JPS61194400A - Electron beam irradiator - Google Patents

Electron beam irradiator

Info

Publication number
JPS61194400A
JPS61194400A JP3495185A JP3495185A JPS61194400A JP S61194400 A JPS61194400 A JP S61194400A JP 3495185 A JP3495185 A JP 3495185A JP 3495185 A JP3495185 A JP 3495185A JP S61194400 A JPS61194400 A JP S61194400A
Authority
JP
Japan
Prior art keywords
electron beam
vacuum container
irradiation
window
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3495185A
Other languages
Japanese (ja)
Inventor
康久 星
林 啓三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISSHIN HAIBORUTEEJI KK
NISSHIN HIGH VOLTAGE KK
Original Assignee
NISSHIN HAIBORUTEEJI KK
NISSHIN HIGH VOLTAGE KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISSHIN HAIBORUTEEJI KK, NISSHIN HIGH VOLTAGE KK filed Critical NISSHIN HAIBORUTEEJI KK
Priority to JP3495185A priority Critical patent/JPS61194400A/en
Publication of JPS61194400A publication Critical patent/JPS61194400A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は電子線照射装置に関し、特に、真空容器に回
転機構を設けることによって照射窓の窓箔交換の作業性
を向上させた電子線照射装置に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an electron beam irradiation device, and in particular to an electron beam irradiation device that improves the workability of replacing window foil of an irradiation window by providing a rotation mechanism in a vacuum container. Regarding equipment.

〔従来の技術〕[Conventional technology]

第3図は従来の電子線照射装置の平面図であり、第4図
はその正面図であり、第5図は第3図の線V−V方向に
見た図である。この例の電子線照射装置は、真空容器6
内に、電子線EBを発生し加速する電子線発生・加速部
8が設けられており、当該電子線発生・加速部8には、
直流電源2で発生した直流高電圧(例えば数百KV)が
圧力容器4内の直流導体20を介して供給される。また
、真空容器6には、窓箔(図示省略)を有していて真空
側VSと照射雰囲気側(例えば大気側)ASとを分離す
る照射窓10が取り付けられており、電子線発生・加速
部8からの電子線EBは当該照射窓lOを通して照射雰
囲気側ASにある被照射物12に照射される。被照射物
12はこの例ではシート状のものであり、ローラ15等
から成るコンベアライン16によって搬送される。尚、
符号14はカバーである。
3 is a plan view of a conventional electron beam irradiation device, FIG. 4 is a front view thereof, and FIG. 5 is a view taken along the line V--V in FIG. 3. The electron beam irradiation device of this example has a vacuum container 6
An electron beam generation/acceleration section 8 that generates and accelerates the electron beam EB is provided within the electron beam generation/acceleration section 8.
A high DC voltage (for example, several hundred KV) generated by a DC power source 2 is supplied via a DC conductor 20 in the pressure vessel 4 . Further, the vacuum container 6 is equipped with an irradiation window 10 having a window foil (not shown) and separating the vacuum side VS and the irradiation atmosphere side (for example, the atmosphere side) AS, and generates and accelerates the electron beam. The electron beam EB from the section 8 is irradiated through the irradiation window IO to the irradiation object 12 located on the irradiation atmosphere side AS. The object 12 to be irradiated is in the form of a sheet in this example, and is conveyed by a conveyor line 16 comprising rollers 15 and the like. still,
Reference numeral 14 is a cover.

第6図は、第3図のD部回りを拡大した概略図である。FIG. 6 is an enlarged schematic view of the area around D in FIG. 3.

上述のような電子線照射装置においては、この図に示す
ように、真空容器6はボルト5によ・ って圧力容器4に固定されている。尚、符号18は直流
導体20の保持、圧力容器4と真空容器6との仕切・り
等のためのスペーサーコーンである。
In the electron beam irradiation apparatus as described above, the vacuum vessel 6 is fixed to the pressure vessel 4 with bolts 5, as shown in this figure. Incidentally, reference numeral 18 is a spacer cone for holding the DC conductor 20, partitioning the pressure vessel 4 and the vacuum vessel 6, and the like.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

真空容器6に取り付けられた照射窓10の窓箔は消耗等
のために交換を要する。所が、上述のように真空容器6
は固定されているため、照射窓10の窓箔の交換は第5
図のB部に示すスペースで行わなければならない、しか
しながら、B部には照射窓10からの電子iEBを受け
るための水冷のビームキャッチャ−13とか、上述した
ローラ15等の種々の機構が設けられているため、その
スペースは非常に狭い。従って、照射窓10の窓箔交換
の作業性は非常に悪い。
The window foil of the irradiation window 10 attached to the vacuum container 6 needs to be replaced due to wear and the like. However, as mentioned above, the vacuum container 6
Since the window foil of the irradiation window 10 is fixed, the window foil of the irradiation window 10 must be replaced at the fifth stage.
This must be carried out in the space shown in part B of the figure. However, in part B, various mechanisms such as a water-cooled beam catcher 13 for receiving the electron iEB from the irradiation window 10 and the roller 15 described above are installed. Therefore, the space is very small. Therefore, the workability of replacing the window foil of the irradiation window 10 is very poor.

