KR100288079B1 - Method for forming flat display device - Google Patents

Abstract

PURPOSE: A method for forming a flat display device is provided to enhance characteristics and reliability without damaging elements such as a fluorescent layer and a cathode layer by fixing spacers using a laser beam and then forming a FED. CONSTITUTION: First, a frit glass(13) is formed on a lower substrate(11). Then, a hard mask(15) is aligned and fixed on the lower substrate. Next, spacers(17) are aligned on the frit glass using the hard mask. Then, the spacers and the lower substrate are bonded by performing the heat treatment against the frit glass using a laser beam(19) through the spacers. In this structure, a coloring agent may be added to the frit glass(13). In addition, it is preferable that the heat treatment is performed within the temperature range of 400-500 deg.C.

Description

Formation method of flat panel display

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat panel display device and a method for forming the same, and more particularly, to a technique for receiving a device from damage during a spacer forming process for maintaining a cell gap of a flat display and improving characteristics and reliability of the device.

Flat panel displays are attracting attention due to their advantages such as low power consumption and thinning. Liquid crystal displays (hereinafter referred to as LCDs) using optical anisotropy of liquid crystals or plasma displays using plasma discharges are known. pannel (hereinafter referred to as PDP) or field emission display (hereinafter referred to as FED).

The FED applies a relatively low voltage, for example, a voltage of about 5 to 10 mA by using a phenomenon in which an electric field is concentrated at a sharp part of a tip, so that a high electric field of about 5 × 10 ⁷ V / cm is applied to a metal or a conductor. A display device for displaying an image by causing electrons to protrude out of a solid through quantum mechanical tunneling to be accelerated by a voltage applied to the opposite rear electrode to strike a fluorescent layer formed on the electrode to emit light. It is attracting attention as the next generation display device because it has both the high definition of CRT and the light and thin type of LCD.

In particular, FED is attracting attention as it is not only possible to manufacture thin and thin, but also solves the problems of process yield, manufacturing cost, and enlargement, which are crucial disadvantages of LCD. In other words, if a single pixel is defective in LCD, the whole product is treated badly. However, FED has a larger number of unit pixels in one pixel group. There is no abnormality in the operation of the group, which improves the overall product yield. In addition, the FED has the advantages of simple structure, low power consumption, low unit cost, and suitable for a portable display device.

Initially, the FED is exposed to the outside by a cavity, and has a conical emitter (cathode) having a sharp portion, a gate arranged on both sides of the emitter, and an anode spaced apart from the gate. Each corresponding to a cathode, a grid and an anode of the CRT.

Herein, the FED performs a spacer forming process to maintain a cell gap between an upper substrate on which a fluorescent layer and a transparent electrode are formed and a lower substrate on which a field emission element (hereinafter referred to as FEA) is formed, and the upper substrate is formed. Seal the end of the lower substrate with the seal.

At this time, the spacer for the FED should be maintained so that the distance between the upper substrate and the lower substrate is about 150 ~ 2000㎛, in order to satisfy this method of printing, forming a method of spraying the spacer fine particles on the substrate, or a material for the spacer Forming an appropriate height on the substrate and patterning it, and the like.

However, the printing method can be carried out by applying the conventional method for forming the conventional PDP, but it is difficult to form a spacer having a width of 300 μm or more as a narrow width, and the method of spraying fine particles for spacers on a substrate is high density. It is difficult to manufacture the panel and spraying it on the whole panel can damage the cathode tips. If the material for spacer is formed on the front surface to be the proper height and etched, high density patterning process is possible. And the process process is difficult.

Although not shown, a method of forming a flat panel display device according to the related art is as follows.

First, frit glass is printed on a predetermined portion of the lower substrate. The frit glass is prebaked at a temperature of about 350 ° C. to remove the oil agent and the binder contained therein.

Next, the hard mask having the groove formed on the lower plate is aligned and fixed to the frit glass. In this case, the hard mask is made of a material having excellent flatness and hardly bent in heat. Then, the end of the hard mask is aligned with the hard mask on the substrate and fixed to the instantaneous adhesive on the bottom plate.

The spacer is inserted into the groove to be aligned with the bonding frit glass formed on the lower plate through the groove.

Next, the spacer bonding substrate is formed on the lower plate provided with the spacer. In this case, the bonding panel uses a material having excellent flatness and hardly bent in heat, such as ceramics.

Then, pressure is applied to the lower plate and the bonding substrate with an object such as tongs so that the spacer is adhered to the frit glass portion formed on the lower plate.

Then, the bonding substrate and the hard mask are removed, and the FED is formed by aligning and bonding the upper plate on which the frit glass is printed on the lower plate on which the spacer is fixed. In this case, the top plate may not be provided with the frit glass.

Here, the substrate with the cathode and the gate electrode may be the lower plate, the substrate with the anode may be the upper plate, or conversely, the substrate with the cathode and the gate electrode may be the upper plate, and the substrate with the anode may be the lower plate. It may be.

As described above, the flat panel display and the method of forming the same according to the related art have a problem that the fluorescent layer or the cathode layer may be damaged by the hard mask during the bonding process of the spacer.

SUMMARY OF THE INVENTION The present invention provides a flat display device and a method for forming the same, which can improve characteristics and reliability without damaging a device by fixing a spacer using a laser and then forming a FED in a subsequent process in order to solve the above problems of the prior art. The purpose is to provide.

