JPS63150684A - Laser radar visual sensor - Google Patents

Laser radar visual sensor

Info

Publication number
JPS63150684A
JPS63150684A JP29759286A JP29759286A JPS63150684A JP S63150684 A JPS63150684 A JP S63150684A JP 29759286 A JP29759286 A JP 29759286A JP 29759286 A JP29759286 A JP 29759286A JP S63150684 A JPS63150684 A JP S63150684A
Authority
JP
Japan
Prior art keywords
laser light
laser beam
reflected
telescope
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29759286A
Other languages
Japanese (ja)
Other versions
JPH0434112B2 (en
Inventor
Minoru Kimura
実 木村
Hidemi Takahashi
秀実 高橋
Osamu Yamada
修 山田
Hiroyuki Naito
宏之 内藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP29759286A priority Critical patent/JPS63150684A/en
Publication of JPS63150684A publication Critical patent/JPS63150684A/en
Publication of JPH0434112B2 publication Critical patent/JPH0434112B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To increase the level of a beam signal for heterodyne detection and to observe an object which is low in refractive index by providing a Galilean type beam diameter conversion telescope in the optical path of at least either of reference laser light and reflected laser light. CONSTITUTION:Laser light from a laser oscillator 1 is split by a beam splitter 2 into signal laser light 21 and the reference laser light 22. The signal laser light 21 is projected on the object 7 through an acoustooptic modulating element 3, a reflecting mirror 5, the hole of a holed mirror 10, and a scanner 30. Its reflected light is bent by the holed mirror 10, and reduced in beam diameter by the Galilean type beam diameter conversion telescope composed of a convex lens 14 and a concave lens 15 to obtain the reflected laser light 801. This reflected laser light 80 is mixed by a beam splitter 11 with reference laser light 22, condensed by a lens 12, and heterodyne-detected by a detector 13.

Description

【発明の詳細な説明】 産業上の利用分野 この発明は、距離情報と視′9j:、情報とを同時に得
ることの出来るレーザレーダ視覚センサに関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a laser radar visual sensor that can simultaneously obtain distance information and visual information.

従来の技術 従来のこの柿のレーザレーダ視覚センサは、例えば、ア
プライド・オブティクス第23巻2565頁(Appl
、○ptics、23 、P2565 1984)に示
されているように、第3図のような構成になっていた。
2. Description of the Related Art A conventional persimmon laser radar vision sensor is described, for example, in Applied Optics, Vol. 23, p. 2565 (Appl.
, ○ptics, 23, P2565 1984), it had a configuration as shown in Fig. 3.

すなわち、レーザ発振器1から出射されたレーザ光をビ
ームスプリッタ2で信号レーザ光21と参照レーザ光2
2とに分離する。信号レーザ光21を周波数シフタ23
で周波数シフトし、反射鏡25で変調器26に導びく。
That is, a laser beam emitted from a laser oscillator 1 is split into a signal laser beam 21 and a reference laser beam 2 by a beam splitter 2.
Separate into 2. The signal laser beam 21 is transferred to a frequency shifter 23
The signal is shifted in frequency by a reflecting mirror 25 and guided to a modulator 26 .

周波数シフタ23から出るもう一方の周波数シフトして
いないレーザ光は出力計24に導びかれモニタ光として
利用される。変調器26を通ったレーザ光は凸レンズ2
7.28で構成されたケプラー形ビーム径変換テレスコ
ープでビーム径を拡大され反射鏡29で折曲げられ二次
元に走査するスキャナ30で対象物7へ照射される。対
象物7からの反射レーザ光8は、対象物7の表面状態に
よって正反射から完全拡散まで種々であるが、スキャナ
30の開口て応じた面積9に相当する分の反射レーサ゛
光が収り込まれる。スキャナ30によって収り込まれた
反射レーザ光81は、ビームスプリッタ11で参照レー
ザ光22と混合され、レンズ12で集光し検出器13で
ヘテロダイン検波するようになっている。
The other non-frequency-shifted laser beam that comes out of the frequency shifter 23 is guided to an output meter 24 and used as monitor light. The laser beam passing through the modulator 26 passes through the convex lens 2
The beam diameter is expanded by a Keplerian beam diameter conversion telescope configured with 7.28, bent by a reflecting mirror 29, and irradiated onto the object 7 by a two-dimensional scanning scanner 30. The reflected laser beam 8 from the object 7 varies from regular reflection to complete diffusion depending on the surface condition of the object 7, but the reflected laser beam 8 corresponds to the area 9 corresponding to the aperture of the scanner 30 and is contained. It will be done. A reflected laser beam 81 collected by the scanner 30 is mixed with a reference laser beam 22 by a beam splitter 11, focused by a lens 12, and subjected to heterodyne detection by a detector 13.

