KR100592367B1 - Combination structure of burn-in board and expansion board - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for testing semiconductor devices, and more particularly to a burn-in board having sockets into which a plurality of semiconductor elements are inserted, and a burn-in board in a chamber of the testing apparatus. The present invention relates to a coupling structure of an extended board used when mounted, and for this purpose, a first guide of an upper plate and a lower plate that protrudes up and down in parallel with the connection terminal, and a first guide corresponding to the first guide and around the slots. Disclosed is a coupling structure of a burn-in board and an expansion board including a second guide formed, and through this coupling structure when the burn-in board is coupled to the expansion board can prevent damage to the connection terminal or slot, furthermore, the efficiency of the inspection apparatus Can improve.

Burn-in Board (BIB), Connector, Expansion Board (EB), Slot, Guide

Description

Combination structure of burn-in board and extension board {Connecting structure of burn-in board and extend board}

1 is an exploded perspective view illustrating a combination of a conventional burn-in board and an expansion board;

Figure 2 is a perspective view briefly showing how the expansion board is coupled to the chamber of the inspection device,

Figure 3 is an exploded perspective view showing the combination of the burn-in board and the expansion board according to an embodiment of the present invention,

4 is a cross-sectional view of the coupling portion of FIG. 3.

Description of the main parts of the drawing

10, 110: connection terminal 12, 112: body

14, 114: socket 30, 130: burn-in board

40, 140: slot 42, 142: body

44, 144: expansion terminal 46, 146: slot outer wall

60, 160: expansion board 70: expansion slot

100: chamber of the inspection device 120: first guide

122: top plate 124: bottom plate

126: fixing means 150: second guide

152: opening

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for testing semiconductor devices, and more particularly to a burn-in board (BIB) having a socket into which a plurality of semiconductor elements are inserted, and to such a burn-in board. The present invention relates to a coupling structure with an extension board (EB) used when mounted in a chamber.

In general, a semiconductor device is burn-in that is subjected to a long time stress under high temperature or room temperature heat and a constant voltage in order to guarantee the reliability, electrical performance and life cycle of the product after manufacturing Inspection and electrical characteristics are tested.

Burn-in inspection is a product to guarantee the life of the product by screening initial defects of semiconductor device products, and electrical property inspection is a product that is defective in DC and bad in the process of fabrication and assembly. Process for sorting and rapid sorting.

Since it is inefficient to process the process by supplying each semiconductor element individually to such burn-in inspection and electrical characteristic inspection, it supplies a large amount of products at one time by using a medium called a test board. Various types of test substrates can be used.

Such a test board is called a "burn-in board (BIB)" because it is used in a burn-in test process, etc., and a burn-in board is normally connected through an intermediate board called an expansion board (EB) mounted in a chamber of a semiconductor device test apparatus. Is common.

1 is an exploded perspective view showing a combination of a conventional burn-in board 30 and the expansion board 60, Figure 2 is a perspective view briefly showing the expansion board 60 is coupled to the chamber 100 of the inspection apparatus to be. Referring to Figure 1 and 2 briefly describe the coupling structure of the conventional burn-in board 30 and the expansion board 60 as follows.

The conventional burn-in board 30 has a body 12 having a connection terminal 10 formed at one side thereof, a socket 14 formed at the body, and a metal wiring (not shown) electrically connecting the connection terminal and the socket, respectively. The conventional expansion board 60 includes a metal wire for electrically connecting the slots 40 and the expansion terminals and the slots formed on the opposite side on which the body 42 and the expansion terminal on which the expansion terminal 44 is formed are formed. (Not shown) is a structural feature. In addition, the slot 40 is protected by being surrounded by the slot outer wall 46.

The expansion boards 60 having such a structure are mounted in the chamber 100 of the inspection apparatus, and the burn-in board 30 and the expansion board 60 are connected to the burn-in board 10 by a slot of the expansion board ( 40) are fitted to each other.

The expansion board 60 is characterized in that the expansion terminal 44 of the plurality of expansion boards are fitted into the expansion slots 70 formed in the chamber 100 of the inspection apparatus, respectively, expansion boards 60 Is fixed after being coupled to the chamber 100 of the inspection apparatus, and the inspection process for the semiconductor elements is repeatedly performed while the burn-in board 30 into which the semiconductor elements are inserted is replaced and coupled to the fixed expansion board 60. .

As described above, when the semiconductor device is repeatedly inspected, the expansion board and the burn-in board must be repeatedly combined and separated. Accordingly, the coupling part between the burn-in board and the expansion board-the connection terminal of the burn-in board and the expansion board. Slots, etc.-can be damaged.

In more detail, if the burn-in board slides horizontally and the burn-in board is not correctly aligned in the process of being joined to the expansion board, it may cause damage such as breaking of the end of the connector, which is a coupling part of the burn-in board. At the same time, the slots of the expansion board into which the damaged connection terminals are inserted may also cause damage such as pins or open pins in the slots.

In addition, if the burn-in board falls to the floor by mistake of the operator may also cause damage, such as broken connection terminal protruding from the burn-in board.

At this time, if the burn-in board is damaged, it will bring an error to the inspection of the semiconductor devices inserted into the burn-in board. If the extension board is damaged, the semiconductor devices inserted into all the burn-in boards inserted into the expansion board will be This can lead to errors in the test.

An object of the present invention is to provide a combined structure of the burn-in board and the expansion board that can prevent damage to the connection terminal and the slots that are the coupling portion of the burn-in board and the expansion board.

