JPS62135705A - Image processing type measuring instrument - Google Patents

Abstract

PURPOSE:To perform exactly, quickly and easily a measurement by an enlarged image, irrespective of an attached position of an object to be measured, by inclining and correcting a figure of an enlarged image of a monitor device to a reference figure. CONSTITUTION:An illumination optical system 14 executes a light irradiation to an object to be measured 12 which has been placed on an object placing base 10. An enlargement optical system 16 enlarges a part to be measured of the object 12. A moving mechanism 18 moves relatively the base 10 and the optical system 16 in order to enlarge a prescribed object part. A monitor device 22 is coupled to the optical system 16 through, for instance, a TV 20, and reflects an enlarged image of the object part. As a result, a size and a shape, etc. of the object are derived by bringing the enlarged image to, for instance, an edge detection processing. Also, an angle difference of an attached angle of the object 12 against the base 10, and a reference relative angle of both of them is derived by evaluating the enlarged image by the optical system 16, and operating an angle difference discriminating means 24. An angle difference signal of an output of this means 24 is supplied to an angle correcting means 26. An operator executes an inclination correction so that a figure of the enlarged image always becomes similar to a reference figure.

Description

[Detailed description of the invention]

[Industrial Application Field 1] The present invention relates to an image processing type measuring device, and in particular, a device suitable for use during image processing type measurement using a television camera.
Receiving the light associated with the defined object placed on the stage, the enlarging optical system, which is moved relative to the stage, magnifies the profile of a predetermined measurement target part, and creates an enlarged image of the measurement target part. The present invention relates to a process-type measuring device that evaluates ``11'' and measures the shape, shape, etc. of a fixed object. [Prior Art] In recent years, a TV camera has been used for Ryo'19 Hay! 1°4
Measuring devices are being researched. In this image processing type JII standard 1;1, the size of the imaging surface of the television camera and the dividing film are limited, so in order to use it as a measurement hole, it is necessary to use a magnifying optical device such as an objective lens to It is necessary to enlarge the object using a system, perform image processing on the enlarged image, and measure the dimensions, shape, etc. of the object to be measured.

[Problems to be solved by the invention]

However, enlarging the field of view narrows the field of view, so for example the object to be measured! ! ! When measuring dimensions, etc. between two points that are far apart from each other, it becomes impossible to display the two points simultaneously on the same screen, which impairs operability and at the same time reduces the visual impact, which is the greatest advantage of the optical definition. The problem was that the advantage of being able to observe images was limited. That is, the applicant has developed an illumination optical system that irradiates light onto a measurement target placed on a stage, and a light (
a magnifying optical system that magnifies an image of a portion to be measured by receiving (reflected light, passing light, or transmitted light); and movement that relatively moves the document table and the magnifying optical system in order to magnify a predetermined portion to be measured. A monitor device that is photoelectrically coupled to the enlarging optical system described above and displays an enlarged image of the part to be measured, and a measuring means that processes the enlarged image to obtain the dimensions, shape, etc. of the object to be measured. Prototype TII' with image processing type W, 11 fixed charge
Upon investigation, it was found that the effective rate was 1!7, allowing for rapid measurement.
1, I was able to recognize that there was a big problem: '<f4. That is, normally, the magnifying optical system and the stage are moved relative to each other.
In the case of two dimensions, the IM is formed to be able to move independently in the X-Y directions. Therefore, when mounting the object to be measured on the stage, the axes of both people should be aligned! It is necessary to reduce However, in the case of J3, which attempts to evaluate on the order of 0.1 .mu.m, it is virtually impossible to mount the tubes with their axes aligned, even if a jig is prepared. In addition, if this is forcibly shifted, the measurement wharf ((11) will be cumbersome and take a long time, resulting in extremely poor quality. Tolerance U colander I
+7, but the degree cannot be quantitatively defined and it varies from person to person, so as a result, the enlarged image is tilted to the 72-tattoo image, and the predetermined enlarged image's j selection operation 1'1: In addition to causing problems, if there is no image display for both measurements and the L edge, even if edges are carefully detected on one side, detection errors may occur on the other side. This has led to situations in which detection has become impossible in some cases. In addition, in the magnifying optical system, the part to be measured of the object to be measured was displayed on the monitor device in the standard state (1! Processing is easy, as evidenced by the development of electronic technology, and enables quick and accurate measurements, but before that, it is necessary to select a predetermined measurement target area and enlarge it to a monitoring device. A great deal of time and effort was required in the so-called preparation process before displaying the image, and the selection of the enlarged image was often made incorrectly. It is difficult to determine which part of the object to be measured corresponds to the object being measured. In addition, if you do not remember the shape and pattern that corresponds to the enlarged image and the object to be measured, as well as the order of the measurement points, you will not be able to even compare and confirm. I'm a monk, so I'm an expert 1 or 1.
There is also the problem of not being able to grow rice. Therefore, it becomes more difficult to work, especially when the object to be measured has a repeating shape such as a tC pattern, or when the object to be measured is mounted on the stage at an angle. When choosing the illumination optics for the eyes? There is also a situation where it is difficult to confirm 51. Furthermore, because it was difficult to confirm, there was a risk that the titles of 1tt's works would be too close to the main body of several books. Such problems arise not only in the manual type in which the operator operates each step Fn of the measurement procedure, but also in the automatic type in which the first relative movement is automatically performed based on the measurement program. The problems are the same because the same steps as in the manual type must be followed during the teaching work for program creation.

