JPS63160489A - Solid-state image pickup device - Google Patents

Abstract

PURPOSE:To require no image set and adjustment by incorporating a light flux branching means and a solid-state image pickup element corresponding thereto. CONSTITUTION:An optical path length correcting member 10 and an optical path length correction member 11 for correcting differences in the optical path length between blue light, red light and green light are successively disposed in the reflecting direction of a total reflection mirror 7 and a total reflection mirror 9 and the light flux branch part 12 is integrally formed by them all. The solid-state image pickup element 1b for the blue light, the solid state image pickup element 1g for the green light and the solid-state image pickup element 1r for the red light are mounted on a sealing member 2 made of ceramics, for instance, correspondingly to the transmitting positions of the three types of the light fluxes branched by the light flux branching part 12. The light flux branching part 12 and the sealing member 2 are bonded by a bonding agent through a sealing member 3 made of ceramics, for instance, The airtightness of the three solid-state image pickup elements 1b, 1g, 1r is maintained. Thereby, the fluctuation in position due to the elapse of time is substantially eliminated and the image set and adjustment is not required.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a solid-state imaging device, and more particularly to a solid-state imaging device having high image quality performance in which high resolution and high color reproducibility are desired.

[Prior Art] FIG. 3 is a sectional view of an imaging section of a conventional solid-state llll1l device.

In the figure, a solid-state Wi converts optical image information into electrical signals.
The image element 1 is placed on a sealing member 2 made of ceramic, for example, and an aluminum layer 5 is formed to establish electrical continuity between the solid-state image sensor 1 and a lead frame 4 that is connected to the outside. The periphery of the solid-state image sensor 1 is covered with a sealing member 3 made of ceramic, for example, and a glass 116 is attached to the surface with an adhesive to maintain airtightness.

The solid-state imaging device configured as described above is often used alone for applications that do not require particularly high resolution, such as home video cameras, but it is also used for broadcasting and business purposes, where high resolution and high color image quality is required. For applications requiring high reproducibility, a combination of two or three solid-state imaging devices has been used.

FIG. 4 shows an imaging optical system of a three-panel television camera composed of three solid-state Wi image devices.

In the figure, a blue-reflecting dichroic mirror 6 and a red-reflecting dichroic mirror 8 are installed on a straight line in the traveling direction of the incident light beam 13 that passes through the imaging lens 15, and behind them is a green light solid 1lii having the configuration shown in FIG. An imaging device 14g is provided. On the other hand, blue reflective dichroic mirror
A total reflection mirror 7 is installed in the direction reflected by the red reflection dichroic mirror 8, and a total reflection mirror 9 is installed in the direction reflected by the red reflection dichroic mirror 8. A solid-state imaging device f14b and a red light solid-state imaging device f14r are provided.

The Wi image operation will be explained below.

The incident light beam 13 that has passed through the imaging lens 15 is split into only the blue light beam by the blue reflection dichroic mirror 6, and the branched blue light beam is reflected by the total reflection mirror 7 and enters the blue light solid-state image sensor 14b for image processing. be done.

On the other hand, the light beam that has passed through the blue reflection dichroic mirror 6 is split into a red light beam by the red reflection dichroic mirror 8, and the branched red light beam is also reflected by the total reflection mirror 9 and enters the red light solid-state imaging device 14. Image processing is performed.The incident light flux, which has passed through the blue reflection dichroic mirror 6 and the red reflection dichroic mirror 8 and is now only a green light flux, enters the green light solid-state imaging device 214111 and is similarly subjected to image processing.

As described above, the solid-state imaging device that requires high image quality is configured to have a solid-state imaging device dedicated to each of the three light beams of blue light, red light, and green light.

[Problems to be Solved by the Invention] In the conventional solid-state imaging device as described above, only one solid-state imaging device is installed in one sealing member, so it is difficult to operate a television camera using multiple solid-state imaging devices. In this case, it is not suitable for downsizing the m-image optical system. Moreover, in this case, there are problems such as the need to frequently perform image alignment adjustment between the Ifi image devices.

The present invention has been made to solve these problems, and provides a solid-state IL image device in which the imaging optical system composed of a plurality of solid-state image sensors is made smaller and does not require frequent image alignment adjustment. The purpose is to

Means for Solving Problem E] A solid-state imaging device according to the present invention includes a light beam branching unit that branches into a plurality of light beams, and a plurality of solid-state image sensors that receive each of the branched light beams. It is composed of

[Function] In the present invention, a light beam branching means and a corresponding solid-state MS element are incorporated in the same device, so that a solid-state imaging device can obtain high image quality! The I-image optical system can be made smaller, and since image alignment is performed at the time of installation, frequent image alignment adjustment is not necessary.

