JPS6258883A - Drive device - Google Patents
Drive deviceInfo
- Publication number
- JPS6258883A JPS6258883A JP60193720A JP19372085A JPS6258883A JP S6258883 A JPS6258883 A JP S6258883A JP 60193720 A JP60193720 A JP 60193720A JP 19372085 A JP19372085 A JP 19372085A JP S6258883 A JPS6258883 A JP S6258883A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric body
- piezoelectric
- driven
- driving
- rigidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
- H02N2/0025—Driving devices, e.g. vibrators using only longitudinal or radial modes using combined longitudinal modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は被１駆動体に駆動力を与える駆動装置に関し、
さらに詳しくは圧電効果を示す圧電体を用いて被駆動体
に駆動力を与える駆動装置に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a drive device that provides a driving force to a driven body.
More specifically, the present invention relates to a driving device that uses a piezoelectric material exhibiting a piezoelectric effect to apply driving force to a driven object.
圧電体に電圧を印加すると歪が生ずるいわゆる逆圧電効
果を利用して被駆動体を駆動する駆動装置としては、例
えば１９８３年に発行された独国丈献「ファインゲラツ
テテクニクＪ （ＦＥＩＮＧＥＲＡＴＥＴＨＣＨＮＩＫ
）の第４７０頁〜第４７３頁に記載されるように、一方
向に歪形態を有する板状の圧電体を直交方向に組み合わ
せて振動変位を合成し、被駆動体に接触する駆動端部を
楕円運動させて、被駆動体を−方向に連続駆動するもの
がある。For example, a driving device that drives a driven object by utilizing the so-called inverse piezoelectric effect, which causes distortion when a voltage is applied to a piezoelectric material, is described in the German journal "Feingerattetechnik J" published in 1983.
), page 470 to page 473 of ``Plate-shaped piezoelectric bodies having a strained form in one direction are combined in orthogonal directions to synthesize vibration displacement, and the driving end that contacts the driven object is There is one that continuously drives the driven body in the negative direction by making an elliptical motion.
上記の駆動装置では板状の圧電体を用いているため、板
状の圧電体の弾性変形による振動が生じる。このため圧
電体による駆動端部本来の楕円振動が損われ、駆動性能
が落ちるという問題があった。Since the above drive device uses a plate-shaped piezoelectric body, vibrations occur due to elastic deformation of the plate-shaped piezoelectric body. As a result, the inherent elliptical vibration of the drive end caused by the piezoelectric body is impaired, resulting in a problem of reduced drive performance.
本発明は、安定で大きな駆動力を得ることのできる駆動
装置を提供することを目的とする。An object of the present invention is to provide a drive device that can obtain stable and large driving force.
本発明の上記の目的は、被駆動体を駆動する駆動装置に
おいて、一対の積層型圧電体をベース上に斜交配置し、
接着剤または弾性部材を用いて圧電体の各一端をベース
上に、各他端を圧電体間を結合する柔機構に固着し、圧
電体の剛性と圧電体・柔機構の質量または圧電体・弾性
部材の剛性と圧電体・柔機構・弾性部材の質量によって
定まる共振系の共振周波数で圧電体を振動させ、共振系
の共振変位を柔機構先端の駆動端部に伝達することによ
り達成される。The above-mentioned object of the present invention is to provide a drive device for driving a driven body, in which a pair of laminated piezoelectric bodies are disposed obliquely on a base,
One end of the piezoelectric body is fixed to the base using adhesive or an elastic member, and each other end is fixed to the flexible mechanism that connects the piezoelectric bodies, and the rigidity of the piezoelectric body and the mass of the piezoelectric body and the flexible mechanism or the piezoelectric body and This is achieved by vibrating the piezoelectric body at the resonance frequency of the resonance system determined by the rigidity of the elastic member and the mass of the piezoelectric body, flexible mechanism, and elastic member, and transmitting the resonance displacement of the resonance system to the drive end at the tip of the flexible mechanism. .