Purpose of the Invention 1 The present invention has been made in order to solve the problems of the previous generation, and to easily perform measurement using an enlarged image accurately, quickly, and without regard to the mounting position of the object to be measured. The first objective is to provide an image processing type measuring device that can perform A second object of the present invention is to provide an image processing measuring device that can easily confirm the position of an enlarged image on an object to be measured. [Means for Solving the Problems] The present invention, as shown in FIG.
an illumination optical system 14 that irradiates light onto the object to be measured 12 placed on the object 12;
a magnifying optical system 16 that magnifies the image of the measurement target portion; a moving mechanism 18 that relatively moves the document table 10 and the magnification optical system 16 to magnify a predetermined measurement target portion; For example, a photoelectric coupling device using a television camera 20, a monitor device 22 that displays an enlarged image of the part to be measured, and a measuring means that performs edge detection processing on the enlarged image to obtain the dimensions, shape, etc. of the object to be measured. In the separated image processing measuring device, the angular difference between the taken f1 angle of the measurement object 12 with respect to the document table 10 and the reference relative angle between the two is determined by evaluating the magnified image by the magnifying optical system 16. identification means 24; and angle correction means 26 for tilting the enlarged image in a direction opposite to compensate for the angular difference according to the angular difference No. 13 output from the angular difference identification means 24 and displaying it on the monitor device 22. The enlargement of the monitor device 22 [1
) has achieved the first objective. Further, the present invention provides the above-mentioned image processing type measuring device, as shown in FIG. A second monitor device (monitor device 2 in Figure 2)
2), +1i+ writing table 10 and magnifying optical system 16
A current position specifying means 30 specifies the current position of the enlarged image on the measurement object 12 from the amount of relative movement displacement, and the mounting angle of the measurement object 12 with respect to the document table 10 and the reference relative angle between the two. An angular difference discriminating means 24 for determining the angular difference by evaluating at least one of the enlarged image by the enlarging optical system 16 or the whole image of the whole optical system 28, and the output of the angular difference discriminating means 24. According to the fQ degree f15,
The monitor device 22 is provided with an angle α correction means 26 for tilting the enlarged image and the entire image in the opposite direction to cancel the angular difference, and always corrects the inclination of the enlarged image to the reference posture. At the same time, by configuring the current position of the enlarged image, which is displaced with the relative movement of the object table 10 and the enlargement optical system 16, to be displayed overlappingly on the overall image whose tilt has been corrected to the reference posture, the above-mentioned (second purpose). Further, in the actual IM aspect of the present invention, the positive angle of inclination iIi of the enlarged image and the inclination correction angle of the entire image can be adjusted independently. Further, in an embodiment of the present invention, the monitor device and the second monitor device are formed so that both display surfaces are the same. (Function) The present invention provides an image processing type measuring device as described above, in which the installation angle of the dyed object to be measured with respect to the stage and the jQ of both 91
An angular difference identifying means that evaluates the magnified image by the enlarging optical system to determine the angular difference between l il+relative angle, and an angular difference identifying means that calculates the angular difference between the angular difference and the relative angle in the opposite direction to cancel the angular difference according to the angular difference signal output from the angular difference identifying means. An angle correction means for tilting the enlarged image and displaying it on the monitor device is provided, and the angle correction means is provided to tilt the enlarged image and display it on the monitor device, so that the enlarged image is always based on the orientation of the enlargement range of the monitor device. (7+1 is made so that the tilt is corrected in the - position. Therefore, regardless of the mounting position of the measurement target,
