KR100257236B1 - Mirror for tma and manufacturing method thereof - Google Patents

Abstract

PURPOSE: A mirror of thin-film micromirror array-actuated(TMA) and manufacturing method thereof refrain the bending of a mirror caused by a thin film during a manufacturing process by using a reinforcing frame for preventing the bending of the edges of the mirror. CONSTITUTION: A reinforcing frame(520) extended from a mirror(500) in the form of 'L' is arranged in the edge of the mirror(500). The reinforcing frame(520) prevents the edge of the mirror(500) from being deformed upwards. Exactly, in case two edges of the upper and lower sides of the mirror(500) are bent upwards, two reinforcing parts of the right and left sides of the reinforcing frame(520) refrain the deformation of the mirror(500). In case two edges of the right and left sides of the mirror(500) are bent upwards, two reinforcing parts of the upper and lower sides of the reinforcing frame(520) refrain the deformation of the mirror(500).

Description

Thin-film type optical path adjusting device mirror and manufacturing method thereof

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin film type optical path adjusting device, and more particularly, an optical path for reflecting light incident at a predetermined angle based on a driving angle obtained by driving an actuator by deforming a membrane by an electric field formed by an applied electric field. A mirror for an adjusting device and a manufacturing method thereof.

In general, a spatial light modulator, which is a device for projecting optical energy onto a screen, may be variously applied to optical communication, image processing, and information display devices. Such devices are classified into a direct view type image display device and a projection type image display device according to a method of projecting a light beam incident from a light source onto a screen.

At this time, an example of a direct view type image display device includes a CRT (Cathod Ray Tube), and a projection type image display device includes a liquid crystal display (hereinafter referred to as an LCD), a DMD (Deformable Mirror Device), and an AMA (Actuated Mirror). Arrays). Here, the present invention relates to the improvement of AMA which is a projection type image display apparatus.

Among the projection-type image display devices described above, LCD has a problem that it is difficult to completely planarize the screen due to its large weight and volume and high mechanical strength, which distorts the peripheral part of the image, and requires a high voltage for light emission of the phosphor by an electron beam. It was developed as an alternative technology to replace the CRT.

However, the LCD also has the advantage of operating at a low voltage, having a low power consumption and providing an image without deformation, while having a low light efficiency of 1 to 2% due to the polarization of the light beam, and the liquid crystal material therein. The problem of slow response speed still holds.

On the other hand, image display devices such as DMD, AMA, etc. have been developed to solve the above-mentioned drawbacks of LCD, and at present, AMA can obtain at least 10% or more of light efficiency, while DMD has about 5% of light efficiency. It is known to be an image display device. In addition, the AMA is not only affected by the polarity of the incident luminous flux but also does not affect the polarity of the luminous flux.

Typically, each of the actuators formed inside the AMA causes deformation in accordance with the electric field generated by the applied image signal and bias voltage, which is applied to the top of the actuator when this actuator causes deformation (i.e., when the actuator is driven). Each of the mounted mirrors is inclined in proportion to the magnitude of the electric field, and the inclined mirrors reflect the light incident from the light source (eg, R, G, B) at a predetermined angle to target the pixel targeted for display. Will be created.

At this time, piezoelectric ceramics such as PZT (Pb (Zr, Ti) O ₃ ), PLZT ((Pb, La) (Zr, Ti) O ₃ ) are used as the constituent material of the actuator for driving the respective mirrors. As the constituent material of the actuator, electrodistorted ceramics such as PMN (Pb (Mg, Nb) O ₃ ) may be used.

As described above, the thin film type optical path control device having a plurality of actuators each reflecting each light incident from the light source at a predetermined angle, has been referred to the Korean Patent Office under the name of "Method of manufacturing a thin film type optical path control device module" by the present applicant. It is well disclosed in patent application No. 96-64447 (hereinafter referred to as first preceding application), filed December 11, 1996.

1 is a cross-sectional view of a thin film type optical path control device module of the first prior application described above, and for the sake of understanding and convenience of description, a plurality of optical paths corresponding to the number of pixels of M × N (eg, 640 × 480). Only the cross section for one light path control device is shown in an AMA panel with control device.

