JPS63260087A - Laminated piezoelectric actuator - Google Patents
Laminated piezoelectric actuatorInfo
- Publication number
- JPS63260087A JPS63260087A JP62327794A JP32779487A JPS63260087A JP S63260087 A JPS63260087 A JP S63260087A JP 62327794 A JP62327794 A JP 62327794A JP 32779487 A JP32779487 A JP 32779487A JP S63260087 A JPS63260087 A JP S63260087A
- Authority
- JP
- Japan
- Prior art keywords
- laminate
- case
- piezoelectric
- piezoelectric laminate
- elastic insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 4
- 239000003822 epoxy resin Substances 0.000 abstract description 3
- 229920000647 polyepoxide Polymers 0.000 abstract description 3
- 229920002050 silicone resin Polymers 0.000 abstract description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 abstract description 2
- 239000011810 insulating material Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 230000035939 shock Effects 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Moving Of Heads (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
この発明は、圧電素子または電歪素子とを交互に複数層
積層した圧電積層体を、ケース内に収容してなる積層型
圧電アクチュエータに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a laminated piezoelectric actuator in which a piezoelectric laminate in which a plurality of piezoelectric elements or electrostrictive elements are alternately laminated is housed in a case.
［従来の技術］
積層型圧電アクチュエータは、たとえば本出願人が先に
出願した特願昭８１−２２５０１号に示すように、圧電
素子と金属板とを交互に複数層積層したものとなってい
る。そして、上記アクチュエータをケース内に収容した
型式のものもある。[Prior Art] A laminated piezoelectric actuator is made by laminating a plurality of layers of piezoelectric elements and metal plates alternately, as shown in, for example, Japanese Patent Application No. 81-22501 previously filed by the present applicant. . There is also a type in which the actuator is housed in a case.
第３図は従来のこの種の圧電アクチュエータの構成を、
紙面手前の側の一側面を切断して示す斜視図である。第
３図に示すように、角筒状のケース１内に圧電積層体２
が収容されている。圧電積層体２は、圧電素子３と内部
電極としての金属板４とを交互に複数層積層し、その両
側面に外部電極として銀とビニル系樹脂等を混合してな
るペースト状の導電性物質層５を形成したものであり、
その両端には固定側基板６および作動側基板７が取付け
である。上記固定側基板６は、ケース１の基端側壁に対
してねじ等の固定素子８により固定されている。また作
動側基板７は、ケース１の先端側壁に設けた窓９からフ
リーな状態で外部に突出している。かくして端子１０ａ
、１０ｂに駆動電圧を印加すると、圧電積層体２が作動
し、作動側基板７が図中矢印で示す如く変位するものと
なっている。Figure 3 shows the configuration of a conventional piezoelectric actuator of this type.
FIG. 2 is a perspective view showing a cutaway side of the front side of the paper. As shown in FIG. 3, a piezoelectric laminate 2 is placed inside a rectangular tube-shaped case 1
is accommodated. The piezoelectric laminate 2 has a piezoelectric element 3 and a plurality of metal plates 4 as internal electrodes laminated alternately, and a paste-like conductive material made of a mixture of silver, vinyl resin, etc. is used as an external electrode on both sides. Layer 5 is formed,
A stationary side board 6 and an operating side board 7 are attached to both ends thereof. The fixed substrate 6 is fixed to the proximal side wall of the case 1 by fixing elements 8 such as screws. Further, the actuating side substrate 7 protrudes freely to the outside through a window 9 provided in the front end side wall of the case 1. Thus terminal 10a
, 10b, the piezoelectric laminate 2 is actuated and the actuating side substrate 7 is displaced as shown by the arrow in the figure.
［発明が解決しようとする問題点コ
上記構成の従来の積層型圧電アクチュエータには次のよ
うな問題があった。すなわち圧電積層体２が固定側基板
６０部分のみでケース１に対して固定されているため、
図示の如くケース１を水平に保持したような場合におい
て、圧電積層体２自体の重みにより、作動側基板７が取
付けられている先端側が下方向へ撓むことになる。また
外部から衝撃等が加わったとき、圧電積層体２がその衝
撃を拾って振動することがあり、圧電積層体２の一部が
ケース内面と衝突して損傷するおそれがあった。[Problems to be Solved by the Invention] The conventional laminated piezoelectric actuator having the above configuration has the following problems. In other words, since the piezoelectric laminate 2 is fixed to the case 1 only by the fixed side substrate 60,
When the case 1 is held horizontally as shown in the figure, the weight of the piezoelectric laminate 2 itself causes the distal end side to which the actuation side substrate 7 is attached to bend downward. Further, when an external impact is applied, the piezoelectric laminate 2 may pick up the impact and vibrate, and there is a risk that a portion of the piezoelectric laminate 2 may collide with the inner surface of the case and be damaged.