The enlarged image can be projected in a predetermined horizontal or vertical position, etc., and measurements using the enlarged image can be performed accurately, quickly, and easily. In an image-based Tahar-type measuring device such as the Current position specifying means for specifying the current position of the enlarged □□□ on the measurement target from the amount of relative movement displacement;
The mounting angle of the measurement pair e-1 with respect to the document table and the relative angle of both; An angular difference discriminating means for evaluating one side and the angle difference discriminating means [Depending on the angular difference No. 18 of the Ω output, 1) canceling the angle tan 11 - oppositely expanding the angle in one direction (... and The whole picture
An angle correction means for adjusting the position of the magnifying lens at an inclination of 1; The current head of the enlarged image, which is displaced as it moves, is tilted to the same tilted position. The position of the magnified image, which is displaced due to the relative movement of the stage and the magnifying optical system, can be confirmed, and measurements using the magnified image can be performed quickly and easily. In addition, the tilt correction angle of the enlarged image and Kij of the entire image:
l? If the ili positive angles can be adjusted independently, it is possible to easily cope with the case where the reference posture of the enlarged image and the overall image are different. Further, when the monitor device and the second monitor device are formed so that both display surfaces are the same, the structure of the device becomes relatively simple and can be miniaturized. (Example 1) Hereinafter, with reference to the drawings, a detailed description will be given of an embodiment of both 1ffi processing type measurement (large) in which the present invention is adopted. The X-Y table 40 is a stage, and the X-Y table/10 is
A table Kurishiro 42 that is movably supported in the Y direction and has a 1-piece inlet/outlet 42△ for 1.1Q entry and exit of a J-shaped 3-1 object on its side, illumination optical system, 411, large optical system. system,
A measuring head 44 that has a built-in optical system, a television camera, etc. and is movable in the Z@ direction, and the measuring head 44 is
It has a support arm 46 that supports above the table 40, and a drive control system for controlling the position of the X-Y table 40; Linear ■1 A position detection system that includes the displacement detector, an illumination control system for controlling the illumination optical system, and a lens Ii for controlling the lenses of the magnification optical system and the overall optical system.
'l 1lln system, the angular difference discrimination circuit according to the present invention for processing the image captured by the television camera.
4. A video α system including tilt correction correction, a measuring table 38 having a built-in autofocus system for automatically adjusting the focus of the television camera, etc. 1q: Human image captured by the television camera and tilt corrected. and the overall picture (such as an IHIH monitor device 48 and a computer 50 that includes a hard disk, floppy disk, and central processing unit), and gives necessary ear commands to the computer 50, or
- a joystick 52 for operating the Y table 40, an operation=, p 54 and a digitizer 56;
It mainly consists of a plotter 58 for drawing the outline of the entire image of the object to be measured as needed. Inside the measuring head 4/I, as shown in detail in Fig. 'f34, at least one enlarging optical system 60 and an overall optical system 62 are provided with a revolver 6 which is rotatable around an axis 64A.
The magnifying optical system 60 and the body optical system 62 can be switched by switching the position of the revolver 64, which is fixed to the optical system switching mocro 8 via a belt 66, for example. The image is input to and covers the light receiving section 70A of the television camera 70. At J3 in the figure, 72 is a click for positioning the optical axis, and 74 is an optical system detection sensor for detecting which optical system is being used. The operation of the first embodiment will be explained below. First, a soft object to be measured is set on the X-Y table 40. Next, after approximately adjusting the position of the Nu Y table 40, the optical system switching motor 68 is driven to insert the entire optical system 62 in front of the television camera 70, capture the entire image of the object to be measured, and perform tilt correction. After that, it is fixedly displayed on a portion of the screen of the monitor device 48, for example, on the left-hand side as shown in FIG. The display of this overall image is kept on display until the measurement is completed. Next, the optical system switching motor 68 is driven to switch the revolver 64.
