JPS62172306A - Method for forming film on end surface of optical fiber - Google Patents
Method for forming film on end surface of optical fiberInfo
- Publication number
- JPS62172306A JPS62172306A JP61013512A JP1351286A JPS62172306A JP S62172306 A JPS62172306 A JP S62172306A JP 61013512 A JP61013512 A JP 61013512A JP 1351286 A JP1351286 A JP 1351286A JP S62172306 A JPS62172306 A JP S62172306A
- Authority
- JP
- Japan
- Prior art keywords
- film
- optical fiber
- end surface
- resist film
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 6
- 230000000644 propagated effect Effects 0.000 claims description 2
- 239000000835 fiber Substances 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000002904 solvent Substances 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 9
- 238000005253 cladding Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
- G02B6/4203—Optical features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Mechanical Coupling Of Light Guides (AREA)
Abstract
Description
【発明の詳細な説明】
(技術分野)
本発明は、光フアイバ端面上に部分的に光の反射膜、吸
収膜あるいは散乱膜などの膜を作成する方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a method for forming a film such as a light reflecting film, an absorbing film, or a light scattering film partially on the end face of an optical fiber.
(従来の技術)
光フアイバ端面上に部分的に膜を作成しようとする場合
に一般的に考えられる方法は第2図に示すようなもので
ある。第2図は、ファイバ端面のクラッド部分だけに反
射膜を作成する方法について示したものである。同図に
おいて、E1〜E6は作成の各段階を示しており、A1
は光ファイバ、A2はフォトマスク、A3は光源を示し
ている。(Prior Art) A method generally considered when attempting to partially form a film on the end face of an optical fiber is as shown in FIG. FIG. 2 shows a method of forming a reflective film only on the cladding portion of the fiber end face. In the same figure, E1 to E6 indicate each stage of creation, and A1
indicates an optical fiber, A2 indicates a photomask, and A3 indicates a light source.
1は光ファイバA1のコア、2はクラッド、3は反射膜
、4はレジスト膜の未露光部分、5はフォトマスクA2
の透明部分、6はフォトマスクA2の不透明部分、7は
露光されたレジスト膜の部分である。先ず、光ファイバ
A1を切断し、必要によって研磨した後(段階E1)、
反射膜用材料を付着させて反D4膜3を全端面にわたっ
て作成し、その上からレジスト液を塗布してレジスト膜
4を作成する〈段階E2)。1 is the core of the optical fiber A1, 2 is the cladding, 3 is the reflective film, 4 is the unexposed part of the resist film, 5 is the photomask A2
6 is an opaque portion of the photomask A2, and 7 is an exposed portion of the resist film. First, after cutting the optical fiber A1 and polishing it if necessary (step E1),
The anti-D4 film 3 is created over the entire end surface by attaching a reflective film material, and a resist solution is applied thereon to create a resist film 4 (step E2).
次にフォトマスクΔ2と光源A3を用いてクラッド部に
塗布されたレジスト!l1I7だけを露光し、変質させ
る(段階E3)。次にディベロツバ−と一般に呼ばれて
いる薬品を用いて露光されなかったレジスト膜部分4を
取り除く(段階4)。次にエツチングにより、レジスト
膜の残っていない部分の反0’jllを取り除く(段階
E5)。最後に、残っているレジストlI7を溶剤等を
用いて取り除く(段11E6)。Next, resist was applied to the cladding using photomask Δ2 and light source A3! Only l1I7 is exposed and altered (step E3). Next, the unexposed resist film portion 4 is removed using a chemical commonly called a developer (step 4). Next, by etching, the anti-0'jll portion of the resist film that does not remain is removed (step E5). Finally, the remaining resist lI7 is removed using a solvent or the like (step 11E6).
以上の手順により、クラッド部分だけに反tJ4IIS
を作成することが可能である。By the above procedure, anti-tJ4IIS is applied only to the cladding part.
