JPS63103959A - Gas sensor - Google Patents
Gas sensorInfo
- Publication number
- JPS63103959A JPS63103959A JP24838786A JP24838786A JPS63103959A JP S63103959 A JPS63103959 A JP S63103959A JP 24838786 A JP24838786 A JP 24838786A JP 24838786 A JP24838786 A JP 24838786A JP S63103959 A JPS63103959 A JP S63103959A
- Authority
- JP
- Japan
- Prior art keywords
- platinum
- tin oxide
- substrate
- film
- fine particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 58
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000010419 fine particle Substances 0.000 claims abstract description 40
- 229910001887 tin oxide Inorganic materials 0.000 claims abstract description 36
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000002253 acid Substances 0.000 claims abstract description 7
- 238000001241 arc-discharge method Methods 0.000 claims abstract description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- FBEIPJNQGITEBL-UHFFFAOYSA-J tetrachloroplatinum Chemical compound Cl[Pt](Cl)(Cl)Cl FBEIPJNQGITEBL-UHFFFAOYSA-J 0.000 claims 2
- 239000007789 gas Substances 0.000 abstract description 66
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 abstract description 22
- 239000000758 substrate Substances 0.000 abstract description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 13
- 238000010891 electric arc Methods 0.000 abstract description 11
- 238000001704 evaporation Methods 0.000 abstract description 11
- 239000001282 iso-butane Substances 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 11
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 abstract description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 7
- 239000001301 oxygen Substances 0.000 abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 abstract description 7
- 239000001294 propane Substances 0.000 abstract description 5
- 239000002245 particle Substances 0.000 abstract description 3
- 238000001035 drying Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 description 8
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 8
- 239000004071 soot Substances 0.000 description 7
- 239000007858 starting material Substances 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
この発明は可燃性ガス、特にイソブタンガスに高い感度
を示し、一般家庭用プロパンガスの漏れ警報器に用いら
れるガスセンサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a gas sensor that exhibits high sensitivity to flammable gases, particularly isobutane gas, and is used in general household propane gas leak alarms.
この種のガスセンサとして、金属ガス蒸気と酸素ガスを
アーク放電下で反応させることにより、ガス感応性金属
酸化物微粒子膜を生成してなるガスセンサが本出願人に
よる先願として出願中である（特願昭６１−２８６９３
号）。As a gas sensor of this type, a gas sensor in which a gas-sensitive metal oxide fine particle film is produced by reacting metal gas vapor and oxygen gas under arc discharge is currently being filed as a prior application by the present applicant. Gansho 61-28693
issue).
しかし、このガス感応性金属酸化物微粒子膜の一つであ
る酸化すず微粒子膜を一般家庭用のプロパンガス漏れ警
報器のガスセンサとして用いた場合、ガス感度がやや不
十分であるため電気回路の構成が複雑となるという実用
上の問題点があった。However, when this tin oxide fine particle membrane, which is one of the gas-sensitive metal oxide fine particle membranes, is used as a gas sensor for a propane gas leak alarm for general household use, the gas sensitivity is somewhat insufficient, so the electrical circuit configuration There was a practical problem that it became complicated.
本発明の目的は前述の先願にかかるガス感応性金属酸化
物微粒子膜の実用上の問題点を改良し、−ａ家庭用プロ
パンガス漏れ警報器への使用に適したガスセンサを捷供
することにある。The purpose of the present invention is to improve the practical problems of the gas-sensitive metal oxide fine particle film disclosed in the prior application, and to provide a gas sensor suitable for use in a household propane gas leak alarm. be.
前述の目的を達成するため、本発明によれば、アーク放
電法により生成された酸化すず微粒子膜に白金を添加し
てガス感応材料（ガスセンサ）とすることを特徴とする
。In order to achieve the above object, the present invention is characterized in that platinum is added to a tin oxide fine particle film produced by an arc discharge method to produce a gas-sensitive material (gas sensor).