Referring to FIG. 1, the conventional thin film type optical path adjusting device has an actuator 130 and a mirror 160 formed on an upper portion of the actuator 130 that are connected through a support portion formed on an upper portion of the panel base 110 and the drain pad 112. The air gap 120 is interposed between the panel base 110 and the actuator 130.

In addition, although the detailed illustration in the same figure is abbreviate | omitted, MxN (M and N are integer) transistors are integrated in the drive board 111 in matrix form.

Meanwhile, the panel base 110 is formed by sequentially depositing the driving substrate 111, the protection layer 113, and the etch stop layer 115 having the drain pad 112 formed on one side thereof, and the actuator 130 is air. Patterning a portion of the sacrificial layer deposited on the etch stop layer 115 (ie, the region where the air gap 120 currently exists), that is, the upper side sacrificial layer of the drain pad 112 to form the gap 120. One side is in contact with the support region formed by the other side and the other side is formed in parallel with the etch stop layer 115 via the air gap 120, the lower electrode 133, the lower electrode formed on the membrane 131 And a strained layer 135 formed on the upper portion of the 133, and an upper electrode 137 formed on the strained layer 135.

In this case, when the actuator is driven, the upper electrode 137 is uniformly operated on the upper side of the upper electrode 137, which is a common electrode, to prevent diffuse reflection of the light beam incident from the light source, not shown. ) Is formed.

Furthermore, a mirror 160 reflecting light incident from a light source, not shown, is formed through the support part 162 on one side of the upper electrode 137, which is a common electrode, between the upper electrode 137 and the mirror 160. An air gap 150 is interposed therebetween.

In addition, the actuator 130 penetrates through the lower electrode 133, the membrane 131, the etch stop layer 115, and the protective layer 113 from one side (side, support side) of the strained layer 135 to drive substrate 111. The distribution hole 140 is vertically formed up to the drain pad 112 in the c). In the distribution hole 140, a distribution 141 electrically connecting the lower electrode 133 and the drain pad 112 is formed. Formed.

In the conventional optical path control apparatus having the above-described configuration, a bias voltage is applied to the upper electrode 137 which is a common electrode, and an image signal is applied to the lower electrode 133 through the drain pad 112 and the distributor 141. In this case, an electric field is generated between the upper electrode 137 and the lower electrode 133, and the deformation layer 135 formed between the upper electrode 137 and the lower electrode 133 is deformed by the generated electric field. As a result, the actuator 130 is driven at a predetermined angle so that the mirror 160 is inclined. At this time, the strained layer 135 is contracted in the vertical direction with respect to the generated electric field, so that the mirror 160 is angled by Q in the direction of the arrow Y of FIG. 1 (for example, approximately 3 to 5 degrees). Driven.

Accordingly, the light R, G or B incident from the light source is reflected at a predetermined angle through the mirror 160 formed on the upper electrode 137 by driving the actuator 130. It will pass through the slit (not shown) and build up as pixels on the screen.

However, in the conventional optical path adjusting device as described above, the driving angle Q of the actuator operated by the predetermined driving voltage (for example, 0V to 17V) is approximately 3, as shown in FIG. 10A as an example. It has a range of about 5 degrees, which is not enough to obtain good contrast. That is, when displaying an image using a conventional optical path control device, there is no limit to the image quality.

On the other hand, the optical path control device for solving the problems of the first preceding application as described above, proposed by the present inventors in 1997 to the Korean Patent Office under the name of "improved thin film optical path control device and its manufacturing method" by the present applicant It is well disclosed in the second prior application filed Nov. 28.

In the second preceding application described above, the optical path control device is a dual support structure, that is, an actuator for driving a mirror (i.e., a mirror corresponding to each pixel) that reflects light incident from a light source, upward and downward from both ends of the mirror center support. A large driving angle is realized by forming two actuators having a dual support structure that is cross-driven.

That is, in the second preceding application, the actuator on one side forms a signal electrode on the lower side of the strained layer and a common electrode on the upper side of the strained layer, centering on the strained layer formed between the two electrodes (the lower electrode and the upper electrode). The actuator is configured to form a common electrode at the bottom of the strained layer and a signal electrode at the top of the strained layer, thereby connecting to one end of the mirror center by the generated electric field when an electric field occurs between each lower electrode and the upper electrode. A larger driving angle is realized by using the operating principle that the one actuator is driven upward and the other actuator connected to the other end of the mirror center is driven downward. For example, the first preceding device described above is approximately When obtaining a driving angle of 3 to 5 degrees, the device of the second preceding application realizes a driving angle of 6 to 10 degrees.

