JPS62178901A - Optical parts having multi-layered antireflection film - Google Patents
Optical parts having multi-layered antireflection filmInfo
- Publication number
- JPS62178901A JPS62178901A JP61020167A JP2016786A JPS62178901A JP S62178901 A JPS62178901 A JP S62178901A JP 61020167 A JP61020167 A JP 61020167A JP 2016786 A JP2016786 A JP 2016786A JP S62178901 A JPS62178901 A JP S62178901A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- antireflection film
- film
- base material
- essentially consisting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229920003023 plastic Polymers 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 17
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 16
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 15
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 10
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910001928 zirconium oxide Inorganic materials 0.000 claims abstract description 7
- 239000010410 layer Substances 0.000 claims description 109
- 239000004033 plastic Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 9
- 238000005299 abrasion Methods 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- 239000002344 surface layer Substances 0.000 claims description 5
- 238000013461 design Methods 0.000 claims description 3
- -1 polysiloxane Polymers 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 2
- 238000006748 scratching Methods 0.000 abstract 2
- 230000002393 scratching effect Effects 0.000 abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 230000003667 anti-reflective effect Effects 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 37
- 238000000034 method Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000001771 vacuum deposition Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 238000005421 electrostatic potential Methods 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 229960000583 acetic acid Drugs 0.000 description 2
- 230000003373 anti-fouling effect Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000012362 glacial acetic acid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000012788 optical film Substances 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- 235000005811 Viola adunca Nutrition 0.000 description 1
- 240000009038 Viola odorata Species 0.000 description 1
- 235000013487 Viola odorata Nutrition 0.000 description 1
- 235000002254 Viola papilionacea Nutrition 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000266 aqualite Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 208000003464 asthenopia Diseases 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- YTUPSNLWAAEFPL-UHFFFAOYSA-N ethenyl(ethoxy)silane Chemical compound CCO[SiH2]C=C YTUPSNLWAAEFPL-UHFFFAOYSA-N 0.000 description 1
- ZZRGHKUNLAYDTC-UHFFFAOYSA-N ethoxy(methyl)silane Chemical compound CCO[SiH2]C ZZRGHKUNLAYDTC-UHFFFAOYSA-N 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の技術分野]
本発明は密着強度に優れた多層反射防止膜を有する光学
物品に関する。さらに詳しくは眼鏡用レンズ、カメラ用
レンズなどの光学用レンズ、ワードプロセッlナーなど
のディ支プレイやテレビのブラウン管などに付設する光
学フィルター、自動車などの窓ガラスなどに有用な多層
反射防止膜を有する光学物品に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an optical article having a multilayer antireflection film with excellent adhesion strength. More specifically, we offer multilayer anti-reflection coatings useful for optical lenses such as eyeglass lenses and camera lenses, optical filters attached to displays such as word processors and cathode ray tubes of televisions, and window glass of automobiles. The present invention relates to an optical article having the following.
[従来技術]
プラスチックレンズに代表されるプラスチック成形体は
、極めて優れた耐衝撃性及び透明性を有しかつ軽釘であ
り、染色も容易でおることから、近年大巾に需要が増え
ている。しかしプラスチック光学製品は無機ガラスに較
べて表面硬度が低く、傷が付き易いという欠点がある。[Prior art] Plastic molded products, such as plastic lenses, have extremely high impact resistance and transparency, are light nails, and can be easily dyed, so the demand for them has been increasing in recent years. . However, plastic optical products have a disadvantage in that their surface hardness is lower than that of inorganic glass and they are easily scratched.
前者の傷つき易さの欠点を改良しようとする試みはすで
に数多く提案されている。例えばプラスチック基材表面
に3 i 02などの無機物を真空蒸着により被覆する
方法(特開昭58−204031号公報)やプラスチッ
ク基材の表面にポリオルガノシラン系ハードコート膜や
アクリル系バートコ−1〜膜を設ける方法(USP3.
986,997、USP4,211,823、特開昭5
7−168922号公報、特開昭59−38262号公
報、特開昭59−51908号公報、特開昭59−51
954号公報、特開昭59−78240号公報、特開昭
59−89368号公報、特開昭59−102964号
公報、特開昭59−109528号公報、特開昭59−
120663M公報、特開昭59−155437号公報
、特開昭59−174629号公報、特開昭59−19
3969号公報、特開昭59 204669@公報など
)が開示されている。Many attempts have already been made to improve the vulnerability of the former. For example, a method of coating the surface of a plastic substrate with an inorganic substance such as 3i02 by vacuum deposition (Japanese Patent Laid-Open No. 58-204031), a method of coating the surface of a plastic substrate with a polyorganosilane hard coat film or an acrylic Bartco-1~ Method of providing a membrane (USP 3.
