JPWO2021028981A1 - Equipment condition measuring device - Google Patents

Abstract

The equipment condition measuring device detects the AE signal according to the vibration and temperature generated in the rotating machine, and outputs the sine wave signal of the detected AE signal to the AE sensor unit (1) and the rotating machine based on the sine wave signal. It is provided with a vibration measuring unit (2) for measuring the vibration level of the above and a temperature measuring unit (3) for measuring the temperature of the rotating machine based on a sine wave signal.

Description

The present invention relates to an equipment state measuring device for measuring the state of equipment.

Conventionally, in order to detect an abnormality generated in equipment at an early stage, for example, the vibration level of a rotating machine is measured in real time, and the deterioration tendency of the rotating machine is grasped from the measured vibration level. It is possible to predict the life of a rotating machine or diagnose the condition of equipment based on the deterioration tendency of the rotating machine. Further, when the rotating machine is in an abnormal state or the rotating machine is in a high operating condition, the temperature of the rotating machine is generally higher than that in the normal rotating state of the rotating machine. In this way, the temperature of the rotating machine can be an index in the life prediction or the state diagnosis of the rotating machine.

For example, Patent Document 1 describes a sensor including a vibration sensor unit and a temperature sensor unit. The sensor is provided with a support plate having a cantilever structure in which one end is fixed, and the vibration sensor unit is a lower electrode and a piezoelectric thin film formed in layers on a vibrable vibration region of the support plate. The temperature sensor portion is formed of a thin film formed of the same material as the lower electrode of the vibration sensor portion on a region other than the vibration region of the support plate. Since the sensor described in Patent Document 1 can simultaneously measure the vibration level of the rotating machine and the temperature of the rotating machine, it can be used for determining an abnormality of the rotating machine.

Japanese Unexamined Patent Publication No. 2012-8101

The measuring device using the sensor described in Patent Document 1 is referred to as vibration measurement using the vibration detection signal detected by the vibration sensor unit and temperature measurement using the temperature detection signal detected by the temperature sensor unit. , There is a problem that it is necessary to perform measurement processing independently of each other. In this case, it is necessary to separately provide wiring for outputting the signal detected by the vibration sensor unit to the vibration measuring unit and wiring for outputting the signal detected by the temperature sensor unit to the temperature measuring unit.

The present invention solves the above-mentioned problems, and an object of the present invention is to obtain an equipment state measuring device capable of performing vibration measurement and temperature measurement using a common signal detected from equipment.

The equipment state measuring apparatus according to the present invention is a cantilever that detects an acoustic emission (hereinafter referred to as AE) signal according to vibration and temperature generated in the equipment to be measured and outputs a sinusoidal signal of the detected AE signal. It includes an AE sensor unit having a structure, a vibration measuring unit that measures the vibration level of the equipment based on a sine wave signal, and a temperature measuring unit that measures the temperature of the equipment based on the sine wave signal.

According to the present invention, the AE sensor unit that detects the vibration generated in the equipment and the AE signal according to the temperature and outputs the sinusoidal signal of the detected AE signal, and measures the vibration level of the equipment based on the sinusoidal signal. It is equipped with a vibration measuring unit for measuring vibration and a temperature measuring unit for measuring the temperature of equipment based on a sine wave signal. As a result, vibration measurement and temperature measurement can be performed using a common signal (sine wave signal) detected from the equipment.

It is a block diagram which shows the structure of the equipment state measuring apparatus which concerns on Embodiment 1. FIG. It is a block diagram which shows the structure of the time measuring part. It is a figure which shows the frequency temperature characteristic of an AE sensor part. It is a figure which shows the example of the frequency temperature table data. It is a block diagram which shows the structure of the equipment state measuring apparatus which concerns on Embodiment 2. It is a block diagram which shows the structure of the equipment state measuring apparatus which concerns on Embodiment 3. It is a block diagram which shows the structure of the equipment state measuring apparatus which concerns on Embodiment 4.