Figure 2 is a perspective view of the mirror for the optical path control apparatus according to the second preceding application described above, in which the two actuator portions having a dual support structure already shown in detail in the second preceding application are omitted.

Referring to FIG. 2, the mirror 500 employed in the second preceding application has a double support structure, which is not shown through the support 510 positioned approximately in the center, and ends of the free end side protrusions 232 and 332 of each actuator. The mirror 500 is formed to be flat in a substantially rectangular shape in contact with the upper portion, and the mirror 500 is formed in parallel with the upper electrode formed on the upper portion of each actuator.

3 is a cross-sectional structure of a mirror formed in the shape as described above, that is, a cross-section of two actuators having a double support structure formed at the bottom when cutting the mirror for the optical path control device shown in Figure 2 along the line A-A ' Is a cross-sectional view of a mirror for an optical path control device.

Referring to FIG. 3, one side and the other side of the panel base 210 including the driving substrate 211 having the drain pads 212 and 212 ′, the protective layer 213, and the etch stop layer 215 may be formed. Each actuator (230, 330) is formed in each of the drain pads (212, 212 ') through the support portion, wherein one actuator 230 is a membrane 231 having a protrusion 232, the signal electrode 233 ), The strain layer 235, and the common electrode 237 are sequentially stacked, and the other actuator 330 includes a membrane 331 having a protrusion 332, a common electrode 333, a strain layer 335, and a signal. The electrodes 337 are formed by being stacked in sequence.

In addition, a mirror 500 is formed at an upper end of the free end of each of the protrusions 232 and 332 in parallel with the upper electrode 237 and the signal electrode 337 through the support 510.

Therefore, in the optical path adjusting device of the second preceding application having the structure as described above, when the electric field is generated between the two electrodes 233 and 237 and the two electrodes 333 and 337, respectively, one actuator 230 causes the upward deformation. On the other hand, since the other actuator 330 causes a downward deformation, when the device of the first preceding application realizes a driving angle of approximately twice as large as that of the first preceding application described above, for example, the driving angle of about 3-5 degrees, the second preceding application is applied. The driving angle is approximately 6-10 degrees.

On the other hand, mirror formation in the optical path control device having a double support structure of two actuators (230, 330), as in the second preceding application described above, after the manufacture of the two actuators (230, 330) is completed, the sacrificial layer is a predetermined thickness And applying a mirror material over the sacrificial layer and the etched area and forming a mirror 500 by patterning the portion to be formed by the support portion and etching the patterned portion. After the formation of the 500 is completed, for example, by removing the sacrificial layer by hydrogen fluoride (HF) vapor to form each air gap 400, the manufacturing process of the optical path control apparatus is completed.

However, in the case of forming the optical path control device in a double supporting structure, it is necessary to form the thin film as much as possible to obtain a larger driving angle. For this purpose, the mirror 500 is thin film, for example, about 0.1 to 1.0 μm. In the case of forming a thickness of H, there is a problem that deformation of the mirror, that is, deformation of the edge portion of the mirror, is caused in the upward direction during the processing of the mirror to remove the sacrificial layer.

Accordingly, the present invention is to solve the above problems of the prior art, the thin film type optical path control that can realize the thinning while suppressing the amount of deformation at each corner of the mirror employed in the optical path control device having a dual support structure of two actuators. The purpose is to provide a mirror for the device.

Another object of the present invention is to provide a method for manufacturing a mirror for a thin film type optical path control device, in which an optical path control device having a double support structure composed of two actuators can be suppressed from thinning the mirror and the amount of deformation at each corner.