986,997, USP4,211,823, Japanese Patent Publication No. 5
7-168922, JP 59-38262, JP 59-51908, JP 59-51
954, JP 59-78240, JP 59-89368, JP 59-102964, JP 59-109528, JP 59-
120663M, JP 59-155437, JP 59-174629, JP 59-19
No. 3969, Japanese Unexamined Patent Application Publication No. 59-204669, etc.) are disclosed.
前記従来技術であるS i 02などの無機物の真空蒸
着による表面硬度の改良は高硬度である反面、基材との
密着性、耐熱性、耐衝撃性、耐熱水性、耐光性などを低
下させる大きな問題が必る。Improvement of surface hardness by vacuum deposition of an inorganic material such as S i 02, which is the conventional technique described above, has high hardness, but on the other hand, it has large effects that reduce adhesion to the base material, heat resistance, impact resistance, hot water resistance, light resistance, etc. There are bound to be problems.
またプラスチックの表面硬度と反射防止性の両者を向上
、改良する目的でプラスチック基材上に1ミクロン前後
の5102を真空蒸着により被覆し、ざらにその上に多
層膜の反射防止膜をコートする方法が開示されている。In addition, in order to improve both the surface hardness and anti-reflection properties of plastics, 5102 of approximately 1 micron is coated on the plastic substrate by vacuum deposition, and a multilayer anti-reflection film is roughly coated on top of this. is disclosed.
(特開昭56−113101号公報)。(Japanese Unexamined Patent Publication No. 113101/1983).
さらには特開昭59−48702号公報、特開昭59−
78301号公報、特開昭59−78304号公報には
プラスチック基材の表面にポリオルガノシラン系バート
コ−1〜膜あるいは、エポキシ樹脂硬化膜を施した上に
、無機物からなる反射防止膜をコートする方法が開示さ
れている。Furthermore, JP-A-59-48702, JP-A-59-
No. 78301 and JP-A-59-78304 disclose a method in which a polyorganosilane Bartco-1 film or a cured epoxy resin film is applied to the surface of a plastic base material, and then an antireflection film made of an inorganic substance is coated. A method is disclosed.
また特開昭56−113101号公報に開示されている
技術は、高硬度で反射防止性を有している反面、密着性
、耐熱性、耐衝撃性、耐熱水性、耐候性などを低下させ
大きな問題がある。Furthermore, although the technology disclosed in JP-A-56-113101 has high hardness and antireflection properties, it deteriorates adhesion, heat resistance, impact resistance, hot water resistance, weather resistance, etc. There's a problem.
また特公昭45−6193号公報、特開昭59−487
02丹公報、特開昭59−78301号公報、特開昭5
9−78304号公報に開示されている技術は、反射防
止性を有する反面、基材に対する密着性が不充分で傷が
深く、かつ太く発生し使用上において大きな欠点を有す
る。さらには水、アルコールなどに浸されやすい、熱水
浸漬後の密着性、耐候密着性などに大きな問題がある。Also, Japanese Patent Publication No. 45-6193, Japanese Patent Publication No. 59-487
02 Tan Publication, JP-A No. 59-78301, JP-A-Sho 5
Although the technique disclosed in Japanese Patent Publication No. 9-78304 has antireflection properties, it has insufficient adhesion to the substrate and causes deep and thick scratches, which is a major disadvantage in use. Furthermore, it is easily immersed in water, alcohol, etc., and has major problems such as adhesion after immersion in hot water and weather resistance.
以上従来技術をレビューしたが、これらの技術はいずれ
も基材の上のハードコート層と、その表層の蒸着膜(反
射防止層)との密着性に問題があり、長期間使用すると
蒸着膜(反射防止層)が鱗片状に剥離してくるという欠
点を有していた。We have reviewed the conventional technologies above, but all of these technologies have problems with the adhesion between the hard coat layer on the base material and the vapor deposited film (antireflection layer) on the surface layer, and if used for a long period of time, the vapor deposited film ( The problem was that the antireflection layer (antireflection layer) peeled off in the form of scales.
し発明が解決しようとする問題点]
本発明者らは、上記の問題点を解決するために鋭意検討
した結果、以下に述べる本発明に到達した。Problems to be Solved by the Invention] The present inventors have conducted intensive studies to solve the above problems, and as a result, have arrived at the present invention described below.
すなわち本発明は特に密着強度、及び耐久性に優れ、耐
すり信性、耐摩耗性、耐衝撃性、耐薬品性、可撓性、耐
熱性、耐光性、耐候性、帯電防止性などにも優れた多層
反射防止膜を有する光学物品を提供するものである。In other words, the present invention has particularly excellent adhesion strength and durability, and also has excellent abrasion resistance, abrasion resistance, impact resistance, chemical resistance, flexibility, heat resistance, light resistance, weather resistance, antistatic properties, etc. An object of the present invention is to provide an optical article having an excellent multilayer antireflection film.
