JPS63200131A - Optical logic element - Google Patents
Optical logic elementInfo
- Publication number
- JPS63200131A JPS63200131A JP3241187A JP3241187A JPS63200131A JP S63200131 A JPS63200131 A JP S63200131A JP 3241187 A JP3241187 A JP 3241187A JP 3241187 A JP3241187 A JP 3241187A JP S63200131 A JPS63200131 A JP S63200131A
- Authority
- JP
- Japan
- Prior art keywords
- fabry
- wavelength
- perot resonator
- voltage
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims description 14
- 230000000694 effects Effects 0.000 claims description 9
- 239000000126 substance Substances 0.000 abstract description 6
- 230000005684 electric field Effects 0.000 abstract description 2
- 230000005693 optoelectronics Effects 0.000 abstract 4
- 238000002834 transmittance Methods 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000010365 information processing Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 241000859095 Bero Species 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/218—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference using semi-conducting materials
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は光論理素子、特に実現する論理関数を電気的に
制御できる光論理素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an optical logic element, and particularly to an optical logic element in which the realized logic function can be electrically controlled.
近年、光による並列大容量の情報処理への関心が高まっ
ている。特にディジタル信号を用いたディジタル光情報
処理は従来の電子的な情報処理では実現できない高速、
並列処理が高精度に行える可能性があり盛んに研究がな
されている。ディジタル光情報処理には光論理素子が必
要であるが、シュウエル(Jewell、 J、 L、
)らは、第2図に示すように、多重量子井戸層15が誘
電体多層膜16と19との間に形成された、すなわち多
重量子井戸を共振器内部に含むファプリ・ペロ共振器を
アプライド フィジックス レターズ(Applied
Physics Letters) 44巻、172
頁(1984年)において報告し、信号光2030波長
とファブリ・ペロ共振器の共振波長を制御することに劣
り、入射光201と202の間で出射光204を出力と
するAND、NOR等の論理関数が実現できることを示
した。In recent years, there has been increasing interest in parallel, large-capacity information processing using light. In particular, digital optical information processing using digital signals can achieve high speeds and speeds that cannot be achieved with conventional electronic information processing.
It has the potential to perform parallel processing with high accuracy, and is being actively researched. Optical logic elements are necessary for digital optical information processing, and Jewell (J., L.
) et al. applied a Fabry-Perot resonator in which a multiple quantum well layer 15 is formed between dielectric multilayer films 16 and 19, that is, a multiple quantum well is included inside the resonator, as shown in FIG. Physics Letters (Applied)
Physics Letters) Volume 44, 172
(1984), it is inferior to controlling the signal light 2030 wavelength and the resonance wavelength of the Fabry-Perot resonator, and logic such as AND and NOR that outputs the output light 204 between the input lights 201 and 202. We showed that the function can be realized.
この素子の原理を、第3図に基づいて説明する。The principle of this element will be explained based on FIG.
第3図は第2図のファブリ・ペロ共振器の共振特性を示
すものであり、縦軸は透過率を、横軸は共振波長からの
ずれ/半値全幅を表している0図中、曲線300は入射
光強度Iが0のときの共振特性、曲線301は入射光強
度Iが1のときの共振特性、曲線302は入射光強度■
が2のときの共振特性、310は信号光の波長の位置の
一例を示したものである。入射光の強度Iが0.1.2
と変化するにつれて、共振器内の多重量子井戸の励起子
吸収が飽和し、屈折率が変化するためファブリ・ペロ共
振器の共振特性も300.301.302と変化する。Figure 3 shows the resonance characteristics of the Fabry-Perot resonator in Figure 2, where the vertical axis represents the transmittance and the horizontal axis represents the deviation from the resonance wavelength/full width at half maximum. is the resonance characteristic when the incident light intensity I is 0, the curve 301 is the resonance characteristic when the incident light intensity I is 1, and the curve 302 is the incident light intensity ■
310 shows an example of the position of the wavelength of the signal light. The intensity I of the incident light is 0.1.2
As the value changes, the exciton absorption of the multiple quantum well in the resonator becomes saturated and the refractive index changes, so the resonance characteristics of the Fabry-Perot resonator also change to 300.301.302.