According to an aspect of the present invention, there is provided a driving substrate having a drain pad formed on one side thereof, a panel base having a protective layer and an etch stop layer sequentially stacked on the driving substrate, and a support base on the panel base. In the mirror for the optical path control device comprising an actuator for providing a driving angle of the mirror for reflecting the incident light, the optical path control device, the fixed end is connected to the upper portion of the one side of the etch stop layer and the free end side projection The upper part is connected to one end of the mirror support part, and the actuator on one side causing the upward deformation when an electric field is generated, and the fixed end is connected to the other upper part of the etch stop layer, and the upper part of the free end side protrusion is connected to the other end of the mirror support part. Has a double support structure with the other side of the actuator causing a down strain when it occurs, The mirror provides a mirror for the optical path control device, characterized in that at each edge is formed a reinforcing frame formed at least higher than the reflective surface of the mirror.

According to another aspect of the present invention, there is provided a driving substrate having a drain pad formed on one side thereof, a panel base having a protective layer and an etch stop layer sequentially stacked on the driving substrate, and a support base on the panel base. In the method for manufacturing a mirror for the optical path control device comprising an actuator for providing a drive angle of the mirror for the reflection of the incident light, the optical path control device, a fixed end is connected to the upper side of one side of the etch stop layer The upper portion of the free end side projection is connected to one end of the mirror support to cause an upward deformation when an electric field is generated, and the fixed end is connected to the other upper portion of the etch stop layer, and the upper part of the free end side protrusion is connected to the other end of the mirror support. Dual actuator with other actuators connected and causing falling strain when an electric field occurs Having a support structure, the manufacturing method comprising: forming a first sacrifice layer by applying a sacrificial layer material of a predetermined thickness over the entire surface of the respective upper side and the other side the actuator; Removing a portion of the first sacrificial layer including a top end portion of each free end side protrusion of the one side and the other side through patterning and etching to form an exposed area; Applying heat to cure the remaining first sacrificial layer having the exposed area; Applying a sacrificial layer material of a predetermined thickness over the exposed area and the first sacrificial layer to form a second sacrificial layer; Removing an upper portion of the second sacrificial layer including the exposed area through patterning and etching to form an exposed area that is at least wider than the exposed area; Applying heat to cure the remaining second sacrificial layer having the exposed area; Applying a mirror material over the exposed area, the top of the exposed first sacrificial layer and the top of the second sacrificial layer, and by patterning and etching the top of the exposed area, the top of the exposed first sacrificial layer and the first 2 forming the mirror having a reinforcement frame over an upper portion of the sacrificial layer; And removing the first and second sacrificial layers interposed between each upper portion of the actuator and the mirror to form an air gap.

1 is a cross-sectional view of a conventional thin film type optical path control device,

Figure 2 is a perspective view of a mirror for the optical path control device according to the prior application of the present invention,

3 is a cross-sectional view of the mirror for the optical path control device showing the cross-section of two actuators having a double support structure formed at the bottom when cutting the mirror for the optical path control device shown in Figure 2 along the line A-A ',

4 is a perspective view of a mirror for a thin film type optical path control device according to an embodiment of the present invention,

5 is a cross-sectional view of the mirror for the optical path control device showing together the cross section of two actuators having a double support structure formed at the bottom when cutting the optical path control device mirror shown in FIG. 4 along the line B-B ',

6 is a plan view of the mirror for the optical path control device shown in FIG.

7a to 7e is a process chart showing a manufacturing process of the mirror for the optical path control apparatus according to the present invention.

<Description of the code | symbol about the principal part of drawing>

232, 332: protrusions 390, 392: sacrificial layer

391, 393: exposed area 400: air gap

500 mirror 510 support

520: reinforcement frame a1, b1, c1, d1: reinforcement

The above and other objects and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention described below with reference to the accompanying drawings by those skilled in the art.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

First, in the present invention, for the convenience of explanation and enhancement of understanding, the same reference numerals are used for components that perform substantially the same functions as those of the above-described second prior application of the optical path control apparatus. Therefore, in consideration of this point, it will be possible to more reliably recognize the difference in construction between the mirror of the present invention and the conventional mirror.

4 is a perspective view of a mirror for a thin film type optical path control apparatus according to a preferred embodiment of the present invention.

