JPS61220756A - Ultrasonic wave atomizing device - Google Patents

Ultrasonic wave atomizing device

Info

Publication number
JPS61220756A
JPS61220756A JP6312185A JP6312185A JPS61220756A JP S61220756 A JPS61220756 A JP S61220756A JP 6312185 A JP6312185 A JP 6312185A JP 6312185 A JP6312185 A JP 6312185A JP S61220756 A JPS61220756 A JP S61220756A
Authority
JP
Japan
Prior art keywords
horn
electrode plate
atomizing
joint
oscillators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6312185A
Other languages
Japanese (ja)
Inventor
Kazuo Asano
一雄 浅野
Toranosuke Ashizawa
寅之助 芦沢
Masaru Kobayashi
小林 眞佐留
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP6312185A priority Critical patent/JPS61220756A/en
Publication of JPS61220756A publication Critical patent/JPS61220756A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn
    • B05B17/063Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn having an internal channel for supplying the liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0623Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers coupled with a vibrating horn

Landscapes

  • Special Spraying Apparatus (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

PURPOSE:To attain the improvement of the atomizing efficiency by screwing the respective male screws of a front horn and a rear horn to the female screws which are provided to the inside periphery of both sides of the oscillators and an electrode plate incorporated in the central part of a joint, compressing and sandwiching the oscillators and the electrodes plate. CONSTITUTION:The flanges are provided to the rear end of the front horn 3 and to the front end of the rear horn 4 and the male screws 13, 14 are cut to the outside periphery of the flanges and the respective male screws 13, 14 are screwed to the female screws 16, 17 which are provided to the inside periphery of both sides of the oscillators 5 and an electrode plate 16 incorporated in the central part of a joint 15 and the oscillators 5 and the electrode plate 6 are compressed and sandwiched with the front horn and the rear horn. Furthermore the liquid feeding holes 8', 8 perforating to an atomizing part 1 of a front end of the horn 3 from a rear end of the horn 4 are provided. In other words, since such design of a bolt that both the stress generated by the vibration and the area considered at a conventional article is not necessitated, the design efficiency is increased and an atomizing device actuating in the high frequency can be obtained and furthermore the element can be uniformly compressed because the clamping is only one position and the atomizing efficiency is made excellent.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は超音波電気−音響変換素子(振動子)を利用し
た液体の超音波霧化装置(以下霧化装置とする)に関す
る。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a liquid ultrasonic atomization device (hereinafter referred to as an atomization device) using an ultrasonic electro-acoustic transducer (vibrator).

(従来の技術) 従来のこの種の装置を第4図及び第5図に示す。(Conventional technology) A conventional device of this type is shown in FIGS. 4 and 5.

第4図の霧化装置は、霧化部1を有する増幅ホーン2と
一体化されている前部ホーン3と後部ホーン4とにより
、電極板6の両側に同じ極性を対向させて配置した圧電
素子の振動子5,5を挾持し。
The atomizing device shown in FIG. 4 consists of a front horn 3 and a rear horn 4 that are integrated with an amplifying horn 2 having an atomizing section 1, and piezoelectric actuators arranged on both sides of an electrode plate 6 with the same polarity facing each other. Holds the oscillators 5, 5 of the element.

ボルト7を後部ホーン、振動子及び電極板の軸心に設け
た孔を貫通し前部ホーン3に設けたねじ孔に螺合により
圧′線固定すると共に、液体を霧化部1へ導入する液体
供給孔8をボルト7及び前部ホーン3に貫通して設けた
ものである。第5図の霧化装置は、s化部1を有する増
幅ホーン2と一体化されている前部ホーン3の後端及び
後部ホーン4の前端にフランジ9,9′を対向して設け
、第4図と同様に配置した電極板6及び振動子5,5を
前部ホーン及び後部ホーンで挾持し、フランジ9゜9′
に設けた複数の孔にボルト10を通しナツト11で圧縮
固定すると共に、後部ホーン4を貫通し前部ホーン3の
後端から中途まで設けた孔に液体供給管12を挿入し、
液体供給管12及び前部ホーンに貫通して設けた液体供
給孔8を液体が通るようにしたものである。
A bolt 7 is passed through a hole provided in the axes of the rear horn, vibrator, and electrode plate and screwed into a screw hole provided in the front horn 3 to fix the pressure line, and the liquid is introduced into the atomizing section 1. A liquid supply hole 8 is provided through the bolt 7 and the front horn 3. The atomizer shown in FIG. 5 has flanges 9 and 9' facing each other at the rear end of the front horn 3 and the front end of the rear horn 4, which are integrated with the amplification horn 2 having the s-shaped part 1. The electrode plate 6 and the vibrators 5, 5 arranged in the same manner as shown in Fig. 4 are held between the front horn and the rear horn, and the flange 9°9'
The bolts 10 are passed through a plurality of holes provided in the front horn 3, and the bolts 10 are compressed and fixed with nuts 11, and the liquid supply pipe 12 is inserted into a hole that penetrates the rear horn 4 and extends halfway from the rear end of the front horn 3.
Liquid is made to pass through a liquid supply pipe 12 and a liquid supply hole 8 provided through the front horn.

