JPS61173124A - Pyroelectric type thermal image device - Google Patents
Pyroelectric type thermal image deviceInfo
- Publication number
- JPS61173124A JPS61173124A JP60013689A JP1368985A JPS61173124A JP S61173124 A JPS61173124 A JP S61173124A JP 60013689 A JP60013689 A JP 60013689A JP 1368985 A JP1368985 A JP 1368985A JP S61173124 A JPS61173124 A JP S61173124A
- Authority
- JP
- Japan
- Prior art keywords
- array
- pyroelectric
- measured
- signal
- gain amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009826 distribution Methods 0.000 claims abstract description 13
- 230000035945 sensitivity Effects 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 4
- 238000001931 thermography Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000006870 function Effects 0.000 abstract description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000010409 thin film Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/48—Thermography; Techniques using wholly visual means
- G01J5/485—Temperature profile
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/026—Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/80—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J2005/0077—Imaging
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Radiation Pyrometers (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は焦電型赤外線アレイを用いた熱画像装置に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thermal imaging device using a pyroelectric infrared array.
従来の技術
焦電型赤外線検出器を用いた熱画像装置には、焦電型赤
外線ビジコンあるいは薄膜化された焦電素子アレイが使
用される。上記熱画像装置は、従来のスキャンミラー、
回転プリズム等を用いた光学的走査機構が簡略化され、
室温動作が可能で装置の小型化が期待できるものである
。BACKGROUND OF THE INVENTION A thermal imaging device using a pyroelectric infrared detector uses a pyroelectric infrared vidicon or a thin film pyroelectric element array. The above thermal imaging device uses a conventional scan mirror,
The optical scanning mechanism using a rotating prism etc. has been simplified,
It is possible to operate at room temperature and can be expected to make the device more compact.
焦電型ビジコンは、電子ビーム走査によって信号読出し
を行なうため、高電圧が必要・寿命が短かい等の欠点を
有する。一方、薄膜化された焦電素子アレイを用いた熱
画像装置は、一層の小型化・長寿命化・高空間分解能を
可能とする。しかし、薄膜化された焦電素子アレイは、
素子作製上から微細配列が困難であり、０．１叫程度で
１００素子以上配列することは著しく困難で、開発途上
のものが多く、その構造・製造方法は種々提案されてい
る。Since the pyroelectric vidicon performs signal readout by electron beam scanning, it has disadvantages such as requiring high voltage and short life. On the other hand, thermal imaging devices using thinned pyroelectric element arrays enable further miniaturization, longer lifespan, and higher spatial resolution. However, the thin film pyroelectric element array
Fine arraying is difficult from the viewpoint of device fabrication, and it is extremely difficult to array 100 or more elements at a resolution of about 0.1 mm.Many devices are still under development, and various structures and manufacturing methods have been proposed.
例えば、特開昭５７−１２０８３０号公報によれば、！
２図に示す構造を提案している。For example, according to Japanese Patent Application Laid-Open No. 57-120830,!
The structure shown in Figure 2 is proposed.
支持基板２４の中央部には°、焦電素子感光部２７が宙
吊シになるよう窓２６が打抜かれておシ、焦電材料２１
は、中央の感光部のみ分離されている。出力信号電極２
２は各々素子毎に分離されており、各素子のアース電極
２３は支持基板２４の中央部２ｏの周辺で連結され共通
になっている。A window 26 is punched out in the center of the support substrate 24 so that the pyroelectric element photosensitive section 27 is suspended in the air.
In this case, only the central photosensitive area is separated. Output signal electrode 2
2 are separated for each element, and the ground electrodes 23 of each element are connected around the central portion 2o of the support substrate 24 and are common.
支持板２４には、焦電材料２１の端部が導電性接着剤２
６で接着固定されており、これで感光部２７が宙吊シ状
態に保持されている〇
信号電極２２は、リード線接続部分、微細なリード線と
接続され、信号処理回路（図示せず）に連結される。信
号処理回路の出力信号に基づき、表示装置が被測定物の
熱分布を表示する。The support plate 24 has an end portion of the pyroelectric material 21 coated with a conductive adhesive 2.