As shown in the figure, the mirror 500 according to the present invention has a double support structure (not shown) through a support 510 located approximately at the center of the end of the free end side protrusions 232 and 332 of each actuator. It is almost similar to the above-described conventional mirror in terms of being formed flat in a substantially rectangular shape in contact with the upper portion and in parallel with the upper electrode formed on the upper portion of each actuator, but a reinforcement material at each edge of the mirror 500 is provided. For example, it has a large technical feature in that it forms a reinforcing frame 520 extending from the mirror in a substantially U-shape when the central portion of the mirror 500 is referred to.

FIG. 5 shows a cross-sectional view of the mirror for the optical path control device showing together the cross section of two actuators having a double support structure formed at the bottom when the mirror for the optical path control device shown in FIG. 4 is cut along the line B-B '.

Referring to FIG. 5, the panel base 210 is formed through an air gap 220 between portions other than the shape of the mirror 500, that is, the panel base 210, the protrusions 232 and 332, and the panel base 210. The structure of the one side and the other side actuator 230, 330 formed on each upper portion of the) is substantially the same as the structure described with the same reference numerals in FIG. Therefore, in the following, only the structural features of the mirror 500 will be mainly described to avoid unnecessary overlapping materials.

As can be seen from the comparison between FIG. 5 and FIG. 3 described above, the mirror 500 for the optical path adjusting device of the present invention is different from the conventional mirror in which the upper surface is flat. Reinforcing frame 520 is formed extending from the mirror in a substantially U-shape when the center portion is a reference.

Here, the reinforcing frame 520 is a phenomenon that the deformation of the mirror 500, that is, the edge of the mirror 500 is deformed in the upward direction, which may be caused when the mirror 500 is formed into a thin film and processed. It functions as a reinforcing material to suppress the

That is, when the upper plane of the mirror 500 is as shown in Figure 6, the phenomenon that the two upper and lower edge portions (a, b) is going to be bent in the upward direction, the two reinforcement parts (c1, d1) Is supported and suppressed, and the phenomenon that the two left and right edge portions c and d are going to be bent upward is supported and suppressed by the upper and lower reinforcement portions a1 and b1.

At this time, the material of the reinforcing frame 520 formed on each edge, for example, the same material as the material of the mirror 500 can be formed at the same process at the same time. For example, a mirror material may be applied by sputtering a metal such as platinum, aluminum, or silver, and may be etched through patterning to simultaneously form the mirror 500 and the reinforcement frame 520.

Therefore, in the mirror for the optical path adjusting apparatus according to the present invention, when the mirror 500 is formed into a thin film, the edge of the mirror is bent upward by using a reinforcement frame 520 integrally formed at each edge portion of the mirror 500. It is possible to reliably suppress the phenomenon, i.e., to suppress the phenomena of the mirror which can be caused in the flat mirror disclosed in the above-mentioned second preceding application.

As a result of the inventors experimenting with the conventional flat mirror and the deformation amount of the improved mirror according to the present invention, the amount of deformation caused during processing in the mirror of the present invention is reduced to approximately 50/1 to 100/1 compared to that of the conventional mirror. And it was found.

Next, details are described with reference to FIGS. 7A to 7E showing a sequential manufacturing process for the process of manufacturing a mirror according to the present invention suitable for adoption in an optical path control device having a double support structure of two actuators as described above. Explain.

First, a panel base 210 including a driving substrate 211 having a drain pad 212 and 212 ′, a protective layer 213, and an etch stop layer 215, except for a process of manufacturing the mirror 500. ), A membrane 231 having a protrusion 232, a signal electrode 233, a strain layer 235, and a common electrode 237 are sequentially stacked to form one side actuator 230 formed on one side of the panel base 210. And the other actuator and each distributor formed by sequentially stacking a membrane 331 having a protrusion 332, a common electrode 333, a strained layer 335, and a signal electrode 337, and being formed on the other side of the panel base 210. The process of forming each of the power distribution holes 240 and 340 having the numbers 241 and 341 is the same as those in the above-mentioned second preceding application, and thus the detailed description thereof will be omitted.

Referring to FIG. 7A, when the actuator of the dual support structure consisting of two actuators is completed, the silicate glass having a high concentration of the sacrificial layer material, that is, phosphorus (P), is formed over each upper portion of one and the other actuators 230 and 330. The sacrificial layer material is applied to a thickness of about 1.0 to 2.0㎛ by Atmospheric Pressure CVD (APCVD) method.