[Embodiment] FIG. 1 is a sectional view of an m-image section showing an embodiment of the invention, and FIG. 2 is a diagram showing an imaging optical system of an embodiment of the invention.

In FIG. 1, a blue-reflecting dichroic mirror 6 and a red-reflecting dichroic mirror 8 are successively installed on a straight line in the traveling direction of the incident light beam 13, and a total-reflecting mirror 7 is placed in the direction of reflection by the blue-reflecting dichroic mirror 6. However, total reflection mirrors 9 are successively installed in the direction in which the light is reflected by the red reflection dichroic mirror 8. Furthermore, an optical path length correction member 10 and an optical path length correction member 11 are successively installed in the reflection direction of the total reflection mirror 7 and the total reflection mirror 9 to correct the difference in optical path length between the blue light, the red light, and the green light. , the light beam branching section 12 is integrally formed by these parts.

On the other hand, the solid-state image sensor 1b for blue light, the solid-state image sensor 1g for green light, and the solid-state image sensor 1 for red light are made of, for example, ceramic, corresponding to the transmission positions of the three types of light beams branched by the light beam splitter 12. It is placed on the sealing member 2.

Further, the light beam branching section 12 and the sealing member 2 are bonded to each other with an adhesive via a sealing member 3 made of ceramic, for example, to maintain airtightness of the three solid-state image sensors. The external connection lead frame 4 protruding from the sealing member 2 and the solid-state imaging device are connected by an aluminum wire 5.

The imaging operation of the solid-state imaging device configured as described above will be described next.

The solid-state imaging device 1 passes through the imaging lens 15 shown in FIG.
The incident light beam 13 directed toward the light source 4 is separated into three components of blue light, red light, and green light by the blue reflection dichroic mirror 6 and the red reflection dichroic mirror 8. The blue light and the red light are reflected by the total reflection mirror 7 and the total reflection mirror 9, respectively, and the three components of light become a mutually parallel light beam.

Next, the blue light and the red light pass through an optical path length correction member 1o and an optical path length correction member 11 that correct the difference in optical path length from the green light, and the green light remains as it is and passes through each solid-state image sensor 1b.
, 1g, and 1r and undergo image processing.

Therefore, the individual solid-state m-image elements and the beam splitter (section 12
The Cil is adjusted and fixed at the time of manufacturing, and the machining stage is 1□.There is almost no positional variation over time, and image alignment adjustment is not required.

In the above actual flow example, a dichroic mirror was used as a beam splitting means to separate the color components, but it is also possible to separate the color components by splitting the beam using a half mirror and then inserting a color filter into each beam. It's okay.

Further, in the above embodiment, each solid-state image sensor is arranged on the same plane by correcting the optical path length between each color light beam using an optical path length correction member, but the solid-state image sensor is arranged on the same plane without using an optical path length correction member. A similar effect can be obtained even if the optical path lengths of the respective color beams are made equal by changing the mounting position.

Furthermore, although the sealing member is made of ceramic in the above embodiment, it goes without saying that other materials may be used.

[Effects of the Invention] As explained above, the present invention incorporates a light beam branching means and a solid-state image sensor corresponding thereto in the same device.
This has the effect of providing a solid-state imaging device that can reduce the size of the imaging optical system and provide high image quality without the need for image alignment adjustment.

[Brief explanation of the drawing]

Fig. 1 is a cross-sectional view of the m image section showing an embodiment of the present invention, Fig. 2 is a view showing the Ifi image optical system of an embodiment of the present invention, and Fig. 3 is a cross-sectional view of the mm part of a conventional device. 4 shows an imaging optical system of a three-panel camera according to the prior art. In the figure, 1b is a solid-state m-image element for blue light, 1a is a solid-state m-image element for green light, 1r is a solid-state image sensor for red light, 2,
3 is a sealing member, 6 is a blue reflective dichroic mirror, 8 is a red reflective dichroic mirror, 10.11 is an optical path length correction member, 12 is a light beam branching part, and 13 is an incident light beam. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (4)

[Claims] (1) A beam splitting means for splitting an incident light beam into at least two color beams; and at least two solid-state imaging devices that receive each of the light beams split by the light beam splitting means, the light beam splitting means and the solid-state image sensor are installed together. (2) The solid-state imaging device according to claim 1, wherein the light beam branching means includes a dichroic mirror. (3) The solid-state imaging device according to claim 1, wherein the light beam branching means includes a half mirror. (4) The solid-state imaging device according to claim 1, 2, or 3, wherein the light beam branching means includes an optical path length correction member.