JPS6136873A - Vertical illuminator for recognition of ic pattern - Google Patents

Abstract

PURPOSE:To detect an IC chip pattern in a high contrast by providing a lens having a filter effect and also converting the radiated light into parallel beams on the optical axis of the radiated light between a lens lamp and a half mirror. CONSTITUTION:The radiated light 2 sent from a lens lamp 1 is converted into parallel beams or the transmitted light 9 approximate to the parallel beams through a lens 8. At the same time, the waveform characteristics of the light 2 are also adjusted by a filter effect of the lens 8. Then the light 2 is made incident on a half mirror 3 and reflected partially. This reflected light is reflected again on the surface of an IC chip 4 and passes partially through the mirror 3 to be turned into the incident light 11 to an industrial TV camera ITV6. The light made incident on the ITV6 is turned into parallel beams. Thus it is possible to obtain pictures having high contrasts and free from fuzz.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] This invention relates to an industrial television camera (hereinafter referred to as Industrial TV).
The present invention relates to an improvement of the pattern surface image displayed on the above-mentioned industrial TV using a vertical illumination device for IC pattern recognition using a vertical illumination device for IC pattern recognition.

[Prior art]

Conventionally, there was a device of this type as shown in Figure 1. In the figure, (1) is a lens lamp that serves as a light source.

(2) is the synchrotron radiation emitted from the lens lamp (1), (
3) is a half mirror 1 (4) that completely reflects the synchrotron radiation (2).
) is an IC chip provided perpendicularly to the optical axis of synchrotron radiation (2), (5) is irradiation light to IC chip (4), (
6) is ITV.

(7) This is the incident light on tf engineering TV (6).

Next, the operation will be explained. The light source is a lens lamp (
The synchrotron radiation (2) emitted from the half mirror (3)
), and is irradiated onto an IC chip (4) provided in a direction perpendicular to the optical axis of the emitted light (2). Then, the irradiated calyx (F,
1 + T ('! 4--puζAS fi back side f
ff M -It J'lInput MrF'rThe irradiated light passes through the half mirror (3 sai) part of the above.
This becomes the incident light (7) to II). This incident light (7) is I
In order to project the pattern of the C chip (4) as an image, it is imported into the TV ((3)).

In addition, the natural light emitted from a light source such as "7" is.

It is generally known that the wavelengths are different and that the directivity is poor because light from various directions is mixed. Therefore, it is clear that the radiated light (2) Vi emitted from the lens lamp becomes diffused light that comes out in all directions and spreads.

However, the conventional device is not equipped with a device B for correcting the light properties as described above, so that the synchrotron radiation (2) emitted from the lens lamp (1) serving as the light source remains as diffused light through the half mirror ( 3) and is partially reflected by the IC chip (4). Then, the light reflected from the surface of the IC chip (4) remains as diffused light and enters the device (6) as incident light (7).
It is incorporated as C. At this time, multiple images are formed on the imaging surface of the IC chip (6) for the reasons mentioned above, so the pattern of the IC chip (4) is projected onto the image plane of the IC chip (6) as a blurred digit image. It turns out.

In addition, factors such as the wavelength characteristics of synchrotron radiation (2), the reflected light of the IC chip (4), the wavelength sensitivity characteristics of the technology (et), and the contrast of the image projected on the technology TV (6) There were some flaws, too.

[Essentials of the invention]

This invention was made in order to eliminate the drawbacks of conventional lights such as the above one.
It has a filter effect on the optical axis of the synchrotron radiation between the half mirrors that partially reflects the synchrotron radiation emitted from the lens lamp and irradiates it onto the IC chip. It is an object of the present invention to provide a vertical illumination device for IC pattern recognition, which can obtain a blurred image and an image with good contrast by disposing a lens for converting it into light.

[Embodiments of the invention]

Hereinafter, a major embodiment of the present invention will be described with reference to FIG.

In the figure, (1) to (4) and (6) are the same as the conventional one. (8) is the lens lamp (1) and half mirror
A lens (9) is provided between (3) on the optical axis of the synchrotron radiation (2), has a filter effect, and further converts the synchrotron radiation (2) into parallel light or near-parallel light. The transmitted light from the lens (8), ■ is the light irradiated onto the IC chip (4) installed perpendicularly to the optical axis of the emitted light (2).

(b) is the incident light to the engineering TV (e).