そこで本発明は、圧電積層体の自重による撓みや、外部
からの衝撃による振動発生を抑制でき、圧電積層体がケ
ース内に安定に保持される積層型圧電アクチュエータを
提供することを目的とする。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a stacked piezoelectric actuator that can suppress the deflection of the piezoelectric laminate due to its own weight and the generation of vibrations due to external shocks, and in which the piezoelectric laminate is stably held within a case.
［問題点を解決するための手段及び作用］この発明は、
上記問題点を解決し目的を達成するために、次のような
手段を講じた。[Means and effects for solving the problems] This invention has the following features:
In order to solve the above problems and achieve the objective, the following measures were taken.
すなわち、圧電素子または電歪素子と導電性材料とを交
互に複数層積層した圧電積層体をケース内に収容してな
る積層型圧電アクチユエータにおいて、前記圧電積層体
を、例えばエポキシ系樹脂または、ウレタン系樹脂、シ
リコーン系樹脂等の材料からなる弾性絶縁部材を介して
前記ケース内に保持するようにした。That is, in a laminated piezoelectric actuator in which a piezoelectric laminate in which a plurality of piezoelectric elements or electrostrictive elements and conductive materials are alternately laminated is housed in a case, the piezoelectric laminate is made of, for example, epoxy resin or urethane. The device is held in the case via an elastic insulating member made of a material such as resin or silicone resin.
このような手段を講じたことにより、圧電積層体の固定
側はもとより作動側も含めて弾性絶縁′部材により保持
されるので、圧電積層体の自重による撓みや外部からの
衝撃による振動発生が抑制されることになる。By taking such measures, not only the fixed side of the piezoelectric laminate but also the operating side are held by the elastic insulating member, which suppresses the deflection of the piezoelectric laminate due to its own weight and the occurrence of vibrations due to external shocks. will be done.
［実施例］ 第１図は本発明の一実施例の構成を示す側面図である。[Example] FIG. 1 is a side view showing the configuration of an embodiment of the present invention.
なお第３図と同一の部材には同一の符号が付しである。Note that the same members as in FIG. 3 are given the same reference numerals.
第１図において、１１は前記ケース１と圧電積層体２と
の間に介在させた弾性絶縁部材であり、圧電積層体２の
変位方向にフレキンビリティを有する如く、圧電積層体
２の外周を筒状に被包している。かくして圧電積層体２
が弾性絶縁部材１１を介して前記ケース１内に安定に保
持されている。なお固定側基板６はケース１に対して図
示しないビスなどで固定されている。In FIG. 1, reference numeral 11 denotes an elastic insulating member interposed between the case 1 and the piezoelectric laminate 2, which extends the outer periphery of the piezoelectric laminate 2 so as to have flexibility in the direction of displacement of the piezoelectric laminate 2. It is encased in a cylindrical shape. Thus, piezoelectric laminate 2
is stably held within the case 1 via an elastic insulating member 11. Note that the fixed board 6 is fixed to the case 1 with screws or the like (not shown).
上記弾性絶縁部材としては、例えばエコゲル１２６５
（商品名−エマーソン・アンド・カミング社）等のエポ
キシ系樹脂、エコセン（商品名、エマーソンーアンドφ
カミング社）等のウレタン系樹脂、さらにはシリコーン
樹脂等の材料が好適である。As the elastic insulating member, for example, Ecogel 1265
(Product name: Emerson & Cumming Co.) Epoxy resins, Ecosen (Product name: Emerson & φ
Materials such as urethane resins such as those manufactured by Cuming Co., Ltd., and silicone resins are suitable.
