JPS622111A - Surface roughness meter using reflected light - Google Patents
Surface roughness meter using reflected lightInfo
- Publication number
- JPS622111A JPS622111A JP14184085A JP14184085A JPS622111A JP S622111 A JPS622111 A JP S622111A JP 14184085 A JP14184085 A JP 14184085A JP 14184085 A JP14184085 A JP 14184085A JP S622111 A JPS622111 A JP S622111A
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- modulation frequency
- surface roughness
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（ａ）発明の技術分野
この発明は、光源の光を被測定物に照射し、被測定物か
らの鏡面反射光と散乱光とを検出して被測定物の表面の
粗さを測定する場合において、光源以外の自然光や室内
の照明光などが被測定物に入ってきても、光源以外の光
の影響を受けないで被測定物の表面の粗さを測定するこ
とができる表面粗さ計に関するものである。Detailed Description of the Invention (a) Technical Field of the Invention This invention illuminates the surface of the measured object by irradiating light from a light source onto the measured object and detecting specularly reflected light and scattered light from the measured object. When measuring the roughness of a surface of a workpiece, even if natural light other than the light source or indoor lighting light enters the workpiece, the roughness of the surface of the workpiece is measured without being affected by light other than the light source. The present invention relates to a surface roughness meter that can perform
Ｔａｌ従来技術と問題点
反射光による表面粗さ計は、被測定物に光源の光を照射
し、被測定物からの反射光を検出して被測定物の表面の
粗さを測定する。この場合、測定パラメータとして、鏡
面反射光の光強度と、ある特定の反射方向の散乱光強度
とを求め、これらを比較して被Ｍ１定物の表面の粗さを
測定する。Tal Prior Art and Problems A surface roughness meter using reflected light irradiates the object to be measured with light from a light source and detects the reflected light from the object to measure the roughness of the surface of the object. In this case, as measurement parameters, the light intensity of the specularly reflected light and the scattered light intensity in a certain specific direction of reflection are determined, and these are compared to measure the surface roughness of the object M1.
このような場合の従来技術の構成図を第２図に示す。A configuration diagram of the prior art in such a case is shown in FIG.
第２図の１は光源、２と３は検出器、４は被測定物であ
る。In FIG. 2, 1 is a light source, 2 and 3 are detectors, and 4 is an object to be measured.
第２図では、光源１の光を被測定物４に入射角θで照射
し、被測定物４からの鏡面反射光が反射角θで反射して
いる。検出器２は反射角θの鏡面反射光を検出する。In FIG. 2, light from a light source 1 is irradiated onto an object to be measured 4 at an incident angle θ, and specularly reflected light from the object 4 is reflected at an angle of reflection θ. Detector 2 detects specularly reflected light having a reflection angle θ.
被測定物４からは、表面の粗さに応じて鏡面反 、
□射光以外の散乱光が発生する。The object to be measured 4 has a mirror surface depending on the roughness of the surface.
□Scattered light other than emitted light is generated.
検出器３は、鏡面反射光以外の特定の反射角に対する散
乱光を検出するためのものである。The detector 3 is for detecting scattered light at a specific reflection angle other than specularly reflected light.
第２図のような場合で、光源以外の自然光や室内の照明
光などが被測定物４に入ってくるような条件下では、検
出器２の出力と検出器３の出力の比を求めても、光源以
外の外来光が出力として検出されるので、周囲の明るさ
によって測定結果が変わってしまい、正確な測定ができ
ないという問題がある。In the case shown in Figure 2, under conditions where natural light other than the light source, indoor lighting light, etc. enters the measured object 4, find the ratio of the output of the detector 2 and the output of the detector 3. However, since extraneous light other than the light source is detected as output, the measurement result changes depending on the surrounding brightness, and there is a problem that accurate measurement cannot be performed.
（ｃ）発明の目的
この発明は、測定系を特別に遮蔽しなくても光源以外の
光の影響を受けないで測定をすることができる表面粗さ
計の提供を目的とする。(c) Purpose of the Invention The object of the present invention is to provide a surface roughness meter that can perform measurements without being affected by light other than the light source, without having to specifically shield the measurement system.
（ｄ）発明の実施例 この発明による実施例の構成図を第１図に示す。(d) Examples of the invention A block diagram of an embodiment according to the invention is shown in FIG.
第１図の５は変調器、６と７はフィルタである。In FIG. 1, 5 is a modulator, and 6 and 7 are filters.
変調器５は、光源１を変調周波数で変調する。Modulator 5 modulates light source 1 at a modulation frequency.
変調器５で変調された光源１の光はチＩＩ−／プ光とな
って被測定物４を照射し、検出器２と検出器３で検出さ
れる。The light from the light source 1 modulated by the modulator 5 becomes tip light and irradiates the object 4 to be measured, and is detected by the detectors 2 and 3.
光源１以外の光が交流電源で点灯されている場合には、
変調器５の変調周波数を例えば２７０Ｈｚなどのように
交流電源の周波数の整数倍にならないような周波数にす
る。これは、交流電源の影響をな（すためである。If lights other than light source 1 are turned on by AC power,
The modulation frequency of the modulator 5 is set to a frequency that is not an integral multiple of the frequency of the AC power source, such as 270 Hz. This is to eliminate the influence of AC power.