[問題点を解決するための手段」 すなわち本発明は、次の構成からなる。[Means to solve problems] That is, the present invention consists of the following configuration.
「 プラスチック透明基材の上に耐擦禍性を有するハー
ドコート層を設け、その表層に基材側から表面に向って
順番に、
第1層;酸化ジルコニウムを主成分とする層第2層;二
酸化ケイ素を主成分とする層第3層;酸化チタンを主成
分とする層
第4層;二酸化ケイ素を主成分とする層を設けると同時
に、前記第1層と第2層とを等価膜としたことを特徴と
する多層反則防止膜を有する光学物品。」
本発明においては、プラスチック透明基材の上に耐擦禍
性を有するバートコ−1〜層を設けることがまず必要で
ある。ここでプラスチックとは、公知のいかなるもので
おってもよい。また透明基材とは、光が通過し得るもの
であればいかなるものであってもよい。ワードプロセツ
リーーなどのディスプレーの前面に使用するものにあっ
ては、原着、または染色により可視光線透過率を25〜
70%としたものが好ましい。目の疲労を減少するため
である。また耐擦禍性を有するへ−ドコー1へ層とは、
ポリオルガノシロキサン、シリカ、アルミナなどの硬度
の高いコーティング層、またはアクリル成分を含む層を
いう。プラスチック製品の表面は一般に傷がつき易いの
で、これを改良するため、及び表層に蒸着、またはスパ
ッタリングする多層反射防止膜のアンダーコートして密
着性を高めるためである。そして特に好ましくは、バー
トコ−1〜層はメチル1〜リメトキシシラン、およびビ
ニル1〜リエトキシシラン、またはこれらの加水分解物
をコーティングした後に、架橋、加熱縮合させたポリオ
ルガノシロキサンである。"A hard coat layer having abrasion resistance is provided on a plastic transparent base material, and on the surface thereof, in order from the base material side toward the surface: a first layer; a second layer containing zirconium oxide as a main component; A third layer containing silicon dioxide as a main component; A fourth layer containing titanium oxide as a main component; At the same time as providing a layer containing silicon dioxide as a main component, the first layer and the second layer are equivalent films. An optical article having a multilayer anti-fouling film characterized by the following: In the present invention, it is first necessary to provide Bartco-1 to layers having abrasion resistance on a transparent plastic substrate. Here, the plastic may be any known material. Moreover, the transparent base material may be any material as long as light can pass therethrough. For items used on the front of displays such as word processors, the visible light transmittance should be increased to 25~25 by sprinkling or dyeing.
Preferably it is 70%. This is to reduce eye fatigue. In addition, the Hedoco 1 layer has abrasion resistance.
A coating layer with high hardness such as polyorganosiloxane, silica, alumina, or a layer containing an acrylic component. This is to improve the surface of plastic products, which are generally easily scratched, and to improve adhesion by undercoating the surface with a multilayer anti-reflection film that is vapor-deposited or sputtered. Particularly preferably, the Bartco-1 layer is a polyorganosiloxane coated with methyl-1-rimethoxysilane, vinyl-1-ethoxysilane, or a hydrolyzate thereof, and then crosslinked and thermally condensed.
そしてハードコート層の好ましい膜厚は、1〜10μm
程度である。The preferred thickness of the hard coat layer is 1 to 10 μm.
That's about it.
またアクリル系ハードコート層とは、メタクリル酸など
のアクリル化合物と、ペンタエリスリ1〜−ル、グリセ
リンなどの多官能グリコールとのエステル化合物を架橋
させたものなどをいう。Further, the acrylic hard coat layer refers to a layer obtained by crosslinking an ester compound of an acrylic compound such as methacrylic acid and a polyfunctional glycol such as pentaerythryl or glycerin.
次に本発明においては、前記のバートコ−1一層の表層
にまず第1層として、酸化ジルコニウムを主成分とする
層を設ける。酸化ジルコニウムを主成分とする層は、下
のハードコート層と上の二酸化ケイ素を主成分とする層
の双方に対し、バインダーとして密着強度を向上させる
効果を発揮すると同時に、第2層の二酸化ケイ素を主成
分とする層と組み合わせて等価膜とすることにより、第
3層、第4層と比べて中屈折率とするためである。Next, in the present invention, a layer containing zirconium oxide as a main component is provided as a first layer on the surface layer of the Bartco-1 layer. The layer mainly composed of zirconium oxide works as a binder to improve the adhesion strength to both the lower hard coat layer and the upper layer mainly composed of silicon dioxide. This is because by combining it with a layer whose main component is to form an equivalent film, the refractive index is set to be intermediate compared to the third layer and the fourth layer.