It is possible to create
(発明が解決しようとする問題点)
しかし、前述した方法にはフォトマスクを用いて部分露
光する工程が含まれており、この工程ではフォトマスク
A2とファイバA1間の高精度な位置合わせが必要であ
り、大量生産に向かないという欠点がある。(Problem to be solved by the invention) However, the above-mentioned method includes a step of partial exposure using a photomask, and this step requires highly accurate alignment between the photomask A2 and the fiber A1. However, it has the disadvantage that it is not suitable for mass production.
(発明の目的)
本発明の目的は、このような高精度な位置合わせを必要
としない大量生産に適したファイバ端面上での部分的な
膜の作成方法を提供することにある。(Objective of the Invention) An object of the present invention is to provide a method for forming a partial film on a fiber end face, which is suitable for mass production and does not require such highly accurate alignment.
(問題点を解決するための手段)
本発明は上記目的を達成するため、光ファイバの一方の
端面にレジスト膜を作成し、該光ファイバの他の端面に
光を照射し、コアを伝搬した光によって前記レジスト膜
を部分的に露光させ、露光したレジスト膜部分または露
光しなかったレジスト膜部分のうちの一方だけを取り除
き、該レジスト膜の残った前記光フアイバ端面に目的と
する膜の作成用の材料を全面にわたって付着させて膜を
作成し、しかる後部分的に残っていたレジスト膜をその
上に付着された前記膜と共に取り除くことを特徴とする
。(Means for Solving the Problems) In order to achieve the above object, the present invention creates a resist film on one end face of an optical fiber, irradiates light onto the other end face of the optical fiber, and propagates through the core. Partially exposing the resist film to light, removing only one of the exposed resist film portion and the unexposed resist film portion, and forming a desired film on the end face of the optical fiber where the resist film remains. The method is characterized in that a resist material is deposited over the entire surface to form a film, and then the partially remaining resist film is removed together with the film deposited thereon.
(作用)
本発明によれば、高精度な位置合わせを行うことなしに
、ファイバ端面上に部分的に反射膜や吸収膜あるいは散
乱膜などを作成できる。(Function) According to the present invention, a reflective film, an absorbing film, a scattering film, etc. can be formed partially on the fiber end face without performing highly accurate alignment.
(実施例)
第1図は、本発明による作成方法の実施例であり、ファ
イバ端面上でクラッド部分だけに反射膜を作成する手順
を示したものである。なお、図中従来例と同一構成部分
は同一符号をもって表わす。(Example) FIG. 1 is an example of the manufacturing method according to the present invention, and shows the procedure for creating a reflective film only on the cladding portion on the fiber end face. In the figures, the same components as those of the conventional example are represented by the same reference numerals.
すなわち図中、E1〜E6は作成の段階を示している。That is, in the figure, E1 to E6 indicate the stages of creation.
また、A1は光ファイバ、A3は光源であり、1は光フ
ァイバA1のコア、2は同じくクラッド、3は反射膜、
4は未露光のレジスト膜、7は露光されたレジスト膜で
ある。Further, A1 is an optical fiber, A3 is a light source, 1 is the core of the optical fiber A1, 2 is the cladding, 3 is a reflective film,
4 is an unexposed resist film, and 7 is an exposed resist film.
先ず、光ファイバA1を切断し、一方の端面を必要に応
じて研磨した後(段ME1)、該光フアイバ端面の全面
にレジスト液を塗布してレジスト膜4を作成する(段階
E2)。次に、光ファイバA1のもう一方の端面から光
を入射せしめ、コア1を伝搬した光によって、コア部分
に塗布され1=レジスト膜4を露光して変質したレジス
ト膜7とする(段階E3)。次に未露光のレジスト膜4
をディベロツバ−を用いて取り除く(段階E4)。First, the optical fiber A1 is cut and one end face is polished if necessary (step ME1), and then a resist solution is applied to the entire end face of the optical fiber to form a resist film 4 (step E2). Next, light is made to enter from the other end surface of the optical fiber A1, and the light propagated through the core 1 coats the core portion and exposes the resist film 4 to become a changed resist film 7 (step E3). . Next, the unexposed resist film 4
is removed using a developer tool (step E4).