(発明の解決しようとする問題点) 霧化装置は9通常霧化した粒径が小さいほど燃焼効率が
よく火炎長も短くなるので石油給湯器に使用した場合バ
ーナーがコンパクトになるという長所がある。霧化した
粒径を小さくするには作動周波数を上げる必要があり、
このためには振動子の径を小さくしなければならないが
、霧化に必要なパワーを出すにはある程度以上の振動子
面積が必要である。更に振動子を圧縮固定している部分
が振動によって発生する応力に耐える必要がある。
(Problems to be Solved by the Invention) Atomizing devices typically have the advantage that the smaller the atomized particle size, the better the combustion efficiency and the shorter the flame length, so when used in an oil water heater, the burner can be made more compact. . To reduce the atomized particle size, it is necessary to increase the operating frequency.
For this purpose, the diameter of the vibrator must be made small, but the vibrator area must be larger than a certain level in order to generate the power necessary for atomization. Furthermore, the portion that compresses and fixes the vibrator must be able to withstand stress generated by vibration.

第4図の霧化装置ではボルト7で締めつけるために振動
によって発生する応力に耐えるにはボルト7の径を大き
くしなければならず、このため振動子の面積が小さくな
る欠点がある。第5図の霧化装置はこの欠点が改良され
たものであるが、多数のボルトを均一に締めつけること
が困難で1片当シが原因で霧化しなかったり、素子が破
壊することがある。
In the atomizing device shown in FIG. 4, since the bolt 7 is tightened, the diameter of the bolt 7 must be increased in order to withstand the stress generated by vibration, which has the disadvantage that the area of the vibrator becomes small. Although the atomizing device shown in FIG. 5 has been improved on this drawback, it is difficult to uniformly tighten a large number of bolts, and the atomization may not be achieved or the element may be destroyed due to one piece hitting the atomizing device.

本発明は上記した欠点を解消する霧化装置を提供するこ
とを目的とする。
The object of the present invention is to provide an atomization device that eliminates the above-mentioned drawbacks.

(問題点を解決するための手段) 本発明は、前部ホーンの後端及び後部ホーンの前端にフ
ランジを設け、該フランジの外周におねじを切り、各お
ねじを継手の中央部に収納した振動子及び電極板の両側
の内周に設けためねじに螺合し、前部ホーン及び後部ホ
ーンにより振動子及び電極板を圧縮挾持すると共に、後
部ホーンの後端から前部ホーン前端の霧化部に貫通する
液体供給孔を設けてなる霧化装置に関する。
(Means for solving the problem) The present invention provides flanges at the rear end of the front horn and the front end of the rear horn, threads are cut on the outer periphery of the flanges, and each male thread is housed in the center of the joint. The vibrator and electrode plate are compressed and clamped by the front horn and the rear horn, and the mist from the rear end of the rear horn to the front end of the front horn is The present invention relates to an atomizing device having a liquid supply hole penetrating through an atomizing section.

本発明において振動子はジルコンチタン酸鉛(PZT)
、チタン酸バリウム等特に制限はないが通常はPZTを
用いる。前部ホーン及び後部ホーンは振動を伝え易いも
のであればよいが通常はアルミニウムを用いる。継手は
アルミニウムでも良いが強度の点から鋼材が好ましい。
In the present invention, the vibrator is made of lead zirconium titanate (PZT).
, barium titanate, etc. Although there are no particular limitations, PZT is usually used. The front horn and rear horn may be made of any material that can easily transmit vibrations, but aluminum is usually used. The joint may be made of aluminum, but steel is preferred from the viewpoint of strength.

液体供給管はアルミニウム、鋼材、プラスチック等特に
制限はないが通常はアルミニウムを用いる。電極板は導
電性のよいものであればよいが通常は銅板を用いる。
The liquid supply pipe is not particularly limited to aluminum, steel, plastic, etc., but aluminum is usually used. The electrode plate may be of any material as long as it has good conductivity, but usually a copper plate is used.