信号光の波長を例えば第3図の位!310におくと、入
射光強度IがI=Oのとき透過率は1/2.1−1のと
き透過率は1/2.I=2のとき透過率は0となる。こ
れからNANDの働きをしていることがわかる。信号光
の波長を変えることで種々の論理関数を実現できる。こ
の関係を第1表に示した。For example, set the wavelength of the signal light to the order shown in Figure 3! 310, when the incident light intensity I is I=O, the transmittance is 1/2.1-1, the transmittance is 1/2. When I=2, the transmittance becomes 0. From this we can see that it works as a NAND. Various logical functions can be realized by changing the wavelength of the signal light. This relationship is shown in Table 1.
第1表
〔発明が解決しようとする問題点〕
しかしながら、以上に述べた従来の光論理素子では、実
現する論理関数を選択するためには、信号光の波長ある
いはファブリ・ベロ共振器の共振波長を変える必要があ
る。このことは、各々の論理関数に対して、波長の異な
る光源や寸法の異なる素子が必要であることを意味し、
系の構成が複雑となる欠点がある。Table 1 [Problems to be Solved by the Invention] However, in the conventional optical logic elements described above, in order to select the logic function to be realized, the wavelength of the signal light or the resonant wavelength of the Fabry-Béro resonator must be need to change. This means that for each logic function, light sources with different wavelengths and elements with different dimensions are required.
The disadvantage is that the system configuration is complicated.
本発明の目的は、以上の欠点を除去し、実現する論理関
数を電気的に制御できる光論理素子を提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the above-mentioned drawbacks and to provide an optical logic element in which the realized logic functions can be electrically controlled.
本発明の光論理素子は、多重量子井戸を含むファブリ・
ペロ共振器の内部に、電圧印加用電極をもつ電気光学効
果層が挿入されていることを特徴とする。The optical logic device of the present invention includes a Fabry logic device including multiple quantum wells.
It is characterized in that an electro-optic effect layer having a voltage applying electrode is inserted inside the Perot resonator.
電気光学効果をもつ物質は、それに印加される電場の大
きさによって屈折率が変化する。このため、ファブリ・
ベロ共振器内に挿入すると、電気光学効果をもつ物質に
印加する電圧によって共振波長を制御することができる
0本発明では信号光の波長が一定であっても電圧の制御
によってファブリ・ペロ共振器の共振特性が変化でき、
種々の論理関数を得ることができる。A substance with an electro-optic effect changes its refractive index depending on the magnitude of the electric field applied to it. For this reason, Fabry
When inserted into a Bero resonator, the resonant wavelength can be controlled by applying a voltage to a substance that has an electro-optic effect.In the present invention, even if the wavelength of the signal light is constant, the Fabry-Perot resonator can be The resonance characteristics of can be changed,
Various logical functions can be obtained.
第1図は本発明の光論理素子の一実施例の断面図である
。この光論理素子の製造方法を述べながらその構成を説
明する。Snドープのn型のGaAs基板ll上に厚さ
1000人、不純物濃度lXl0”elf−’のn型A
j!Asからなるn型コンタクト層12、厚さ1μmの
アンドープAj!Asからなる電気光学効果層13、厚
さ1000人のp型An!Asからなる不純物濃度5
XIO”ca+−”のp型コンタクト層14を順次積層
し、さらにその上に厚さ140人のアンドープA ’
o、 hG a *、 aA sからなるバリア層15
1と厚さ60人のアンドープGaAsからなるウェル層
152を交互に50層ずつ積層した多重量子井戸層15
を形成する。多重量子井戸層15は、直径20μmの′
部分を残して化学エツチングで除去される。多重量子井
戸層15の表面は、Ti0gとSiO□からなり波長0
.8μ園の光に対して96%の反射率をもつ誘電体多層
膜16でコーティングされ、入射面17を形成する。多
重量子井戸層15が除去された部分のp型コンタクト層
14上にA n / S n合金からなるp型電極18
を形成する。基板11の裏面は、多重量子井戸層15に
対応する部分を直径40μmの円形に化学エツチングで
除去し、T i OtとSin。FIG. 1 is a sectional view of one embodiment of the optical logic element of the present invention. The structure of this optical logic element will be explained while describing the method of manufacturing it. An n-type A layer with a thickness of 1000 nm and an impurity concentration of lXl0"elf-' is formed on a Sn-doped n-type GaAs substrate 11.
