained grid pattern image (step S120).

In addition, the steps of obtaining the object phase corresponding to the measurement object are as follows.

The measurement object is placed on the transfer table 12h and the light of the light source 12b is projected onto the measurement plane through the projection grid 12d and the projection lens 12f (step S150). In order to apply the 4 bucket algorithm, the projection grid is microscopically transferred through the driving PZT unit 12e and projected onto the measurement surface and acquired through the CCD camera 12m and the image board 12r (step S160). A bucket algorithm is applied to the obtained grid pattern image (step S170) to obtain an object phase of the workpiece (step S180).

If the object phase is subtracted from the reference phase (S200), the moiré phase can be obtained (S210), and the actual height information of the measurement object is obtained by unwrapping the moiré phase (S220).

However, since the conventional three-dimensional shape measuring device scans the light source 12b only on one side of the measurement object 12j, shadows are generated on the other side, and thus the disadvantage of not being able to accurately measure the measurement object 12j. have.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and by scanning the grid images on both sides of the inspection object to obtain a grid image deformed by the measurement object to measure the three-dimensional shape to remove the shadow region 3 It is an object of the present invention to provide a dimensional shape measuring apparatus and method.

Another object of the present invention is to provide a three-dimensional shape measuring apparatus and method that can obtain an optical image more accurately by changing the optical characteristics of the light using a plurality of mirrors, filters and illumination.

The three-dimensional shape measuring apparatus of the present invention, the base member is formed with a plurality of recognition marks is seated, and the XY stage 100 which is movable in the XY direction by a plurality of motors; First and second illuminations, a plurality of condensing lenses respectively provided in front of the plurality of illuminations, a grating plate having a plurality of gratings formed thereon, transfer means for moving the grating plate in a direction perpendicular to the illumination direction, and a plurality of A projection unit having a projection lens; A plurality of mirrors, each of which is provided with a plurality of mirrors on both sides at predetermined intervals, first and second filters for adjusting the characteristics of light passing through the mirrors, a beam splitter provided between them, and an inspection A light path converter having a third light and a fourth light for irradiating light to the object; An imaging unit including a third filter, an imaging lens for imaging light passing through the third filter, and an imaging camera for imaging an optical image passing through the imaging lens; A first control unit comprising a first central control unit, an image acquisition card, and a serial communication unit, and connected to the first auxiliary control unit; And a second control unit connected to the second auxiliary control unit, the second central control unit and the motor control unit.

In addition, the three-dimensional shape measuring method of the present invention is the step of positioning the base member in the inspection area of the XY stage, and the step of turning on the first illumination of the position and angle programmed at the brightness programmed in advance by the grid transfer and lighting control device And projecting the light generated from the first illumination to the base member through the first grating and the first projection lens of the projection unit through the first mirror, the third mirror and the first filter of the optical path converter, and the image acquisition card. Acquiring an image while moving the lattice transfer actuator by a programmed number using the EEN signal obtained from the method; acquiring a reference phase for the first illumination by using a bucket algorithm; Acquiring a reference phase for the second illumination by using the second grating, the second projection lens, the second mirror, the fourth mirror, the second filter, and cut the inspection object. Positioning the predetermined position on the member, turning on the third light and / or the fourth light at the brightness already programmed by the grid transfer and lighting control device, and then using the programmed position information, the first recognition mark and the second light. Determining the position of the inspection object using the position of the recognition mark and measuring the inspection object by limiting the inspection area, and when the position of the inspection object is identified / confirmed, the position of the inspection object using the first motor and the second motor And turning on the first illumination at the position and angle programmed at the brightness programmed by the grating transfer and illumination control device, the generated light passes through the first grating and the first projection lens of the projection unit. Projecting the actuator using the 1st mirror, the 3rd mirror, and the 1st filter on an inspection object, and using the EEN (enable) signal obtained from the image acquisition card of a projection part, Acquiring an image through a third filter, an imaging lens, and an imaging camera of the imaging unit while moving the ram, and measuring the phase of the inspection object by using the acquired image and measuring a difference from the reference phase of the first illumination. Acquiring three-dimensional information of the inspection object using the method, and a method such as the first illumination may include the second illumination, the second grating, the second projection lens, the second mirror, the fourth mirror, and the second filter using the second filter. Acquiring three-dimensional information of the object to be inspected for illumination and acquiring a single two-dimensional image of the object to be inspected using the average of gray values of pixels of each camera of the images acquired by the first illumination; Identifying the shadow position and the brightly shining area by using the brightness value, replacing the portion corresponding to the shadow position of the first light with the three-dimensional information obtained by the second light, and Using the three-dimensional information is characterized in that finally comprising the step of obtaining three-dimensional information.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