上述の酸化すず微粒子膜はアーク放電法により生成され
る。すなわち、所定の減圧状態に制御された酸素中です
すを蒸発させながら低電圧でアーク放電を発生させ、蒸
発すずと酸素を反応させて酸化すず微粒子を生成し、こ
れを電極の形成されたアルミナ基板上に付着することに
より生成される。The tin oxide fine particle film described above is produced by an arc discharge method. That is, arc discharge is generated at low voltage while evaporating soot in oxygen controlled at a predetermined reduced pressure state, and the evaporated tin and oxygen are reacted to produce tin oxide fine particles, which are then transferred to the alumina on which the electrodes are formed. It is produced by adhering onto a substrate.
このアルミナ基板上に付着した酸化すず微粒子膜はこれ
自体でガス感応材料として用いることができるが、本発
明ではこの材料にさらに白金を添加してガス感応材料と
する。この白金の添加は塩化白金（ＩＶ）または塩化白
金（Ｎ）酸を出発原料とし、この水溶液中に前記アルミ
ナ基板上の酸化すず微粒子膜を浸漬することにより前記
出発原料と前記酸化すず微粒子膜を接触し、その後加熱
処理することにより行われ、この結果得られるガス感応
材料は可燃性ガス、特にイソブタンガスに高い感度を示
すガス感応材料となり、−ａ家庭用プロパンガス漏れ警
報器用のガスセンサとして最適となる。The tin oxide fine particle film deposited on the alumina substrate can be used as a gas-sensitive material by itself, but in the present invention, platinum is further added to this material to make it a gas-sensitive material. This addition of platinum uses platinum chloride (IV) or platinum chloride (N) acid as a starting material, and by immersing the tin oxide fine particle film on the alumina substrate in this aqueous solution, the starting material and the tin oxide fine particle film are combined. The resulting gas-sensitive material is highly sensitive to flammable gases, especially isobutane gas, and is ideal as a gas sensor for household propane gas leak alarms. becomes.
塩化白金（ＩＶ）または塩化白金（ＩＶ）酸を出発原料
として白金を添加することによりイソブタンガスに高い
感度を示す理由はまだ明らかではないが、白金を添加す
ることによりガス感応材料の電気抵抗が高くなること、
ならびに組成がすべて二酸化すず（ＳＮＯｘ）になるこ
とが判明している。Although it is not yet clear why adding platinum to platinum chloride (IV) or platinum chloride (IV) acid as a starting material shows higher sensitivity to isobutane gas, adding platinum increases the electrical resistance of the gas-sensitive material. to get high,
It has also been found that the composition is all tin dioxide (SNOx).
以下、この発明を添付図面を用いて詳述する。 Hereinafter, this invention will be explained in detail using the accompanying drawings.
第１図乃至第３図は本発明にかかるガスセンサの一具体
例を示した図面であって、第１図はその平面図、第２図
は背面図、第３図は第１図におけるＡ−Ａ ’線断面図
である。1 to 3 are drawings showing a specific example of the gas sensor according to the present invention, in which FIG. 1 is a plan view, FIG. 2 is a rear view, and FIG. It is an A' line sectional view.
１はアルミナ基板であって、この基板ｌ上にアーク放電
法により生成された酸化すず微粒子膜５を形成し、この
膜５にさらに白金１０を添加し、ガス感応材料として構
成される。２はガスセンサを加熱するためのヒーター、
３．４は白金１０と酸化すず微粒子１Ｉ１５からなるガ
ス感応材料の電気抵抗値を測定するための一対の白金電
極、６．７はヒーター２のリード線、８．９は白金電極
３．４のリード線である。1 is an alumina substrate, on which a tin oxide fine particle film 5 produced by an arc discharge method is formed, and platinum 10 is further added to this film 5 to form a gas-sensitive material. 2 is a heater for heating the gas sensor;
3.4 is a pair of platinum electrodes for measuring the electrical resistance of a gas-sensitive material consisting of platinum 10 and tin oxide fine particles 1I15, 6.7 is the lead wire of heater 2, and 8.9 is the platinum electrode 3.4. This is the lead wire.
以下、本発明を酸化すず微粒子膜の生成、白金の添加お
よびガスセンサの組立に区分してそれぞれ詳細に説明す
る。Hereinafter, the present invention will be explained in detail by dividing into the generation of a tin oxide fine particle film, the addition of platinum, and the assembly of a gas sensor.