Embodiment 1.
FIG. 1 is a block diagram showing a configuration of an equipment state measuring device according to the first embodiment. In the following description, it is assumed that the equipment for which the state is measured is a rotary machine. The equipment state measuring device shown in FIG. 1 measures the vibration level and the temperature as the state of the rotating machine, and determines the abnormality of the rotating machine based on at least one of the vibration level or the temperature of the rotating machine. As shown in FIG. 1, the equipment state measuring device includes an AE sensor unit 1, a vibration measuring unit 2, a temperature measuring unit 3, an abnormality determination unit 4, and an external I / F unit 5. Rotating machines include, for example, motors, speed reducers, cutting machines, pumps and turbines. AE is a phenomenon in which elastic energy stored inside a material is released as an elastic wave when the material is deformed or broken.

The AE sensor unit 1 is attached to a rotating machine (equipment) and has a cantilever structure that detects an AE signal corresponding to vibration and temperature generated by the rotation of the rotating machine and outputs a sinusoidal signal of the detected AE signal. This cantilever structure is an oscillation structure made of a piezoelectric material having a high Q value, and a resonance frequency is set in the frequency band of the AE signal. For example, the cantilever structure has a plurality of cantilever having each resonance frequency in the frequency band of the AE signal. When a wideband (frequency component of several kHz to several MHz) AE signal corresponding to the vibration generated by the rotation of the rotating machine is generated, a sine wave signal corresponding to the resonance frequency in the frequency band of the AE signal is output from the cantilever structure. Will be done.

The AE sensor unit 1 is connected to the vibration measurement unit 2 and the temperature measurement unit 3 with a common wiring, and the sine wave signal output from the AE sensor unit 1 is connected to the vibration measurement unit 2 via the common wiring to the temperature. It is output to the measuring unit 3. Further, since the AE signal corresponds to the vibration generated by the rotation of the rotating machine, the vibration level of the rotating machine can be measured based on the sine wave signal output from the AE sensor unit 1. Further, since the frequency of the AE signal fluctuates according to the temperature of the place where the AE sensor unit 1 (cantilever structure) is installed in the rotating machine, the temperature of the rotating machine is based on the frequency of the AE signal detected from the rotating machine. Is possible to measure.

The vibration measuring unit 2 measures the vibration level of the rotating machine (equipment) based on the sine wave signal output from the AE sensor unit 1. For example, as shown in FIG. 1, the vibration measuring unit 2 includes a noise filter unit 21, an A / D conversion unit 22, an effective value calculation unit 23, and an averaging processing unit 24.

The noise filter unit 21 removes noise in the sine wave signal output from the AE sensor unit 1. The sine wave signal from which noise has been removed is output from the noise filter unit 21 to the A / D conversion unit 22. The A / D conversion unit 22 converts an analog sine wave signal into a digital signal in order to digitally process the sine wave signal.

The effective value calculation unit 23 calculates the effective value of the sine wave signal converted into a digital signal by the A / D conversion unit 22. The effective value is an evaluation value for evaluating the magnitude of the sinusoidal signal that changes with time. For example, the square of the digital signal value of the sinusoidal signal sampled by the A / D conversion unit 22 is used. It is a value obtained by averaging one cycle of a sine wave signal and taking the square root of that value.

The averaging processing unit 24 performs averaging processing on the effective value calculated by the effective value calculation unit 23, and outputs the average value, which is the result of quantifying the vibration level of the rotating machine, to the abnormality determination unit 4. .. For example, the averaging processing unit 24 calculates the average value of the effective values accumulated up to the previous measurement. This average value is based on a sinusoidal signal corresponding to the vibration generated in the rotating machine, and is a value indicating the vibration level of the rotating machine.

The method of averaging the effective value of the sine wave signal in order to quantify the vibration level is an example, and even if the method is other than this, it is based on the sine wave signal output from the AE sensor unit 1. Any method that can quantify the vibration level will do. For example, the effective value of the sine wave signal itself may be quantified as the vibration level, or the period integrated value of the effective value of the sine wave signal may be quantified as the vibration level.