3 is a perspective view of a three-dimensional shape measuring apparatus of the present invention.

As shown in FIG. 3, the three-dimensional shape measuring apparatus of the present invention includes an XY stage 100, an inspection unit 200, an optical path converter 300, an image forming unit 400, and an inspection region. And first and second control units 500 and 600 (see FIGS. 9 and 10).

First, as shown in FIG. 4, the XY stage 100 has a base member 110 installed thereon, and first and second recognition marks 112 and 114 at predetermined portions of the base member 110. Is formed. In addition, an inspection object 120 for three-dimensional inspection is placed at the center of the base member 110. In addition, the XY stage 100 is configured to be movable in the XY direction by the first and second motors 130 and 140 installed on one side and the other side, respectively.

As illustrated in FIG. 5, the projection unit 200 is provided with first and second lights 210 and 212 that emit light at predetermined intervals, and is disposed on the front surface of the first and second lights 210 and 212. First and second condensing lenses 220 and 222 are respectively installed. The first and second lights 210 and 212 are configured to be selectively turned on and off by the grid transfer and lighting control device 270, and control grid transfer to a pre-programmed position. In addition, the first and second lighting units 210 and 212 may be used to acquire 3D information of the inspection object 120 in the imaging unit 400 to be described later.

The grating plate 234 is provided with first and second gratings 230 and 232 at predetermined intervals. The grating plate 234 is connected to a linear motion (LM) guide 240, and the LM guide 240 is installed on the LM rail 242. The LM guide 240 is configured to be movable in a predetermined direction (up and down direction) along the LM rail by operating the grid transfer actuator 250 installed on one side thereof. That is, since the grid plate 234 is connected to the LM guide 240, the grid plate 234 may be moved in a predetermined direction according to the movement of the LM guide 240. The grating plate 234 is movable in a predetermined direction by a conveying means, and the conveying means is composed of an LM guide 240, an LM rail 242, and a lattice conveying actuator 250. In addition, a feedback sensor 256 for recognizing the position of the grating is provided at one side of the grating transfer actuator 250. The feedback sensor 256 typically uses a strain gauge sensor having different resistance values as the material increases and decreases, and a capacitive sensor for determining a difference in the amount of charge concentrated according to a distance interval.

Meanwhile, first and second projection lenses 260 and 262 are provided at predetermined intervals from the grating plate 234.

As shown in FIG. 6, the optical path converter 300 is installed at one side of the projection part 200 and is used to convert a path of light emitted from the projection part 200. The optical path converter 300 is provided with first and second mirrors 310 and 312 at which the light from the first and second projection lenses 260 and 262 are projected, respectively, at predetermined intervals. The first and second mirrors 310 and 312 may be installed to be inclined at an angle of 45 degrees, and may be installed at different angles within a predetermined range in some cases. The light passing through the first and second mirrors 310 and 312 converts the path of the light through the third and fourth mirrors 320 and 322, and the light whose path is converted is the first and second filters 330 and 332, respectively. Through) is transmitted to the inspection object 120. The first and second filters 330 and 332 installed under the third and fourth mirrors 320 and 322 filter the grid images passing through the first and second gratings 230 and 232 to filter one and the other sides of the inspection object 120. Scan the grid image n times in turn. The angles of the third and fourth mirrors 320 and 322 may be installed within a range of 20 to 80 degrees according to a user's request.

The first and second filters 330 and 332 change the optical characteristics of the light incident on the inspection object 120 in the first and second illuminations 210 and 212. The frequency filter, the color filter, the polarization filter, and the light intensity control are changed. You will use one of each filter.