次に本発明においては、前記の第1層の表層に第2層と
して、二酸化ケイ素を主成分とする層を設ける。第1層
と第3層の双方の層に対して密着強度を向上させる効果
を発揮すると同時に、第1層の酸化ジルコニウムを主成
分とする層と組み合わせて等価膜とすることにより、第
3層、第4層と比べて中屈折率とするためである。Next, in the present invention, a layer containing silicon dioxide as a main component is provided as a second layer on the surface layer of the first layer. It exhibits the effect of improving the adhesion strength to both the first layer and the third layer, and at the same time, by combining the first layer with the layer mainly composed of zirconium oxide to form an equivalent film, the third layer , to have a medium refractive index compared to the fourth layer.
以上第1層と第2層は全体として中屈折率の層となる。The first layer and the second layer as a whole have a medium refractive index.
次に第3層として、酸化チタンを主成分とする層を設け
、その上に第4層として二酸化ケイ素を主成分とする層
を設ける。第3層に高屈折率層を、第4層に低屈折率層
を設ければ、第1.2層の中屈折率層と相俟って全体と
して反射防止機能に優れた膜が達成されるからである。Next, a layer containing titanium oxide as a main component is provided as a third layer, and a layer containing silicon dioxide as a main component is provided thereon as a fourth layer. By providing a high refractive index layer in the third layer and a low refractive index layer in the fourth layer, together with the medium refractive index layer in the first and second layers, a film with excellent antireflection function as a whole can be achieved. This is because that.
本発明において前記第1〜4層は、真空蒸着、またはス
パッタリングによって設けることができる。より好まし
くは真空蒸着である。イオンビームアシストなどの方法
も適宜応用してもよい。また第1層の酸化ジルコニウム
には、本発明の効果を低下さUない範囲において酸化チ
タンなどを加えてもよく、同様に第3層の酸化チタンの
層にはTa205などを混合してもよい。In the present invention, the first to fourth layers can be provided by vacuum deposition or sputtering. More preferred is vacuum deposition. Methods such as ion beam assist may also be applied as appropriate. Further, titanium oxide or the like may be added to the first layer of zirconium oxide within a range that does not reduce the effect of the present invention, and similarly, Ta205 or the like may be mixed into the third layer of titanium oxide. .
膜厚は可視光線を反射防止できる程度の厚さであればい
かなる厚さでもよい。好ましい光学的膜厚は、設計波長
λ0としたとき、450〜550ru++の範囲におい
て
第1層: 0.05〜0.15λO
第2層: 0.05〜0.15λ0
第3層: 0.36〜0.49λ0
第4層: 0.15〜0.35λ0
である。このうちとくに第4層は0,25λ0であるこ
とが好ましい。The film may have any thickness as long as it can prevent reflection of visible light. Preferred optical film thicknesses are, when the design wavelength is λ0, in the range of 450 to 550ru++.First layer: 0.05 to 0.15λO Second layer: 0.05 to 0.15λO Third layer: 0.36 to 0.49λ0 Fourth layer: 0.15 to 0.35λ0. Among these, it is particularly preferable that the fourth layer has a thickness of 0.25λ0.
本発明においては、上記の多層反射防止膜をプラスチッ
ク基材の1面または2面に設ける。1面に設けた場合は
、反対面の傷付防止をするため、少くとも上記で説明し
たハードコートを設けることが好ましい。また本発明の
多層反射防止膜を1而に設け、反対面にはバートコ−1
〜層、酸化インジウム・酸化スズ@(いわゆるITO膜
)を設けるか、またはこのITO膜の上に二酸化ケイ素
を主成分とする層を設け、片面は反射防止層、他の片面
は電磁波シールド性を有する層とすることもできる。前
記において、最外層にITO層を設けた場合は比較的薄
い膜(100〜500人程度)が好ましく、ITO膜の
上に二酸化ケイ素を主成分とする層を設けるときは比較
的厚い膜(たとえば500〜1000人程度)が好まし
い。In the present invention, the multilayer antireflection film described above is provided on one or two sides of a plastic substrate. When provided on one side, it is preferable to provide at least the hard coat described above in order to prevent damage to the opposite side. In addition, the multilayer antireflection coating of the present invention is provided on one side, and a bartcoat layer is provided on the opposite side.
~ layer, indium oxide/tin oxide@ (so-called ITO film), or a layer mainly composed of silicon dioxide is provided on this ITO film, with an antireflection layer on one side and an electromagnetic shielding layer on the other side. It can also be a layer with. In the above, when an ITO layer is provided as the outermost layer, a relatively thin film (about 100 to 500 layers) is preferable, and when a layer containing silicon dioxide as a main component is provided on the ITO film, a relatively thick film (for example, (approximately 500 to 1000 people) is preferable.