1A and 1B are a cross-sectional view and a plan view showing a flat panel display device and a method of forming the same according to an embodiment of the present invention.

2 is a cross-sectional view showing a flat panel display device and a method of forming the same according to another embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

11,37: Lower substrate 13,39: Frit glass

15,33: hard mask 17,35: spacer

19,41: Laser 21: Home

23: alignment mark 31: bonding substrate

In order to achieve the above object, a flat panel display device forming method according to the present invention,

Forming frit glass on the lower substrate;

Aligning and fixing a hard mask on the lower substrate;

Aligning a spacer to the frit glass through the hard mask;

The frit glass is heat-treated with a laser through the spacer, thereby bonding the spacer and the lower substrate.

In addition, the method for forming a flat panel display according to the present invention in order to achieve the above object,

Aligning and fixing a hard mask having grooves formed on the bonding substrate;

Aligning a spacer with a groove of the hard mask;

Aligning the upper or lower substrate on which frit glass is formed on the alignment portion of the wing spacer;

Bonding the spacer to a substrate by irradiating heat treatment with a portion provided with the frit glass with a laser;

A second feature is to include a step of bonding the lower or upper substrate to the upper or lower substrate in a subsequent step.

On the other hand, in order to achieve the above object, the flat panel display device according to the present invention,

Mounted on the upper and lower substrates, characterized in that the spacer is bonded to the upper substrate printed frit glass is provided.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1A and 1B illustrate a cross-sectional view and a plan view of a flat panel display device and a method of forming the same according to an exemplary embodiment of the present invention.

First, the frit glass 13 is formed on the lower substrate 11, and the printing method is formed at the position where the spacer is to be formed. At this time, the frit glass 13 is formed to be narrower than the width of the spacer.

The frit glass 13 is prebaked to remove an oil agent and a binder in the frit glass 13.

Next, the hard mask 15 having the groove 21 exposing the portion where the frit glass 13 is located is aligned and fixed.

In this case, the hard mask 15 may be formed of a material that is resistant to heat and has excellent flatness. In addition, the coefficient of thermal expansion using a substrate or a material similar to the spacer, but the soda-lime (soda-lime) is mainly a common window glass, soda lime used as a spacer 17, the hard mask also has a similar thermal expansion value Use materials. Therefore, the spacer 17 is formed by photolithography using photosensitive glass (hereinafter, referred to as PSG).

Here, "23" shows an alignment mark.

Next, the spacers 17 are aligned with the grooves 21 of the hard mask 15. In this case, the spacer 17 may be made of the same material as that of the substrate 11, but may be formed of a material having a similar coefficient of thermal expansion. Typically, soda-lime or PSG is used.

In addition, as a hard mask, a material having a similar thermal expansion coefficient to that of the substrate or the spacer should be used, such as PSG.

Next, the spacer 17 and the lower substrate 11 are adhered to each other by irradiating and heat treating the frit glass 13 with the laser 19 through the spacer 17. At this time, the heat treatment step is carried out at a temperature of about 400 ~ 500 ℃, preferably at a temperature of about 450 ℃.

At this time, a colorant may be added during the printing process of the frit glass 13 to facilitate the heating process of the frit glass 13 using the laser 19. (FIG. 1A FIG. 1B)

2 is a cross-sectional view illustrating a method of forming a flat panel display device according to another exemplary embodiment of the present invention.

First, the hard mask 33 is aligned on a flat plate, that is, the bonding substrate 31, and the end of the hard mask 35 having a groove (not shown) is fixed by using an adhesive. At this time, the groove is formed to align and bond the spacer to be formed in a subsequent process to the substrate.

The spacer 350 is aligned and fixed to the groove of the hard mask 33.

Next, as in the embodiment of the present invention, the substrate 37 on which the frit glass 39 is printed is aligned on the spacer 35 and the laser 35 is used to arrange the spacer 35 and the substrate 37. Is bonded.

At this time, the frit glass 39 serves to make the bonding well during the bonding process using the laser by adding the colorant (FIG. 2).

As described above, the flat panel display and the method for forming the same according to the present invention are formed on a substrate having an anode by bonding a spacer by heat treating a frit glass formed between the substrate and the spacer with a laser in consideration of the cell gap between the upper and lower plates. It is possible to prevent damage to the cathode layer of the phosphor layer and the cathode formed substrate, and to apply voltage as necessary, thereby improving the characteristics and reliability of the device.

Claims (6)

Forming frit glass on the lower substrate; Aligning and fixing a hard mask having a groove exposing the frit glass on the lower substrate; And bonding the spacer and the lower substrate onto the frit glass through the groove of the hard mask. The method of claim 1 The frit glass is a flat panel display device, characterized in that the coloring agent is added. The method of claim 1 And the heat treatment step is performed at a temperature of 400 to 500 占 폚. Aligning and fixing a hard mask having grooves formed on the bonding substrate; Aligning a spacer with a groove of the hard mask; Aligning and contacting an upper or lower substrate having frit glass with an alignment portion of the spacer; Bonding the spacer to a substrate by irradiating heat treatment with a portion provided with the frit glass with a laser; And a step of bonding a lower or upper substrate to the upper or lower substrate in a subsequent step. The method of claim 4, wherein The frit glass is a flat panel display device, characterized in that the coloring agent is added. The method according to claim 4, And the heat treatment step is performed at a temperature of 400 to 500 占 폚.

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