駆動装置を構成する要素の共振周波数に一致する駆動周
波数で圧電体を駆動させるので、駆動端部に接触する被
駆動体に対して大きな駆動力を与えることができる。Since the piezoelectric body is driven at a driving frequency that matches the resonant frequency of the elements constituting the driving device, a large driving force can be applied to the driven object that comes into contact with the driving end.
以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第１図は本発明の装置筒１の実施例を示すもので、この
図において１および２は直交体形状の積層型圧電体であ
る。８は耐摩耗性材料でできた駆動端部で、柔機構７の
先端に接着固定されている。FIG. 1 shows an embodiment of a device cylinder 1 of the present invention, and in this figure, numerals 1 and 2 are orthogonal body-shaped laminated piezoelectric bodies. Reference numeral 8 denotes a drive end made of a wear-resistant material, which is adhesively fixed to the tip of the flexible mechanism 7.
９は被駆動体である。１０は被駆動体９と駆動端部８の
接触点における接平面に対して±４５°の傾斜面１０Ａ
を有するベースである。前記圧電体１．２は、振動方向
がベース１０の傾斜面１０Ａの法線方向と平行になるよ
うに傾斜面１０Ａ上に配置され、接着剤１１により各一
端をベース１０ａ傾斜面１０Ａ上にまた各他端を柔機構
７に固着されている。圧電体１，２の機械的変位の方向
はそれぞれ矢印５と６で表わされる。すなわち、圧電体
１と２は各振動方向が直交しかつ前記接平面に対し±４
５°の角度をなすようにベース１０と柔機構７の間に組
み込まれ固着されている。前記柔機構７は圧電体１に相
対する部分７ａと圧電体２に相対する部分７ｂとからな
る。前記柔機構の一部７ａは、矢印５の方向には剛であ
り、矢印５と直角方向には柔であり１部分７ｂと対称で
あるように、弾性ヒンジを用いた平行リンク機構となっ
ている。同様に前記柔機構７の一部７ｂは、矢印６の方
向には剛であり、矢印６と直角方向には柔であり、部分
７ａと対称であるように弾性ヒンジを用いた平行リンク
機構となっている。したがって圧電体１の変化は圧電体
２に妨げられることなく駆動端８を矢印５の方向に変位
させ、逆に圧電体２の変位は圧電体１に妨げられること
なく駆動端８を矢印６の方向に変位させる。9 is a driven body. 10 is an inclined surface 10A at an angle of ±45° with respect to the tangent plane at the contact point between the driven body 9 and the drive end portion 8;
It is a base with The piezoelectric body 1.2 is placed on the inclined surface 10A so that its vibration direction is parallel to the normal direction of the inclined surface 10A of the base 10, and one end of each is attached to the inclined surface 10A of the base 10a with adhesive 11. Each other end is fixed to the flexible mechanism 7. The direction of mechanical displacement of the piezoelectric bodies 1, 2 is represented by arrows 5 and 6, respectively. In other words, the vibration directions of the piezoelectric bodies 1 and 2 are perpendicular to each other and ±4 with respect to the tangential plane.
It is installed and fixed between the base 10 and the flexible mechanism 7 so as to form an angle of 5°. The flexible mechanism 7 includes a portion 7a facing the piezoelectric body 1 and a portion 7b facing the piezoelectric body 2. Part 7a of the flexible mechanism is rigid in the direction of arrow 5, flexible in the direction perpendicular to arrow 5, and is a parallel link mechanism using an elastic hinge so that it is symmetrical with part 7b. There is. Similarly, the part 7b of the flexible mechanism 7 is rigid in the direction of the arrow 6 and flexible in the direction perpendicular to the arrow 6, and is symmetrical to the part 7a with a parallel linkage using an elastic hinge. It has become. Therefore, the change in the piezoelectric body 1 causes the drive end 8 to be displaced in the direction of the arrow 5 without being hindered by the piezoelectric body 2, and conversely, the displacement of the piezoelectric body 2 causes the drive end 8 to be displaced in the direction of the arrow 6 without being hindered by the piezoelectric body 1. direction.