ヒすず′ −の生
酸化すず微粒子膜５は第４図示のような酸化すず微粒子
膜生成装置を用いて、アルミナ基板１上に形成される。A raw tin oxide fine particle film 5 of histin'- is formed on the alumina substrate 1 using a tin oxide fine particle film producing apparatus as shown in FIG.
第４図において、１１はすずの蒸発源であって、抵抗加
熱型のタングステン製ボートからなり、この中にはすす
が入っている。１２はモリブデン製アーク放電電極、１
３はタングステン製熱電子放射フィラメントであつて、
数十アンペアの交流電流を通して加熱することにより熱
電子が発生する。In FIG. 4, reference numeral 11 is a tin evaporation source, which is a resistance-heated tungsten boat, and contains soot. 12 is a molybdenum arc discharge electrode, 1
3 is a thermionic emission filament made of tungsten,
Thermionic electrons are generated by heating through an alternating current of several tens of amperes.
蒸発源１１、アーク放電電極１２）熱電子放射フィラメ
ント１３への電力供給は図示しないが、ベースプレート
１５に設けられた電流導入ボートからそれぞれ行われる
。Although not shown, electric power is supplied to the evaporation source 11, arc discharge electrode 12) and thermionic emission filament 13 from a current introduction boat provided on the base plate 15, respectively.
基板ホルダー１４はアーク放電電極１２と熱電子放射フ
ィラメント１３の上方に配置され、この基板ホルダ１４
には、表面に一対の白金電極と裏面にヒーターがそれぞ
れ焼付けられたアルミナ基板が表面にステンレス製のマ
スクを密着させ、かつ表面がすすの蒸発源１１に向かう
ように設置される。この基板ホルダー１４はさらに、ス
テンレス製真空槽１６に設置されたモーター１７により
回転自在である。A substrate holder 14 is arranged above the arc discharge electrode 12 and the thermionic emission filament 13.
, an alumina substrate with a pair of platinum electrodes baked on the front surface and a heater baked on the back surface is installed with a stainless steel mask tightly attached to the front surface and with the surface facing the soot evaporation source 11. This substrate holder 14 is further rotatable by a motor 17 installed in a vacuum chamber 16 made of stainless steel.
１８は真空槽１６に接続した真空ポンプ、１９は真空計
、２０は真空ポンプ１８と真空計１９の間に挿入された
絞りパルプ、２１は真空槽１６に接続された流量計付バ
ルブである。18 is a vacuum pump connected to the vacuum chamber 16, 19 is a vacuum gauge, 20 is a squeeze pulp inserted between the vacuum pump 18 and the vacuum gauge 19, and 21 is a valve with a flow meter connected to the vacuum chamber 16.
本発明にかかる酸化すず微粒子膜は第４図示の装置を用
いて以下のようにしてアルミナ基板上に形成される。The tin oxide fine particle film according to the present invention is formed on an alumina substrate in the following manner using the apparatus shown in FIG.
まず、真空槽１６は真空ポンプ１８でｌ Ｘ １０−
’Ｔｏｒｒ以下の高真空まで排気された後、この槽１６
中に流量計付パルプ２１を開けて酸素を４入し、所定圧
力値に保持される。次いで、すすの蒸発源１１に電流を
流して加熱し、すすを蒸発させなから熱電子放射フィラ
メント１３から熱電子を放射させ、アーク放電電極１２
と蒸発ｔＡ１１との間にアーク放電を発生させると、ア
ーク放電中でｆ発すずと酸素とが反応し、生成した酸化
すず微粒子は上方に配置されたアルミナ基板１には付着
して酸化すず微粒子膜が形成される。First, the vacuum chamber 16 is powered by a vacuum pump 18.
'After being evacuated to a high vacuum of less than Torr, this tank 16
The pulp 21 with a flow meter is opened and 4 pieces of oxygen are introduced into the pulp, and the pressure is maintained at a predetermined pressure value. Next, a current is passed through the soot evaporation source 11 to heat it, and while the soot is not evaporated, thermionic electrons are emitted from the thermionic emission filament 13, and the arc discharge electrode 12 is heated.