The frequency filter uses an ultraviolet light removing filter for removing wavelengths of 400 nm or less, and an infrared light removing filter for removing wavelengths of 700 nm or more, and the color filter is a red, green, and blue filter for passing a specific frequency band in the visible light region. Will be used.

For example, when inspecting a PCB board, red and green filters are commonly used that correspond to the background color of the board. That is, a green filter is used for the red PCB board and a red filter is used for the green PCB board.

On the other hand, in the case of the light intensity control filter, the range of the light intensity uses a neutral concentration filter to adjust 100 ~ 50%, in the case of the polarization filter, the incident light is specularly reflected from the inspection object 120 is formed in the image forming unit 400 In order to reduce the effect, a linear polarizing filter is used.

The grid image scanned by the inspection object 120 forms a grid image deformed by the inspection object 120, and the modified grid image passes through the third illumination 340 having an O-ring shape. The third lighting 340 is provided with a plurality of LED elements 342 at predetermined intervals below. In addition, a beam splitter 360 is disposed above the third light 340, that is, between the first mirror 310 and the second mirror 312, and a fourth light is provided at one side of the beam splitter 360. 350 is installed.

The third illumination 340 is indirect illumination inclined with respect to the optical axis of the imaging camera 420 of the imaging unit 400 to be incident on an object, and the first and second recognition marks 112 and 114 have a diffuse reflection metal surface tendency. When used, the recognition mark can be effectively recognized when the imaging camera observes the recognition mark.

On the other hand, the fourth illumination 350 is a direct light incident on an object coaxially with the optical axis of the imaging camera 420, when used when the first and second recognition marks 112 and 114 have a mirror surface reflective metal surface tendency. When observing the recognition mark in the imaging camera 420, the recognition mark can be effectively recognized.

The light generated by the third illumination 340 is incident on the inspection object 120 at a relatively large incident angle, and then is reflected on the surface of the inspection object 120 and input to the image forming unit 400. In addition, the light generated by the fourth illumination 350 is coaxial with the optical axis of the imaging unit 400 through the beam splitter 360, and the light is incident on the inspection object 120 at a narrow angle of incidence. Reflected from the surface of the object 120 is input to the image forming unit 400. The incidence angle of the third illumination 340 may use a range of 2 to 35 degrees, and the incidence angle of the fourth illumination 350 may use a range within 10 degrees. In this case, the incidence angle of the third light 340 is applied in the range of 5 to 20 degrees, and the incidence angle of the fourth light 350 is applied within 5 degrees.

Recognition marks that reflect the incident light relatively well with respect to the first and second recognition marks (112, 114) described above are classified into a kind of high reflectance tendency according to the surface treatment state, and is divided into a kind of high specular reflection tendency. Can be.

The recognition mark uses a metal material which is characterized by reflecting rather than absorbing light, which has a different light reflection tendency according to the surface roughness of the metal recognition mark processed and surface-treated by an etching method.

When the surface roughness is large, the incident light is reflected from the metal surface several times, and then shows a tendency to emit reflected light in various directions irrespective of the direction of the incident light. This is called a metal surface with diffuse reflection, and when the surface roughness is minute, the incident light is made of metal. It is called a metal surface with specular reflection since it causes specular reflection on the surface, and the incident light, the normal of the surface, and the angle of the reflected light are formed at the same angle, so that the incident light is reflected from the surface.

As shown in FIG. 7, the imaging unit 400 has an imaging lens 410 installed below the imaging camera 420, and a third filter 402 installed below the imaging lens 410. . In the imaging unit 400, the modified grid image passing through the third filter 402 is obtained by the imaging camera 420 through the imaging lens 410. The third filter 402 serves to change the optical characteristics of the light reflected from the inspection object 120 and input to the image forming unit 400. Here, the "change of optical properties of light" means to pass through a limited frequency range of light passing through a corresponding filter, to adjust the intensity of light, to limit the polarization direction of light or to change the polarization property of light. In addition, the third filter 402 may use any one of a frequency filter, a color filter, a polarization filter, and a light intensity control filter.