上述した本発明の装置の第１の実施例の基本的動作は、
次のようなものである。圧電体１に交流電圧を印加する
と、圧電体１が矢印５の方向に振動変位し、柔機構７を
へて駆動端８を矢印５の方向へ振動変位させ、駆動端８
の振動変位を受けて被駆動体９が一方向へ駆動するもの
である。ここで交流電圧を印加する圧電体を１から２に
変えれば、圧電体２が矢印６の方向へ振動し、柔機構７
をへて駆動端８を矢印６の方向へ振動変位させるので、
被駆動体９の駆動方向は反転する。The basic operation of the first embodiment of the device of the present invention described above is as follows:
It is as follows. When an AC voltage is applied to the piezoelectric body 1, the piezoelectric body 1 vibrates in the direction of the arrow 5, vibrates and displaces the drive end 8 in the direction of the arrow 5 through the flexible mechanism 7, and the drive end 8
The driven body 9 is driven in one direction in response to vibrational displacement. If the piezoelectric body to which the AC voltage is applied is changed from 1 to 2, the piezoelectric body 2 will vibrate in the direction of arrow 6, and the flexible mechanism 7
Since the drive end 8 is vibrated in the direction of the arrow 6 through the
The driving direction of the driven body 9 is reversed.
さらに詳しく説明すると、圧電体１を振動させた場合、
駆動端８の振動変位は圧電体１と柔機構７の剛性および
圧電体１・柔機構７・駆動端部８の有効質量により定ま
る周波数特性を示す。ここで圧電体１の変位方向に対す
る柔機構７の部分７ａの剛性は高く部分７ｂの剛性は低
いことから、駆動端８の振動変位は、第２図に示すよう
に先端に前記有効質量をもった、圧電体１の剛性により
定まるばね定数をもつばね系に、圧電体１の振動変位に
相当する外部振動が加わる場合のばね先端の振動変位と
して表わすことができる。前記ばね系は、第３図に示す
ように有効質量をｍ、はね定数をｋで表わすと、周波数
ｆ＝ （ｋ／ｍ）”／” ／２πに共振点をもつ周波数
特性を示す。To explain in more detail, when the piezoelectric body 1 is vibrated,
The vibration displacement of the drive end 8 exhibits a frequency characteristic determined by the rigidity of the piezoelectric body 1 and the flexible mechanism 7 and the effective masses of the piezoelectric body 1, the flexible mechanism 7, and the drive end 8. Here, since the rigidity of the portion 7a of the flexible mechanism 7 in the direction of displacement of the piezoelectric body 1 is high and the rigidity of the portion 7b is low, the vibration displacement of the drive end 8 is caused by the effective mass at the tip as shown in FIG. Furthermore, it can be expressed as the vibrational displacement of the tip of the spring when external vibration corresponding to the vibrational displacement of the piezoelectric body 1 is applied to a spring system having a spring constant determined by the rigidity of the piezoelectric body 1. As shown in FIG. 3, the spring system exhibits frequency characteristics with a resonance point at a frequency f=(k/m)"/"/2π, where m is the effective mass and k is the spring constant.
したがって、圧電体に印加する交流電圧の周波数を上述
の共振点近傍に設定することにより、簡単小型な構造で
微小変位を拡大して駆動端部に伝達でき、駆動効率の向
上を図ることができる。Therefore, by setting the frequency of the AC voltage applied to the piezoelectric material near the resonance point described above, it is possible to magnify minute displacements and transmit them to the drive end with a simple and compact structure, thereby improving drive efficiency. .
第３図は本発明の装置の第２の実施例を示すもので、こ
の図において第１図と同符号のものは同一部分である。FIG. 3 shows a second embodiment of the apparatus of the present invention, and in this figure, the same reference numerals as in FIG. 1 are the same parts.
１’ 、２’は中央に貫通穴をもつ直方体形状の積層型
圧電体である。圧電体１′は貫通穴に通した弾性部材３
を介してベース１０の傾斜面１０Ａ上と柔機構７に固着
され、圧電体２′は貫通穴に通した弾性部材４を介して
ベース１０の傾斜面１０Ａ上と柔機構７とに固着される
点で前述した第１の実施例と異なっている。1' and 2' are rectangular parallelepiped-shaped laminated piezoelectric bodies with a through hole in the center. The piezoelectric body 1' is an elastic member 3 passed through a through hole.