なあ本尭明品には静電気を除去するためにアースを取り
つけてもよい。この場合、前記ITO膜があるときはア
ースはITO膜から直接取るか、または導通状態にして
ことおくが好ましい。また他の手段として、本発明品の
周囲に金属製の枠を取りゴけ、静電気を放電させてもよ
い。この場合も、前記ITO膜があるときは金属枠はI
TO膜と直接接するか、または導通状態にしておくこと
が好ましい。By the way, you may attach a ground to this product to remove static electricity. In this case, if the ITO film is present, it is preferable to connect the ground directly to the ITO film or to keep it in a conductive state. Alternatively, a metal frame may be placed around the product of the present invention to discharge static electricity. Also in this case, when the ITO film is present, the metal frame is
It is preferable to be in direct contact with the TO film or to be in a conductive state.
以下図面により説明する。This will be explained below with reference to the drawings.
第1図は本発明の好ましい多層反射防止膜を有する光学
物品の1実施態様の断面を示す。プラスチック透明基材
10の上に耐擦損性を有するハードコート層11を設け
、ざらにその表層に前記多層反射防止膜1〜4を順番に
設けたものである。FIG. 1 shows a cross-section of one embodiment of an optical article having a preferred multilayer antireflection coating of the present invention. A hard coat layer 11 having abrasion resistance is provided on a plastic transparent base material 10, and the multilayer antireflection films 1 to 4 are sequentially provided on the surface layer thereof.
第2図は従来技術のうち最も近似した例である。FIG. 2 is the closest example of the prior art.
すなわち多層反射防止膜の第1層が酸化イツトリウムで
あったので、ハードコート層、酸化チタン層の双方の界
面において剥離し易いものであった。That is, since the first layer of the multilayer antireflection film was made of yttrium oxide, it was likely to peel off at the interface of both the hard coat layer and the titanium oxide layer.
本発明の多層反射防止膜を有する光学物品の用途は、テ
レビやディスプレーの画面のフィルター(いわゆる光学
フィルター)に特に有効である。The optical article having the multilayer antireflection film of the present invention is particularly effective as a filter for a television or display screen (so-called optical filter).
その他眼鏡などのレンズや、フィルム、成形物としての
用途も期待できる。It is also expected to be used as lenses for glasses, films, and molded products.
なお本発明の多層膜は「オージェ電子分光測定法」によ
って行うことができる。この方法は、高真空中に置いた
試料表面に電子ビームを照射し、表面から出たオージェ
電子をアナライザーでエネルギー分割して検出する。測
定条件としては、下記のとおりである。Note that the multilayer film of the present invention can be formed by "Auger electron spectroscopy." In this method, an electron beam is irradiated onto the surface of a sample placed in a high vacuum, and the energy of Auger electrons emitted from the surface is divided and detected using an analyzer. The measurement conditions are as follows.
測定装@二日本電子株式会社製“JAHP−103”最
表面分析時:1X10’Pa
深さ方向分析時: 6X 10’Pa (Ar雰囲気)
サンプリング:試料の端を銅板で押さえて試料台に固定
する。Measuring device @2 "JAHP-103" manufactured by JEOL Ltd. When analyzing the outermost surface: 1X 10'Pa When analyzing in the depth direction: 6X 10'Pa (Ar atmosphere)
Sampling: Hold the edge of the sample with a copper plate and fix it to the sample stand.
加速電圧:3.0KV
試料電流:1X10’A
ビーム径:1μm
スリット:No、5
試料傾斜角度:40〜70度
Arイオンエツチング条件
加速電圧:3.OKV
試料電流:3X10’A
エツチング速度: 200人/min (SiO2
の場合)[実施例]
以下実施例により説明する。Acceleration voltage: 3.0KV Sample current: 1X10'A Beam diameter: 1μm Slit: No. 5 Sample tilt angle: 40-70 degrees Ar ion etching conditions Acceleration voltage: 3. OKV Sample current: 3X10'A Etching speed: 200 people/min (SiO2
case) [Example] The following will be explained using an example.
実施例1
基材として市販のポリメタクリレート板(三菱レイヨン
株式会社製、商標“アクアライト”LN−084、グレ
ー原着、厚さ約2mm)を使用した。ハードコート用塗
料としては、特開昭59−114501号公報の実施例
1の記載のとおり、ビニルトリエ1−キシシラン氷酢酸
で加水分解したものと、メチル1〜リエトキシシランを
氷酢酸で加水分解したものを混合して用いた。この混合
溶解物に硬化剤である酢酸ナトリウムを加え、ざらにシ
リコーン系表面平滑剤を加えて塗料とした。Example 1 A commercially available polymethacrylate plate (manufactured by Mitsubishi Rayon Co., Ltd., trademark "Aqualite" LN-084, gray spun-dyed, thickness approximately 2 mm) was used as a base material. As the hard coat paint, as described in Example 1 of JP-A-59-114501, vinyltrie-1-xysilane hydrolyzed with glacial acetic acid and methyl-1-ethoxysilane hydrolyzed with glacial acetic acid were used. I used a mixture of things. A hardening agent, sodium acetate, was added to this mixed solution, and a silicone-based surface smoothing agent was added to the coating to form a paint.