On the other hand, the imaging unit 400 in another embodiment, as shown in Figure 8, may be provided to move the imaging lens 410 and the imaging camera 420 to each other. The imaging lens 410 and the imaging camera 420 are connected to the imaging lens supporting member 412 and the imaging camera supporting member 422, respectively, and the imaging lens supporting member 412 and the imaging camera supporting member 422 are respectively. Respectively connected to an LM guide 414 for an imaging lens and an LM guide 424 for an imaging camera. A fourth motor 450 is installed at one side of the LM guide 414 for the imaging lens, and a third motor 440 is installed at one side of the LM guide 424 for the imaging camera. The LM guide 414 for the imaging lens and the LM guide 424 for the imaging camera are provided at predetermined intervals on the LM rail 430. The moving means of the imaging unit 400 is an LM guide 424 and an imaging system for an imaging camera, respectively connected to an imaging camera 420 and an imaging lens 410 by an imaging camera support member 422 and an imaging lens support member 412, respectively. On one side of the LM guide 414 for the lens, the LM rail 430 connected to the LM guides 424 and 414 for the imaging camera and the imaging lens, and the LM guides 424 and 414 for the imaging camera and the imaging lens. The third and fourth motors 440 and 450 are installed. Therefore, since the imaging lens 410 and the imaging camera 420 may be moved to a predetermined position by the operation of the fourth motor 450 and the third motor 440, the zooming function of the imaging unit 400 may be performed. Can be. The third filter 402 preferably uses a filter as described above.

9 is a block diagram for explaining the operation of the three-dimensional shape measuring apparatus, Figure 10 is a block diagram for explaining another embodiment of the three-dimensional shape measuring apparatus.

In FIG. 9, the three-dimensional shape measuring apparatus of the present invention is configured by dividing a control unit into first and second control units 500 and 600, and the first control unit 500 includes a first central control unit 530 and an image acquisition card ( 280, a serial communication device 520, and the second controller 600 includes a second central controller 630 and a motor controller 610.

The image acquisition card 280 is configured to transmit an EEN signal to the grid transfer and illumination control device 270 and receive a trigger signal from the grid transfer and illumination control device 270. When the grid transfer and illumination control device 270 sends an operation signal to the grid transfer motor driver 252, the grid transfer actuator 250 is operated according to the signal. In addition, the signal obtained from the feedback sensor 256 is transmitted to the grid transfer motor driver 252, and this signal is also transmitted to the grid transfer and lighting control device 270. The serial communication apparatus 520 is for communicating with the grid transfer and lighting control device 270 when the illumination brightness, grid transfer interval, etc. are set from the first central controller 530.

The first control unit 500 is connected to the first auxiliary control unit 550, the first auxiliary control unit 550 is composed of a grid transfer motor driver 252 and the grid transfer and lighting control device 270, The second control unit 600 is connected to the second auxiliary control unit 650, and the second auxiliary control unit 650 includes first and second motor drivers 132 and 142.

In addition, the second control unit 600 may be connected to the third auxiliary control unit 670, as shown in Figure 10, the third auxiliary control unit 670 is the first and second motor of the XY stage 100 And first to fourth motor drivers 132, 142, 442, and 452 for driving the third and fourth motors 440 and 450 of the image forming unit 400. Here, the second control unit 600 is a case where the configuration of the imaging unit 400 is configured as shown in FIG. 8, and is composed of a second central control unit 630 and a motor control unit 610, and the second control unit 600. The motor control device 610 of FIG. 1 is connected to the third auxiliary control unit 670 including the first to fourth motor drivers 132, 142, 442, and 452.

The first control unit 500 is the same as the above-described embodiment, and the only difference is the third and fourth motor drivers 442 and 452 for driving the third and fourth motors 440 and 450 in the second control unit 600. It is further connected to the motor controller 610. That is, the operation of another embodiment of the imaging unit 400 is the third and fourth motor drivers 442 and 452 controlled by the motor controller 610 mounted to the second control unit 600, as shown in FIG. Since the third and fourth motors 440 and 450 are controlled by controlling the imaging, the imaging camera 420 and the imaging lens 410 are vertically transferred to each other to allow imaging at various magnifications.

