JPS6359974B2 - - Google Patents
Info
- Publication number
- JPS6359974B2 JPS6359974B2 JP59134464A JP13446484A JPS6359974B2 JP S6359974 B2 JPS6359974 B2 JP S6359974B2 JP 59134464 A JP59134464 A JP 59134464A JP 13446484 A JP13446484 A JP 13446484A JP S6359974 B2 JPS6359974 B2 JP S6359974B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- carbon mold
- carbon
- mold
- molding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052799 carbon Inorganic materials 0.000 claims description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 27
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 22
- 238000000465 moulding Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B40/00—Preventing adhesion between glass and glass or between glass and the means used to shape it, hold it or support it
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
- C03B23/025—Re-forming glass sheets by bending by gravity
- C03B23/0252—Re-forming glass sheets by bending by gravity by gravity only, e.g. sagging
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は石英ガラスを所定の形状に成型する方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of molding quartz glass into a predetermined shape.
石英ガラスは1700℃以上の高融点材料であり、
その成型が困難な材料の一つである。従来の成型
方法は酸水素焔によつて加熱するものが多いが、
バーナーからの焔の加熱面積を大きくすることが
困難で、そのためその周辺部との間に熱歪を残し
やすい。従つて例えば溶接した場合は周辺全体も
含めてアニール処理したり、研磨等の工程が必要
となる。又、小型の成型品を作ることも難かし
く、加工部において肉厚が変化しやすい等の欠点
があつた。
Quartz glass is a material with a high melting point of over 1700℃,
It is one of the materials that is difficult to mold. Conventional molding methods often involve heating with an oxyhydrogen flame, but
It is difficult to increase the heating area of the flame from the burner, and as a result, thermal distortion tends to occur between the burner and the surrounding area. Therefore, for example, in the case of welding, processes such as annealing or polishing the entire periphery are required. Furthermore, it is difficult to make small molded products, and there are drawbacks such as the wall thickness easily changing in the processed part.
本発明はカーボン型を用いて石英ガラスを軟化
変形させる際、カーボン型と石英ガラスとの反応
によつて生ずるガスを自然排気させることによつ
て石英ガラスをカーボン型に密着させるようにし
たものである。
In the present invention, when softening and deforming quartz glass using a carbon mold, the quartz glass is brought into close contact with the carbon mold by naturally exhausting the gas generated by the reaction between the carbon mold and the quartz glass. be.
石英ガラスは高温でカーボンと接触するとSiO
等のガスを発生するため、型として使用した場
合、カーボン型と石英ガラスとの間にガスが溜り
やすく、型としての役割がはたせない。この場合
カーボン型に多数の貫通孔を設けることによつ
て、石英ガラスをカーボン型に密着させることが
できるようになつた。発生するガスは強制的に排
気されるようにしてもよいが、単に貫通孔を設け
ることによつて圧力差により自然に拡散する。従
つて石英ガラスはカーボン型の形状に応じて無荷
重でも任意の形に成型することができる。 When quartz glass comes into contact with carbon at high temperatures, it forms SiO
When used as a mold, gas tends to accumulate between the carbon mold and the quartz glass, making it impossible to function as a mold. In this case, by providing a large number of through holes in the carbon mold, it has become possible to bring the quartz glass into close contact with the carbon mold. The generated gas may be forcibly exhausted, but by simply providing a through hole, it will naturally diffuse due to the pressure difference. Therefore, quartz glass can be molded into any shape without any load depending on the shape of the carbon mold.
以下に本発明の一実施例を図によつて説明す
る。
An embodiment of the present invention will be described below with reference to the drawings.
第１図において、カーボンは上部カーボンを型
１と下部カーボン型２とからなつている。上部カ
ーボン型１には多数の貫通孔３が設けられてい
る。このカーボン型の上に成型すべき石英ガラス
板４を載置し、図示しない非酸化性雰囲気炉内で
1700℃以上に加熱される。 In FIG. 1, the carbon consists of an upper carbon mold 1 and a lower carbon mold 2. The upper carbon mold 1 is provided with a large number of through holes 3. A quartz glass plate 4 to be molded is placed on top of this carbon mold, and placed in a non-oxidizing atmosphere furnace (not shown).
Heated to over 1700℃.
第２図は石英ガラス板が軟化変形した状態を示
すもので、石英ガラス４の両端４ａ，４ｂは垂れ
下り、中央部分はカーボン型１に密着している。 FIG. 2 shows a state in which the quartz glass plate has been softened and deformed, with both ends 4a and 4b of the quartz glass 4 hanging down, and the central portion in close contact with the carbon mold 1.