The temperature measuring unit 3 measures the temperature of the rotating machine (equipment) based on the sinusoidal wave signal output from the AE sensor unit 1. For example, as shown in FIG. 1, the temperature measurement unit 3 includes a square wave conversion unit 31, a time measurement unit 32, a frequency calculation unit 33, a temperature determination unit 34, and a table data storage unit 35.

The square wave conversion unit 31 converts the sine wave signal output from the AE sensor unit 1 into a square wave signal. For example, the square wave conversion unit 31 compares a constant reference voltage level with the level of the sine wave signal by using a comparator, so that the level of the sine wave signal becomes a high level during a period larger than the reference level, and the sine wave signal becomes a high level. Generates a square wave signal such that the level of is low during the period below the reference level.

The time measuring unit 32 measures the time of N cycles of the square wave signal generated by the square wave conversion unit 31. N is a natural number of 2 or more. FIG. 2 is a block diagram showing the configuration of the time measuring unit 32. For example, the time measurement unit 32 includes an N cycle counter 32A, a time measurement counter 32B, and an N cycle time calculation unit 32C. The N-cycle counter 32A has a high-level to low-level (or low-level) change point of the square wave signal generated by the square wave converter 31 from a high-level to low-level (or low-level to high-level) change point of the square wave signal. From to the high level) to the next change point is counted as one cycle for N cycles. The time measurement counter 32B counts the number of clocks of the time measurement clock signal while the N cycle counter 32A is counting for N cycles. The N cycle time calculation unit 32C calculates the N cycle time by multiplying the count number of the time measurement counter 32B and the cycle of one clock of the time measurement clock signal. However, in order to detect the change point from the high level to the low level (or from the low level to the high level) of the square wave signal without omission, the clock signal for time measurement must be shorter than the period of the square wave signal.

When the time Δt required for detecting a change of 1 ° C. is _{determined based on the frequency f count} of the time measurement clock signal, the following equation (1) is used. From the following equation (1), the number of cycles N required for detecting a change at 1 ° C. may be set to a value of _{1 / (fcount × Δt) or more.}
Δt × N cycle ≧ 1 / f _count ... (1)

FIG. 3 is a diagram showing the frequency temperature characteristics of the AE sensor unit 1, and shows the relationship between the rate of change (%) from the reference frequency and the temperature (° C.). In FIG. 3, the temperature on the horizontal axis is the temperature of the AE sensor unit 1 (that is, the temperature of the place where the AE sensor unit 1 is installed in the rotating machine). The reference frequency is the frequency of the sine wave signal output from the AE sensor unit 1 when the temperature of the installation location of the AE sensor unit 1 in the rotating machine is the reference temperature (for example, 20 ° C.). The rate of change from the reference frequency is the rate of change from the reference frequency according to the change in the temperature of the installation location of the AE sensor unit 1 with respect to the frequency of the sine wave signal. The frequency temperature characteristic shown in FIG. 3 is obtained by a prior experiment and is set in the time measuring unit 32.

For example, in the frequency temperature characteristic shown in FIG. 3, the reference temperature is 20 ° C., and the rate of change from the reference frequency at the reference temperature is 0%. _{When the frequency f count} of the clock signal for time measurement is 10 MHz and the frequency of the sine wave signal output from the AE sensor unit 1 is 20 kHz, the reference when the temperature of the installation location of the AE sensor unit 1 is 40 ° C. The rate of change from frequency is -0.2%. That is, the frequency of the sine wave signal changes by about 0.01% from the reference frequency due to the change of 1 ° C. One cycle of 20 kHz is 50 microseconds.

The time measuring unit 32 calculates 5 nanoseconds, which is 0.01% of the time of 50 microseconds in one cycle of the sine wave signal, as the time Δt required for detecting the change of 1 ° C. Further, the time measuring unit 32 calculates the number of cycles N to be 20 cycles or more according to the above equation (1).