この塗料を基材の表面(表裏面)に2μmの厚さに塗布
し、90’Cで3時間加熱キュアした。This paint was applied to the surface (front and back) of the base material to a thickness of 2 μm, and heated and cured at 90'C for 3 hours.
次いでこのこのハードコートしたプラスチック基板を真
空蒸着槽にセットし、設定温度60’Cで、1 X 1
0−5TORRまで排気した後、カオフマンタイプのイ
オンビーム発生装置によりアルゴンイオンビームを発生
させ、加速電圧500Vで基板のクリーニングを実施し
た。引き続いて基板側から順にエレクトロンビーム法に
より、次の条件で表裏面に4層腸を形成した。Next, this hard-coated plastic substrate was set in a vacuum evaporation tank, and a 1 x 1 film was deposited at a set temperature of 60'C.
After evacuation to 0-5 TORR, an argon ion beam was generated using a Kaofman type ion beam generator, and the substrate was cleaned at an acceleration voltage of 500V. Subsequently, a four-layer intestine was formed on the front and back surfaces under the following conditions using an electron beam method starting from the substrate side.
(1)第1層二酸化ジルコニウムを主成分とする層、光
学的膜厚(nd)約42nm、真空度3X10−”To
’RR(酸素導入)
(2〉 第2層;二酸化ケイ素を主成分とする層、光
学的膜厚(nd )約42nm、真空度1 X 10−
”TO1?R(3) 第3層;酸化チタンを主成分と
する層、光学的膜厚(nd)約2161m、真空度4
X 10 ’TORR(酸素導入)
(4) 第4層;二酸化ケイ素を主成分とする層、光
学的膜厚(nd)約1201m、真空度1 X 10−
”TORf?
(ただし上記(1)〜(4)において光学的膜厚は設計
波長480nm使用。〉
上記の方法及び条件で1qられた本発明品は、青紫色の
反射干渉色を有し、550nmにあける表面反射率は約
0.2%と極めて優れた反q寸防止性を有していた。(1) First layer: layer mainly composed of zirconium dioxide, optical thickness (nd) approximately 42 nm, degree of vacuum 3X10-''To
'RR (oxygen introduction) (2> 2nd layer; layer mainly composed of silicon dioxide, optical thickness (nd) approximately 42 nm, degree of vacuum 1 x 10-
"TO1?R (3) 3rd layer; layer mainly composed of titanium oxide, optical thickness (nd) approximately 2161 m, degree of vacuum 4
X 10 'TORR (Oxygen introduction) (4) Fourth layer; layer mainly composed of silicon dioxide, optical thickness (nd) approximately 1201 m, degree of vacuum 1 X 10-
"TORf? (However, in (1) to (4) above, the optical film thickness uses a design wavelength of 480 nm.) The product of the present invention produced by the above method and conditions has a blue-violet reflection interference color, and a wavelength of 550 nm. The surface reflectance per hole was about 0.2%, and it had extremely excellent anti-q dimension properties.
また表面が硬く、−辺が2cmの正方形のポリエステル
編物に水通水をたらしたものを表面に置き、2kgの荷
重をかけて2,000往復擦過するテストを行ったが、
全く損傷を認めなかった。In addition, a test was conducted in which a square polyester knitted fabric with a hard surface and a side of 2 cm was soaked with water and rubbed 2,000 times under a load of 2 kg.
No damage was observed.
更に屋外に1月間放置し暴露試験をしたが、反則防止膜
の剥離等、表面の損傷はなかった。Furthermore, an exposure test was performed by leaving it outdoors for one month, but there was no damage to the surface such as peeling of the antifouling film.
さらにこれをワードプロセッサーの光学フィルターとし
て使用したところ、反射防止は能に優れ、使用者の目が
疲れない点において著るしい効果がおった。Furthermore, when this was used as an optical filter for a word processor, it had excellent anti-reflection properties and had a remarkable effect in terms of not tiring the user's eyes.
また耐久性に富むものであった。It was also highly durable.
