JPS6469874A - Mass flow controller - Google Patents

Mass flow controller

Info

Publication number
JPS6469874A
JPS6469874A JP62225731A JP22573187A JPS6469874A JP S6469874 A JPS6469874 A JP S6469874A JP 62225731 A JP62225731 A JP 62225731A JP 22573187 A JP22573187 A JP 22573187A JP S6469874 A JPS6469874 A JP S6469874A
Authority
JP
Japan
Prior art keywords
valve aperture
alarm
valve
preset
flow quantity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62225731A
Other languages
Japanese (ja)
Inventor
Katsuyuki Sasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP62225731A priority Critical patent/JPS6469874A/en
Publication of JPS6469874A publication Critical patent/JPS6469874A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing And Monitoring For Control Systems (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Flow Control (AREA)

Abstract

PURPOSE:To attain the early detection of an abnormality, etc., of a control system by measuring the valve aperture of a needle valve so as to generate an alarm, if it deviate from a preset valve aperture. CONSTITUTION:Gas whose flow quantity is to be measured runs through a piping 1 in the direction of arrows, while its mass flow is measured by a censor 2. Also the control of the flow quantity is made by the top and the bottom parts of a needle valve 3. A comparison control circuit 7 will compare a value measured by the flow quantity censor 2 with a preset value, send a signal to a stepping motor 4 so that they may be equal, and thereby change the valve aperture. When the range of the valve aperture is preset in a valve aperture alarm 9, a valve aperture indication deviated from such a range will result in the generation of an alarm.
JP62225731A 1987-09-09 1987-09-09 Mass flow controller Pending JPS6469874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62225731A JPS6469874A (en) 1987-09-09 1987-09-09 Mass flow controller

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62225731A JPS6469874A (en) 1987-09-09 1987-09-09 Mass flow controller

Publications (1)

Publication Number Publication Date
JPS6469874A true JPS6469874A (en) 1989-03-15

Family

ID=16833941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62225731A Pending JPS6469874A (en) 1987-09-09 1987-09-09 Mass flow controller

Country Status (1)

Country Link
JP (1) JPS6469874A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05134764A (en) * 1991-11-12 1993-06-01 Nec Kyushu Ltd Mass flow controller
JPH05158550A (en) * 1991-12-04 1993-06-25 Zexel Corp Hot water flow control valve controller
JPH06502942A (en) * 1991-01-07 1994-03-31 シマテク，インコーポレイテッド intelligent mass flow controller
JP2007500896A (en) * 2003-07-31 2007-01-18 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー Triggered field device data collection in process control systems.
JP2009543247A (en) * 2006-07-10 2009-12-03 シーアンドジーハイテク株式会社 Flow control device
JP2013535636A (en) * 2010-08-09 2013-09-12 センサス・ユーエスエー・インコーポレイテッド Method and apparatus for controlling gas flow through a gas shut-off valve assembly
JP5548208B2 (en) * 2009-09-04 2014-07-16 大陽日酸株式会社 Method and apparatus for supplying hydrogen selenide mixed gas for solar cell
JP2016147228A (en) * 2015-02-12 2016-08-18 ソフタード工業株式会社 Catalyst loading device and method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06502942A (en) * 1991-01-07 1994-03-31 シマテク，インコーポレイテッド intelligent mass flow controller
JPH05134764A (en) * 1991-11-12 1993-06-01 Nec Kyushu Ltd Mass flow controller
JPH05158550A (en) * 1991-12-04 1993-06-25 Zexel Corp Hot water flow control valve controller
JP2007500896A (en) * 2003-07-31 2007-01-18 フィッシャー コントロールズ インターナショナル リミテッド ライアビリティー カンパニー Triggered field device data collection in process control systems.
JP2009543247A (en) * 2006-07-10 2009-12-03 シーアンドジーハイテク株式会社 Flow control device
JP5548208B2 (en) * 2009-09-04 2014-07-16 大陽日酸株式会社 Method and apparatus for supplying hydrogen selenide mixed gas for solar cell
JP2013535636A (en) * 2010-08-09 2013-09-12 センサス・ユーエスエー・インコーポレイテッド Method and apparatus for controlling gas flow through a gas shut-off valve assembly
US9182052B2 (en) 2010-08-09 2015-11-10 Sensus Usa Inc. Method and apparatus for controlling gas flow via a gas shut-off valve assembly
US9261204B2 (en) 2010-08-09 2016-02-16 Sensus Usa Inc. Method and apparatus for controlling gas flow via a gas shut-off valve assembly
JP2016147228A (en) * 2015-02-12 2016-08-18 ソフタード工業株式会社 Catalyst loading device and method

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