When an arc discharge is generated between the evaporation tA11 and the evaporation tA11, the emitted tin and oxygen react with each other in the arc discharge, and the generated tin oxide fine particles adhere to the alumina substrate 1 disposed above, forming tin oxide fine particles. A film is formed.
亘倉■垂■
酸化すず微粒子が形成されたアルミナ基板を塩化白金（
ｒｌ／）酸溶液中に浸漬した後、とり出して乾燥し、次
いで電気炉中で熱処理して酸化すず微粒子膜に白金を添
加する。Tadori Watakura The alumina substrate on which tin oxide fine particles have been formed is treated with platinum chloride
rl/) After being immersed in an acid solution, it is taken out and dried, and then heat treated in an electric furnace to add platinum to the tin oxide fine particle film.
ガスセンサの組立
白金１０の添加された酸化すず微粒子膜５を付着したア
ルミナ基板１に第５図示のようにヒーター用リード線６
および７、電極用リード線８および９をボンディングし
、さらにベース３１に立てられたステム３２および３３
にヒーター用リード線６および７を、ステム３４および
３５に電極用リード線８および９をそれぞれ接続する。Assembling the gas sensor As shown in Figure 5, heater lead wires 6 are attached to an alumina substrate 1 on which a tin oxide fine particle film 5 to which platinum 10 is added is attached.
and 7, bonding the electrode lead wires 8 and 9, and further stems 32 and 33 erected on the base 31.
The heater lead wires 6 and 7 are connected to the stems 34 and 35, and the electrode lead wires 8 and 9 are connected to the stems 34 and 35, respectively.
なお、図示しないかベース３１にステンレス製金網をか
ぶせてガスセンサが組立てられる。Note that the gas sensor is assembled by covering the base 31 with a stainless wire mesh (not shown).
上述の酸化すず微粒子ｆｉｌ ５は第４図の装置により
真空槽１６内の酸素圧力を０．０２Ｔｏｒｒ、すずの蒸
発速度を約０．０４ ｇ ／分、アーク放電電流を約Ｉ
Ａの条件で３０分間酸化すず微粒子を生成し、アルミナ
基板に付着させることにより形成した。このときの酸化
すず微粒子の粒径は走査電子ｗ４ｍ鏡にらる観察では０
．１μｍ以下であり、膜厚は約１μｍであった。Ｘ線回
折の結果、酸化すず微粒子膜の組成は二酸化すずと一酸
化すすが大部分であり、それに微量の金属すずが含まれ
ていた。The above-mentioned tin oxide fine particles fil 5 were prepared using the apparatus shown in FIG. 4 at an oxygen pressure of 0.02 Torr in the vacuum chamber 16, a tin evaporation rate of about 0.04 g/min, and an arc discharge current of about I.
It was formed by generating tin oxide fine particles for 30 minutes under the conditions of A and adhering them to an alumina substrate. At this time, the particle size of the tin oxide fine particles was 0 when observed using a scanning electron W4M mirror.
．． It was 1 μm or less, and the film thickness was about 1 μm. As a result of X-ray diffraction, the composition of the tin oxide fine particle film was found to be mostly tin dioxide and soot monoxide, with a trace amount of metal tin included.
さらに上述の白金は酸化すず微粒子膜が形成されている
アルミナ基板を白金ン震度１重世％の塩化白金（ＩＶ）
酸水溶液に３０分間浸漬した後、室温で乾燥し、さらに
６００℃の温度の電気炉中で３時間熱処理することによ
り酸化すず微粒子膜に添加した。この熱処理によって酸
化すず微粒子の粒径は変わらなかったが、組成は全て二
酸化すずになっていることが認められた。Furthermore, the above-mentioned platinum is made of platinum chloride (IV) with a seismic intensity of 1%.
After being immersed in an acid aqueous solution for 30 minutes, it was dried at room temperature and further heat-treated in an electric furnace at a temperature of 600° C. for 3 hours, and then added to the tin oxide fine particle film. This heat treatment did not change the particle size of the tin oxide fine particles, but it was confirmed that the composition was entirely tin dioxide.