ざらに帯電防止性能を次のように測定した。すなわちパ
ソコン(NEC株式会社¥I!jPc−9801E)に
接続されたCRT (NEC−KD551K>の前面5
3mmの位置に静電気測定器(シシド静電気株式会社“
スタチロンM″)を設定し、パソコンのスイッチをON
t、たときの静電位を測定した結果、ブランクは、9K
V以上であった。次にCRTと゛スタヂロンM′との間
であって、パスタチロンM Itからの距130 mm
の位置に、アースを取りつけた本発明品を設置し、スイ
ッチをONしたときの静電位を測定した。この結果、3
0秒以内に0.2KV以下に低下し、帯電防止効果は極
めて例れたものであった。The antistatic performance was roughly measured as follows. In other words, the front 5 of a CRT (NEC-KD551K) connected to a personal computer (NEC Corporation\I!jPc-9801E)
Static meter at 3mm position (Shishido Static Electric Co., Ltd.)
Set Statyron M″) and turn on the computer.
As a result of measuring the electrostatic potential at t, the blank was 9K.
It was more than V. Next, between the CRT and the stationaryon M', the distance from the stationaryon M It is 130 mm.
The product of the present invention with a ground connection was installed at the position, and the electrostatic potential was measured when the switch was turned on. As a result, 3
The voltage decreased to 0.2 KV or less within 0 seconds, and the antistatic effect was extremely excellent.
比較例
実施例1において、4層膜に代えて下記の条件で3層膜
を作成した。Comparative Example In Example 1, instead of the four-layer film, a three-layer film was created under the following conditions.
(1) 第1層;醸化イッ1〜リウムを主成分とする
層、光学的膜厚(nd >約12011m、真空度3X
10−5TORR(酸素導入)
(2〉 第2層;酸化チタンを主成分とする層、光学
的膜厚(nd)約216nm、真空度4 X 10 ’
TORR(酸素導入)
(3) 第3層二二酸化ケイ素を主成分とする層、光
学的膜厚(nd)約1201m、真空度1 X 10−
”TOR
以上の方法で得られた比較量は、その反射防止特性は本
発明品と比べて若干劣る程度であった。(1) 1st layer: Layer mainly composed of 1 to 1 chloride, optical thickness (nd > approx. 12011 m, degree of vacuum 3X)
10-5 TORR (oxygen introduction) (2> 2nd layer; layer mainly composed of titanium oxide, optical thickness (nd) approximately 216 nm, degree of vacuum 4 x 10'
TORR (Oxygen introduction) (3) Third layer A layer mainly composed of silicon dioxide, optical thickness (nd) approximately 1201 m, degree of vacuum 1 x 10-
``TOR'' The antireflection properties of the comparative product obtained by the above method were slightly inferior to that of the product of the present invention.
しかし本発明品と同様にして評価した布摩擦テストでは
、約100回で反射防止膜の部分剥離が発生した。また
屋外暴露テストでは約1・週間でスポット状の外観以上
が発生した。However, in a cloth friction test evaluated in the same manner as the product of the present invention, partial peeling of the antireflection film occurred after about 100 times. In addition, in an outdoor exposure test, a spot-like appearance or more appeared after about 1 week.
ざらに実施例1と同様に帯電防止性能を測定したところ
、スイッチを入れ10分後であっても静電位は約1にV
までしか下がらなかった。When antistatic performance was roughly measured in the same manner as in Example 1, the electrostatic potential was approximately 1V even after 10 minutes after turning on the switch.
It only went down to.
[発明の効果]
本発明は上記のとおりの技術であるので、特に多層反射
防止膜の密着強度、及び耐久性に優れ、耐すり信性、耐
摩耗性、耐衝撃性、耐薬品性、可撓性、耐熱性、耐光性
、耐候性、帯電防止性などにも優れた多層反射防止膜を
有する光学物品とすることができた。[Effects of the Invention] Since the present invention is a technology as described above, the multilayer anti-reflection film has particularly excellent adhesion strength and durability, and has excellent scratch resistance, abrasion resistance, impact resistance, chemical resistance, and flexibility. An optical article having a multilayer antireflection film with excellent flexibility, heat resistance, light resistance, weather resistance, antistatic property, etc. could be obtained.
とくに耐久性については、著るしい耐寿命性を示し、長
期間安定した状態で使用することができるようになった
。In terms of durability in particular, it has shown remarkable longevity and can now be used in a stable manner for a long period of time.
また予期できない効果として帯電防止効果にも極めて優
れた性能を示した。Furthermore, as an unexpected effect, it showed extremely excellent antistatic effect.