次に、反射膜用材料をレジスト膜7の残っている部分も
含めて全光ファイバ端面に付着させ、反射11!3を作
成する(段階E5)。最後に溶剤を用いて、残っている
レジストII!$7をその1に作成した反射膜と共に取
り除く。Next, a material for a reflective film is attached to the entire end face of the optical fiber including the remaining portion of the resist film 7 to create a reflection 11!3 (step E5). Finally, use a solvent to remove the remaining resist II! Remove $7 along with the reflective film created in Part 1.
このように、本発明による作成方法を用いれば、高精度
な位置合わせをすることなしにクラッド部分だけに反射
膜を作成することができる。As described above, by using the production method according to the present invention, it is possible to produce a reflective film only on the cladding portion without performing highly accurate alignment.
第1図に示した実施例では、ディベロツバ−による処理
により露光して変質した部分7が残るレジスト液を使っ
ているが、逆に未露光部分4が残るレジスト液を用いれ
ば、コア部分だけに反射膜を作成することができる。In the embodiment shown in FIG. 1, a resist solution is used in which the exposed and altered portions 7 remain due to processing by a developer, but if a resist solution is used in which the unexposed portions 4 remain, only the core portions are left. A reflective film can be created.
光ファイバの一端から光を入射した時の他端における光
の強度はコアの中でも屈折率の高いところ程強い。従っ
て、コアの中心で屈折率が最も高く、中心から離れるに
従って徐々に屈折率が低下しているグレー°デッド型フ
ァイバの場合、コアの中心で光強度が最も強く、中心か
ら離れるに従って徐々に弱くなる。この点を利用すれば
、反射膜を作成せんとする端面とは異なるもう一方の端
面から入射する光の量を適当に設定することにより、レ
ジスト膜が変質するに足りるだけの光エネルギーをコア
の中心付近に塗布された一部のレジスト膜だけに与える
ことができる。このような技術を使えば、ファイバ端面
のうち、コアの中心付近の一部分だけを残して反射膜を
施したり、反対にコア付近だけに反射膜を施したりする
ことができる。When light enters from one end of the optical fiber, the intensity of the light at the other end is higher in the core where the refractive index is higher. Therefore, in the case of a graded fiber, in which the refractive index is highest at the center of the core and gradually decreases as you move away from the center, the light intensity is strongest at the center of the core and gradually weakens as you move away from the center. Become. By taking advantage of this point, by appropriately setting the amount of light that enters from the other end surface, which is different from the end surface on which the reflective film is to be created, sufficient light energy to change the quality of the resist film can be applied to the core. It can be applied only to a part of the resist film coated near the center. Using such a technique, it is possible to apply a reflective film to only a portion of the fiber end face near the center of the core, or to apply a reflective film only to the vicinity of the core.
なお、実施例の説明かられかるように、作成せんとする
膜は反射膜ではなく吸収膜や散乱膜などであっても全く
同じ作成手段で部分的な躾を作成することかできる。As can be seen from the description of the embodiments, even if the film to be created is not a reflective film but an absorbing film, a scattering film, etc., partial control can be created using exactly the same manufacturing means.
ファイバ端面に作成する膜の材料や厚さ、大きさ、ファ
イバ端面の角度、更には膜をコア部分に作成するかクラ
ッド部分に作成するかなどを適当に選択することにより
、部分的に作成された膜を用いて光スィッチ、光分岐、
光減衰器、光モ・−ドフィルタなどを構成することが可
能である。By appropriately selecting the material, thickness, and size of the film to be created on the fiber end face, the angle of the fiber end face, and whether the film is created on the core or cladding part, it is possible to create a film partially. Optical switches, optical branching,
It is possible to configure an optical attenuator, an optical mode filter, etc.