is rotated, and the magnifying optical system 60 with a predetermined magnification is pushed into the front of the television camera 70. The tilt-corrected Iζ magnified image captured by the wide optical system 6o is displayed, for example, at the lower left of the monitor device/I8, as shown in FIG. The position γ of the X-Y table 40, that is, the position of the magnifying optical system 60 with respect to the object to be measured, is detected by, for example, a linear displacement detector built into the table pedestal 42, and the magnifying optical system 60 detected by this and the positional relationship of the X-Y table 40 are displayed overlappingly on the above-mentioned whole section (2) using, for example, a bright spot current position mark. Therefore, the measurer should move the current position mark displayed on the entire Rf toward the desired target value using the joystick 52, the digitizer 56, or the light bevel (not shown).
etc. to drive the X-Y table 40. As shown in FIG. 5, when the desired enlarged image including the edge line GG to be measured is displayed on the monitor device 48, the operator presses the button of the probe vehicle 54, for example, the digitizer 56, to
As shown in the arrow A → B in the figure, when you set the position and direction of the edge detection system and turn on the edge detection button, the edge position (length 1 from the center of the screen) is automatically set at edge point H. Detected. Next, the X-Y table is moved by the amount of movement, and a desired enlarged image including the edge line J-'J on the opposite side is displayed on the monitor device 48, as shown in FIG. Next, contrary to Figure 5,
Determine the position and direction of the edge detection system as shown by arrow C→D,
Find the position of the edge point (length L2 from the center of the screen). In this way, the dimension between the edge points FIK is set as (dimension L1
+ dimension L2 + table movement amount detected by the displacement detector). In this case, it is assumed that the edge lines GG and JJ are positioned on the same line on the monitor mount 48. Here, the measurement accuracy is the blindness of the television camera 70
00 pixel
18, the output signal from the television camera 70 is 1150X10.1500=1/250 in the horizontal direction.
0/Work with Bixel. Therefore, the gland to be measured is 0.1
This means that evaluation can be performed with a resolution of 1 μm/Vichir. The output signal of this platform and the displacement detector is 0.4
The depth exceeds μm. As shown in Figure 7, when the edge lines G-G and J-J are projected at the same time,
- Pixel attack x 0.4 μm between G-J-J is G-G
- The dimension between J and J. The processed data is stored and output as memory as necessary to the right half of the monitor device 48 as shown in FIG. 5 above. The diameter, virtual center position, slope, angle, etc. of the 33 circles can also be determined in the same way by detecting edges using the same procedure. The edge detection direction, the number of detection points, the position of the measurement object to be enlarged, etc. for this enlargement are recorded in a measurement program determined for each step. It should be noted that the overall area captured by the overall optical system 62 is extracted only as a contour and printed as a sketch on a printer or plotter 5.
8, making it possible to create trace diagrams more accurately and quickly than with conventional methods. It is also possible to write the measurement results on the trace figure.Furthermore, as shown in Figure 8, it is possible to write the measurement results on the trace figure.
1, straight line intersections I+, Iz, etc.) can also be displayed in an overlapping manner with names. In this case, it is easy to understand the measurement procedure and compare it with the drawings, which is convenient when performing complex data processing. In this first embodiment, the magnifying optical system 60 and the overall optical system 62 are provided with a plurality of lens systems having different magnifications, and the VJ