6, and the photosensitive part 27 is held in a suspended state. The signal electrode 22 is connected to a lead wire connection part, a fine lead wire, and a signal processing circuit (not shown). connected to. A display device displays the heat distribution of the object to be measured based on the output signal of the signal processing circuit.
発明が解決しようとする問題点
上記構造による焦電アレイは、クロストークの低減と感
度向上を図るため、焦電材料２１を信号電極２２のピッ
チに合わせて切り込み分離する工程が必要である。この
工程にレーザ加工機による方法、化学エツチングによる
方法が提案されている０
しかし、上記切シ込み分離する工程が主因となり、各素
子の感度バラツキが大きい問題があった。Problems to be Solved by the Invention The pyroelectric array having the above structure requires a step of cutting and separating the pyroelectric material 21 in accordance with the pitch of the signal electrodes 22 in order to reduce crosstalk and improve sensitivity. A method using a laser processing machine and a method using chemical etching have been proposed for this step. However, there is a problem in that the sensitivity of each element varies widely, mainly due to the above-mentioned step of cutting and separating.
したがって被測定物の温度分布に対応した画像信号を精
度良く得ることは困難であった。Therefore, it has been difficult to accurately obtain an image signal corresponding to the temperature distribution of the object to be measured.
問題点を解決するための手段
焦電素子アレイと、各素子群の出力信号を増幅するマル
チアンプと、並直列変換するマルチプレクサと、ＡＤ変
換器と、メモリと、熱分布を表示する表示装置とを備え
るとともに、マルチプレクサとＡＤ変換器との間にプロ
グラマブルゲインアンプを設ける。プログラマブルゲイ
ンアンプは、同一温度分布の被測定物を各素子群が検出
した場合、メモリに格納される各素子群のデジタル信号
が同一になるように設定されている０自動感度補正機能
を有するものである。Means for solving the problem: A pyroelectric element array, a multi-amplifier that amplifies the output signal of each element group, a multiplexer that performs parallel-to-serial conversion, an AD converter, a memory, and a display device that displays heat distribution. A programmable gain amplifier is provided between the multiplexer and the AD converter. The programmable gain amplifier has a zero automatic sensitivity correction function that is set so that when each element group detects an object to be measured with the same temperature distribution, the digital signals of each element group stored in the memory are the same. It is.
作 用
最初に同一温度分布の被測定物を焦電素子プレイの各素
子群に検出させて、そのとき種々の値を示す各デジタル
信号を同一値に、かつ被測定物の温度を正しく示す値に
なるように設定したプログラマブルゲインアンプを、マ
ルチプレクサの出力側に設けることによって、焦電素子
アレイの各素子群の感度バラツキ及びマルチアンプのゲ
イン差等回路系のバラツキを皆無にし、被測定物の温度
分布に対応した画像信号を得る熱画像装置を実現できる
。Function: First, each element group of the pyroelectric device detects the object to be measured with the same temperature distribution, and at that time, each digital signal showing various values is set to the same value, and a value that correctly indicates the temperature of the object to be measured is set. By installing a programmable gain amplifier set to A thermal imaging device that obtains image signals corresponding to temperature distribution can be realized.
実施例
第１図は本発明の焦電型熱画像装置の一実施例を示すブ
ロック図である。Embodiment FIG. 1 is a block diagram showing an embodiment of the pyroelectric thermal imaging device of the present invention.
ゲルマニウム等からなる赤外線レンズ１により、被測定
物（図示せず）から放射される赤外線はチョッパ２を通
って焦電素子アレイ３に結像される。Infrared rays emitted from an object to be measured (not shown) pass through a chopper 2 and are imaged onto a pyroelectric element array 3 by an infrared lens 1 made of germanium or the like.
チョッパ２は赤外線を断続する。Chopper 2 intermittents infrared rays.