Next, the operation will be explained. The light source is a lens lamp (
The synchrotron radiation (2) emitted from 1) is diffused light as described in the prior art, but it is completely transmitted through the lens (8) provided between the lens lamp (1) and the half mirror (3). It is converted into slightly parallel light or transmitted light (9) close to parallel light. At the same time, the wavelength characteristics of the emitted light (2) are adjusted by the filter effect of the lens (8), and the half mirror (3)
It is incident on and partially reflected. This partially reflected light is
The IC chip (4) is used as the irradiation light C113 to the chip (4).
) is irradiated. The irradiated light αQ that was irradiated onto the IC chip (4) is reflected on the surface of the IC chip (4) and is reflected on the optical axis between the IC chip (4) and the TV (6) as shown in Figure 1. , a half mirror installed at a certain angle (3
) It becomes the incident light (b) to the fully transmitted TV (6).

That is, t emitted from the lens lamp (1) which is the light source
The path until it enters the T'V (e) is the same as that of the conventional device, but the IC chip (
In order to obtain the pattern image (4) without blurring and with good contrast, it is necessary to use synchrotron radiation (2) emitted from the light source.
) is preferably parallel light or at least light close to parallel light. In this regard, in this invention, as mentioned above, the lens (8) which has the property of adjusting the wavelength characteristics of light by a filter effect and converting the light into parallel light or nearly parallel light, and the lens lamp (1). By disposing it between the lens (8) and the half mirror (3), the light completely transmitted through the lens (8) is always collimated light (1) or nearly parallel light (I).
It will be incident on T V (a). In other words, I.C.
The light reflected on the surface of the chip (4) also enters the ITV (6) as parallel light or nearly parallel light, so the IC chip (
The pattern 4) will be imaged on the imaging surface of the T'V (6) as a focused image without blurring.

In addition, when the second lens (8) is completely transmitted, the custom wavelength of the synchrotron radiation (2) is adjusted by the filter effect of the lens (8), so it is not affected by the wavelength sensitivity characteristics of the ITV (a). As a clear image with good contrast.

The pattern of the IC chip (4) is projected onto the engineering TV (6).

In addition, in the above embodiment, the lens (8) disposed between the lens lamp (1) and the half mirror (3), which are the light sources, is
Has a filter effect and synchrotron radiation (2)? It is assumed that the light is converted into parallel light or light that is close to parallel light.

Separate lens and filter functions.

In example t, the same effect as the above embodiment can be obtained even with a combination of a lens and a color glass filter. Further, in the above embodiments, the shape and material of the lens (8) are not particularly specified.

For example, the shape and material are not particularly limited as long as it converts diffused light emitted from a light source such as a glass plano-convex lens into parallel light or parallel light. Further, although the lens (8) is composed of one lens, it may be composed of two or more lenses as long as parallel light or light close to parallel light can be obtained, and the same effect as in the above embodiment can be obtained. is obvious.

[Effects of the invention-]

As described above, according to the present invention, there is a lens lamp serving as a light source, and an IC that partially reflects the synchrotron radiation emitted from the lens lamp and is provided in a direction perpendicular to the optical axis of the synchrotron radiation (2).
A lens that has a filter effect and converts the emitted light into parallel light or nearly parallel light is placed on the optical axis of the emitted light between the half mirror and the half mirror that irradiates the tip.
This has the effect of providing a clear image with good contrast without blurring the pattern image of the IC chip projected on the TVK.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a conventional vertical illumination device for IC pattern recognition, and FIG. 2 is a block diagram of a vertical illumination device for IC pattern recognition according to an embodiment of the present invention. In the figure, (1) is a lens lamp, and (2) is synchrotron radiation. (3) is half mirror 1 (4) is IC chip, (8) I
-t lens. QO is the irradiation light of the IC chip. Note that the same line numbers in Figure 1 indicate the same or equivalent parts.

Claims (2)

[Claims] (1) A lens lamp serving as a light source, a half mirror that partially reflects the synchrotron radiation emitted from the lens lamp, and a mirror disposed perpendicular to the optical axis of the synchrotron radiation, which is reflected by the half mirror. In a vertical illumination device for IC pattern recognition comprising an IC chip to which light is irradiated, on the optical axis of the emitted light between the lens lamp and the half mirror,
1. A vertical illumination device for IC pattern recognition, comprising a lens having a filter effect and converting the emitted light into parallel light or near-parallel light. (2) The IC according to claim 1, wherein the lens disposed on the optical axis of the emitted light between the lens lamp and the half mirror is a plano-convex glass lens having a filter effect. Vertical illuminator for pattern recognition.