It is easy to set up each optical system because it can be changed (j4). Also, in this first embodiment, since the television camera 70 is shared, the equipment can be - It is also possible to provide the television camera 70 in each of the enlarging optical system 60 and the overall optical system 62.Furthermore, in this first embodiment, 71-1 to the focus mechanism Since the image is clearly defined, the measurement accuracy is high.It is also possible to omit the step 1 of autofocus.Next, a second embodiment of the present invention will be explained in detail. In this '?52 embodiment, as shown in FIG. 9, the entire optical system is constructed with a zoom lens 80 (r11), and when the moving box 82 is moved to the right in the figure, Jl: A magnifying optical system is formed by forming a constant lens 84, that is, a magnifying lens. In FIG. 92 is a zoom motor; 92 is a sensor for outputting the zoom position; 91 and 96 are a moving FJJ board and a fixed plate supported by V-rails; 98 is a moving box 82;
This is a rack for driving the optical system switching motor 68. The surface-to-plane measurement lens 8/l can be changed to one with a different magnification using a revolver (not shown), or can be replaced by attachment and detachment. The other points are the same as those of the first embodiment, so the explanation will be omitted. In this second embodiment, the entire image is displayed by an image input to the television camera 70 through the measurement lens 84 and the zoom lens 80 in the state shown in FIG. a3. The magnification of the zoom lens 80 can be changed by a zoom motor 88. On the other hand, when observing the enlarged image, the moving box 8 is
Move the entire section 2 to the right in the figure. Then, the zoom lens 80 is removed from the optical path and becomes an enlarging optical system using the measurement lens 84. At iJ3 between the second fruit colors, one mechanism for switching the optical system is completely housed within the measuring head 44, so there is little risk of damage. Furthermore, since the zoom lens 80 is used in the entire optical system, it is possible to easily coordinate arbitrary reduction magnifications according to the size of the constant object. In addition, the fruit/II! In Example i, the magnifying optical system and the overall optical system were independent, but as shown in FIG. 10, as in the third embodiment, the optical system is By forming a lens system that can change f and l in the axial direction and adjusting the position of the lens system, it is possible to easily create a magnifying optical system with a magnification of n times (n = 30, 20, 40, etc.), for example. It is also possible to share the entire optical system of 1/n 13. In this case, it is possible to miniaturize the measurement head. It is also possible to omit the entire optical system. In addition, in the embodiments described above, the current state of the optical system is I tried to display only the position as a bright spot, but
According to a measurement program stored in advance, the next target position to be moved can also be displayed with a mark or blinking depending on the degree of approach. Furthermore, at 0) where the current position coincides with the target position, the first measurement Q'= f(i°1
It is also possible to output a completion signal. In these cases, accurate measurements can be quickly performed even if the operator is not familiar with the order of measurement points. C15, in each of the above embodiments, the X-Y table 40 is used to move the stage in the X-Y direction, and the measurement head 44 is used to move the optical system in the Z-axis direction. However, the configuration in which the stage and the optical system are moved relative to each other is not limited to this, for example, the stage may be fixed and only the optical system may be moved in the XYZ directions. You can also do it. In addition, in all of the above embodiments, the present invention was used for two-dimensional measurement (;), but the scope of application of the present invention is not limited to this, and three-dimensional measurement using special autofocus is also possible. It is clear that the present invention can be similarly applied to a microscope, etc. [Effects of the Invention] As explained above, according to the present invention, an enlarged image or an overall image can be obtained regardless of the mounting position of the force to be measured. It has an excellent effect in that it can be displayed in a predetermined standard state, and therefore, rapid and reliable measurement is possible.