Another object of the present invention is to prevent damage to the connection terminal and the slot in the bonding process of the burn-in board and expansion board to suppress the occurrence of the cost of frequent replacement of materials to improve the efficiency of the inspection apparatus.

In order to achieve the above object, the present invention provides a burn-in including a body in which connection terminals are formed at one side, a plurality of sockets formed in the body and into which a semiconductor element is inserted, and metal wires electrically connecting each socket and the connection terminal. board; And an expansion board including a body having an expansion terminal formed at one side, slots formed at opposite sides formed with the expansion terminal formed therein, and metal wires electrically connecting the expansion terminal and the slots. The burn-in board includes a first guide in the form of a flat plate protruding up and down of the connection terminal in parallel with the connection terminal, and the expansion board is formed around the slots and the groove to which the first guide can be fitted corresponding to the first guide. It comprises a second guide constituting a structure, and provides a coupling structure of the burn-in board and the expansion board, characterized in that the burn-in board and the expansion board is coupled by contacting the connector and the slot after the first / second guide contact. .

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

3 is an exploded perspective view showing the combination of the burn-in board and the expansion board according to an embodiment of the present invention, Figure 4 is a cross-sectional view showing a coupling portion of the center. Referring to Figure 3 and 4 will be described the coupling structure of the burn-in board and the expansion board according to the present invention.

The burn-in board 130 according to the present invention has a body 112 formed by protruding the connection terminals 110 on one side and the sockets 114 and the connection terminals and the sockets respectively formed on the body and into which the semiconductor elements are inserted. It includes a metal wiring (not shown) connected to the expansion board 160, the expansion terminal 144 protruding on one side of the body 142 and protruding slots 140 formed on the opposite side formed with the expansion terminal and Structural features include a metal wire (not shown) that electrically connects the expansion terminal and the slot.

In addition, the burn-in board 130 and the expansion board 160 each include first / second guides 120/150 in accordance with a feature of the present invention. The first guide 120 includes a top plate 122 and a bottom plate 124 in the form of a flat plate protruding up and down in parallel with the connection terminal 110 of the burn-in board 130, the second guide 150 Is formed around the slots 140 of the expansion board 160, characterized in that the opening 152 is inserted into the slot is formed.

The second guide 150 forms a groove structure together with the slot outer wall 146 formed around the slots 140 of the expansion board 160, and is formed of upper and lower plates 122/124 in the groove structure. The first guide 120 of the burn-in board 130 corresponds.

The first guide 120 and the second guide 150 are preferably made of aluminum alloy, and fixing means such as bolts on the burn-in board 130 and the expansion board 160, respectively. It is preferred to be fixed through 126.

The expansion boards 160 having such a structure are generally mounted in a plurality of about 48 inside the chamber of the inspection apparatus, and each of the burn-in boards 130 and the expansion boards 160 are first / second guides. (120/150) are first contacted and then inserted into the connection terminal 110 of the burn-in board is coupled to each other while being inserted into the slot 140 of the expansion board.

The end of the first guide according to the invention is preferably rounded to reduce the friction that may occur in the process of coupling the first guide and the second guide.

In addition, since the first guide and the second guide according to the present invention are fixed to the burn-in board and the expansion board through the fixing means, respectively, the first guide and the second guide may be replaced by a new one by releasing the fixing means. In this way, when the burn-in board is damaged, the burn-in board may be reduced compared to replacing the entire burn-in board.

Since the first and second guides according to the present invention are first coupled while sliding horizontally, the connection terminal of the burn-in board can be slidably and horizontally coupled to the slot of the expansion terminal, thus connecting unlike the conventional coupling structure. It can prevent the terminal or slot from being damaged.

In other words, the sliding of the burn-in board is accurately leveled by the combination of the first and second guides, and thus the connection terminal of the burn-in board is not accurately contacted with the slot of the expansion board, so that the connection terminal is broken or the pin inside the slot is opened. It can prevent damage such as being pushed or pressed.

The combination structure of the burn-in board and the extension board according to the present invention includes first and second guides, and the first and second guides are first contacted and fitted, and then the connector of the burn-in board and the slot of the extension board are coupled. It features.

By combining the first and second guides, the slippage of the burn-in board can be prevented from shifting horizontally, thereby preventing damage to the connection terminal and the slot, thereby improving the efficiency of the inspection apparatus used in the inspection process. In addition, since the first / second guides are fixed through the fixing means, they can be easily separated and replaced.

Claims (3)

A burn-in board including a body having connection terminals formed at one side thereof, a plurality of sockets formed at the body and into which semiconductor elements are inserted, and metal wires electrically connecting the sockets and the connection terminals; And An expansion board including a body having an expansion terminal formed at one side thereof, slots formed at opposite sides of the expansion terminal formed therein and coupled with the connection terminals, and metal wires electrically connecting the expansion terminal and the slots; In the bonding structure of The burn-in board includes a first guide in the form of a flat plate protruding up and down of the connection terminal in parallel with the connection terminal. The expansion board includes a second guide formed around the slots and forming a recess structure in which the first guide may be fitted in correspondence to the first guide. Combination structure of the burn-in board and the expansion board, characterized in that the burn-in board and the expansion board is coupled by contacting the connector and the slot after the first / second guide contact. The combined structure of the burn-in board and the expansion board according to claim 1, wherein the end of the first guide is rounded to reduce friction when the first guide is coupled to the second guide. The burn-in board and the extension board of claim 1, wherein the first and second guides are respectively fixed to the burn-in board and the expansion board through fixing means, and can be separated by releasing the fixing means. Coupling structure.

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