j! N-type contact layer 12 made of As, undoped Aj! with a thickness of 1 μm! Electro-optic effect layer 13 made of As, p-type An! with a thickness of 1000 people! Impurity concentration consisting of As 5
A p-type contact layer 14 of
Barrier layer 15 consisting of o, hG a *, aA s
A multi-quantum well layer 15 in which 50 well layers 152 made of undoped GaAs with a thickness of 1 and 60 are laminated alternately.
form. The multiple quantum well layer 15 has a diameter of 20 μm.
It is removed by chemical etching, leaving only a portion intact. The surface of the multiple quantum well layer 15 is made of Ti0g and SiO□ and has a wavelength of 0.
.. It is coated with a dielectric multilayer film 16 having a reflectance of 96% for light of 8 μm to form an incident surface 17 . A p-type electrode 18 made of an A n /S n alloy is formed on the p-type contact layer 14 in the portion where the multiple quantum well layer 15 has been removed.
form. On the back surface of the substrate 11, a portion corresponding to the multiple quantum well layer 15 was removed by chemical etching into a circular shape with a diameter of 40 μm, and etched with TiOt and Sin.
からなる誘電体多層膜19でコーティングし、出射面2
0を形成する。誘電体多層WA19の反射率は、波長0
.8μ蒙の光に対して96%である。基板11の裏面上
の誘電体多層膜19を除去し、AuGeNi合金のn型
電極21を形成する。The output surface 2 is coated with a dielectric multilayer film 19 consisting of
form 0. The reflectance of dielectric multilayer WA19 is at wavelength 0.
.. It is 96% for 8 μm of light. The dielectric multilayer film 19 on the back surface of the substrate 11 is removed, and an n-type electrode 21 of AuGeNi alloy is formed.
以上のような構成の光論理素子において、その入射面1
7には入射光201.202と信号光203が入射する
。入射光201.202の波長は、多重量子井戸層15
の励起子吸収のピーク波長より短い820nmである。In the optical logic element having the above configuration, the entrance surface 1
Incident light 201, 202 and signal light 203 are incident on 7. The wavelength of the incident light 201 and 202 is the same as that of the multiple quantum well layer 15.
The wavelength is 820 nm, which is shorter than the peak wavelength of exciton absorption.
信号光203の波長は、励起子吸収のピーク波長よりわ
ずかに長い850nmである。出射面から出射する出射
光204を波長850nmの光とする。The wavelength of the signal light 203 is 850 nm, which is slightly longer than the peak wavelength of exciton absorption. The emitted light 204 emitted from the emitting surface has a wavelength of 850 nm.
入射光201.202によって多重量子井戸層15の励
起子吸収が飽和して、屈折率が変化するため誘電体多層
膜16.19の間に形成されるファブ、す・ペロ共振器
の信号光203に対する透過率が変化し、入射201と
202の間で出射光204を出力とする論理演算が実現
される。このとき、p型電極18とn型電極21の間の
電圧をOvから−1,6vに変化すると電気光学効果層
13の屈折率がlXl0−’だけ増加する。このためフ
ァブリ・ペロ共振器の共振波長は共振曲線の半値全幅に
等しい分だけ長波長側に移動する。p型電極18とn型
電極21の間の電圧がOvのとき信号光203の波長と
ファプリ・ペロ共振器の共振波長を一致させておくと、
電圧を一〇、8V、 −1,6V、 −2,4V、
−3,6Vと変化させることにより、信号光203
の波長と共振波長とのずれを、共振曲線の半値全幅を単
位として1/2.1 。The exciton absorption of the multiple quantum well layer 15 is saturated by the incident light 201 and 202, and the refractive index changes, so that the signal light 203 of the Fab S-Perot resonator formed between the dielectric multilayer films 16 and 19 is generated. The transmittance changes, and a logical operation is realized between the incident light 201 and 202 with the output light 204 as the output. At this time, when the voltage between the p-type electrode 18 and the n-type electrode 21 is changed from Ov to -1.6V, the refractive index of the electro-optic effect layer 13 increases by lXl0-'. Therefore, the resonant wavelength of the Fabry-Perot resonator shifts toward the long wavelength side by an amount equal to the full width at half maximum of the resonance curve. When the voltage between the p-type electrode 18 and the n-type electrode 21 is Ov, if the wavelength of the signal light 203 and the resonant wavelength of the Fapry-Perot resonator are made to match,
Voltage 10.8V, -1.6V, -2.4V,
By changing it to -3,6V, the signal light 203
The difference between the wavelength of
3/2.2と変化させることができ、信号光203の波
長を一定としたままで、電圧制御で種々の論理関数を選
択できる。3/2.2, and various logic functions can be selected by voltage control while keeping the wavelength of the signal light 203 constant.