The piezoelectric body 2' is fixed to the inclined surface 10A of the base 10 and the flexible mechanism 7 via the elastic member 4 passed through the through hole. This embodiment differs from the first embodiment described above in this respect.
上述した本発明の第２の実施例の基本的動作は、第１の
実施例の場合と同様であるが、共振ばね系に弾性部材３
，４の剛性と質量が加わる点で異なる。すなわちこの第
５図に示すように第２の実施例では駆動端８の振動変位
は、圧電体１’ 、２’の剛性により定まるばね定数を
もつばねに、圧電体１’ 、２’ を貫通する弾性部材
３，４の剛性により定まるばね定数をもつばねが並列結
合された。The basic operation of the second embodiment of the present invention described above is the same as that of the first embodiment, but an elastic member 3 is added to the resonant spring system.
, 4 is different in that the stiffness and mass of 4 are added. That is, as shown in FIG. 5, in the second embodiment, the vibration displacement of the drive end 8 is caused by a spring having a spring constant determined by the rigidity of the piezoelectric bodies 1', 2' penetrating the piezoelectric bodies 1', 2'. Springs having a spring constant determined by the rigidity of the elastic members 3 and 4 are connected in parallel.
並列ばねの先端に圧電体・柔機構・駆動端部および弾性
部材の有効質量をもつばね系に、圧電体の振動変位に相
当する外部振動が加わる場合のばね先端の振動変位とし
て表わすことができる。新たに加わった弾性部材の有効
質量をｍＭ 、弾性部材の剛性より定まる定数をｋＭで
表わすとこのばね系の共振周波数は第６図に示すように
ｆ’ ＝（（ｋ ＋ ｋＨ） ／ （ｍ＋ｍｓ） ）
”／ ２ ｙｃ となる。It can be expressed as the vibrational displacement of the spring tip when an external vibration equivalent to the vibrational displacement of the piezoelectric body is applied to a spring system that has an effective mass of a piezoelectric body, a flexible mechanism, a driving end, and an elastic member at the tip of the parallel spring. . When the effective mass of the newly added elastic member is expressed as mm and the constant determined by the stiffness of the elastic member is expressed as kM, the resonance frequency of this spring system is f' = ((k + kH) / (m + ms) as shown in Figure 6. ))
”/2 yc.
この第２の実施例に示す構造では、弾性部材３゜４と圧
電体１’ 、２’の剛性が加算されるため、圧電体部分
の強度が増す効果がある。また本構造では、圧電体１’
、２’ を速性部材３，４で締め付けることによって
ベース１０と柔機構７とに固着することから、圧電体に
あらかじめ圧縮力が加わり、圧電体が引っばり応力で破
壊されるおそれがない。In the structure shown in this second embodiment, since the rigidity of the elastic member 3.4 and the piezoelectric bodies 1' and 2' are added, the strength of the piezoelectric body portion is increased. In addition, in this structure, the piezoelectric body 1'
, 2' are fixed to the base 10 and the flexible mechanism 7 by tightening them with the fastening members 3 and 4, so that a compressive force is applied to the piezoelectric body in advance, and there is no fear that the piezoelectric body will be destroyed by tensile stress.
弾性部材３，４の具体例としては、ボルトやばねを用い
ることが可能である。As specific examples of the elastic members 3 and 4, bolts and springs can be used.
以上述べたように、本発明によれば圧電体の微小変位を
拡大して駆動端部に伝達でき、安定で大きな駆動力を得
ることのできるものである。As described above, according to the present invention, minute displacements of the piezoelectric body can be magnified and transmitted to the driving end, and stable and large driving force can be obtained.