第1図は本発明の好ましい多層反射防止膜を有する光学
物品の1実施態様の断面を示す。
第2図は従来技術のうち最も近似した公知例である。
1〜4;多層反射防止膜
10ニブラスチツク透明基材
11;バートコ−1〜層FIG. 1 shows a cross-section of one embodiment of an optical article having a preferred multilayer antireflection coating of the present invention. FIG. 2 is a known example that is the closest to the prior art. 1 to 4; Multilayer antireflection coating 10 Niblast transparent base material 11; Bartco-1 to layer
Claims (4)
ードコート層を設け、その表層に基材側から表面に向っ
て順番に、 第1層;酸化ジルコニウムを主成分とする層第2層;二
酸化ケイ素を主成分とする層 第3層;酸化チタンを主成分とする層 第4層;二酸化ケイ素を主成分とする層 を設けると同時に、前記第1層と第2層とを等価膜とし
たことを特徴とする多層反射防止膜を有する光学物品。(1) A hard coat layer with abrasion resistance is provided on the plastic transparent base material, and the surface layer is coated with the following layers in order from the base material side to the surface: 1st layer; 2nd layer mainly composed of zirconium oxide. Layer: layer whose main component is silicon dioxide Third layer; layer whose main component is titanium oxide Fourth layer; at the same time as providing a layer whose main component is silicon dioxide, the first layer and the second layer are made equivalent An optical article having a multilayer antireflection film, characterized in that it is a film.
としたとき、450〜550nmの範囲において第1層
;0.05〜0.15λ_0 第2層;0.05〜0.15λ_0 第3層;0.36〜0.49λ_0 第4層;0.15〜0.35λ_0 であることを特徴とする特許請求の範囲第(1)項記載
の多層反射防止膜を有する光学物品。(2) The optical thickness of the first to fourth layers is the design wavelength λ_0
In the range of 450 to 550 nm, first layer: 0.05 to 0.15λ_0 Second layer: 0.05 to 0.15λ_0 Third layer: 0.36 to 0.49λ_0 Fourth layer: 0.15 An optical article having a multilayer antireflection film according to claim (1), characterized in that the multilayer antireflection film has a multilayer antireflection coating of ˜0.35λ_0.
膜であることを特徴とする特許請求の範囲第(1)項記
載の多層反射防止膜を有する光学物品。(3) An optical article having a multilayer antireflection film according to claim (1), wherein the first to fourth layers are vapor deposited films or sputtered films.
あることを特徴とする特許請求の範囲第(1)項記載の
多層反射防止膜を有する光学物品。(4) An optical article having a multilayer antireflection film according to claim (1), wherein the hard coat layer is a layer containing organic polysiloxane.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61020167A JPH0685001B2 (en) | 1986-02-03 | 1986-02-03 | Optical article having multilayer antireflection film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61020167A JPH0685001B2 (en) | 1986-02-03 | 1986-02-03 | Optical article having multilayer antireflection film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62178901A true JPS62178901A (en) | 1987-08-06 |
JPH0685001B2 JPH0685001B2 (en) | 1994-10-26 |
Family
ID=12019607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61020167A Expired - Lifetime JPH0685001B2 (en) | 1986-02-03 | 1986-02-03 | Optical article having multilayer antireflection film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0685001B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6480904A (en) * | 1987-09-22 | 1989-03-27 | Nippon Sheet Glass Co Ltd | Transparent plate stuck with conductive antireflection film |
JPH01252926A (en) * | 1988-03-31 | 1989-10-09 | Hoya Corp | Colored plastic lens |
JPH02291502A (en) * | 1989-04-28 | 1990-12-03 | Hoya Corp | Multilayered antireflection film |
JPH03229202A (en) * | 1990-02-02 | 1991-10-11 | Hoya Corp | Antireflection film for plastic lens |
JPH03237401A (en) * | 1990-02-15 | 1991-10-23 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | Antireflecting film of chalcogenide glass |
CN101665014A (en) * | 2009-09-18 | 2010-03-10 | 浙江大学 | Antireflection film used in all-angle and wide wavelength range and preparation method thereof |
-
1986
- 1986-02-03 JP JP61020167A patent/JPH0685001B2/en not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6480904A (en) * | 1987-09-22 | 1989-03-27 | Nippon Sheet Glass Co Ltd | Transparent plate stuck with conductive antireflection film |
JPH01252926A (en) * | 1988-03-31 | 1989-10-09 | Hoya Corp | Colored plastic lens |
JPH02291502A (en) * | 1989-04-28 | 1990-12-03 | Hoya Corp | Multilayered antireflection film |
JPH03229202A (en) * | 1990-02-02 | 1991-10-11 | Hoya Corp | Antireflection film for plastic lens |
JP2628589B2 (en) * | 1990-02-02 | 1997-07-09 | ホーヤ 株式会社 | Anti-reflection coating for polyurethane lens |
JPH03237401A (en) * | 1990-02-15 | 1991-10-23 | Hisankabutsu Glass Kenkyu Kaihatsu Kk | Antireflecting film of chalcogenide glass |
CN101665014A (en) * | 2009-09-18 | 2010-03-10 | 浙江大学 | Antireflection film used in all-angle and wide wavelength range and preparation method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPH0685001B2 (en) | 1994-10-26 |
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