[Brief explanation of drawings]

1 and 2 are block diagrams showing an example of the basic configuration of an image processing]11j type measuring device according to the present invention, and FIG. FIG. 4 is a sectional view showing the structure of the measurement head of the first embodiment, and FIG. 5 is a perspective view showing the overall structure of the first embodiment of the measurement head.
6 and 7 are diagrams showing display examples of the monitor device in the embodiment, and FIG. 7 is a diagram showing an example of display of an enlarged image of the monitor device in the first embodiment. FIG. 9 is a diagram showing an example of the display of J3 in the second embodiment of the present invention.
FIG. 10 is a cross-sectional view showing the configuration of the measuring head, and is a diagram showing the basic (111 configuration) of the optical system in the third practical example. ...Measurement object, 14.. Illumination optical system, 16.60.. Magnifying optical system, 18.. Moving orange drawing, 20.70.. Television camera, 22.48.. Monitor device. 24... Angle difference identification means, 26... Angle correction means, 28... Overall optical system, 30... Current position (support) identification means, 38... Measurement stand, 40... X- Y table, 44...Measuring head, 50...Computer.

Claims (4)

[Claims] (1) An illumination optical system that irradiates light onto an object to be measured placed on a stage, an enlarging optical system that receives light related to the object and magnifies an image of the part to be measured, and a predetermined a moving mechanism for relatively moving the document table and the magnifying optical system in order to magnify the measurement target part; a monitor device photoelectrically coupled to the magnification optical system to display an enlarged image of the measurement target part; and a monitor device for displaying the enlarged image. In an image processing measuring device equipped with a measuring means for processing and determining the dimensions, shape, etc. of the object to be measured, the angular difference between the mounting angle of the object to be measured with respect to the object table and the reference relative angle between the two, An angular difference identifying means for evaluating and obtaining an enlarged image by the enlarging optical system; and an angular difference identifying means for determining the enlarged image by tilting the enlarged image in a direction opposite to canceling out the angular difference according to an angular difference signal output from the angular difference identifying means. An image processing type measuring device, comprising: an angle correction means for displaying the image on the device, and configured to always correct the tilt of the enlarged image of the monitor device to a reference posture. (2) An illumination optical system that irradiates light onto the measurement target placed on the stage, an enlarging optical system that receives the light associated with the measurement target and magnifies the image of the measurement target, and a predetermined a moving mechanism for measuring and moving the document table and the enlarging optical system in order to enlarge the part to be measured; a monitor device that is photoelectrically coupled to the enlarging optical system and displays an enlarged image of the part to be measured; and a monitor device for displaying the enlarged image. In an image processing type measuring device, the image processing measuring device is equipped with a measuring means for determining the dimensions, shape, etc. of the object to be measured. a current position specifying means for specifying the current position of the enlarged image on the object to be measured based on the amount of relative displacement between the object table and the magnifying optical system; An angular difference identifying means for determining the angular difference between the mounting angle and a reference relative angle between the two by evaluating at least either an enlarged image by the enlarging optical system or an overall image by the overall optical system; and the angular difference identifying means. and angle correction means for tilting the enlarged image and the entire image in a direction opposite to canceling out the angular difference according to the output angular difference signal, and displaying the image on the monitor device, so that the posture of the enlarged image is always used as a reference. In addition to performing tilt correction on the posture, the current position of the enlarged image that is displaced due to the relative movement of the document stage and the magnifying optical system is overlappingly displayed on the overall image that has also been tilt-corrected to the reference posture. Features of image processing measurement device. (3) The image processing measuring device according to claim 2, wherein the tilt correction angle of the enlarged image and the tilt correction angle of the entire image are each independently adjustable. (4) The image processing type measuring device according to claim 2, wherein the monitor device and the second monitor device are formed with the same display screen.