第１図は本発明の装置の第１の実施例を示す正面図、第
２図は第１図に示す本発明の第１の実施例をばね系とし
て示した図、第３図はその特性図、第４図は本発明の装
置の第２の実施例を一部断面にて示す正面図、第５図は
第４図に示す本発明の装置の第２の実施例をばね系とし
て示した図、第６図はその特性図である。
１．２．１’ 、２’・・・圧電体、３，４・・・弾性
部材。
５．６・・・圧電体の変位方向、７・・・柔機構、８・
・・駆動端部、９・・・被駆動体、１０・・・ベース、
１１・・・接着剤。
代理人 弁理士 小川勝男 ′□
￥ １ 圀Fig. 1 is a front view showing a first embodiment of the device of the present invention, Fig. 2 is a diagram showing the first embodiment of the invention shown in Fig. 1 as a spring system, and Fig. 3 is its characteristics. 4 is a partially sectional front view showing a second embodiment of the device of the present invention, and FIG. 5 shows the second embodiment of the device of the present invention shown in FIG. 4 as a spring system. Figure 6 shows its characteristic diagram. 1.2.1', 2'... piezoelectric body, 3, 4... elastic member. 5.6...Displacement direction of piezoelectric body, 7...Flexible mechanism, 8.
... Drive end, 9... Driven body, 10... Base,
11...Adhesive. Agent Patent Attorney Katsuo Ogawa ′□ ￥ 1 Kuni
Claims (1)
おいて、前記被駆動体を接触駆動する駆動端部と、前記
被駆動体と前記駆動端部の接触点における法線に対して
、＋４５°方向に変位成分を持つ圧電体１と−４５°方
向に変位成分を持つ圧電体２とを有し、前記各圧電体の
各一端を前記各圧電体を固定するベース上に固着し、前
記各圧電体の各他端を、前記各圧電体の各変位方向には
剛性が高く各変位方向と直角方向には剛性が低い系機構
からなる結合子に固着し、前記各圧電体に、前記各圧電
体の剛性で定まる共振周波数に一致する駆動周波数を印
加したことを特徴とする駆動装置。 ２、特許請求の範囲第１項記載の駆動装置において、圧
電体をベースと結合子に接着剤で固着したことを特徴と
する駆動装置。 ３、特許請求の範囲第１項記載の駆動装置において、圧
電体をベースと結合子とに弾性部材で締め付けて固着し
、圧電体に、圧電体の剛性と弾性部材の剛性で定まる共
振周波数に一致する駆動周波数を印加したことを特徴と
する駆動装置。[Claims] 1. In a drive device that uses a piezoelectric body to contact drive a driven body, a drive end that contacts and drives the driven body, and a contact point between the driven body and the drive end. It has a piezoelectric body 1 having a displacement component in the +45° direction with respect to the normal line, and a piezoelectric body 2 having a displacement component in the −45° direction with respect to the normal, and each piezoelectric body is fixed at one end of each piezoelectric body. fixed on a base, and fixed each other end of each piezoelectric body to a connector consisting of a system mechanism that has high rigidity in each displacement direction of each piezoelectric body and low rigidity in a direction perpendicular to each displacement direction, A driving device characterized in that a drive frequency that matches a resonance frequency determined by the rigidity of each piezoelectric body is applied to each of the piezoelectric bodies. 2. A drive device according to claim 1, characterized in that a piezoelectric body is fixed to the base and the connector with an adhesive. 3. In the drive device according to claim 1, the piezoelectric body is fixed to the base and the connector by tightening with an elastic member, and the piezoelectric body has a resonance frequency determined by the rigidity of the piezoelectric body and the rigidity of the elastic member. A driving device characterized in that matching driving frequencies are applied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60193720A JPS6258883A (en) | 1985-09-04 | 1985-09-04 | Drive device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60193720A JPS6258883A (en) | 1985-09-04 | 1985-09-04 | Drive device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258883A true JPS6258883A (en) | 1987-03-14 |
Family
ID=16312670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60193720A Pending JPS6258883A (en) | 1985-09-04 | 1985-09-04 | Drive device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258883A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