Meanwhile, the three-dimensional shape measuring method of the present invention includes positioning the base member 110 in the inspection area I of the XY stage 100, and using a brightness previously programmed by the grid transfer and lighting control device 270. Turning on the first illumination 210 of the programmed position and angle, and the light generated from the first illumination 210 through the first grating 230 and the first projection lens 260 of the projection unit 200. Projecting to the base member 110 through the first mirror 310, the third mirror 320, and the first filter 330 of the optical path converter 300, and the EEN signal obtained from the image acquisition card 280. Acquiring an image while moving the grid transfer actuator 250 by a programmed number by using the second method, acquiring a reference phase for the first illumination 210 by using a bucket algorithm, and second illumination 212. Turn on and change the optical path through the second grating 232 and the second projection lens 262 of the projection unit 200 as described above. Acquiring a reference phase for the second illumination 212 using the second mirror 312, the fourth mirror 322, and the second filter 332 of the apparatus 300, and inspecting the inspection object 120. Positioning the predetermined position on the base member 110, turning on the third light 340 and the fourth light 350 at the brightness already programmed by the grid transfer and lighting control device 270, and then programming the programmed position information. Using the positions of the first recognition mark 112 and the second recognition mark 114 to determine the position of the inspection object 120 and limit the inspection area to measure the inspection object 120, and inspection When the position of the object 120 is identified / confirmed, the first motor 130 and the second motor 140 are moved to the position of the inspection object 120, and the grid transfer and light control device 270 is moved. When the first illumination 210 is turned on with the brightness programmed by the light path, the generated light is changed to the optical path through the first grating 230 and the first projection lens 260 of the projection unit 200. Projecting to the inspection object 120 through the first mirror 310, the third mirror 320, and the first filter 330 of the ventilation 300, and the image acquisition card 280 of the projection unit 200. Acquiring an image through the third filter 402 of the optical path converter 300 and the camera 420 of the image forming unit 400 while moving the actuator 250 by a programmed number using the EEN signal obtained from Measuring the phase of the inspection object 120 using the acquired image and acquiring three-dimensional information of the inspection object 120 by using a difference from a reference phase of the first illumination 210; and The same method as the illumination 210 may generate light generated from the second illumination 212 by the second grating 232, the second projection lens 262, the second mirror 312, the fourth mirror 322, and the second light. Acquiring three-dimensional information of the inspection object 120 for the second illumination 212 through the filter 332, and of each imaging camera 420 of the images obtained by the first illumination (210) Pick Computing a two-dimensional image of the object to be inspected without using the average gray value of the illumination, and using the gray brightness value to identify the shadow position and the brightly shining area, and the first illumination 210 Replacing the portion corresponding to the shadow position with the three-dimensional information obtained by the second illumination 212, and finally obtaining the three-dimensional information by using the three-dimensional information corrected by the second illumination 212. Is done.

In the step of acquiring the image, the time for acquiring the image depends on the image acquisition speed of the imaging camera 420. During image acquisition, an exposure meter (not shown) of the imaging camera 420 is exposed to the imaging camera 420 for a predetermined time. The start of the exposure is then synchronized with the EEN signal. That is, since the start of the exposure can be known by the EEN signal, the grid transfer and control device 270 transfers the grid as desired by receiving the EEN signal and avoiding a predetermined exposure time.

Meanwhile, the obtaining of the image through the imaging camera 420 of the third filter 402 and the image forming unit 400 may be performed by using the actuator 250 using the EEN signal obtained from the image acquisition card 280 of the projection unit 200. ), The imaging lens 410 and the imaging camera 420 of the third filter 402 and the imaging unit 400 of the optical path converter 300 are moved to the fourth and third motors 450 and 440 by moving the programmed number. The method may further include acquiring a predetermined number of images while adjusting. That is, as shown in FIG. 8, desired images are acquired while moving the imaging lens 410 and the imaging camera 420 to predetermined positions, respectively. In addition, in the step of acquiring an image through the imaging camera 420 of the third filter 402 and the image forming unit 400, when the obtained image is not appropriate, the imaging is performed using the third and fourth motors 440 and 450. The method may further include adjusting the current magnification by adjusting the camera 420 or the imaging lens 410. By performing such a step, it is possible to obtain a desirable image by adjusting the current magnification.