(発明の効果)
以上説明したように、本発明によれば、高精度な位置合
わせを行うことなしに、ファイバ端面上に部分的に反射
膜や吸収膜あるいは散乱膜などを作成でき、光スィッチ
、光分岐、光減衰器、光モードフィルタなどの曙能を有
する光デバイスを人聞にかつ低コストで生産できるとい
う利点がある。(Effects of the Invention) As explained above, according to the present invention, a reflective film, an absorbing film, a scattering film, etc. can be formed partially on the fiber end face without performing highly accurate positioning, and an optical switch can be This method has the advantage that optical devices with advanced capabilities such as optical branches, optical attenuators, and optical mode filters can be produced manually and at low cost.
第1図は本発明による作成方法の実施例を示す工程説明
図、第2図は光ファイバ端面上に部分的に膜を作成する
従来の方法の工程説明図である。
E1〜E6・・・作成の段階を示す記号、A1・・・光
ファイバ、A2・・・フォトマスク、A3・・・光源、
1・・・コア、2・・・クラッド、3・・・反1)[,
4・・・未露光のレジスト膜、5・・・フォトマスクの
不透明部分、7・・・露光されたレジスト膜。FIG. 1 is a process explanatory diagram showing an embodiment of the manufacturing method according to the present invention, and FIG. 2 is a process explanatory diagram of a conventional method for partially forming a film on the end face of an optical fiber. E1 to E6...Symbols indicating stages of creation, A1...Optical fiber, A2...Photomask, A3...Light source,
1... Core, 2... Clad, 3... Anti-1) [,
4... Unexposed resist film, 5... Opaque portion of photomask, 7... Exposed resist film.
Claims (1)
ァイバの他の端面に光を照射し、コアを伝搬した光によ
って前記レジスト膜を部分的に露光させ、露光したレジ
スト膜部分または露光しなかったレジスト膜部分のうち
の一方だけを取り除き、該レジスト膜の残った前記光フ
ァイバ端面に目的とする膜の作成用の材料を全面にわた
って付着させて膜を作成し、しかる後部分的に残ってい
たレジスト膜をその上に付着された前記膜と共に取り除
くことを特徴とする光ファイバ端面の膜作成方法。A resist film is created on one end face of an optical fiber, the other end face of the optical fiber is irradiated with light, the resist film is partially exposed by the light propagated through the core, and the exposed resist film portion or the exposed part is exposed. Remove only one of the parts of the resist film that remained, and apply a material for creating the desired film over the entire surface of the end face of the optical fiber where the resist film remained. 1. A method for forming a film on an end face of an optical fiber, comprising removing a resist film deposited on the resist film along with the film deposited thereon.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61013512A JPS62172306A (en) | 1986-01-24 | 1986-01-24 | Method for forming film on end surface of optical fiber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61013512A JPS62172306A (en) | 1986-01-24 | 1986-01-24 | Method for forming film on end surface of optical fiber |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62172306A true JPS62172306A (en) | 1987-07-29 |
Family
ID=11835198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61013512A Pending JPS62172306A (en) | 1986-01-24 | 1986-01-24 | Method for forming film on end surface of optical fiber |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62172306A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01255803A (en) * | 1988-04-06 | 1989-10-12 | Nec Corp | Optical fixed attenuator |
JP2004163577A (en) * | 2002-11-12 | 2004-06-10 | Pentax Corp | Processing method of optical fiber |
-
1986
- 1986-01-24 JP JP61013512A patent/JPS62172306A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01255803A (en) * | 1988-04-06 | 1989-10-12 | Nec Corp | Optical fixed attenuator |
JP2004163577A (en) * | 2002-11-12 | 2004-06-10 | Pentax Corp | Processing method of optical fiber |
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