JPS641249A - Wafer prober - Google Patents
Wafer proberInfo
- Publication number
- JPS641249A JPS641249A JP62155452A JP15545287A JPS641249A JP S641249 A JPS641249 A JP S641249A JP 62155452 A JP62155452 A JP 62155452A JP 15545287 A JP15545287 A JP 15545287A JP S641249 A JPS641249 A JP S641249A
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- circuit
- contact resistance
- needle
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To quantitatively manage a contact resistance by forming a closed circuit between a probe needle and a measuring instrument for measuring an electric resistance, and actually measuring the contact resistance with the needle.
CONSTITUTION: A wafer prober has a contact resistance measuring circuit 10 as a device for measuring a contact resistance with a probe needle 1, and a pair of terminals of the circuit 10 are electrically connected to a probe needle 1 of the prober, and a conductive plate 2 through a plate stage 3, respectively. Since the plate 2 is formed of a material having preferable conductivity, when the needle 1 is in contact with the plate 1, the circuit 10 is closed. The circuit 10 has a measuring power supply 11, a plurality of switches 12 for switching the needle 1 to be measured, and an ammeter 13 as a contact resistance measuring instrument interposed between the power supply 11 and the switch 12 group.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-155452A JPH011249A (en) | 1987-06-24 | wafer prober |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62-155452A JPH011249A (en) | 1987-06-24 | wafer prober |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS641249A true JPS641249A (en) | 1989-01-05 |
| JPH011249A JPH011249A (en) | 1989-01-05 |
Family
ID=
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04276018A (en) * | 1991-03-01 | 1992-10-01 | Kobe Steel Ltd | Manufacture of door guard bar excellent in collapse resistant property |
| JPH0513046U (en) * | 1991-07-29 | 1993-02-19 | 山形日本電気株式会社 | Semiconductor probe board inspection device |
| JP2006329836A (en) * | 2005-05-26 | 2006-12-07 | Advantest Corp | Contact terminal for measurement, measuring device, probe card set, wafer prober device, and testing device |
| JP2013238488A (en) * | 2012-05-15 | 2013-11-28 | Mitsubishi Electric Corp | Solar battery cell characteristics evaluation device |
| CN111239490A (en) * | 2018-11-28 | 2020-06-05 | 波音公司 | Differential capacitive probe for measuring contact resistance |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04276018A (en) * | 1991-03-01 | 1992-10-01 | Kobe Steel Ltd | Manufacture of door guard bar excellent in collapse resistant property |
| JPH0513046U (en) * | 1991-07-29 | 1993-02-19 | 山形日本電気株式会社 | Semiconductor probe board inspection device |
| JP2006329836A (en) * | 2005-05-26 | 2006-12-07 | Advantest Corp | Contact terminal for measurement, measuring device, probe card set, wafer prober device, and testing device |
| JP2013238488A (en) * | 2012-05-15 | 2013-11-28 | Mitsubishi Electric Corp | Solar battery cell characteristics evaluation device |
| CN111239490A (en) * | 2018-11-28 | 2020-06-05 | 波音公司 | Differential capacitive probe for measuring contact resistance |
| CN111239490B (en) * | 2018-11-28 | 2023-08-29 | 波音公司 | Differential capacitive probe and method for measuring contact resistance |
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