以上本発明の一実施例について説明したが、本発明は励
起子の存在する多重量子井戸が形成できればInP/I
nGaAs系などいかなる半導体材料にも適用できる。Although one embodiment of the present invention has been described above, the present invention is applicable to InP/I
It can be applied to any semiconductor material such as nGaAs.
以上詳述したように本発明によれば、電圧によって論理
関数を選択できる光論理素子を得ることができる。As described in detail above, according to the present invention, it is possible to obtain an optical logic element whose logic function can be selected depending on the voltage.
第1図は本発明の一実施例の構成図、
第2図は従来のファブリ・ペロ共振器を示す構成図、
第3図は第2図のファプリ・ペロ共振器の原理を説明す
るための共振特性を示す図である。
11・・・・・基板
12・・・・・n型コンタクト層
13・・・・・電気光学効果層
14・・・・・p型コンタクト層
15・・・・・多重量子井戸層
151 ・・・・バリア層
152 ・・・・ウェル層
16、19・・・誘電体多層膜
17・・・・・入射面
18・・・・・p型電極
20・・・・・出射面
21・・・・・n型電極
201.202 ・・入射光
203 ・・・・信号光
204 ・・・・出射光Fig. 1 is a block diagram of an embodiment of the present invention, Fig. 2 is a block diagram showing a conventional Fabry-Perot resonator, and Fig. 3 is a diagram for explaining the principle of the Fabry-Perot resonator shown in Fig. 2. FIG. 3 is a diagram showing resonance characteristics. 11... Substrate 12... N-type contact layer 13... Electro-optic effect layer 14... P-type contact layer 15... Multiple quantum well layer 151... ... Barrier layer 152 ... Well layers 16, 19 ... Dielectric multilayer film 17 ... Incident surface 18 ... P-type electrode 20 ... Output surface 21 ... ...N-type electrode 201,202 ...Incoming light 203 ...Signal light 204 ...Outgoing light
Claims (1)
に、電圧印加用電極をもつ電気光学効果層が挿入されて
いることを特徴とする光論理素子。(1) An optical logic element characterized in that an electro-optic effect layer having a voltage applying electrode is inserted inside a Fabry-Perot resonator including a multiple quantum well.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3241187A JPS63200131A (en) | 1987-02-17 | 1987-02-17 | Optical logic element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3241187A JPS63200131A (en) | 1987-02-17 | 1987-02-17 | Optical logic element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63200131A true JPS63200131A (en) | 1988-08-18 |
Family
ID=12358206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3241187A Pending JPS63200131A (en) | 1987-02-17 | 1987-02-17 | Optical logic element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63200131A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5157537A (en) * | 1991-02-01 | 1992-10-20 | Yeda Research And Development Co., Ltd. | Distributed resonant cavity light beam modulator |
US5340998A (en) * | 1991-02-28 | 1994-08-23 | Nec Corporation | Semiconductor surface light emitting and receiving heterojunction device |
-
1987
- 1987-02-17 JP JP3241187A patent/JPS63200131A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5157537A (en) * | 1991-02-01 | 1992-10-20 | Yeda Research And Development Co., Ltd. | Distributed resonant cavity light beam modulator |
US5340998A (en) * | 1991-02-28 | 1994-08-23 | Nec Corporation | Semiconductor surface light emitting and receiving heterojunction device |
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