それゆえこの発明は、照射窓の窓箔交換の作業性を同上
させることができる電子線照射装置を提供することを目
的とする。
Therefore, an object of the present invention is to provide an electron beam irradiation device that can improve the workability of replacing the window foil of the irradiation window.

〔問題点を解決するための手段〕[Means for solving problems]

この発明の電子線照射装置は、真空容器に回転機構を設
けている。
The electron beam irradiation device of this invention has a rotation mechanism provided in the vacuum container.

〔作用〕 真空容器に回転機構が設けられているため真空容器を回
転させることができ、これによって真空容器に取り付け
られた照射窓を作業性の良い方向に向けることができる
[Function] Since the vacuum container is provided with a rotation mechanism, the vacuum container can be rotated, and thereby the irradiation window attached to the vacuum container can be directed in a direction with good workability.

〔実施例〕〔Example〕

第1図は、この発明に係る電子線照射装置の真空容器の
回転機構回りの一例を示す概略図である。
FIG. 1 is a schematic diagram showing an example of a rotation mechanism of a vacuum container of an electron beam irradiation apparatus according to the present invention.

その他の部分については上述した従来の電子線照射装置
と同様であるので、ここではその説明を省略する。
Since the other parts are the same as those of the conventional electron beam irradiation apparatus described above, the explanation thereof will be omitted here.

真空容器6に、ベアリング22.24等から成る回転機
構が設けられており、これによって真空容器6をその軸
30を中心に回転させることができる。この場合、圧力
容器4内には電気絶縁のためニ1 、 5 K g /
cm”G程度のSF6ガスが封入されているので、0リ
ング26.28によって回転部分をガスシールしている
。また、この例では電子線発生・加速部8及びスペーサ
ーコーン18は回転する真空容器6側に取り付けられて
いて真空容器6の回転と共に回転するので、それらの回
転に支障が無いように直流導体20には例えばフレキシ
ブルな部分(図示省略)を設けている。
The vacuum vessel 6 is provided with a rotation mechanism consisting of bearings 22, 24, etc., by which the vacuum vessel 6 can be rotated about its axis 30. In this case, the inside of the pressure vessel 4 contains 21.5 kg/kg for electrical insulation.
Since SF6 gas of about cm"G is sealed, the rotating parts are gas-sealed by the O-rings 26 and 28. In addition, in this example, the electron beam generation/acceleration section 8 and the spacer cone 18 are connected to the rotating vacuum container. Since the DC conductor 20 is attached to the DC conductor 20 and rotates with the rotation of the vacuum container 6, the DC conductor 20 is provided with, for example, a flexible portion (not shown) so that the rotation thereof is not hindered.

上述のような構造によって、例えば作業者によって真空
容器6を任意の方向に向けることができるため、それに
取り付けられた照射窓10を広いスペースに向けること
ができる0例えば再び第3図及び第5図を参照して、真
空容器6を矢印Fの方向に回転させて、0部のような広
いスペースに照射窓10を向けることもできる。(符号
10′参照)、そうすると照射窓10の窓箔の交換は0
部の広いスペースで行うことができるので、窓箔交換の
作業性は大幅に向上する。
With the structure described above, the vacuum container 6 can be directed in any direction by, for example, an operator, so that the irradiation window 10 attached thereto can be directed into a wide space. Referring to , it is also possible to rotate the vacuum container 6 in the direction of arrow F to direct the irradiation window 10 to a wide space such as 0 part. (See reference numeral 10'), then the window foil of the irradiation window 10 will be replaced at 0.
Since window foil replacement can be done in a large space, the work efficiency of window foil replacement is greatly improved.