第５図に示される構成のガスセンサに組立て、白金の付
着された酸化すず微粒子膜の感ガス特性を通常のガス注
入法により求めた。空気中での電気抵抗をＲｏ、所定濃
度のイソブタンガス中での電気抵抗をＲｇとしてＲｏ
／ Ｒｇをガス感度とした。第６図は本発明によるガス
センサと白金を添加しないガスセンサについてのイソブ
タンガス濃度とガス感度との関係を表したグラフであっ
て、曲線イは本発明のガスセンサの感ガス特性、曲線口
は白金を添加しないで酸化すず微粒子膜のみをガス感応
材料として構成したガスセンサの感ガス特性である。ガ
スセンサの温度は３５０℃である。It was assembled into a gas sensor having the configuration shown in FIG. 5, and the gas sensitivity characteristics of the tin oxide fine particle film to which platinum was attached were determined by a conventional gas injection method. Ro is the electrical resistance in air, and Rg is the electrical resistance in isobutane gas at a given concentration.
/Rg was taken as gas sensitivity. FIG. 6 is a graph showing the relationship between isobutane gas concentration and gas sensitivity for the gas sensor according to the present invention and the gas sensor without platinum added. This is the gas-sensitive characteristic of a gas sensor configured only with a tin oxide fine particle film as a gas-sensitive material without any additives. The temperature of the gas sensor is 350°C.
第６図から、本発明による白金の添加された酸化すず微
粒子膜をガス感応材料としたガスセンサは白金を添加し
ない上述のガスセンサと比較すると、曲線イ、口に示さ
れるようにイソブタンガスに対して３倍以上の高い感度
を示すことがわかる。From FIG. 6, it can be seen that the gas sensor using the platinum-doped tin oxide fine particle film according to the present invention as a gas-sensitive material has a high sensitivity to isobutane gas, as shown by curves A and B, when compared with the above-mentioned gas sensor that does not contain platinum. It can be seen that the sensitivity is three times or more higher.
同様な効果は塩化白金（ＩＴ）の塩酸酸性水溶液を用い
た場合にも認められた。A similar effect was also observed when an acidic aqueous solution of platinum chloride (IT) in hydrochloric acid was used.
このように本発明において、イソブタンガスに高い感度
を示す理由は明らかでないが、白金がイソブタンガスの
酸化すず微粒子の表面吸着に太きく寄与するためと考え
られる。The reason why the present invention exhibits high sensitivity to isobutane gas is not clear, but it is thought to be because platinum greatly contributes to the surface adsorption of tin oxide fine particles of isobutane gas.
以上のとおり、本発明ガスセンサはアーク、放電法によ
り形成された酸化すず微粒子膜に白金、特に塩化白金（
ＩＶ）または塩化白金（ＩＶ）酸を出発原料とした白金
を付着させて感応材料としたから、イソブタンガスに高
い感度を示し、一般家庭用ブロバンガスの漏れ警報器に
最適なガスセンサである。As described above, the gas sensor of the present invention has platinum, especially platinum chloride (
IV) or chloroplatinic (IV) acid as a starting material and made into a sensitive material by attaching platinum, it exhibits high sensitivity to isobutane gas, making it an ideal gas sensor for general household broban gas leak alarms.
第１図乃至第３図は本発明にかかるガスセンサの一興体
例を表した図面であって、第１図は平面図、第２図は背
面図、第３図は第１図におけるＡ−Ａ’線断面図であり
、第４図は本発明にかかる酸化すず微粒子膜を形成する
ための装置の断面図であり、第５図は本発明にかかるガ
スセンサの組立図であり、第６図はガスセンサのイソブ
タンガスに対する惑ガス特性である。
１・・・アルミナ基板、 ３．４・・・白金電極、５
・・・酸化すず微粒子膜、 １ｏ・・・白金、１１・
・・すすの蒸発源、 １２・・・アーク放電電極、１
３・・・熱電子放射フィラメント、
イ・・・本発明による感ガス特性曲線、口・・・酸化す
ず微粒子膜のみのガスセンサにょる感ガス特性曲線。1 to 3 are drawings showing an example of an integrated gas sensor according to the present invention, in which FIG. 1 is a plan view, FIG. 2 is a rear view, and FIG. 3 is a line AA' in FIG. 1. 4 is a cross-sectional view of an apparatus for forming a tin oxide fine particle film according to the present invention, FIG. 5 is an assembled diagram of a gas sensor according to the present invention, and FIG. 6 is a cross-sectional view of a gas sensor according to the present invention. This is the gas characteristic of isobutane gas. 1... Alumina substrate, 3.4... Platinum electrode, 5
...Tin oxide fine particle film, 1o...Platinum, 11.