カーボン型１と石英ガラス板４との接触面は加
熱処理温度においてSiOガスを発生させるがカー
ボン型に設けられている貫通孔３を通り、上部カ
ーボン型１と下部カーボン型２との間の透き間か
ら脱気される。 The contact surface between the carbon mold 1 and the quartz glass plate 4 generates SiO gas at the heat treatment temperature, but it passes through the through hole 3 provided in the carbon mold and forms the gap between the upper carbon mold 1 and the lower carbon mold 2. is degassed from.
成型終了後冷却された時、熱膨脹の大きいカー
ボン型は容易に脱型できる。 Carbon molds with large thermal expansion can be easily demolded when cooled after molding.
又、カーボン型の形状は、成型すべき石英ガラ
スの形状に応じて任意に定めることができ、例え
ば深底の容器状のものの場合は大十字形の石英ガ
ラス板を角形のカーボン型を使用して成型する。
そして角形のカーボン型脱型後成型石英ガラスの
四隅を溶接することによつて製造することができ
る。 In addition, the shape of the carbon mold can be arbitrarily determined depending on the shape of the quartz glass to be molded. For example, in the case of a container-like object with a deep bottom, a large cross-shaped quartz glass plate may be used with a rectangular carbon mold. and mold it.
It can be manufactured by welding the four corners of a square carbon-shaped quartz glass after demolding.
又、発生するSiOガスの排気は減圧下で処理す
れば容易であるが、石英ガラス板が軟化しカーボ
ン型に密着するためSiOガスは貫通孔に圧入さ
れ、常圧のもとでも不都合はない。又排気を容易
にするために下部カーボン型に溝を設けてもよ
い。なお、実施例においては上部及び下部の二つ
のカーボン型を用いたが、これは成型する石英ガ
ラスの形状によつて任意に選択すれば良い。 Additionally, the generated SiO gas can be easily exhausted if treated under reduced pressure, but since the quartz glass plate softens and adheres to the carbon mold, the SiO gas is forced into the through hole, so there is no problem even under normal pressure. . Grooves may also be provided in the lower carbon mold to facilitate evacuation. In the embodiment, two carbon molds, an upper one and a lower one, were used, but these may be arbitrarily selected depending on the shape of the quartz glass to be molded.
本発明の成型方法によれば、特に５mm以上の肉
厚の石英ガラスの成型には好適で、寸法精度の高
いことを求められるような製品、例えば半導体処
理用ボート等に利用し得る。
The molding method of the present invention is particularly suitable for molding quartz glass with a wall thickness of 5 mm or more, and can be used for products that require high dimensional accuracy, such as semiconductor processing boats.
第１図及び第２図は本発明の実施例を示す概略
正面図である。
１……上部カーボン型、２……下部カーボン
型、３……貫通孔、４……石英ガラス板。
1 and 2 are schematic front views showing an embodiment of the present invention. 1... Upper carbon mold, 2... Lower carbon mold, 3... Through hole, 4... Quartz glass plate.
Claims (1)
英ガラスを載置し、非酸化性雰囲気炉内で加熱軟
化させ無荷重でカーボン製型板に密着せしめるこ
とを特徴とする石英ガラスの成型方法。1. A method for molding quartz glass, which is characterized by placing quartz glass on a carbon mold plate having a large number of through holes, heating and softening it in a non-oxidizing atmosphere furnace, and bringing it into close contact with the carbon mold plate without any load. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13446484A JPS6114148A (en) | 1984-06-29 | 1984-06-29 | Molding method of quartz glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13446484A JPS6114148A (en) | 1984-06-29 | 1984-06-29 | Molding method of quartz glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6114148A JPS6114148A (en) | 1986-01-22 |
| JPS6359974B2 true JPS6359974B2 (en) | 1988-11-22 |
Family
ID=15128936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13446484A Granted JPS6114148A (en) | 1984-06-29 | 1984-06-29 | Molding method of quartz glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6114148A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5204681A (en) * | 1991-09-24 | 1993-04-20 | Gordian Holding Corporation | Radio frequency automatic identification system |
| WO2020162467A1 (en) * | 2019-02-08 | 2020-08-13 | Ａｇｃ株式会社 | Glass plate molding device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS565695A (en) * | 1979-06-26 | 1981-01-21 | Tokyo Shibaura Electric Co | Device for charging treating agent for washing machine* etc* |
| JPS5792528A (en) * | 1980-11-27 | 1982-06-09 | Mitsubishi Metal Corp | Molding device for transparent quartz glass |
-
1984
- 1984-06-29 JP JP13446484A patent/JPS6114148A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS565695A (en) * | 1979-06-26 | 1981-01-21 | Tokyo Shibaura Electric Co | Device for charging treating agent for washing machine* etc* |
| JPS5792528A (en) * | 1980-11-27 | 1982-06-09 | Mitsubishi Metal Corp | Molding device for transparent quartz glass |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6114148A (en) | 1986-01-22 |
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