フィルタ６は検出４２の出力に接続されており、検出器
２で検出した鏡面反射光の中から変調周波数の成分だけ
を取り出す。The filter 6 is connected to the output of the detector 42 and extracts only the modulation frequency component from the specularly reflected light detected by the detector 2.
フィルタ７は検出器３の出力に接続されており、検出器
３で検出した散乱光の中から変調周波数の成分だけを取
り出す。The filter 7 is connected to the output of the detector 3 and extracts only the modulation frequency component from the scattered light detected by the detector 3.
したがって、フィルタ６の出力とフィルタ７の出力には
光Ｒ１以外の外来光の影響を受けない出力が得られるの
で、被測定物４の表面の粗さを正確に測定することがで
きる。Therefore, since the output of the filter 6 and the output of the filter 7 are not affected by external light other than the light R1, the roughness of the surface of the object to be measured 4 can be accurately measured.
（ｅ）発明の効果
この発明によれば、光源１を変調器５の変調周波数で変
調し、検出器２の出力と検出器３の出力からそれぞれフ
ィルタ６とフィルタ７で変調周波数を取り出しているの
で、光源１以外の外来光が被測定物４に入ってきても、
外米光の影響を受けることな（、被測定物４の表面の粗
さを測定することができる。(e) Effect of the Invention According to this invention, the light source 1 is modulated by the modulation frequency of the modulator 5, and the modulation frequencies are extracted from the output of the detector 2 and the output of the detector 3 by the filters 6 and 7, respectively. Therefore, even if external light other than light source 1 enters the object to be measured 4,
The roughness of the surface of the object to be measured 4 can be measured without being affected by external light.
第１図はこの発明による実施例の構成図、第２図は従来
技術の構成図。
１・・・・・・光源、２・・・・・・検出器、３・・・
・・・検出器、４・・・・・・被測定物、５・・・・・
・変調器、６・・・・・・フィルタ、７・・・・・・フ
ィルタ。
代理人 弁理士 小 俣 欽 ｄ１ｊ！１ ２
図
検出器FIG. 1 is a block diagram of an embodiment according to the present invention, and FIG. 2 is a block diagram of a conventional technique. 1...Light source, 2...Detector, 3...
...Detector, 4...Measurement object, 5...
・Modulator, 6...filter, 7...filter. Agent Patent Attorney Kin Omata d1j! 1 2
diagram detector
Claims (1)
鏡面反射光と散乱光を検出器で検出する表面粗さ計にお
いて、 前記光源を変調周波数で変調する変調器と、前記検出器
の出力から前記変調周波数を取り出すフィルタとを備え
ることを特徴とする反射光による表面粗さ計。[Claims] 1. A surface roughness meter in which a measured object is irradiated with light from a light source and specular reflected light and scattered light from the measured object are detected by a detector, the light source being modulated at a modulation frequency. A surface roughness meter using reflected light, comprising a modulator and a filter that extracts the modulation frequency from the output of the detector.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14184085A JPS622111A (en) | 1985-06-28 | 1985-06-28 | Surface roughness meter using reflected light |
| DE19863621567 DE3621567A1 (en) | 1985-06-28 | 1986-06-27 | WITH REFLECTED LIGHT WORKING SURFACE ROUGHNESS ANALYZER |
| GB8615726A GB2177793B (en) | 1985-06-28 | 1986-06-27 | Reflected light type surface roughness analyzer |
| GB8901426A GB2211711B (en) | 1985-06-28 | 1989-01-23 | Reflected light type surface roughness analyzer |
| GB8901427A GB2211712B (en) | 1985-06-28 | 1989-01-23 | Reflected light type surface roughness analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14184085A JPS622111A (en) | 1985-06-28 | 1985-06-28 | Surface roughness meter using reflected light |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS622111A true JPS622111A (en) | 1987-01-08 |
Family
ID=15301372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14184085A Pending JPS622111A (en) | 1985-06-28 | 1985-06-28 | Surface roughness meter using reflected light |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS622111A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5474381A (en) * | 1993-11-30 | 1995-12-12 | Texas Instruments Incorporated | Method for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer |
| US5689757A (en) * | 1994-07-18 | 1997-11-18 | Xerox Corporation | Method and apparatus for detecting substrate roughness and controlling print quality |
-
1985
- 1985-06-28 JP JP14184085A patent/JPS622111A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5474381A (en) * | 1993-11-30 | 1995-12-12 | Texas Instruments Incorporated | Method for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer |
| US5741070A (en) * | 1993-11-30 | 1998-04-21 | Texas Instruments Incorporated | Apparatus for real-time semiconductor wafer temperature measurement based on a surface roughness characteristic of the wafer |
| US5689757A (en) * | 1994-07-18 | 1997-11-18 | Xerox Corporation | Method and apparatus for detecting substrate roughness and controlling print quality |
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