The frequency calculation unit 33 is a calculation unit that calculates the frequency of the square wave signal based on the time of a plurality of cycles of the square wave signal measured by the time measurement unit 32 (time of N cycles or more). For example, the frequency calculation unit 33 calculates the time of one cycle (one cycle) by dividing the time of the N cycle of the rectangular wave signal measured by the time measurement unit 32 by the count number (= N). The frequency of the rectangular wave signal is calculated by performing the reciprocal calculation of the cycle time.

The temperature determination unit 34 inputs the frequency of the square wave signal calculated by the frequency calculation unit 33, and determines the temperature corresponding to the frequency of the square wave signal. For example, the temperature determination unit 34 determines the temperature corresponding to the frequency calculated by the frequency calculation unit 33 based on the frequency temperature table data. The frequency temperature table data is table data showing the correspondence between the frequency of the square wave signal and the temperature of the rotating machine to be measured. By referring to the frequency temperature table data, the temperature determination unit 34 determines the temperature corresponding to the frequency of the rectangular wave signal in the frequency temperature table data as the temperature of the rotating machine.

FIG. 4 is a diagram showing an example of frequency temperature table data. The frequency temperature table data as shown in FIG. 4 is stored in the table data storage unit 35. In the frequency temperature table data, the frequency of the square wave signal for each fixed frequency range and the corresponding temperature are set, and the relationship between the frequency range and the temperature is obtained by a preliminary experiment.

Although FIG. 1 shows a temperature measuring unit 3 provided with a table data storage unit 35, the table data storage unit 35 may be provided with an external device provided separately from the equipment state measuring device. In this case, since the temperature determination unit 34 reads the frequency temperature table data from the table data storage unit 35 provided in the external device, the temperature measurement unit 3 does not have to include the table data storage unit 35.

The abnormality determination unit 4 determines the abnormality of the rotating machine based on at least one of the vibration level of the rotating machine (equipment) measured by the vibration measuring unit 2 and the temperature of the rotating machine measured by the temperature measuring unit 3. For example, the abnormality determination unit 4 sets the vibration level obtained when the rotating machine is normal as a normal value, calculates the difference between the vibration level measured by the vibration measurement unit 2 and the normal value, and calculates the difference. The value of is compared with the permissible range, and if the value of the difference is out of the permissible range, it is determined that an abnormality has occurred in the rotating machine. Similarly, the abnormality determination unit 4 sets the temperature obtained when the rotating machine is normal as a normal value, calculates the difference between the temperature measured by the temperature measuring unit 3 and the normal value, and calculates the difference value. And the permissible range are compared, and if the value of the difference is out of the permissible range, it is determined that an abnormality has occurred in the rotating machine.

Further, the abnormality determination unit 4 may determine the abnormality of the rotating machine based on the combination of the abnormality determination result of the rotating machine using the vibration level and the abnormality determination result of the rotating machine using the temperature. For example, the abnormality determination unit 4 determines that an abnormality has occurred in the rotating machine and the temperature has risen when the temperature of the rotating machine is out of the allowable range even if the vibration level of the rotating machine is within the allowable range. .. As described above, since the abnormality determination unit 4 performs the abnormality determination using the temperature in addition to the abnormality determination using the vibration level, the certainty of the abnormality determination is improved. Further, the abnormality determination unit 4 can determine the abnormality of the rotating machine even when a failure occurs in either the vibration measurement or the temperature measurement.

The abnormality determination unit 4 detects the change tendency of the vibration level of the rotating machine measured by the vibration measuring unit 2 from the initial value, and further, the change from the initial value of the temperature of the rotating machine measured by the temperature measuring unit 3. The tendency may be detected and the deterioration tendency of the rotating machine may be diagnosed based on these change trends. For example, the vibration level and temperature (for example, the average value of effective values) of the rotating machine measured within a certain period after the new rotating machine is installed in the factory are set as initial values. In the abnormality determination unit 4, if the vibration level generated by the rotation of the rotating machine has a significant change from the initial value, or the temperature has a significant change from the initial value due to the rotation of the rotating machine, the rotating machine tends to deteriorate. Judge that there is. The abnormality determination unit 4 may analyze the deterioration tendency of the rotating machine and predict the life of the rotating machine based on the analysis result of the deterioration tendency.