液体導入部の構造は第5図の場合のように、液体供給管
を挿入するようにした方が取扱いが容易である。また前
部ホーンの前方の増幅ホーンは設けることが好ましく、
その形状は第4図のように段付にしてもよく9円錐形、
エキスボネンシャル形等にしてもよく制限はない。霧化
部の形状についても制限はない。
It is easier to handle the structure of the liquid introduction part when a liquid supply pipe is inserted therein, as shown in FIG. It is also preferable to provide an amplification horn in front of the front horn.
Its shape may be stepped as shown in Figure 4, 9 conical,
There are no restrictions even if it is an exponential type. There are also no restrictions on the shape of the atomization section.

(実施例) 第1図は本発明の実施例になる霧化装置における振動子
及び電極板を取りつける前の部品の正面図及び第2図は
組立後の霧化装置の断面図である。
(Example) FIG. 1 is a front view of parts of an atomizing device according to an embodiment of the present invention before the vibrator and electrode plate are attached, and FIG. 2 is a sectional view of the atomizing device after assembly.

図において13及び14はアルミニウム製の前部ホーン
3の後端及び後部ホーン4の前端に設けたフランジの外
周に方向を逆にして切ったおねじである。15は鋼製の
継手で16及び17は前記おねじ13及び14に螺合す
るめねじである。継手15の中央部の空間18に、外周
をそれぞれ0リング19.19で周回した振動子5,5
でおたまじゃくし形の銅製の電極板6の円板部分を挾み
In the figure, 13 and 14 are male threads cut in opposite directions on the outer periphery of flanges provided at the rear end of the front horn 3 and the front end of the rear horn 4 made of aluminum. 15 is a steel joint, and 16 and 17 are female threads that are screwed into the male threads 13 and 14. In the space 18 in the center of the joint 15, vibrators 5, 5 each having an O-ring 19 and 19 around the outer periphery are placed.
Hold the disc part of the tadpole-shaped copper electrode plate 6 between the two.

孔20から電極板6の先端(おたまじゃくしの尾の部分
)を外部に出るように側面から収納する。
The electrode plate 6 is housed from the side so that the tip (the tadpole's tail part) comes out from the hole 20.

次に継手15の両側に前部ホーン3及び後部ホーン3及
び後部ホーン4を配してスパナ掛は部(図示せず)をス
パナで固定し、継手15を回転させて前部ホーン3及び
後部ホーン4を継手15に螺合し振動子及び電極板を圧
縮固定する。同図において24は前部ホーン3と一体に
なったエキスポネンシャル形の増幅ホーン、1はその先
端の霧化部であり、後部ホーンの後端から霧化部1に貫
通する液体供給孔は8(小径)及び8′(大径)の二段
階になっており、先端のネック部23に0リング21を
周回した液体供給管12が前記8′中に挿入される(液
体供給管12の内径は液体供給孔8の径に等しくしであ
る)。前記Oりング19.19は電極板6と継手15の
電気的絶縁及び組立の際振動子と電極板とを中央に固定
し、0リング21は液体供給管12から供給される液体
が漏洩して振動子に接触するのを防止する。第3図は第
1図における継手15のA−A断面図で9図中22は螺
合させるためのスパナ掛は部であり、20の孔は継手の
螺合時に電極板6が多少回転して継手に接触するのを防
止するために回転方向に長くしたことを示すものである
Next, arrange the front horn 3, rear horn 3, and rear horn 4 on both sides of the joint 15, fix the wrench hooks (not shown) with a spanner, and rotate the joint 15 to remove the front horn 3 and the rear horn. The horn 4 is screwed into the joint 15, and the vibrator and electrode plate are compressed and fixed. In the figure, 24 is an exponential amplification horn integrated with the front horn 3, 1 is an atomizing section at its tip, and a liquid supply hole that penetrates from the rear end of the rear horn to the atomizing section 1 is There are two stages, 8 (small diameter) and 8' (large diameter), and the liquid supply pipe 12, which goes around the O ring 21 at the neck part 23 at the tip, is inserted into the 8'. The inner diameter is equal to the diameter of the liquid supply hole 8). The O-rings 19 and 19 electrically insulate the electrode plate 6 and the joint 15 and fix the vibrator and the electrode plate in the center during assembly, and the O-ring 21 prevents liquid supplied from the liquid supply pipe 12 from leaking. to prevent contact with the vibrator. Figure 3 is a cross-sectional view taken along the line A-A of the joint 15 in Figure 1. In Figure 9, 22 is a wrench hole for screwing together, and the hole 20 is a hole that allows the electrode plate 6 to rotate slightly when the joint is screwed. This indicates that the shaft is made longer in the direction of rotation to prevent it from coming into contact with the joint.