発明が解決しようとする問題点 しかし、このような構成の光学系では、反射レーザ光8
1と参照レーザ光22のビーム径が極端(=異ってしま
い、有効なヘテロダイン検波が行えないという問題があ
った。これは下記の理由による。
Problems to be Solved by the Invention However, in an optical system with such a configuration, the reflected laser beam 8
There was a problem in that the beam diameters of the reference laser beam 1 and the reference laser beam 22 were extremely different, and effective heterodyne detection could not be performed.This is due to the following reasons.

つまり、ヘテロゲイン検波では、元の周波数の光である
参照レーザ光22と、周波数シフトしている反射レーザ
光81を混合し、2つのレーザ光の差周波、すなわち、
シフト周波数のビート信号を検出するものであるが、2
つのレーザ光の波面を完全に一致させて検出器13に入
射する必要がある。ここで、2つのレーザ光の径が異る
と完全に波面を一致させることが出来ず、反射レーザ光
81を有効(=利用していないことになる。
In other words, in heterogain detection, the reference laser beam 22, which is light at the original frequency, and the reflected laser beam 81, which is frequency-shifted, are mixed, and the difference frequency between the two laser beams, that is,
It detects a beat signal with a shift frequency, but 2
It is necessary to make the wavefronts of the two laser beams perfectly coincide with each other so that the two laser beams enter the detector 13. Here, if the diameters of the two laser beams are different, the wavefronts cannot be completely matched, and the reflected laser beam 81 is not effectively used.

本発明は上記の問題点を解決するもので、2つのレーザ
光の波面を完全に一致させて反射レーザ光を有効に使用
し高感度化を図ることを目的とするものである。
The present invention is intended to solve the above-mentioned problems, and aims to achieve high sensitivity by making the wavefronts of two laser beams perfectly match and effectively using reflected laser beams.

問題点を解決するための手段 そして上記問題点を解決するための本発明の技術的な手
段は、上記参照レーザ光と、反射レーザ光との少なくと
も一方にビーム径変換テレスコープを設けるものである
A means for solving the problems and a technical means of the present invention for solving the above problems is to provide a beam diameter conversion telescope on at least one of the reference laser beam and the reflected laser beam. .

作   用 この技術的手段による作用は次のようになる。For production The effect of this technical means is as follows.

すなわち、本発明では参照レーザ光と、反射レーザ光の
少なくとも一方のビーム径をビーム変換テレスコープで
変換し、両者のビーム径を一致させてから2つのレーザ
光を混合するので、2つのレーザ光の波面は完全に一致
し、全ての入力がへテロゲイン検波に寄与することにな
る。その結果、対象物からの反射レーザ光の強度が弱く
ても検出が可能となる。
That is, in the present invention, the beam diameter of at least one of the reference laser beam and the reflected laser beam is converted using a beam conversion telescope, and the two laser beams are mixed after matching the beam diameters of both, so that the two laser beams are The wavefronts of the two will match perfectly, and all inputs will contribute to the heterogain detection. As a result, detection is possible even if the intensity of the reflected laser light from the object is weak.

実施例 以下、本発明の一実施例を図面にもとづいて説明する。Example Hereinafter, one embodiment of the present invention will be described based on the drawings.