The external I / F unit 5 is an interface for exchanging data with an external device (not shown), and for example, the determination result of the abnormality determination unit 4 is output to the external device via the external I / F unit 5.

Although FIG. 1 shows an equipment state measuring device including an abnormality determination unit 4 and an external I / F unit 5, the abnormality determination unit 4 and the external I / F unit 5 are separate from the equipment state measuring device. It may be provided with an external device provided in. In this case, the vibration measuring unit 2 outputs the vibration level to the abnormality determination unit 4 provided in the external device, and the temperature measuring unit 3 outputs the temperature to the abnormality determination unit 4 provided in the external device. The equipment state measuring device may not include the abnormality determination unit 4 and the external I / F unit 5.

The description so far has shown a case where the temperature determination unit 34 determines the temperature of the equipment corresponding to the frequency of the rectangular wave signal based on the frequency temperature table data, but the present invention is not limited to this. For example, the temperature determination unit 34 can determine the temperature corresponding to the period of the rectangular wave signal based on the periodic temperature table data. In the periodic temperature table data, the time (period) of the rectangular wave signal and the corresponding temperature are set, and the relationship between the periodic range and the temperature can be obtained by a prior experiment. In this case, the frequency calculation unit 33 calculates the time (cycle) of one cycle of the square wave signal based on the N cycle time of the square wave signal measured by the time measurement unit 32. In the equipment state measuring apparatus according to the first embodiment, the reciprocal calculation for the time of one cycle of the square wave signal can be omitted by determining the temperature based on the time of one cycle of the square wave signal.

Further, the temperature determination unit 34 may calculate the temperature of the rotating machine based on an approximate function using the frequency of the square wave signal without using the frequency temperature table data. This approximation function is, for example, a function for calculating the temperature corresponding to the frequency of the square wave signal by using the frequency of the square wave signal for each frequency range as a parameter, and is obtained by a preliminary experiment. When the frequency of the rectangular wave signal calculated by the frequency calculation unit 33 is input, the temperature determination unit 34 substitutes this frequency into the approximate function to calculate the temperature of the rotating machine. The temperature determination unit 34 may calculate the temperature of the rotating machine based on an approximate function using the period of one cycle of the rectangular wave signal. This approximation function is, for example, a function for calculating the temperature corresponding to this cycle by using the time (cycle) of one cycle of the rectangular wave signal for each cycle range as a parameter. As described above, by using the approximate function for measuring the temperature, the table data storage unit 35 can be omitted from the temperature measuring unit 3, so that the equipment state measuring device can be miniaturized.

As described above, the equipment state measuring device according to the first embodiment rotates based on the AE sensor unit 1 that outputs the AE signal sinusoidal signal according to the vibration and the temperature generated in the rotating machine, and the sinusoidal signal. Since the vibration measuring unit 2 for measuring the vibration level of the machine and the temperature measuring unit 3 for measuring the temperature of the rotating machine based on the sinusoidal signal are provided, a common signal (sine wave signal) detected from the rotating machine is used. It is possible to measure vibration and temperature. That is, in the equipment state measuring device according to the first embodiment, the wiring for outputting the signal used for vibration measurement to the vibration measuring unit 2 and the wiring for outputting the signal used for temperature measurement to the temperature measuring unit 3. It is not necessary to separately provide a sensor for detecting the vibration level of the rotating machine and a sensor for detecting the temperature of the rotating machine. Therefore, the equipment state measuring device according to the first embodiment can be miniaturized. Further, since the abnormality determination unit 4 can determine the abnormality of the rotating machine even when a failure occurs in either the vibration measurement or the temperature measurement, the equipment state measuring device according to the first embodiment. Is also very useful as a device for the purpose of determining an abnormality in equipment.

Embodiment 2.
FIG. 5 is a block diagram showing a configuration of the equipment state measuring device according to the second embodiment. In FIG. 5, the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted. The equipment state measuring device shown in FIG. 5 includes an AE sensor unit 1, a vibration measuring unit 2, a temperature measuring unit 3, an abnormality determination unit 4, an external I / F unit 5, and an operation determination unit 6. The operation determination unit 6 determines whether or not the rotating machine is operating based on the vibration level measured by the vibration measuring unit 2, and if it is determined that the rotating machine is not operating, the temperature measured by the temperature measuring unit 3 Stop the measurement.

