JPS62289259A - Atomizer for evaporating monomer - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] 3. Detailed Description of the Invention [Field of Industrial Application] The present invention relates generally to the conversion of liquids into gases, and more particularly to the atomization of monomer liquids for flash evaporation. It concerns something.

[Conventional technology]

U.S. Patent Application No. 620.647, filed on June 14, 1984, entitled "Small Monolithic Multilayer Capacitor, Apparatus for Manufacturing the Same, and Ripping Blade," discloses an apparatus and method for manufacturing a small electrical capacitor. ing. This manufacturing method includes a vapor deposition step under high vacuum, and one of the things deposited is resin in the form of a monomer.

This resin, after deposition and curing, forms a dielectric layer on the monolithic capacitor structure.

In flash evaporation technology, liquid particles are given heat of vaporization and evaporate instantaneously, but with this method, the resin maintains its monomer form throughout the vapor deposition process, and crosslinks and hardens in the subsequent process. be done. Monomers are relatively viscous and difficult to atomize. Atomizing the liquid by spraying it under pressure results in much greater vaporization than is necessary to obtain extremely thin deposited layers. Also, the use of compressed gas for atomization has an undesirable effect on the vacuum environment for deposition.

[Contents of the invention]

One of the objects of the present invention is to provide an atomization device which is suitable for flash evaporation and vacuum evaporation of monomer liquids and is capable of dispersing a highly viscous liquid in the form of fine particles over a wide range. .

Another object of the invention is to provide an atomizing device of the type described above which has standard equipment and construction and is therefore inexpensive to manufacture and maintain.

These and other objects of the invention will become apparent from the following description with reference to the accompanying drawings.

Although the preferred embodiments of the invention will be described exclusively, it will be understood that the invention is not intended to be limited to only such embodiments. Thus, it will be understood that various alternatives, modifications and equivalent uses are possible without departing from the spirit and scope of the invention as set forth in the claims.

In the figure, the liquid supplied via line 11 and valve 12 is vaporized, and the surface 13 of rotating drum 14 is
An apparatus IO for depositing vaporized vapor is shown. The monomer liquid is atomized by the structure 15 implementing the present invention, vaporized in the evaporation chamber 16 by receiving heat from the heater 17, and then passed through the nozzle structure 18 to the drum surface 1.
3. Nozzle structure 18 controls deposition in part by confining the vapor flow in an inert gas.

The overall configuration and purpose of the device 10 are as shown in the above-mentioned application number 620.647,
Please refer to this.

In the present invention, it is necessary that the structure 15 is monolithic, and the tip portion 31 at one end of the structure 15 is connected to the evaporation chamber 1.
6 and is adapted to supply liquid thereto. Further, an ultrasonic vibration device 32 is coupled to the other end of the structure 15. The structure 15 is supported by a collar 34 which closes the opening of the evaporation chamber through which the tip section 31 extends and which is fixed near the throat of the tip section. The tip part 31 has a neck-shaped tip 35 which has an end face 36 to which liquid is supplied through a capillary channel 37 provided in the tip part 31 . The capillary passage 37 is connected to a compression joint 38
It is connected to the liquid supply line 11 via.

A vibrating device 32, preferably a piezoelectric crystal oscillator, is adapted to receive power from a power source 39 via line 41. As a result of the ultrasonic vibration of the tip 35 and its end face 36, liquid flows out of the passageway 37, covers the end face 36, and is spread through the extensive pattern of the chambers 16 in minute droplets. This pattern has a shallow bell shape when a flat surface, such as end face 36, is used. Typically 350
The liquid hitting the heated chamber wall, which is between 400 and 400 degrees Fahrenheit, evaporates and creates a gas pressure that drives vapor to deposit on the surface 13 through the nozzle structure 18.

The length of the coupling member 43 and the length of the tip portion 31 correspond to the wavelength of vibration 172, and the device 32 operates at the fundamental frequency of the coupling member 43 and the tip portion 31, with a maximum at the end face 36. An amplitude of is obtained and the lowest amplitude section, ie the node of vibration, appears at the junction between the coupling member 43 and the tip portion 31.