As described above, the three-dimensional shape measuring apparatus of the present invention selectively uses a plurality of lights and at the same time, using a plurality of filters, even if the optical properties and geometrical shapes of the inspection object are changed in various ways, the three-dimensional shape is correspondingly responded. Can be measured.

Claims (18)

A XY stage on which a base member having a plurality of identification marks formed thereon is mounted and which is movable in the XY direction by a plurality of motors; First and second illuminations, a plurality of condensing lenses respectively provided in front of the plurality of illuminations, a grating plate having a plurality of gratings formed thereon, transfer means for moving the grating plate in a direction perpendicular to the illumination direction, and a plurality of A projection unit having a projection lens; A plurality of mirrors, each of which is provided with a plurality of mirrors on both sides at predetermined intervals, first and second filters for adjusting the characteristics of the light passing through the mirrors, and third lighting and third for irradiating light to the inspection object. An optical path converter having four illuminations; An imaging unit including a third filter, an imaging lens for imaging light passing through the third filter, and an imaging camera for imaging an optical image passing through the imaging lens; A first control unit for controlling the first auxiliary control unit connected to the projection unit and the optical path converter and receiving and processing the optical image; And a second control unit for controlling a second auxiliary control unit connected to the plurality of motors of the XY stage. The three-dimensional shape measuring apparatus of claim 1, wherein the first and second illuminations of the projection unit are configured to be selectively turned on and off by a grid transfer and an illumination control device. According to claim 1, The conveying means of the projection unit 3, characterized in that consisting of an LM guide connected to the grid plate, the LM rail on which the LM guide is seated, and an actuator for driving and installed on one side of the LM guide Dimensional shape measuring device. The apparatus of claim 3, wherein the actuator is provided with a feedback sensor for recognizing a position on one side of the actuator. The apparatus of claim 1, wherein the plurality of mirrors of the optical path converter are first to fourth mirrors, and the first and second mirrors are inclinedly installed. The 3D shape measurement of claim 1, wherein the first and second filters of the optical path converter and the third filter of the image forming unit are any one of a frequency filter, a color filter, a polarization filter, and an optical intensity control filter. Device. According to claim 1, wherein the third and fourth illumination of the optical path converter is configured to be selectively ON / OFF indirect and direct lighting respectively, the third illumination has a range of incidence angle of 2 to 35 degrees and the first And when the second recognition mark has a diffuse reflection metal surface tendency, the fourth illumination has an incidence angle range within 10 degrees, and when the first and second recognition marks have a mirror reflection metal surface tendency. 3D shape measuring device. The image forming apparatus of claim 1, wherein the imaging unit comprises a plurality of LM guides respectively connected to the imaging lens and the imaging camera, an LM rail connected to the LM guide, and the LM guide to move the imaging lens and the imaging camera vertically. Three-dimensional shape measuring apparatus further comprises a plurality of motors for making. The apparatus of claim 1, wherein the first control unit comprises a first central control unit, an image acquisition card, and a serial communication unit, and comprises a lattice transfer motor driver for controlling the transfer of the lattice, and a lattice transfer and lighting control unit. 1 3D shape measuring apparatus, characterized in that connected to the auxiliary control unit. The second auxiliary control unit of claim 1, wherein the second control unit comprises a second central control unit and a motor control unit, and the second auxiliary control unit comprises first and second motor drivers for driving the first and second motors of the XY stage. 3D shape measuring apparatus, characterized in that connected to. delete An XY stage movable in the XY direction; A projection unit comprising a plurality of lights, a plurality of condenser lenses installed in the plurality of lights, a grating plate having a plurality of gratings formed thereon, a transfer means for moving the grating plate, and a plurality of projection lenses; A light path having a plurality of mirrors, a plurality of filters for adjusting the characteristics of light passing through the mirrors, a beam splitter provided between them of the plurality of mirrors, and a plurality of illuminations for irradiating light to an inspection object. A converter; Moving at least one filter, an imaging lens for imaging light passing through the filter, an imaging camera for imaging an optical image passing through the imaging lens, and the imaging lens and the imaging camera in a vertical direction An image forming unit having a moving unit for moving; A first control unit for controlling