Here, the sacrificial layer 390 serves to facilitate the lamination required to form the mirror of the AMA module, and this sacrificial layer 390 is a hydrogen fluoride (HF) vapor after the lamination of the AMA module is completed. Is removed, and the space in which the sacrificial layer 390 is removed thus becomes an air gap 400 region, for example, as shown in FIG. 5.

In addition, the sacrificial layer may be etched through patterning to remove a portion of the sacrificial layer material, that is, the sacrificial layer including a portion of the upper end portion of the protrusions 232 and 332 on the free end side of each actuator 230 and 330, as shown in FIG. 7B. A portion of 390 is removed to form exposed area 391. In this case, the exposed region 391 from which the sacrificial layer material is removed is used as a support region of the mirror in contact with a portion of the upper end of each of the protrusions 232 and 332.

Then, as described above, hard baking is applied while a part of the sacrificial layer 390 is removed to cure the remaining sacrificial layer 390. At this time, the reason for curing the remaining sacrificial layer 390 is to suppress the phenomenon that the two sacrificial layer material is dissolved when the next sacrificial layer 392 is applied to form the reinforcing frame 520, as will be described later.

Next, as shown in FIG. 7C, the sacrificial layer material is bonded to the sacrificial layer 390 and the exposed area 391, for example, the same sacrificial layer material used for the sacrificial layer material 390 described above. Apply to a predetermined thickness. Here, the thickness of the sacrificial layer material to be applied is substantially the height of the reinforcing frame 520 to be formed on each edge portion of the mirror 500 according to the present invention, the height of the reinforcing frame 520 is to prevent bending Determination can be made appropriately by considering reinforcement.

In addition, the portion of the sacrificial layer material is removed by patterning to remove a portion of the sacrificial layer material, that is, a portion of the sacrificial layer 392 including an exposed portion 391 and an upper portion of the sacrificial layer 392 as shown in FIG. 7D. The exposed area 393 is formed. In this case, the exposed region 393 from which the sacrificial layer material is removed is used as a region where the mirror 500 is formed later.

Then, soft baking is applied while a portion of the sacrificial layer 392 is removed to soften the remaining sacrificial layer 392 as described above. At this time, the reason why the remaining sacrificial layer 392 is weakly cured with weak heat is to prevent the sacrificial layer 390 already hardened with strong heat and the sacrificial layer 217 formed at the bottom of each of the protrusions 232 and 332 further harden. For that. In other words, the sacrificial layers 390 and 217 are hardened so hard that the sacrificial layer removal in the sacrificial layer removal process is not smooth.

Meanwhile, when the sacrificial layer 390 having the exposed region 391 and the sacrificial layer 392 having the exposed region 393 are completed through the above-described process, the exposed region 391 and the exposed sacrificial layer are formed. Apply mirror material over the top of 390 (ie, exposed area 393) and over the sacrificial layer 392, for example by sputtering a metal such as platinum, aluminum, or silver to apply the mirror material and patterning Etching through forms a mirror 500 over the exposed area 301, the top of the exposed sacrificial layer 390 and the top portion of the sacrificial layer 392, as shown in FIG. 7E.

Thus, the support 510 on the central axis abuts on a part of the upper end of each of the protrusions 232 and 332, respectively, and its free ends are parallel to the respective upper electrodes 237 and 337 of the respective actuators 230 and 330. The mirror 500 is formed to form a reinforcing frame 520 extending from the mirror in a substantially U-shape when each edge is based on the central portion. At this time, the formed mirror 500 preferably has a thickness of about 0.1 to 1.0 μm, and reflects light incident from a light source not shown at a predetermined reflection angle.

Lastly, the sacrificial layer 390 interposed between the upper electrodes 237 and 337 and the mirror 500 and the lower portion of the membrane 231 and 331 of the actuators 230 and 330 and the etching protection layer 215 are interposed between the sacrificial layer 390 and the mirror 500. The respective sacrificial layers 217 are removed by, for example, hydrogen fluoride (HF) vapor to form respective air gaps 400 and 220, respectively, as shown in FIG. 400, 220) is filled with liquid p-dichlobenznen (p-dichlobenznen). At this time, the moisture present in each of the air gaps 400 and 220 is discharged to the outside. Subsequently, the p-dichlorobenzene filled in each of the air gaps 400 and 220 is sublimated in vacuo to complete the mirror for the thin film type optical path control device, i.e., a double support structure consisting of two actuators as shown in FIG. The mirror for the optical path control device which has is completed.