第1図において、レーザ発振器1から出射したレーザ光
をビームスプリッタ2で、信号レーザ光21と参照レー
ザ光22に分離する。信号レーザ光21ば、音響光学変
調素子3で回折し、周波数シフトと強度変調を同時に受
ける。周波数シフトしていない透過光は、出力計4でモ
ニタとして利用される。強度変調されたレーザ光は、反
射鏡5で折曲げられ、穴開き鏡10の穴を通り、スキャ
ナ30で対象物7に照射される。対象物7からの反射レ
ーサ゛光8のうち、スキャナ30の開口に応じた面積9
で取り込まれる。スキャナ30で収り込まれた反射レー
ザ光81は、穴開き鏡10によれ検出器13でヘテロゲ
イン検波される。この時、参照レーザ光22と反射レー
ザ光801のビーム径が等しくなるようにビーム径変換
テレスコープの諸元を決める。ビーム径の縮小率は、凸
レンズ14と凹レンズ15の焦点距離の比で決まる。
In FIG. 1, a laser beam emitted from a laser oscillator 1 is separated by a beam splitter 2 into a signal laser beam 21 and a reference laser beam 22. The signal laser beam 21 is diffracted by the acousto-optic modulation element 3 and undergoes frequency shift and intensity modulation at the same time. The transmitted light that has not been frequency shifted is used as a monitor with an output total of 4. The intensity-modulated laser beam is bent by a reflecting mirror 5, passes through a hole in a perforated mirror 10, and is irradiated onto an object 7 by a scanner 30. Of the reflected laser beam 8 from the object 7, an area 9 corresponding to the aperture of the scanner 30
It is taken in by. The reflected laser beam 81 collected by the scanner 30 is subjected to hetero gain detection by the detector 13 using the perforated mirror 10 . At this time, the specifications of the beam diameter conversion telescope are determined so that the beam diameters of the reference laser beam 22 and the reflected laser beam 801 are equal. The reduction rate of the beam diameter is determined by the ratio of the focal lengths of the convex lens 14 and the concave lens 15.

本実施例では、反射レーダ′光81をビーム径変換テレ
スコープで反射レーザ光801に縮少しているので、ビ
ームスプリッタ11、レンズ12が小口径のもので良く
、光学系が安価となる。また参照レーザ光22と反射レ
ーザ光801の径が等しく、波面が一致しているのでヘ
テロゲイン検波のビート信号強度も大きくなる。
In this embodiment, since the reflected radar' light 81 is reduced to the reflected laser beam 801 by the beam diameter conversion telescope, the beam splitter 11 and the lens 12 need only have small diameters, and the optical system can be made inexpensive. Furthermore, since the diameters of the reference laser beam 22 and the reflected laser beam 801 are equal and their wavefronts match, the intensity of the beat signal of the hetero gain detection is also increased.

次に本発明の他の実施例について説明する。Next, other embodiments of the present invention will be described.

第2図は他の実施例を示す。図中第1図と同一部分には
同一符号を付す。この実施例では、参照レーザ光22の
光路にガリレイ形ビーム径変換テレスコープを設けてい
る。本実施例では凹レンズ15によりビーム径を拡大し
、凸レンズ14により平行光としている。この時、反射
レーサ゛光81と拡大された参照レーザ光202の径を
等しくする様にテレスコープの諸元を決める。
FIG. 2 shows another embodiment. The same parts in the figure as in FIG. 1 are given the same reference numerals. In this embodiment, a Galilean beam diameter conversion telescope is provided in the optical path of the reference laser beam 22. In this embodiment, the beam diameter is expanded by the concave lens 15, and the beam is made into parallel light by the convex lens 14. At this time, the specifications of the telescope are determined so that the diameters of the reflected laser beam 81 and the enlarged reference laser beam 202 are made equal.

本実施例では2つのレーザ光の径が大きいために混合の
ための光学調整が容易であるという利点がある。
This embodiment has the advantage that optical adjustment for mixing is easy because the diameters of the two laser beams are large.