焦電素子アレイ３は、特開昭５７−１２０８３０号公報
に示されているように、研磨等により薄板化された焦電
素子を用いたもの、あるいは、スパッタ等により薄膜化
して構成したもの等を使用することができる。The pyroelectric element array 3 may be constructed using pyroelectric elements made into a thin plate by polishing or the like, or made into a thin film by sputtering or the like, as shown in Japanese Patent Application Laid-Open No. 57-120830. can be used.
焦電素子アレイ３を構成する各素子群の出力信号は、被
測定物の温度分布に対応しており、マルチアンプ４に入
力され、所定の信号レベルまで増幅される。マルチアン
プ４の各出力信号は、テンプルホールド６でそれぞれの
値に保持された後、マルチプレクサ６で並直列変換され
る。並直列変換された信号は、プログラマブルゲインア
ンプ７を介してＡＤ変換器８でデジタル変換されメモリ
ｅに格納される。The output signal of each element group constituting the pyroelectric element array 3 corresponds to the temperature distribution of the object to be measured, and is input to the multi-amplifier 4 and amplified to a predetermined signal level. Each output signal of the multi-amplifier 4 is held at its respective value by a temple hold 6, and then parallel-serial converted by a multiplexer 6. The parallel-serial converted signal is digitally converted by an AD converter 8 via a programmable gain amplifier 7 and stored in a memory e.
プログラマブルゲインアンプ７はＤＡ変換器を用いたも
ので、焦電素子アレイ３の感度及びマルチアンプ４のゲ
インのバラツキを補正する機能を有する〇
この補正は、同一温度分布の被測定物から放射される赤
外線を、焦電素子アレイ３の各素子群に検出させて、各
素子群の出力信号に対応するメモリ９に格納されたデジ
タル信号を同一値になるように調整することで実行され
る。The programmable gain amplifier 7 uses a DA converter and has the function of correcting variations in the sensitivity of the pyroelectric element array 3 and the gain of the multi-amplifier 4. This correction is performed by adjusting the variation in the sensitivity of the pyroelectric element array 3 and the gain of the multi-amplifier 4. This is carried out by having each element group of the pyroelectric element array 3 detect infrared rays, and adjusting the digital signals stored in the memory 9 corresponding to the output signals of each element group so that they have the same value.
１ｏは、メモリ９に格納されたデータを画像信号として
被測定物の温度分布を表示する表示装置である。1o is a display device that displays the temperature distribution of the object to be measured using the data stored in the memory 9 as an image signal.
１１はＣＰＵでチョッパ２の周期に同期して、各信号処
理系をコントロールする。A CPU 11 controls each signal processing system in synchronization with the cycle of the chopper 2.
なお焦電素子アレイ３が一次元でも、スキャンミラー等
の光学系を用いて二次元の画像を表示することが可能で
ある。Note that even if the pyroelectric element array 3 is one-dimensional, it is possible to display a two-dimensional image using an optical system such as a scan mirror.
また、焦電素子アレイ３に信号処理デバイスを付加し、
その信号が時間順次に出力されるものでも、本発明は有
用であることは言うまでもない。In addition, a signal processing device is added to the pyroelectric element array 3,
It goes without saying that the present invention is useful even if the signal is output in time sequence.
発明の効果
信号処理系回路にプログラマブルゲインアンプを設けて
なる自動感度補正機能を有するので、焦電素子アレイの
各素子群の感度バラツキ、マルチアンプのゲイン差等回
路系のバラツキを著しく低減し、被測定物の温度分布に
対応した正確な画像信号を得る熱画像装置を実現するこ
とができる。Effects of the Invention Since the signal processing system circuit has an automatic sensitivity correction function by providing a programmable gain amplifier, it is possible to significantly reduce sensitivity variations in each element group of a pyroelectric element array, variations in the circuit system such as gain differences of multi-amplifiers, A thermal imaging device that obtains accurate image signals corresponding to the temperature distribution of the object to be measured can be realized.