For example, the operation determination unit 6 compares the effective value input from the effective value calculation unit 23 included in the vibration measurement unit 2 with the threshold value, and determines whether or not the rotating machine (equipment) is operating according to the comparison result. do. For example, the operation determination unit 6 determines that the rotating machine is operating when the effective value is equal to or greater than the threshold value, and determines that the rotating machine is not operating when the effective value is less than the threshold value.

The operation determination unit 6 compares the average value input from the averaging processing unit 24 included in the vibration measurement unit 2 with the threshold value, and determines whether or not the rotating machine (equipment) is operating according to the comparison result. It is also possible to do. For example, the operation determination unit 6 determines that the rotating machine is operating when the average value is equal to or greater than the threshold value, and determines that the rotating machine is not operating when the average value is less than the threshold value.

When the operation determination unit 6 determines that the rotating machine is not operating, the operation determination unit 6 outputs a stop signal to the time measurement unit 32 included in the temperature measurement unit 3. When the stop signal is input from the operation determination unit 6, the time measurement unit 32 stops counting the number of cycles N of the rectangular wave signal. As a result, the temperature measurement by the temperature measuring unit 3 is stopped, and the count of the number N of cycles of the square wave signal and the count of the clock signal for time measurement by the time measuring unit 32 are reset. On the other hand, when the operation determination unit 6 determines that the rotating machine is operating, the operation determination unit 6 does not output a stop signal to the time measurement unit 32. In this case, the time measurement unit 32 continues to count the number of cycles N of the square wave signal and the clock signal for time measurement.

In general, it is considered that changes in the state (for example, vibration level and temperature) accompanying the operation of the equipment affect the deterioration of the equipment. Therefore, in the equipment state measuring device according to the second embodiment, when the operation determination unit 6 determines that the rotating machine (equipment) is not operating, the temperature measurement by the temperature measuring unit 3 is stopped. Thereby, the equipment state measuring device according to the second embodiment can measure the vibration level and the temperature when the rotating machine is operating. For example, even if the rotating machine is operating intermittently, only the temperature of the rotating machine when the rotating machine is operating can be appropriately measured. This improves the accuracy of abnormality determination of the rotating machine.

Embodiment 3.
FIG. 6 is a block diagram showing a configuration of the equipment state measuring device according to the third embodiment. In FIG. 6, the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted. The equipment state measuring device shown in FIG. 6 includes an AE sensor unit 1, a vibration measuring unit 2, a temperature measuring unit 3A, an abnormality determination unit 4, and an external I / F unit 5. The temperature measurement unit 3A includes a square wave conversion unit 31, a time measurement unit 32, a frequency calculation unit 33, a temperature determination unit 34, a table data storage unit 35, and a frequency range determination unit 36.

The frequency range determination unit 36 determines whether or not the frequency of the square wave signal calculated by the frequency calculation unit 33 is within the frequency range of the sinusoidal wave signal corresponding to the vibration detected from the rotating machine (equipment) in operation. Is determined. The frequency range of the sine wave signal is the frequency range of the AE signal corresponding to the vibration generated by the rotation of the rotating machine, and is in the range of several kHz to several MHz. Since the AE signal is generated in response to the vibration generated by the rotation of the rotating machine, the AE signal is not detected when the rotating machine is not operating, that is, the rotating machine is not rotating.

When the frequency of the square wave signal is within the frequency range of the sine wave signal, the frequency range determination unit 36 determines that the sine wave signal converted into the square wave signal is a unique signal (AE signal) generated in the rotating machine in operation. ), And it is determined that the rotary machine is operating. On the other hand, in the frequency range determination unit 36, when the frequency of the square wave signal is outside the frequency range of the sine wave signal, the sine wave signal converted into the square wave signal is not a peculiar signal generated in the rotating machine in operation. It is determined that the rotating machine is not operating.