発明の効果 以上のように本発明は、参照レーザ光と反射レーサ°光
との少なくとも一方の光路中にガリレイ形ビーム径変換
テレスコープを設けたものであるので、2つのレーザ光
のビーム径を等しくして波面を一致させて混合が出来る
ため、ヘテロゲイン検波のビートイ=号強度が強くなり
、反射率の低い対象物の観測が可能となる。また、テレ
スコープにプリレイ形を採用することにより、球面収差
を小さくすることが出来、同時に装置の小形化も図るこ
とが出来るものである。
Effects of the Invention As described above, the present invention provides a Galilean beam diameter conversion telescope in the optical path of at least one of the reference laser beam and the reflected laser beam, so that the beam diameters of the two laser beams can be changed. Since the wave fronts can be made equal and mixed, the intensity of the beat signal of the hetero gain detection becomes stronger, making it possible to observe objects with low reflectance. Further, by adopting a pre-lay type telescope, spherical aberration can be reduced, and at the same time, the device can be made smaller.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例におけるレーザレーダ視覚セ
ンサの構成図、第2図は本発明の他の実施例のレーザレ
ーダ視覚センサの構成図、第3図は従来のレーザレーダ
視覚センサの構成図である。 1・・・・・・レーザ発振器、3・・・・・・音響光学
変調素子、10・・・・六開き鏡、11・・・・ビーム
スプリッタ、13・・・・・検出器、14・・・凸レン
ズ、15・・・・・凹レンズ、22・・・・・参照レー
ザ光、30 ・・・スキャナ、81・・・・・反射レー
ザ光。
Fig. 1 is a block diagram of a laser radar vision sensor according to an embodiment of the present invention, Fig. 2 is a block diagram of a laser radar vision sensor according to another embodiment of the present invention, and Fig. 3 is a block diagram of a conventional laser radar vision sensor. FIG. DESCRIPTION OF SYMBOLS 1... Laser oscillator, 3... Acousto-optic modulation element, 10... Hexagonal mirror, 11... Beam splitter, 13... Detector, 14... ... Convex lens, 15 ... Concave lens, 22 ... Reference laser beam, 30 ... Scanner, 81 ... Reflected laser light.

Claims (2)

【特許請求の範囲】[Claims] (1)レーザ発振器と、レーザ光を周波数シフトおよび
強度変調するための音響光学変調素子と周波数シフトし
たレーザ光を対象物に対し二次元走査するスキャナと、
対象物からの反射レーザ光と参照レーザ光とをヘテロダ
イン検波する検出器を備え、反射レーザ光と参照レーザ
光の光路の少なくとも一方にビーム径変換テレスコープ
を設けたレーザレーダ視覚センサ。
(1) A laser oscillator, an acousto-optic modulation element for frequency shifting and intensity modulation of laser light, and a scanner for two-dimensionally scanning an object with the frequency-shifted laser light;
A laser radar vision sensor comprising a detector for heterodyne detection of a reflected laser beam from an object and a reference laser beam, and a beam diameter conversion telescope provided in at least one of the optical paths of the reflected laser beam and the reference laser beam.
(2)ビーム径変換テレスコープがガリレイ形テレスコ
ープである特許請求の範囲第1項記載のレーザレーダ視
覚センサ。
(2) The laser radar visual sensor according to claim 1, wherein the beam diameter conversion telescope is a Galilean telescope.
JP29759286A 1986-12-16 1986-12-16 Laser radar visual sensor Granted JPS63150684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29759286A JPS63150684A (en) 1986-12-16 1986-12-16 Laser radar visual sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29759286A JPS63150684A (en) 1986-12-16 1986-12-16 Laser radar visual sensor

Publications (2)

Publication Number Publication Date
JPS63150684A true JPS63150684A (en) 1988-06-23
JPH0434112B2 JPH0434112B2 (en) 1992-06-04

Family

ID=17848551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29759286A Granted JPS63150684A (en) 1986-12-16 1986-12-16 Laser radar visual sensor

Country Status (1)

Country Link
JP (1) JPS63150684A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102412A (en) * 1988-10-11 1990-04-16 Nec Corp Laser distance measuring machine
JP2007085756A (en) * 2005-09-20 2007-04-05 Mitsubishi Electric Corp Laser radar device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876784A (en) * 1981-10-31 1983-05-09 Nissan Motor Co Ltd Light pulse radar apparatus for vehicles
JPS616349A (en) * 1984-06-18 1986-01-13 津田駒工業株式会社 Drum type weft yarn storage apparatus
JPS6151740A (en) * 1984-08-21 1986-03-14 Mitsubishi Electric Corp Ion implantation device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876784A (en) * 1981-10-31 1983-05-09 Nissan Motor Co Ltd Light pulse radar apparatus for vehicles
JPS616349A (en) * 1984-06-18 1986-01-13 津田駒工業株式会社 Drum type weft yarn storage apparatus
JPS6151740A (en) * 1984-08-21 1986-03-14 Mitsubishi Electric Corp Ion implantation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102412A (en) * 1988-10-11 1990-04-16 Nec Corp Laser distance measuring machine
JP2007085756A (en) * 2005-09-20 2007-04-05 Mitsubishi Electric Corp Laser radar device

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JPH0434112B2 (en) 1992-06-04

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