JPS6222933A - Air cleaner device - Google Patents
Air cleaner deviceInfo
- Publication number
- JPS6222933A JPS6222933A JP60160606A JP16060685A JPS6222933A JP S6222933 A JPS6222933 A JP S6222933A JP 60160606 A JP60160606 A JP 60160606A JP 16060685 A JP16060685 A JP 16060685A JP S6222933 A JPS6222933 A JP S6222933A
- Authority
- JP
- Japan
- Prior art keywords
- air
- air flow
- work space
- turbulence
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、清浄な作業空間を得るための空気清浄装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an air cleaning device for obtaining a clean working space.
従来の技術
従来、水平吹出型空気清浄装置は、第３図および第４図
に示すような構成であった。図において、水平吹出型空
気清浄装置１は清浄空気を得るためのＨＥＰＡフィルタ
ー３と、このＨＥＰＡフィルター３の風上側に設けられ
、送風機５の風を均圧にするプレナムチャンバー４と、
クリーンルーム１１から再び空気を取り入れるため送風
機５の吸込側に位置するリターン空気吸込口６と、この
吸込口６に設けられたプレフィルタ−７と、ＨＥＰＡフ
ィルター３の風下側に位置する作業空間２に設けられ、
拡散処理を受けるＩＣ用シリコンウェハー８が載置され
るポート台９から構成されている。BACKGROUND OF THE INVENTION Conventionally, a horizontal blowing type air cleaning device has a structure as shown in FIGS. 3 and 4. In the figure, a horizontal blowing type air purifier 1 includes a HEPA filter 3 for obtaining clean air, a plenum chamber 4 provided on the windward side of the HEPA filter 3, and equalizing the pressure of the air from the blower 5.
In order to take in air again from the clean room 11, a return air suction port 6 located on the suction side of the blower 5, a pre-filter 7 provided in this suction port 6, and a work space 2 located on the leeward side of the HEPA filter 3 are provided. established,
It consists of a port stand 9 on which an IC silicon wafer 8 to be subjected to a diffusion process is placed.
クリンルーム１１には、グレーティング床１２の下方に
位置し、クリーンルーム１１の循環空気用ダクトに連結
したリターン口が設けられ、上方にはＨＥＰＡフィルタ
ー１０が設けられている。また水平吹出型空気清浄装置
１の設置面は、グレーティング床１２と同一平面である
。The clean room 11 is provided with a return port located below the grating floor 12 and connected to a circulating air duct of the clean room 11, and a HEPA filter 10 is provided above. Further, the installation surface of the horizontal blowing air purifier 1 is on the same plane as the grating floor 12.
そして拡散炉１５は水平吹出型空気清浄装置１に横付け
されて組み立てられている。The diffusion furnace 15 is assembled next to the horizontal blowing air purifier 1.
以下上記構成における水平吹出型空気清浄装置１の動作
を説明する。ファン６が運転されると、清浄作業空間２
とクリーンルーム１１の一部の空気は、リターン空気吸
込口６、プレフィルタ−７を通り、送風機６によってプ
レナムチャンバー４に送られる。プレナムチャンバー４
において送られた空気は均圧化され、ＨＥＰＡフィルタ
ー３を介して清浄空気として清浄作業空間２に０．４５
ｍ／Ｓｅｃの風速で供給される。The operation of the horizontal blowing type air cleaning device 1 having the above configuration will be explained below. When the fan 6 is operated, the clean work space 2
A part of the air in the clean room 11 passes through the return air suction port 6 and the pre-filter 7, and is sent to the plenum chamber 4 by the blower 6. Plenum chamber 4
The air sent at
It is supplied at a wind speed of m/Sec.
一方、クリーンルーム１１のＨＥＰＡフィルター１０か
ら、０．２５ｍ／ＳｅＣで吹出された清浄空気は、清浄
作業空間２の前方を通り、グレーティング床１２を介し
て、リターンダクト１４に入り循環空気となる。On the other hand, clean air blown out at 0.25 m/SeC from the HEPA filter 10 in the clean room 11 passes in front of the clean work space 2, enters the return duct 14 via the grating floor 12, and becomes circulating air.
発明が解決しようとする問題点
このような従来の構成において、清浄作業空間のボート
台９付近の気流の状態を実測してみると、少しづつ上段
の影響を受けるため下段はど乱れており、そのため、汚
染空気の停滞、汚染空気の清浄作業空間への誘引などに
よって、ボート台９上に乗せられたウェノ・−８を汚染
する危険性が高いという問題があった。その気流の様子
を第５図に示す。第６図に示すように、ａ ％ ９点に
はつきりした渦流が認められ、水平層流が望ましい清浄
作業空間２では気流が乱れていることがわかる。Problems to be Solved by the Invention In this conventional configuration, when we actually measured the state of the airflow near the boat platform 9 in the clean working space, we found that the lower level was disturbed because it was gradually influenced by the upper level. Therefore, there was a problem in that there was a high risk of contaminating the Weno-8 placed on the boat platform 9 due to stagnation of contaminated air and attraction of contaminated air to the clean work space. Figure 5 shows the state of the airflow. As shown in FIG. 6, a sharp vortex flow is observed at the a% 9 point, indicating that the airflow is turbulent in the clean working space 2 where a horizontal laminar flow is desirable.