... Soot evaporation source, 12 ... Arc discharge electrode, 1
3... Thermionic emission filament, A... Gas sensitive characteristic curve according to the present invention, and... Gas sensitive characteristic curve based on a gas sensor having only a tin oxide fine particle film.
Claims (2)
に白金を添加してガス感応材料とすることを特徴とする
ガスセンサ。(1) A gas sensor characterized by adding platinum to a tin oxide fine particle film produced by an arc discharge method to make a gas-sensitive material.
て、前記白金の添加は前記酸化すず微粒子膜を塩化白金
（IV）または塩化白金（IV）酸と接触させ、加熱するこ
とにより行うことを特徴とするガスセンサ。(2) In the gas sensor according to claim 1, the platinum is added by bringing the tin oxide fine particle film into contact with platinum (IV) chloride or platinum (IV) chloride acid and heating it. Characteristic gas sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24838786A JPS63103959A (en) | 1986-10-21 | 1986-10-21 | Gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24838786A JPS63103959A (en) | 1986-10-21 | 1986-10-21 | Gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63103959A true JPS63103959A (en) | 1988-05-09 |
Family
ID=17177348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24838786A Pending JPS63103959A (en) | 1986-10-21 | 1986-10-21 | Gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63103959A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01284747A (en) * | 1988-05-10 | 1989-11-16 | Ricoh Co Ltd | Gas sensor |
| GB2255849A (en) * | 1991-05-15 | 1992-11-18 | Alan Smith | Gas sensor alarm system |
| US6634210B1 (en) * | 2002-04-17 | 2003-10-21 | Delphi Technologies, Inc. | Particulate sensor system |
| WO2006007802A1 (en) * | 2004-07-20 | 2006-01-26 | T.E.M.. Technologische Entwicklungen Und Management Gmbh | Sensor for detecting airborne gases or fumes, which comprises a metal oxide, gas-sensitive active layer |
| CN106197871A (en) * | 2016-06-28 | 2016-12-07 | 中国航天空气动力技术研究院 | Water leakage measuring method during electro-arc heater water leakage fault |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950352A (en) * | 1982-09-14 | 1984-03-23 | Nippon Denso Co Ltd | Detection element for nox |
| JPS5999244A (en) * | 1982-11-30 | 1984-06-07 | Toshiba Corp | Detector for gaseous co |
| JPS60255973A (en) * | 1984-04-12 | 1985-12-17 | プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Method and device for evaporating material in vacuum |
-
1986
- 1986-10-21 JP JP24838786A patent/JPS63103959A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950352A (en) * | 1982-09-14 | 1984-03-23 | Nippon Denso Co Ltd | Detection element for nox |
| JPS5999244A (en) * | 1982-11-30 | 1984-06-07 | Toshiba Corp | Detector for gaseous co |
| JPS60255973A (en) * | 1984-04-12 | 1985-12-17 | プラスコ・ドクトル・エーリツヒ・プラズマ―コーテイング・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Method and device for evaporating material in vacuum |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01284747A (en) * | 1988-05-10 | 1989-11-16 | Ricoh Co Ltd | Gas sensor |
| GB2255849A (en) * | 1991-05-15 | 1992-11-18 | Alan Smith | Gas sensor alarm system |
| US6634210B1 (en) * | 2002-04-17 | 2003-10-21 | Delphi Technologies, Inc. | Particulate sensor system |
| WO2006007802A1 (en) * | 2004-07-20 | 2006-01-26 | T.E.M.. Technologische Entwicklungen Und Management Gmbh | Sensor for detecting airborne gases or fumes, which comprises a metal oxide, gas-sensitive active layer |
| CN106197871A (en) * | 2016-06-28 | 2016-12-07 | 中国航天空气动力技术研究院 | Water leakage measuring method during electro-arc heater water leakage fault |
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