第１図は本発明焦電型熱画像装置の一実施例を示すブロ
ック図、第２図は熱画像装置に用いる焦電素子アレイの
一例を示し、（、）はその平面図、（ロ）はその断面図
である。
３・・・・・・焦電素子アレイ、４・・・・・・マルチ
アンプ、７・・・・・・プログラマブルゲインアンプ、
８・・・・・・ＡＤ変換器、９・・・・・・メモリ、１
０・・・・・・表示装置。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
第２図
（山）Fig. 1 is a block diagram showing an embodiment of the pyroelectric thermal imaging device of the present invention, Fig. 2 shows an example of a pyroelectric element array used in the thermal imaging device, (,) is a plan view thereof, (b) is a sectional view thereof. 3...Pyroelectric element array, 4...Multi amplifier, 7...Programmable gain amplifier,
8...AD converter, 9...Memory, 1
0...Display device. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 (Mountain)
Claims (1)
れる焦電素子アレイと、前記焦電素子アレイを構成する
各素子群の出力を処理する信号処理部と、前記信号処理
部の出力に基づき被測定物の温度分布を表示する表示装
置とを備え、前記信号処理部は前記焦電素子アレイの各
素子群の信号をデジタル変換してメモリに格納する機能
を有するとともに、前記メモリに格納されたデータにも
とづいて設定されるプログラマブルゲインアンプを備え
、前記プログラマブルゲインアンプにより前記各素子群
の感度補正を行うことを特徴とする焦電型熱画像装置。an infrared optical system, a pyroelectric element array into which the infrared rays that have passed through the infrared optical system are incident, a signal processing unit that processes outputs of each element group constituting the pyroelectric element array, and the signal processing unit a display device that displays the temperature distribution of the object to be measured based on the output of the pyroelectric element array; A pyroelectric thermal imaging device comprising a programmable gain amplifier set based on data stored in a memory, the programmable gain amplifier correcting the sensitivity of each element group.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60013689A JPS61173124A (en) | 1985-01-28 | 1985-01-28 | Pyroelectric type thermal image device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60013689A JPS61173124A (en) | 1985-01-28 | 1985-01-28 | Pyroelectric type thermal image device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61173124A true JPS61173124A (en) | 1986-08-04 |
Family
ID=11840155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60013689A Pending JPS61173124A (en) | 1985-01-28 | 1985-01-28 | Pyroelectric type thermal image device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61173124A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993000576A1 (en) * | 1991-06-24 | 1993-01-07 | Matsushita Electric Industrial Co., Ltd. | Device for sensing thermal image |
| JPH0694536A (en) * | 1992-09-17 | 1994-04-05 | Matsushita Electric Ind Co Ltd | Thermal image detector |
| JPH06194136A (en) * | 1992-09-17 | 1994-07-15 | Matsushita Electric Ind Co Ltd | Thermal image detecting device |
| US5763882A (en) * | 1994-04-12 | 1998-06-09 | Hughes Aircraft Company | Low cost night vision camera |
| US6758595B2 (en) * | 2000-03-13 | 2004-07-06 | Csem Centre Suisse D' Electronique Et De Microtechnique Sa | Imaging pyrometer |
-
1985
- 1985-01-28 JP JP60013689A patent/JPS61173124A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993000576A1 (en) * | 1991-06-24 | 1993-01-07 | Matsushita Electric Industrial Co., Ltd. | Device for sensing thermal image |
| JPH0694536A (en) * | 1992-09-17 | 1994-04-05 | Matsushita Electric Ind Co Ltd | Thermal image detector |
| JPH06194136A (en) * | 1992-09-17 | 1994-07-15 | Matsushita Electric Ind Co Ltd | Thermal image detecting device |
| US5763882A (en) * | 1994-04-12 | 1998-06-09 | Hughes Aircraft Company | Low cost night vision camera |
| US6758595B2 (en) * | 2000-03-13 | 2004-07-06 | Csem Centre Suisse D' Electronique Et De Microtechnique Sa | Imaging pyrometer |
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