JPS63159705U - - Google Patents
Info
- Publication number
- JPS63159705U JPS63159705U JP5286887U JP5286887U JPS63159705U JP S63159705 U JPS63159705 U JP S63159705U JP 5286887 U JP5286887 U JP 5286887U JP 5286887 U JP5286887 U JP 5286887U JP S63159705 U JPS63159705 U JP S63159705U
- Authority
- JP
- Japan
- Prior art keywords
- laser
- interference fringes
- optical system
- optical fiber
- laser interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- 239000000835 fiber Substances 0.000 claims 2
- 230000010287 polarization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Description
第１図は本考案に係る分離型レーザ干渉計の全
体構成を示す説明図、第２図は第１図に示した干
渉計本体の内部構造を示す説明図、第３図は第１
図に示した干渉計本体の光電変換部の電気信号波
形図、第４図は第１図に示したカウンタの概略構
成を示す回路ブロツク図、第５図は本発明に係る
分離型レーザ干渉計の他の実施例の概略構成を示
す説明図である。
２……光源、４……光フアイバ、６……干渉計
本体、７……被測定物、８……ケーブル、１０…
…カウンタ。
FIG. 1 is an explanatory diagram showing the overall configuration of a separate laser interferometer according to the present invention, FIG. 2 is an explanatory diagram showing the internal structure of the interferometer main body shown in FIG. 1, and FIG.
4 is a circuit block diagram showing a schematic configuration of the counter shown in FIG. 1, and FIG. 5 is a separate laser interferometer according to the present invention. FIG. 2 is an explanatory diagram showing a schematic configuration of another embodiment. 2... Light source, 4... Optical fiber, 6... Interferometer body, 7... Measured object, 8... Cable, 10...
…counter.
Claims (1)
割した一方のレーザビームを被測定物側の可動反
射体に照射させて反射光を得ると共に他方のレー
ザビームを参照反射鏡に照射させて反射光を得、
これらの反射光を干渉させて干渉縞を発生させる
光学系と、 前記干渉縞を検出素子で検出すると共にその検
出信号に基づいて干渉縞をカウントして前記被測
定物の長さ等を表示する表示部と、 から構成される分離型レーザ干渉計において、前
記レーザ光源と前記光学系とが光フアイバによつ
て光結合され、前記可動反射体は被測定物の表面
に当接する測定子に設けられた反射鏡として構成
され、前記検出素子は１周期の干渉縞間に空間位
相をずらして複数配置されると共に各検出素子か
ら得られる電気信号を演算することによつて光フ
アイバの外乱を相殺することを特徴とする分離型
レーザ干渉計。 (2) 前記光フアイバは単一モードフアイバ又は
偏波面保存フアイバであることを特徴とする実用
新案登録請求の範囲第(1)項記載の分離型レーザ
干渉計。 (3) 前記光学系と前記表示部とは電気ケーブル
を介して接続されていることを特徴とする実用新
案登録請求の範囲第(1)項に記載の分離型レーザ
干渉計。 (4) 前記光学系と前記表示部とは光フアイバを
介して接続されていることを特徴とする実用新案
登録請求の範囲第(1)項に記載の分離型レーザ干
渉計。[Scope of Claim for Utility Model Registration] (1) A laser light source that generates a laser beam, the laser beam from the laser light source is split, and one of the split laser beams is irradiated onto a movable reflector on the side of the object to be measured. Obtain the reflected light and irradiate the other laser beam onto the reference reflector to obtain the reflected light.
an optical system that causes these reflected lights to interfere to generate interference fringes; and a detection element that detects the interference fringes and counts the interference fringes based on the detection signal to display the length of the object to be measured. A separate laser interferometer comprising: a display section; the laser light source and the optical system are optically coupled by an optical fiber; A plurality of the detection elements are arranged with the spatial phase shifted between the interference fringes of one period, and the disturbance of the optical fiber is canceled out by calculating the electric signal obtained from each detection element. A separate laser interferometer that is characterized by: (2) The separated laser interferometer according to claim 1, wherein the optical fiber is a single mode fiber or a polarization preserving fiber. (3) The separated laser interferometer according to claim (1), wherein the optical system and the display section are connected via an electric cable. (4) The separated laser interferometer according to claim 1, wherein the optical system and the display section are connected via an optical fiber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286887U JPS63159705U (en) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5286887U JPS63159705U (en) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159705U true JPS63159705U (en) | 1988-10-19 |
Family
ID=30878427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5286887U Pending JPS63159705U (en) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159705U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018727A (en) * | 1983-07-12 | 1985-01-30 | Hitachi Cable Ltd | Optical interferometer |
| JPS61219803A (en) * | 1985-03-27 | 1986-09-30 | Nippon Kogaku Kk <Nikon> | Apparatus for measuring physical quantity |
| JPS61256204A (en) * | 1985-05-09 | 1986-11-13 | Omron Tateisi Electronics Co | Optical fiber displacement sensor |
-
1987
- 1987-04-08 JP JP5286887U patent/JPS63159705U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6018727A (en) * | 1983-07-12 | 1985-01-30 | Hitachi Cable Ltd | Optical interferometer |
| JPS61219803A (en) * | 1985-03-27 | 1986-09-30 | Nippon Kogaku Kk <Nikon> | Apparatus for measuring physical quantity |
| JPS61256204A (en) * | 1985-05-09 | 1986-11-13 | Omron Tateisi Electronics Co | Optical fiber displacement sensor |
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