JPS6488146A - Humidity sensor - Google Patents
Humidity sensorInfo
- Publication number
- JPS6488146A JPS6488146A JP24404787A JP24404787A JPS6488146A JP S6488146 A JPS6488146 A JP S6488146A JP 24404787 A JP24404787 A JP 24404787A JP 24404787 A JP24404787 A JP 24404787A JP S6488146 A JPS6488146 A JP S6488146A
- Authority
- JP
- Japan
- Prior art keywords
- film
- hysteresis
- response speed
- glutamate
- polymethyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
PURPOSE:To obtain a humidity sensor which is small in hysteresis, is high in response speed and can be combined to an Si element by using polymethyl glutamate for a humidity sensing material. CONSTITUTION:The polymethyl glutamate is hydrophobic. While the film thereof has porosity and high moisture permeability, the film has low hygroscopicity. The hysteresis is, therefore, greatly decreased and since the film formation is easy, the response speed is increased. A soln. prepd. by diluting the polymethyl glutamate 1-1 in trichloroethylene is spin-coated on an SiO2 glass substrate 1-4 provided with a lower electrode 1-2 and is dried at room temp. The unnecessary part is easily removable by plasma ashing. The sensor is completed by depositing an upper electrode 1-3 by evaporation thereon. Since these stages are executable at <=200 deg.C, the provision of this moisture sensitive element on an Si element is possible as well.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24404787A JPS6488146A (en) | 1987-09-30 | 1987-09-30 | Humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24404787A JPS6488146A (en) | 1987-09-30 | 1987-09-30 | Humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6488146A true JPS6488146A (en) | 1989-04-03 |
Family
ID=17112934
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24404787A Pending JPS6488146A (en) | 1987-09-30 | 1987-09-30 | Humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6488146A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU636037B2 (en) * | 1990-06-02 | 1993-04-08 | Basf Aktiengesellschaft | A reference electrode for chemical sensors |
| JP2003028824A (en) * | 2001-07-16 | 2003-01-29 | Denso Corp | Capacitive humidity sensor |
| US6948388B1 (en) * | 2003-12-18 | 2005-09-27 | The United States Of America As Represented By The Secretary Of The Navy | Wireless remote sensor |
| WO2009045733A2 (en) * | 2007-10-05 | 2009-04-09 | 3M Innovative Properties Company | Organic chemical sensor comprising microporous polymer, and method of use |
| JP2010540967A (en) * | 2007-10-05 | 2010-12-24 | スリーエム イノベイティブ プロパティズ カンパニー | Organic chemical sensors including plasma deposited microporous layers, and methods of making and using the same |
-
1987
- 1987-09-30 JP JP24404787A patent/JPS6488146A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU636037B2 (en) * | 1990-06-02 | 1993-04-08 | Basf Aktiengesellschaft | A reference electrode for chemical sensors |
| JP2003028824A (en) * | 2001-07-16 | 2003-01-29 | Denso Corp | Capacitive humidity sensor |
| US6948388B1 (en) * | 2003-12-18 | 2005-09-27 | The United States Of America As Represented By The Secretary Of The Navy | Wireless remote sensor |
| WO2009045733A2 (en) * | 2007-10-05 | 2009-04-09 | 3M Innovative Properties Company | Organic chemical sensor comprising microporous polymer, and method of use |
| WO2009045733A3 (en) * | 2007-10-05 | 2009-05-28 | 3M Innovative Properties Co | Organic chemical sensor comprising microporous polymer, and method of use |
| JP2010540967A (en) * | 2007-10-05 | 2010-12-24 | スリーエム イノベイティブ プロパティズ カンパニー | Organic chemical sensors including plasma deposited microporous layers, and methods of making and using the same |
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