When the frequency of the rectangular wave signal is out of the frequency range of the sinusoidal wave signal and the rotating machine (equipment) is not operating, the frequency range determination unit 36 stops the temperature measurement by the temperature measuring unit 3A. For example, when the frequency range determination unit 36 determines that the rotating machine is not operating, as shown in FIG. 6, the frequency range determination unit 36 outputs a stop signal to the time measurement unit 32 included in the temperature measurement unit 3. When the stop signal is input from the frequency range determination unit 36, the time measurement unit 32 stops counting the number of cycles N of the rectangular wave signal. As a result, the temperature measurement by the temperature measuring unit 3A is stopped, and the count of the cycle number N of the square wave signal and the count of the clock signal for time measurement are reset. On the other hand, when the frequency range determination unit 36 determines that the rotating machine is operating, the frequency range determination unit 36 does not output a stop signal to the time measurement unit 32. In this case, the time measurement unit 32 continues to count the number of cycles N of the square wave signal and the clock signal for time measurement.

Up to now, the case where the frequency range determination unit 36 determines whether or not the rotating machine is operating is shown based on whether or not the frequency of the square wave signal is within the frequency range of the sinusoidal wave signal. However, it is not limited to this. For example, the frequency range determination unit 36 is based on whether or not the rate of change of the frequency of the square wave signal from the reference frequency is the rate of change from the reference frequency at the temperature of the rotating machine at that time. It may be determined whether or not it is operating.

As described above, in the equipment state measuring device according to the third embodiment, when the frequency range determination unit 36 determines that the rotating machine is not operating, the temperature measurement by the temperature measurement unit 3A is stopped. Thereby, the equipment state measuring device according to the third embodiment can measure the vibration level and the temperature when the rotating machine is operating. For example, even if the rotating machine is operating intermittently, only the temperature of the rotating machine when the rotating machine is operating can be appropriately measured. This improves the accuracy of abnormality determination of the rotating machine.

Embodiment 4.
FIG. 7 is a block diagram showing a configuration of the equipment state measuring device according to the fourth embodiment. In FIG. 7, the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted. The equipment state measuring device shown in FIG. 7 includes an AE sensor unit 1, a vibration measuring unit 2A, a temperature measuring unit 3, an abnormality determination unit 4, an external I / F unit 5, and a noise filter unit 21A. The vibration measuring unit 2A does not include the noise filter unit 21, and shares the noise filter unit 21A with the temperature measuring unit 3.

The noise filter unit 21A removes noise from the sinusoidal signal output from the AE sensor unit 1. The sine wave signal from which noise has been removed by the noise filter unit 21A is branched and output to the A / D conversion unit 22 included in the vibration measurement unit 2A and the square wave conversion unit 31 included in the temperature measurement unit 3. As a result, the temperature measuring unit 3 can measure the temperature of the rotating machine based on the sinusoidal signal from which noise has been removed, and the accuracy of the temperature measurement is improved.

In the equipment state measuring device shown in FIG. 7, in the equipment state measuring device according to the first embodiment, the noise filter unit is omitted from the vibration measuring unit, and the noise filter unit 21A is shared by the vibration measuring unit and the temperature measuring unit. .. However, the equipment state measuring device according to the fourth embodiment is not limited to the configuration shown in FIG. 7. For example, in the equipment state measuring device shown in FIG. 5 or 6, the noise filter unit may be omitted from the vibration measuring unit, and the noise filter unit 21A shared by the vibration measuring unit and the temperature measuring unit may be provided.