the first auxiliary control unit connected to the projection unit and the optical path converter and receiving and processing the optical image; And a second control unit for controlling a third auxiliary control unit connected to the plurality of motors of the XY stage and the plurality of motors of the imaging unit. 13. The apparatus of claim 12, wherein the projection means comprises a LM guide connected to the grid, an LM rail on which the LM guide is seated, and an actuator installed at one side of the LM guide and configured to drive the LM guide. Dimensional shape measuring device. The imaging unit according to claim 12, wherein the moving unit of the imaging unit comprises: an LM guide for an imaging camera and an LM guide for an imaging lens, respectively connected to an imaging camera and an imaging lens by an imaging camera support member and an imaging lens support member, respectively, and connected to the LM guide. And a third and fourth motors provided at one side of each of the LM rails and the LM guide for the imaging camera and the LM guide for the imaging lens. The method of claim 12, wherein the third auxiliary control unit of the second control unit is a first to fourth motor driver for driving the first and second motors of the XY stage and the third and fourth motor of the image forming unit 3D shape measuring device. Positioning the base member in the inspection area I of the XY stage; Turning on the first illumination of the position and angle programmed at the brightness programmed in advance by the grid transfer and illumination control device; Projecting the light generated from the first illumination to the base member through the first grating and the first projection lens of the projection unit through the plurality of mirrors and the first filter of the optical path converter; Acquiring an image while moving the grid transfer actuator by a programmed number using the EEN signal obtained from the image acquisition card; Obtaining a reference phase for the first illumination using a bucket algorithm; Turning on the second illumination and using the second grating, the second projection lens, the plurality of mirrors, and the second filter to obtain a reference phase for the second illumination, as described above; Positioning the inspection object at a predetermined position on the base member; After turning on the third and fourth lights with the brightness already programmed by the grid transfer and lighting control device, the location of the inspection object is identified and inspected using the positions of the first and second recognition marks using the programmed position information. Defining an area to measure an inspection object; If the position of the inspection object is identified / confirmed, moving to the position of the inspection object using a plurality of motors; When the first light is turned on at the brightness programmed by the grid transfer and illumination control device, the generated light is projected onto the inspection object through the plurality of mirrors and the first filter of the optical path converter through the first grating and the first projection lens of the projection unit. Making a step; Acquiring an image through a camera of the third filter of the optical path converter and the image forming unit while moving the actuator by a programmed number using the EEN signal obtained from the image acquisition card of the projection unit; Measuring the phase of the inspection object by using the acquired image and acquiring three-dimensional information of the inspection object by using a difference from the reference phase of the first illumination; The first illumination method may include obtaining three-dimensional information of the inspection object for the second illumination by using the second grating, the second projection lens, the plurality of mirrors, and the second filter with the light generated from the second illumination; ; Acquiring a two-dimensional image of an object to be inspected using an average of gray values of pixels of each camera of the images acquired by the first illumination, and identifying a shadow position and a brightly shining area using gray brightness values Wow; Replacing the portion corresponding to the shadow position of the first illumination with the three-dimensional information obtained by the second illumination, and finally obtaining the three-dimensional information by using the three-dimensional information corrected by the second illumination. Three-dimensional shape measurement method characterized in that. 17. The method of claim 16, wherein acquiring an image through a camera of the third filter and the image forming unit comprises: moving the actuator by a programmed number using an EEN signal obtained from an image acquisition card of the projection unit, and performing a third filter and image forming of the optical path converter. And acquiring an image while adjusting the negative imaging lens and the camera with a plurality of motors. 17. The method of claim 16, wherein in the obtaining of the image through the camera of the third filter and the image forming unit, if the obtained image is not appropriate, adjusting the current magnification by adjusting the imaging lens or the image forming camera using a plurality of motors. Three-dimensional shape measurement method characterized in that it further comprises.

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