本発明は、上記問題点に鑑み、吹出し部に位置する清浄
作業空間での乱流を防止し、汚染空気の停滞、清浄作業
空間への誘引などを減少させることを目的とする。SUMMARY OF THE INVENTION In view of the above-mentioned problems, an object of the present invention is to prevent turbulence in a clean working space located in a blow-out section, and to reduce stagnation of contaminated air and attraction to a clean working space.
問題点を解決するだめの手段
この問題点を解決するために、本発明の空気清浄装置は
、フィルターと、前記フィルターの風上側に設けられ、
かつ送風機の風圧を均圧化するプレナムチャンバーと、
前記フィルターの風下側に位置する空気流通抵抗体とを
備え、前記空気流通抵抗体は部分ごとに空気流通抵抗を
異ならせた構成である。Means for Solving the Problem In order to solve this problem, the air purifying device of the present invention includes a filter, a filter provided on the upwind side of the filter,
and a plenum chamber that equalizes the wind pressure of the blower,
and an air flow resistance body located on the leeward side of the filter, and the air flow resistance body has a configuration in which the air flow resistance is made different for each part.
作 用
この構成によって、フィルターを介して得られる清浄空
気は、空気流通抵抗の異なる空気流通抵抗体によって、
吹き出し速度を変えることができるため、吹き出し箇所
によって適切な風速を得ることができる。よって乱流を
引き起こすことがなく、清浄作業空間における汚染空気
の停滞、誘引を減少させることができる０
実施例
以下、本発明の一実施例を第１図、第２図にもとづき説
明する。第１図、第２図において、第３図、第４図と同
じ構成部品については、同一番号を用いて説明を省略す
る。１６ａ〜１６ｅは、ＨＥＰＡフィルター３の風下側
に位置し、ボード台９とＨＥＰＡフィルター３の間に設
けられた空気流通抵抗体である。この空気流通抵抗体１
６ａ〜１６ｅは水平吹出型空気清浄装置１の設置面１３
からの高さによって空気流通抵抗が異なっている。Effect With this configuration, clean air obtained through the filter is transferred by air flow resistance elements with different air flow resistances.
Since the blowing speed can be changed, an appropriate wind speed can be obtained depending on the blowing point. Therefore, turbulence is not caused, and the stagnation and attraction of contaminated air in a clean working space can be reduced.Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. In FIGS. 1 and 2, the same components as those in FIGS. 3 and 4 are designated by the same numbers, and the description thereof will be omitted. 16a to 16e are air flow resistance elements located on the leeward side of the HEPA filter 3 and provided between the board stand 9 and the HEPA filter 3. This air flow resistance element 1
6a to 16e are installation surfaces 13 of the horizontal blowing air purifier 1
Air flow resistance differs depending on the height from the ground.
各々の空気流通抵抗を表わす指標として、空気流通抵抗
体１６ａ〜１６θの開口率をメツシュで表示すると、上
段より１６６．１４４，５９，２０゜１２メツシユとな
る。If the aperture ratios of the air flow resistors 16a to 16θ are expressed as a mesh as an index representing each air flow resistance, they are 166.144, 59, and 20°12 meshes from the top.
上記構成において、クリーンルーム１１はＨＥＰＡフィ
ルター１０から０．２５ｍ／ｓｍの風速で清浄空気が垂
直層流で吹出される。また、水平吹出型空気清浄装置１
のＨＥＰＡフィルター３からは、空気流通抵抗体１６ａ
〜１６ｅを介することにより０．３０ ｍ ／ｓｅｃ、
０．３６ ｍ／ｓｅｃ、 ０．４０ ｍ／ｓｅｅ、０．
５５ ｍ ／ ｓｅｃ、 ０．６５ ｍ ／気で各々水
平層流の清浄空気が吹出される。このとき、ＨＥＰＡフ
ィルター３を介して得られる清浄空気は、上記空気流通
抵抗体１６ａ〜１６ｅによって各段のポート台９付近で
乱流の発生しにくい風速に調節された後に、清浄作業空
間２に吹出されたことになる。In the above configuration, clean air is blown out from the HEPA filter 10 in a vertical laminar flow at a wind speed of 0.25 m/sm into the clean room 11. In addition, horizontal blow-out type air purifier 1
From the HEPA filter 3, the air flow resistor 16a
~0.30 m/sec via 16e,
0.36 m/sec, 0.40 m/see, 0.