実施例と同一材質の振動子及び電極板を用いて作成した
第4図及び第5図の霧化装置を作成し。
The atomizing device shown in FIGS. 4 and 5 was created using a vibrator and an electrode plate made of the same material as in the example.

比較例1及び比較例2とし、上記実施例の霧化装置と共
に霧化実験を行なった。第1表にその結果を示す。
Comparative Examples 1 and 2 were used, and atomization experiments were conducted using the atomization device of the above example. Table 1 shows the results.

第1表から明らかなように、比較例の霧化装置は作動周
波数を大きくするとボルト又は振動子の破損が生ずるが
、実施例のものは破損がなく、S化能率が良好である。
As is clear from Table 1, in the atomizing device of the comparative example, when the operating frequency is increased, the bolt or vibrator is damaged, but in the example, there is no damage and the S conversion efficiency is good.

(発明の効果) 本発明によれば、従来品のように振動によって発生する
応力及び面積を考慮したボルト設計の必要がないため設
計効率が上がシ、高周波数で作動する霧化装置を得るこ
とができ、さらに締め付けが一ケ所であるため素子を均
一に圧縮でき霧化効率が良くなる。
(Effects of the Invention) According to the present invention, unlike conventional products, there is no need to design bolts that take stress and area caused by vibration into consideration, so design efficiency is improved, and an atomization device that operates at high frequency is obtained. Furthermore, since the tightening is done in one place, the element can be compressed uniformly and the atomization efficiency is improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図及び第2図は本発明の実施例になる霧化装置にお
ける部品の正面図及び組立てた霧化装置の断面図、第3
図は第1図における継手のA−A側面断面図、第4図及
び第5図は従来の超音波霧化装置の正面図である。 符号の説明 1・・・霧化部      2・・・増幅ホーン3・・
・前部ホーン    4・・・後部ホーン5・・・振動
子      6・・・電極板7・・・ポル)    
   8.8’・・・液体供給孔9・・・フランジ  
  10・・・ボルト11・・・ナツト12・・・液体
供給管13・・・ねじ      14・・・ねじ15
・・・継手      16・・・めねじ17・・・め
ねじ     18・・・空間19・・・0リング  
  20・・・孔21・・・0りング    22・・
・スパナ掛は部23・・・ネック部    24・・・
増幅ホーン苓 1 ロ     ト00.霧/W IF
5・−・角IP、T=−ン 茅 2 (73tL、l’l・=  71.Jarりθ 某30
Figures 1 and 2 are a front view of parts in an atomizer according to an embodiment of the present invention, a sectional view of the assembled atomizer, and a third figure.
The figure is a side sectional view taken along the line A-A of the joint in FIG. 1, and FIGS. 4 and 5 are front views of a conventional ultrasonic atomizer. Explanation of symbols 1...Atomization section 2...Amplification horn 3...
・Front horn 4... Rear horn 5... Vibrator 6... Electrode plate 7... Pol)
8.8'...Liquid supply hole 9...Flange
10... Bolt 11... Nut 12... Liquid supply pipe 13... Screw 14... Screw 15
...Joint 16...Female thread 17...Female thread 18...Space 19...0 ring
20...hole 21...0 ring 22...
・Spanner hook part 23...Neck part 24...
Amplified Horn Rei 1 Loto 00. Fog/W IF
5・-・Angle IP, T=-n 2 (73tL, l'l・= 71.Jarri θ certain 30

Claims (1)

【特許請求の範囲】[Claims] 1、前部ホーンの後端及び後部ホーンの前端にフランジ
を設け、該フランジの外周におねじを切り、各おねじを
継手の中央部に収納した振動子及び電極板の両側の内周
に設けためねじに螺合し、前部ホーン及び後部ホーンに
より振動子及び電極板を圧縮挾持すると共に、後部ホー
ンの後端から前部ホーン前端の霧化部に貫通する液体供
給孔を設けてなる超音波霧化装置。
1. Provide flanges at the rear end of the front horn and the front end of the rear horn, cut threads on the outer periphery of the flanges, and attach each male thread to the inner periphery on both sides of the vibrator and electrode plate housed in the center of the joint. The vibrator and the electrode plate are compressed and clamped by the front horn and the rear horn, and a liquid supply hole is provided that penetrates from the rear end of the rear horn to the atomization section at the front end of the front horn. Ultrasonic atomization device.
JP6312185A 1985-03-27 1985-03-27 Ultrasonic wave atomizing device Pending JPS61220756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6312185A JPS61220756A (en) 1985-03-27 1985-03-27 Ultrasonic wave atomizing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6312185A JPS61220756A (en) 1985-03-27 1985-03-27 Ultrasonic wave atomizing device