In order to protect the vibration device 32 from heat, a coupling member 43 rigidly connected between the chip portion 31 and the vibration device 32 has a water-cooled structure, and cooling water is supplied through a line 44.
It is adapted to flow through a passageway in the coupling member 43.

The heat transferred from the evaporation chamber 16 via the tip portion 36 is absorbed by the coupling member 43 and the cooling water flowing through it, so that the vibrating device is not adversely affected by excessive temperature increases.

To minimize absorption of vibrations, the connections to lines 38, 44 and collar 34 are located at or near vibration nodes. Since the structure 15 is supported by the collar 34 in a cantilevered manner, it can vibrate without experiencing vibration damping.

The material of the tip portion 31 is titanium alloy 6AL4.
Materials such as V have been found to be suitable. aisle 37
The diameter of the line 11 is determined by the flow rate of liquid through line 11, but 20 mils to 178 inches have been found to be suitable.

The basic elements such as the tip portion 31, the vibrating device 32, and the electronic device 39 can be found in standard laboratory equipment, such as an ultrasonic emulsifier, and atomization using such relatively standard elements is possible. The device is relatively inexpensive to manufacture and maintain.

[Brief explanation of the drawing]

The attached single drawing is a schematic, partially sectional view of a device implementing an atomization device according to the invention. 10... Atomization and vapor deposition device, 14... Drum, 1
5... Structure for atomization, 16... Evaporation chamber, 18...
Nozzle structure, 23... Vacuum chamber, 31... Chip portion, 32... Ultrasonic vibration device, 35... Chip, 3
6...Chip end face, 43...Joining member of water cooling structure.

Claims (9)

[Claims] (1) A device for atomizing a liquid to be vaporized, which includes an elongated integral structure having a tip portion at one end and an ultrasonic vibrating device coupled to the other end; and means for inducing ultrasonic vibrations in the tip portion, the tip portion having an end surface and defining a capillary passage terminating in the end surface, the end surface being about 1 sec. from the nodal point of vibration. 4 wavelengths apart and further comprising means for supplying liquid into said passageway and causing it to flow onto said end face and atomize it in the form of liquid droplets. (2) Claim 1 further comprising: a cooling chamber provided between the chip portion and the vibration device; and means for supplying cooling fluid to the cooling chamber.
). (3) The tip portion has a neck-shaped tip that terminates at the end surface, and is made of a solid hard material except for the portion that becomes the passageway. ). (4) a vacuum chamber, a heated vaporization chamber provided in the vacuum chamber, and an elongated integral structure provided in the vacuum chamber, one end of which protrudes and extends into the vaporization chamber; an ultrasonic vibrating device provided at the other end of the structure, and means for energizing the ultrasonic vibrating device to apply vibration to the tip portion; The chip portion has an end face located approximately 1/4 wavelength away from the vibration node and forms a capillary passage that ends at the end face, and further supplies liquid to the passageway and causes it to flow onto the end face. a cooling chamber provided in the structure between the evaporation chamber and the device; and flowing a cooling fluid into the cooling chamber. and means for thermally isolating the ultrasonic vibration device from the evaporation chamber. (5) The liquid vaporizer according to claim 4, wherein the integral structure has a coupling portion coupled to the tip portion. (6) The liquid vaporizer according to claim (5), wherein the connecting portion has the cooling chamber. (7) The length of the tip portion is equivalent to 1/4 wavelength of the vibration given by the ultrasonic vibration device, as set forth in claim (1) or (4). Device. (8) The device according to claim (1) or (4), wherein the length of the structure is equivalent to one wavelength of vibration given by the ultrasonic vibration device. (9) The ultrasonic vibration device applies vibration at the fundamental vibration frequency of the structure so that maximum amplitude can be obtained at the end face.
) or (4).