このように構成された本実施例においては、次のような
作用効果を奏する。すなわち圧電積層体２の固定側はも
とより作動側も含めて、圧電積層体全体が弾性絶縁部材
１１により保持されるので圧電積層体２がたとえ長尺な
ものであっても、自重による撓みや、外部からの衝撃に
よる振動発生が抑制される。か（して圧電積層体２は、
ケース１内に安定に保持されることになる。なお弾性絶
縁部材１１の絶縁機能により、圧電積層体２の絶縁コー
トを格別設ける必要がなくなるので、その分構成が簡略
化される利点がある。This embodiment configured in this manner provides the following effects. That is, since the entire piezoelectric laminate 2, including the fixed side as well as the active side, is held by the elastic insulating member 11, even if the piezoelectric laminate 2 is long, it will not bend due to its own weight, Vibrations caused by external shocks are suppressed. (Then, the piezoelectric laminate 2 is
It will be stably held within the case 1. The insulating function of the elastic insulating member 11 eliminates the need to provide an insulating coat for the piezoelectric laminate 2, which has the advantage of simplifying the structure.
第２図は本発明の他の実施例を示す図である。FIG. 2 is a diagram showing another embodiment of the present invention.
この実施例が前記実施例と異なる点は、弾性絶縁部材１
１の外側たとえば図中上下両側に、平板状の押圧部材１
２．１３を当てがい、ケース１の外側から複数本のビス
等の押圧素子１４によって押圧固定するようにした点で
ある。This embodiment differs from the previous embodiment in that the elastic insulating member 1
1, for example, on both the upper and lower sides in the figure, there is a flat pressing member 1.
2.13 is applied, and the case 1 is pressed and fixed from the outside using a plurality of pressing elements 14 such as screws.
本実施例によれば、押圧素子１４の締付は力を調整する
ことにより、圧電積層体２に対する押圧保持力を適切な
ものとなし得る利点がある。According to this embodiment, by adjusting the tightening force of the pressing element 14, there is an advantage that the pressing holding force against the piezoelectric laminate 2 can be made appropriate.
なお、この発明は前記実施例に限定されるものではない
、例えば、前記実施例では内部電極として金属板４を積
層しているが、本出願人が先に出願した特願昭８２−１
１１５０２号に示すように、金属板４を積層せずに、圧
電素子１の両面に焼付られた銀電極のみをそのまま内部
電極として用いることができる。焼付られる材料として
は銀だけではなくＭ１合金等を用いてもよい。このよう
にすることで、圧電素子を積層する際に、わざわざ金属
板を挾む必要がな（なり、製造工程を短縮し、コストを
削減することができる。Note that the present invention is not limited to the above-mentioned embodiment. For example, in the above-mentioned embodiment, metal plates 4 are laminated as internal electrodes, but this invention is not limited to the above-mentioned embodiment.
As shown in No. 11502, only the silver electrodes baked on both sides of the piezoelectric element 1 can be used as internal electrodes without laminating the metal plates 4. As the material to be baked, not only silver but also M1 alloy or the like may be used. By doing so, there is no need to take the trouble to sandwich the metal plates when stacking the piezoelectric elements, thereby shortening the manufacturing process and reducing costs.
また、前記実施例では、弾性絶縁部材を圧電積層体２の
全体を覆うようにして設けているが作動側先端部と中央
付近だけに弾性絶縁部材を設けて部分的に圧電積層体２
を保持するようにしてもよい０
このように、この発明の要旨を逸脱しない範囲で種々変
型実施できるのは勿論である。Further, in the embodiment described above, the elastic insulating member is provided to cover the entire piezoelectric laminate 2, but the elastic insulating member is provided only at the tip end on the actuating side and near the center to partially cover the piezoelectric laminate 2.
It is also possible to hold 0.As described above, it goes without saying that various modifications can be made without departing from the gist of the present invention.
［発明の効果］
本発明によれば、圧電積層体を弾性絶縁部材を介して前
記ケース内に保持するようにしたので、圧電積層体の自
重による撓みや、外部からの衝撃による振動発生を抑制
でき、圧電積層体がケース内に安定に保持される積層型
圧電アクチュエータを提供できる。[Effects of the Invention] According to the present invention, since the piezoelectric laminate is held in the case via the elastic insulating member, the deflection of the piezoelectric laminate due to its own weight and the generation of vibration due to external shocks are suppressed. Therefore, it is possible to provide a laminated piezoelectric actuator in which the piezoelectric laminate is stably held within the case.