As described above, the equipment state measuring device according to the fourth embodiment performs vibration measurement and temperature measurement using a common signal (sine wave signal) output from the AE sensor unit 1, and thus performs vibration measurement and temperature measurement. The temperature measuring unit 3 can share the noise filter unit 21A that removes noise from the sinusoidal signal. As a result, the temperature measuring unit 3 can measure the temperature of the rotating machine based on the sinusoidal signal from which noise has been removed, and the accuracy of the temperature measurement is improved. Further, for example, when the AE sensor unit 1 has a plurality of cantilever and the plurality of cantilever outputs a sine wave signal having a resonance frequency corresponding to each, the vibration measuring unit 2 is provided for each frequency of the sine wave signal. .. In this case, in the equipment state measuring device according to the fourth embodiment, the noise filter unit 21A is shared by the plurality of vibration measuring units 2 and the temperature measuring unit 3, so that the device can be significantly downsized.

In the first to fourth embodiments, the case where the target equipment for the state measurement is a rotating machine has been shown, but the target equipment for the state measurement may be a device in which vibration is generated and the temperature changes according to the operation. It is not limited to rotating machines.

It should be noted that the present invention is not limited to the above-described embodiment, and within the scope of the present invention, any free combination of the embodiments or any modification of each component of the embodiment is modified or embodiments. Any component can be omitted in each of the above.

The equipment state measuring device according to the present invention can be used, for example, in an equipment abnormality determination system for determining an abnormality of equipment based on a vibration level and a temperature detected from the equipment.

1 AE sensor unit, 2,2A vibration measurement unit, 3,3A temperature measurement unit, 4 abnormality determination unit, 5 external I / F unit, 6 operation determination unit, 21,21A noise filter unit, 22A / D conversion unit, 23 Effective value calculation unit, 24 averaging processing unit, 31 square wave conversion unit, 32 hour measurement unit, 33 frequency calculation unit, 34 temperature determination unit, 35 table data storage unit, 36 frequency range determination unit.

Claims (8)

An AE sensor unit having a cantilever structure that detects an acoustic emission signal according to the vibration and temperature generated in the equipment to be measured and outputs a sinusoidal signal of the detected acoustic emission signal.
A vibration measuring unit that measures the vibration level of the equipment based on the sine wave signal,
A temperature measuring unit that measures the temperature of the equipment based on the sine wave signal,
Equipment condition measuring device characterized by being equipped with. The temperature measuring unit is
A square wave converter that converts the sine wave signal into a square wave signal,
A time measuring unit that measures the time of a plurality of cycles of the square wave signal,
A calculation unit that calculates the frequency or period of the square wave signal based on the time of a plurality of cycles of the square wave signal.
A temperature determination unit that determines the temperature corresponding to the frequency or period of the rectangular wave signal, and
The equipment state measuring apparatus according to claim 1, wherein the equipment condition measuring apparatus is provided. The temperature determination unit determines the temperature corresponding to the frequency or period of the square wave signal calculated by the calculation unit based on the table data showing the correspondence between the frequency or period of the square wave signal and the temperature of the equipment. The equipment condition measuring apparatus according to claim 2, wherein the determination is made. The equipment state measuring apparatus according to claim 2, wherein the temperature determination unit calculates the temperature of the equipment based on an approximate function using the frequency or period of the square wave signal. Based on the vibration level measured by the vibration measuring unit, it is determined whether or not the equipment is operating, and if it is determined that the equipment is not operating, an operation determination is made to stop the temperature measurement by the temperature measuring unit. The equipment condition measuring device according to claim 1, wherein the equipment is provided with a unit. It is determined whether or not the frequency of the square wave signal is within the frequency range of the sinusoidal signal corresponding to the vibration detected from the equipment in operation, and if it is determined that the frequency is not within the frequency range, the temperature is determined. The equipment state measuring device according to claim 2, further comprising a frequency range determination unit for stopping temperature measurement by the measuring unit. A noise filter unit for removing noise from the sine wave signal is provided.
The vibration measuring unit measures the vibration level of the equipment based on the sine wave signal from which noise has been removed by the noise filter unit.
The equipment state measuring apparatus according to claim 1, wherein the temperature measuring unit measures the temperature of the equipment based on the sinusoidal signal from which noise has been removed by the noise filter unit. The equipment according to any one of claims 1 to 7, wherein an abnormality determination unit for determining an abnormality of the equipment is provided based on at least one of the vibration level of the equipment and the temperature of the equipment. Condition measuring device.

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