Publications (1)

Publication Number Publication Date
JPS61220756A true JPS61220756A (en) 1986-10-01

Family

ID=13220132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6312185A Pending JPS61220756A (en) 1985-03-27 1985-03-27 Ultrasonic wave atomizing device

Country Status (1)

Country Link
JP (1) JPS61220756A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136759U (en) * 1987-02-27 1988-09-08
KR100690282B1 (en) 2005-12-28 2007-03-12 한국생산기술연구원 Ultrasonic nozzle for high frequency application
JP2011194370A (en) * 2010-03-23 2011-10-06 Mitsui Eng & Shipbuild Co Ltd Ultrasonic processor
CN102294313A (en) * 2011-07-27 2011-12-28 江苏大学 Low-frequency ultrasonic secondary atomizing sprayer with adjustable spray angle
JP2016536116A (en) * 2013-10-17 2016-11-24 ペプトロン インコーポレイテッド Ultrasonic spray equipment for aseptic processes
CN110479568A (en) * 2019-08-20 2019-11-22 浙江大学 A kind of ultrasonic vibration installation improving longitrorse transformation efficiency

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63136759U (en) * 1987-02-27 1988-09-08
JPH0536533Y2 (en) * 1987-02-27 1993-09-16
KR100690282B1 (en) 2005-12-28 2007-03-12 한국생산기술연구원 Ultrasonic nozzle for high frequency application
JP2011194370A (en) * 2010-03-23 2011-10-06 Mitsui Eng & Shipbuild Co Ltd Ultrasonic processor
CN102294313A (en) * 2011-07-27 2011-12-28 江苏大学 Low-frequency ultrasonic secondary atomizing sprayer with adjustable spray angle
JP2016536116A (en) * 2013-10-17 2016-11-24 ペプトロン インコーポレイテッド Ultrasonic spray equipment for aseptic processes
US9776201B2 (en) 2013-10-17 2017-10-03 Peptron, Inc. Ultrasonic atomizer for aseptic process
CN110479568A (en) * 2019-08-20 2019-11-22 浙江大学 A kind of ultrasonic vibration installation improving longitrorse transformation efficiency

Similar Documents

Publication Publication Date Title
US4723708A (en) Central bolt ultrasonic atomizer
US4978067A (en) Unitary axial flow tube ultrasonic atomizer with enhanced sealing
US3772538A (en) Center bolt type acoustic transducer
JP3657608B2 (en) Electromechanical transducer device
US3861852A (en) Fuel burner with improved ultrasonic atomizer
WO2016009788A1 (en) Ultrasonic vibrator for medical treatment
KR100368624B1 (en) Ultrasonic transducer for a bonding apparatus and a method for manufacturing the same
JPS61220756A (en) Ultrasonic wave atomizing device
JP2726255B2 (en) Device for detecting and / or monitoring a predefined filling surface height in a container
US5364005A (en) Ultrasonic transducer and mount
JP4118728B2 (en) Ultrasonic transducer
CN107028643B (en) Ultrasonic transducer
CN112827786A (en) Ultrasonic treatment device
JPH10200995A (en) Bolt tightening langevin type oscillator
JP2007117934A (en) Bolt tightening langevin-type oscillator
JP2915340B2 (en) Ultrasonic welding equipment
EP0245671B1 (en) Central bolt ultrasonic atomizer
JP2934602B2 (en) Resonator support for ultrasonic bonding equipment
JP2020065947A (en) Resonator support device
JPS6372371A (en) Method for supporting ultrasonic atomizing apparatus
JP2006319404A (en) Ultrasonic transducer
JPH044853Y2 (en)
JPS60148385A (en) Ring-shaped supersonic vibrator of twisting and bending mode
JPH1071365A (en) Ultrasonic vibrator and ultrasonic washing apparatus
JPH0576841A (en) Screw turning langevin type ultrasonic vibrator