| US5059850A (en) * | 1989-02-14 | 1991-10-22 | Brother Kogyo Kabushiki Kaisha | Temperature compensation member composed of shape memory effect alloy for an actuator driven by a piezo-electric element |
| US5424597A (en) * | 1993-05-07 | 1995-06-13 | Physik Instrumente (P.I.) Gmbh & Co. | Adjusting device with piezo drive |
| US5563465A (en) * | 1993-04-14 | 1996-10-08 | Hitachi, Ltd. | Actuator |
| US6392298B1 (en) * | 2000-02-28 | 2002-05-21 | Ericsson Inc. | Functional lid for RF power package |
| US6492760B1 (en) | 1999-06-01 | 2002-12-10 | Minolta Co., Ltd. | Actuator |
| US6713943B1 (en) * | 1999-06-14 | 2004-03-30 | Minolta Co., Ltd. | Actuator and driving method thereof |
| US6771004B1 (en) | 1999-11-02 | 2004-08-03 | Minolta Co., Ltd. | Actuator using displacement element |
| EP3430652B1 (en) * | 2016-03-15 | 2020-08-26 | Physik Instrumente (PI) GmbH & Co. Kg | Piezoelectric drive |
-
1985
- 1985-09-04 JP JP60193720A patent/JPS6258883A/en active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5049775A (en) * | 1988-09-30 | 1991-09-17 | Boston University | Integrated micromechanical piezoelectric motor |
| US5059850A (en) * | 1989-02-14 | 1991-10-22 | Brother Kogyo Kabushiki Kaisha | Temperature compensation member composed of shape memory effect alloy for an actuator driven by a piezo-electric element |
| US5563465A (en) * | 1993-04-14 | 1996-10-08 | Hitachi, Ltd. | Actuator |
| US5424597A (en) * | 1993-05-07 | 1995-06-13 | Physik Instrumente (P.I.) Gmbh & Co. | Adjusting device with piezo drive |
| US6492760B1 (en) | 1999-06-01 | 2002-12-10 | Minolta Co., Ltd. | Actuator |
| US6713943B1 (en) * | 1999-06-14 | 2004-03-30 | Minolta Co., Ltd. | Actuator and driving method thereof |
| US6771004B1 (en) | 1999-11-02 | 2004-08-03 | Minolta Co., Ltd. | Actuator using displacement element |
| US6392298B1 (en) * | 2000-02-28 | 2002-05-21 | Ericsson Inc. | Functional lid for RF power package |
| EP3430652B1 (en) * | 2016-03-15 | 2020-08-26 | Physik Instrumente (PI) GmbH & Co. Kg | Piezoelectric drive |
| US11101750B2 (en) | 2016-03-15 | 2021-08-24 | Physik Instrumente (Pi) Gmbh & Co. Kg | Piezoelectric drive with at least two independent drive sections |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3184117B2 (en) | Ultrasonic motor and electronic device with ultrasonic motor | |
| JPS61224881A (en) | Vibration wave motor | |
| JP2612050B2 (en) | Vibration wave motor | |
| JPS6258883A (en) | Drive device | |
| JPS6096183A (en) | Surface wave motor | |
| JPS61224878A (en) | Vibration wave motor | |
| JPH0532991B2 (en) | ||
| JPH1151959A (en) | Piezoelectric vibrator | |
| KR100318861B1 (en) | Flat Linear Ultrasonic Motors | |
| JPH11346487A (en) | Oscillation wave unit and oscillation wave driver | |
| JPH0477554B2 (en) | ||
| JPH08182351A (en) | Ultrasonic actuator | |
| JP2000324865A (en) | Vibrating motor and optical fiber switch | |
| JPH01144371A (en) | Ultrasonic motor device | |
| RU2030343C1 (en) | Oscillating conveyer | |
| JP2543163B2 (en) | Ultrasonic linear motor | |
| JP2538757B2 (en) | Piezoelectric vibration unit | |
| JP4040172B2 (en) | Vibration wave device and vibration wave drive device | |
| JP2538033B2 (en) | Planar ultrasonic actuator | |
| JPH0787710B2 (en) | Ultrasonic linear motor | |
| JP2874174B2 (en) | Ultrasonic transducer and ultrasonic motor | |
| JPH08172782A (en) | Ultrasonic motor | |
| JPH03212175A (en) | Linear ultrasonic wave motor | |
| JPH0898565A (en) | Vibrating actuator | |
| JPH07110143B2 (en) | Planar ultrasonic actuator |