第１図は本発明の一実施例を示す斜視図、第２図は本発
明の他の実施例を示す斜視図、第３図は従来の構成を示
す斜視図である。
１・・・ケース、２・・・圧電積層体、３・・・圧電素
子、４・・・金属板（導電性部材）、５・・・導電性物
質層、６・・・固定側基板、７・・・作動側基板、８・
・・固定素子、９・・・窓、 １０ａ、１０ｂ・
・・端子、１１・・・弾性絶縁部材、１２．１３・・・
押圧部材、１４・・・押圧素子。FIG. 1 is a perspective view showing one embodiment of the present invention, FIG. 2 is a perspective view showing another embodiment of the invention, and FIG. 3 is a perspective view showing a conventional configuration. DESCRIPTION OF SYMBOLS 1... Case, 2... Piezoelectric laminate, 3... Piezoelectric element, 4... Metal plate (conductive member), 5... Conductive material layer, 6... Fixed side substrate, 7... Operating side board, 8.
... Fixed element, 9... Window, 10a, 10b.
...Terminal, 11...Elastic insulation member, 12.13...
Pressing member, 14...pressing element.
Claims (1)
層積層した圧電積層体をケース内に収容してなる積層型
圧電アクチュエータにおいて、前記圧電積層体を、弾性
絶縁部材を介して前記ケース内に保持したことを特徴と
する積層型圧電アクチュエータ。In a laminated piezoelectric actuator in which a piezoelectric laminate in which a plurality of piezoelectric elements or electrostrictive elements and conductive members are alternately laminated is housed in a case, the piezoelectric laminate is inserted into the case through an elastic insulating member. A laminated piezoelectric actuator characterized by being held at .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62327794A JPS63260087A (en) | 1986-12-26 | 1987-12-24 | Laminated piezoelectric actuator |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61-315559 | 1986-12-26 | ||
| JP31555986 | 1986-12-26 | ||
| JP62327794A JPS63260087A (en) | 1986-12-26 | 1987-12-24 | Laminated piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63260087A true JPS63260087A (en) | 1988-10-27 |
Family
ID=26568353
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62327794A Pending JPS63260087A (en) | 1986-12-26 | 1987-12-24 | Laminated piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63260087A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998047188A3 (en) * | 1997-04-14 | 1999-01-28 | Siemens Ag | Piezoelectric actuator with a hollow profile |
| JP2000173301A (en) * | 1998-12-10 | 2000-06-23 | Seiko Epson Corp | Piezoelectric light emission element, display device and manufacture thereof |
| WO2000079606A2 (en) * | 1999-06-19 | 2000-12-28 | Robert Bosch Gmbh | Piezoelectric actuator with motion stabilization elements |
| US6563687B2 (en) | 2000-12-28 | 2003-05-13 | Denso Corporation | Piezoelectric device for injector, method for producing the same, and injector |
| KR100392908B1 (en) * | 2000-02-16 | 2003-07-28 | 마쯔시다덴기산교 가부시키가이샤 | Actuator, apparatus for recording and reproducing information, and method for manufacturing actuator |
-
1987
- 1987-12-24 JP JP62327794A patent/JPS63260087A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998047188A3 (en) * | 1997-04-14 | 1999-01-28 | Siemens Ag | Piezoelectric actuator with a hollow profile |
| JP2000173301A (en) * | 1998-12-10 | 2000-06-23 | Seiko Epson Corp | Piezoelectric light emission element, display device and manufacture thereof |
| WO2000079606A2 (en) * | 1999-06-19 | 2000-12-28 | Robert Bosch Gmbh | Piezoelectric actuator with motion stabilization elements |
| WO2000079606A3 (en) * | 1999-06-19 | 2001-05-03 | Bosch Gmbh Robert | Piezoelectric actuator with motion stabilization elements |
| KR100392908B1 (en) * | 2000-02-16 | 2003-07-28 | 마쯔시다덴기산교 가부시키가이샤 | Actuator, apparatus for recording and reproducing information, and method for manufacturing actuator |
| US6563687B2 (en) | 2000-12-28 | 2003-05-13 | Denso Corporation | Piezoelectric device for injector, method for producing the same, and injector |
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