Horizontal laminar clean air is blown out at 55 m/sec and 0.65 m/air, respectively. At this time, the clean air obtained through the HEPA filter 3 is adjusted to a wind speed that does not easily cause turbulence near the port stand 9 of each stage by the air flow resistors 16a to 16e, and then enters the clean work space 2. It means that it was blown out.
このときの気流は第２図に示すように、従来例で見られ
たような乱れはなくなり、より水平層流に近づくように
なる。At this time, as shown in FIG. 2, the airflow no longer has the turbulence seen in the conventional example, and becomes closer to a horizontal laminar flow.
なお、本実施例では水平吹出型空気清浄装置について述
べたが、要は清浄空気が吹き出される箇所の乱流を防止
するように流通抵抗の異なる空気流通抵抗体を設ければ
よい。In this embodiment, a horizontal blowing type air purifying device has been described, but the point is that air flow resistors having different flow resistances may be provided to prevent turbulence at the location where clean air is blown out.
発明の効果
以上のように本発明によれば、フィルターの風下側に、
空気流通抵抗が部分ごとに異なる空気流通抵抗体を設け
ることによって清浄空気の吹き出し箇所の乱流を防止し
、清浄作業空間の汚染を防止できるものである。Effects of the Invention As described above, according to the present invention, on the leeward side of the filter,
By providing an air flow resistance element having different air flow resistance for each part, turbulence at the point where clean air is blown out can be prevented, and contamination of the clean work space can be prevented.
第１図は本発明の一実施例による水平吹出型空気清浄装
置を示す断面図、第２図は同気流状態図、第３図は従来
の水平吹出型空気清浄装置を示す正面図、第４図は第３
図のＡ−Ａ’断面図、第５図は気流状態図である。
３・・・・・・ＨＥＰＡフィ′ルタ−，４・・・・・プ
レナムチャンバー、５・・・・・・ファン、１６ａ〜１
６ｅ・・・・・・空気流通抵抗体。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第２
図
第３図
３ 隘・
第４図
第５図Fig. 1 is a cross-sectional view showing a horizontal blowing type air purifying device according to an embodiment of the present invention, Fig. 2 is a state diagram of the same airflow, Fig. 3 is a front view showing a conventional horizontal blowing type air purifying device, and Fig. 4 is a sectional view showing a horizontal blowing type air purifying device according to an embodiment of the present invention. The figure is the third
The AA' sectional view in the figure and FIG. 5 are airflow state diagrams. 3...HEPA filter, 4...Plenum chamber, 5...Fan, 16a~1
6e...Air flow resistance element. Name of agent: Patent attorney Toshio Nakao and 1 other person 2nd
Figure 3 Figure 3 Figure 4 Figure 5
Claims (1)
側に設けられ、かつ送風機からの風圧を均圧化するプレ
ナムチャンバーと、前記フィルターの風下側に設けられ
た空気流通抵抗体とを備え、前記空気流通抵抗体は空気
流通抵抗を部分ごとに異ならせた空気清浄装置。A filter that purifies the air, a plenum chamber that is provided on the windward side of the filter and that equalizes the wind pressure from the blower, and an air flow resistance body that is provided on the leeward side of the filter, A flow resistance element is an air purification device that has different air flow resistance for each part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60160606A JPS6222933A (en) | 1985-07-19 | 1985-07-19 | Air cleaner device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60160606A JPS6222933A (en) | 1985-07-19 | 1985-07-19 | Air cleaner device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6222933A true JPS6222933A (en) | 1987-01-31 |
Family
ID=15718575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60160606A Pending JPS6222933A (en) | 1985-07-19 | 1985-07-19 | Air cleaner device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6222933A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152622U (en) * | 1987-03-27 | 1988-10-06 | ||
| JPH03170699A (en) * | 1989-10-23 | 1991-07-24 | Eltech Syst Corp | Electroplating bath anode |
| US5525106A (en) * | 1993-04-12 | 1996-06-11 | Daifuku Co., Ltd. | Load storing equipment with cleaning device |
| US5628683A (en) * | 1992-03-09 | 1997-05-13 | Josef Gentischer | System for transferring substrates into clean rooms |
-
1985
- 1985-07-19 JP JP60160606A patent/JPS6222933A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152622U (en) * | 1987-03-27 | 1988-10-06 | ||
| JPH03170699A (en) * | 1989-10-23 | 1991-07-24 | Eltech Syst Corp | Electroplating bath anode |
| US5628683A (en) * | 1992-03-09 | 1997-05-13 | Josef Gentischer | System for transferring substrates into clean rooms |
| US5525106A (en) * | 1993-04-12 | 1996-06-11 | Daifuku Co., Ltd. | Load storing equipment with cleaning device |
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