第・2図は、この発明に係る電子線照射装置の真空容器
の回転機構回りの他の例を示す概略図である。第1図の
実施例との主な相違点は、電子線発生・加速部8及びス
ペーサーコーン18は、固定した圧力容器4側に取り付
けられていて、真空容器6を回転させてもそれらは回転
しないことである。それゆえ、この例では直流導体20
はねじれないのでそこにフレキシブルな部分を設ける必
要はない。この場合、真空容器6内は高真空(例えば、
10−’〜10−’T o r r程度)に排気される
ため、0リング26.28によって回転部分を真空シー
ルする。
FIG. 2 is a schematic diagram showing another example of the rotation mechanism of the vacuum container of the electron beam irradiation apparatus according to the present invention. The main difference from the embodiment shown in FIG. 1 is that the electron beam generation/acceleration section 8 and the spacer cone 18 are attached to the fixed pressure vessel 4 side, and even when the vacuum vessel 6 is rotated, they do not rotate. Don't do it. Therefore, in this example, the DC conductor 20
Since it does not twist, there is no need to provide a flexible part there. In this case, the inside of the vacuum container 6 is under high vacuum (for example,
10-' to 10-' Torr), the rotating parts are vacuum-sealed with O-rings 26 and 28.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、真空容器に回転機構を
設けているため真空容器を回転させることができ、これ
によって真空容器に取り付けられた照射窓を作業性の良
い方向に向けることができる。その結果、照射窓の窓箔
交換の作業性を向上させることができる。
As described above, according to the present invention, since the vacuum container is provided with a rotation mechanism, the vacuum container can be rotated, and thereby the irradiation window attached to the vacuum container can be oriented in a direction with good workability. . As a result, the workability of replacing the window foil of the irradiation window can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、この発明に係る電子線照射装置の真空容器の
回転機構回りの一例を示す概略図である。 第2図は、この発明に係る電子線照射装置の真空容器の
回転機構回りの他の例を示す概略図である。 第3図は従来の電子線照射装置の平面図であり、第4図
はその正面図であり、第5図は第3図の線V−V方向に
見た図である。第6図は、第3図のD部回りを拡大した
概略図である。 4゛・・・圧力容器、6・・・真空容器、8・・・電子
線発生・加速部、10・・・照射窓、18・・・スペ−
サーコーン、22.24・・・ベアリング、26゜28
・・・ 0リング
FIG. 1 is a schematic diagram showing an example of a rotation mechanism of a vacuum container of an electron beam irradiation apparatus according to the present invention. FIG. 2 is a schematic diagram showing another example of the rotation mechanism of the vacuum container of the electron beam irradiation apparatus according to the present invention. 3 is a plan view of a conventional electron beam irradiation device, FIG. 4 is a front view thereof, and FIG. 5 is a view taken along the line V--V in FIG. 3. FIG. 6 is an enlarged schematic view of the area around D in FIG. 3. 4゛... Pressure vessel, 6... Vacuum vessel, 8... Electron beam generation/acceleration section, 10... Irradiation window, 18... Space
Circone, 22.24...Bearing, 26°28
・・・ 0 ring

Claims (1)

【特許請求の範囲】[Claims] (1)真空容器内に設けられた電子線発生・加速部から
の電子線を、真空容器に取り付けられていて真空側と照
射雰囲気側とを分離する照射窓を通して照射雰囲気側に
照射する電子線照射装置において、当該真空容器に回転
機構を設けたことを特徴とする電子線照射装置。
(1) An electron beam is emitted from an electron beam generation/acceleration unit installed in a vacuum container onto the irradiation atmosphere side through an irradiation window attached to the vacuum container that separates the vacuum side and the irradiation atmosphere side. An electron beam irradiation device characterized in that the vacuum container is provided with a rotation mechanism.
JP3495185A 1985-02-22 1985-02-22 Electron beam irradiator Pending JPS61194400A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3495185A JPS61194400A (en) 1985-02-22 1985-02-22 Electron beam irradiator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3495185A JPS61194400A (en) 1985-02-22 1985-02-22 Electron beam irradiator

Publications (1)

Publication Number Publication Date
JPS61194400A true JPS61194400A (en) 1986-08-28

Family

ID=12428468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3495185A Pending JPS61194400A (en) 1985-02-22 1985-02-22 Electron beam irradiator

Country Status (1)

Country Link
JP (1) JPS61194400A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989009906A1 (en) * 1988-04-07 1989-10-19 Loma Linda University Medical Center Roller-supported, modular, isocentric gantry and method of assembly
JP2005300327A (en) * 2004-04-12 2005-10-27 Iwasaki Electric Co Ltd Electron beam irradiation device
US8093569B2 (en) 2003-08-12 2012-01-10 Loma Linda University Medical Centre Modular patient support system
US9084886B2 (en) 2006-11-21 2015-07-21 Loma Linda University Medical Center Device and method for immobilizing patients for breast radiation therapy

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027159A (en) * 1973-07-13 1975-03-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027159A (en) * 1973-07-13 1975-03-20

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1989009906A1 (en) * 1988-04-07 1989-10-19 Loma Linda University Medical Center Roller-supported, modular, isocentric gantry and method of assembly
US5039057A (en) * 1988-04-07 1991-08-13 Loma Linda University Medical Center Roller-supported, modular, isocentric gentry and method of assembly
US8093569B2 (en) 2003-08-12 2012-01-10 Loma Linda University Medical Centre Modular patient support system
US8418288B2 (en) 2003-08-12 2013-04-16 Loma Linda University Medical Center Modular patient support system
JP2005300327A (en) * 2004-04-12 2005-10-27 Iwasaki Electric Co Ltd Electron beam irradiation device
US9084886B2 (en) 2006-11-21 2015-07-21 Loma Linda University Medical Center Device and method for immobilizing patients for breast radiation therapy

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