As described above, according to the present invention, in order to obtain a large driving angle, by processing the mirror in the conventional mirror by forming a reinforcing frame for preventing bending at the edge of the mirror that is employed in the optical path control device having a double support structure of two actuators It is possible to effectively suppress the warpage of the mirror due to the thin film that has occurred during the process.

Claims (5)

A panel base 210 having a driving substrate 211 having a drain pad formed on one side thereof, a protective layer 213 and an etch stop layer 215 sequentially stacked on the driving substrate 211, and a panel base through a support part. In the mirror for the optical path control device formed on the 210, comprising an actuator for providing a drive angle of the mirror for the reflection of the incident light, The optical path adjusting device may have a fixed end connected to an upper portion of the etch stop layer 215, and an upper portion of the free end side protrusion 232 may be connected to one end of the mirror 500 support 510 to generate an upward deformation. One end of the actuator 230 and a fixed end is connected to the other upper portion of the etch stop layer 215 and a part of the upper portion of the free end side protrusion 332 is connected to the other end of the support portion 510 of the mirror 500 to generate an electric field. It has a double support structure of the other actuator 330 which causes the downward deformation when The mirror 500 is a mirror for the optical path control device, characterized in that the reinforcing frame (520) formed at each edge formed at least higher than the reflective surface of the mirror (500). The mirror of claim 1, wherein a material of the reinforcing frame (520) is made of the same material as the mirror (500). A panel base 210 having a driving substrate 211 having a drain pad formed on one side thereof, a protective layer 213 and an etch stop layer 215 sequentially stacked on the driving substrate 211, and a panel base through a support part. In the method for manufacturing a mirror for the optical path control device comprising an actuator formed on the 210 to provide a drive angle of the mirror for the reflection of the incident light, The optical path adjusting device may have a fixed end connected to an upper portion of the etch stop layer 215, and an upper portion of the free end side protrusion 232 may be connected to one end of the mirror 500 support 510 to generate an upward deformation. One end of the actuator 230 and a fixed end is connected to the other upper portion of the etch stop layer 215 and a part of the upper portion of the free end side protrusion 332 is connected to the other end of the support portion 510 of the mirror 500 to generate an electric field. It has a double support structure of the other actuator 330 which causes the downward deformation when The manufacturing method is: Forming a first sacrificial layer (390) by applying a sacrificial layer material having a predetermined thickness over each upper front surface of the one and the other actuators (230, 330); A portion of the first sacrificial layer 390 including the upper end portions of the free end side protrusions 232 and 332 of the one side and the other side actuators 230 and 330 may be removed through patterning and etching to expose the exposed area 391. Forming a; Applying a sacrificial layer material having a predetermined thickness over the exposed region 391 and the first sacrificial layer 390 to form a second sacrificial layer 392; Removing an upper portion of the second sacrificial layer 392 including the exposed area 391 by patterning and etching to form an exposed area 393 that is at least wider than the exposed area; Applying a mirror material over the exposed region 391, the exposed first sacrificial layer 390 and the upper portion of the second sacrificial layer 392, and patterning and etching the upper portion of the exposed region 391. Forming the mirror (500) having a reinforcing frame (520) over the exposed first sacrificial layer (390) and over the upper portion of the second sacrificial layer (392); And Removing the first and second sacrificial layers 390 and 392 interposed between the upper portions of the actuators 230 and 330 and the mirror 500 to form an air gap 400. Method for manufacturing a mirror for the device. 4. A method according to claim 3, wherein the materials of the first and second sacrificial layers (390, 392) are the same material. 4. The reinforcing frame 520 of claim 3, wherein the reinforcing frame 520 has a height difference between the exposed edge of the first sacrificial layer 390 and the remaining second sacrificial layer 392 and the second sacrificial layer 392. Method for producing a mirror for the optical path control device, characterized in that the mirror material formed on the upper portion.

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