JPS61129945A - Remote diagnostic device - Google Patents

Remote diagnostic device

Info

Publication number
JPS61129945A
JPS61129945A JP59251153A JP25115384A JPS61129945A JP S61129945 A JPS61129945 A JP S61129945A JP 59251153 A JP59251153 A JP 59251153A JP 25115384 A JP25115384 A JP 25115384A JP S61129945 A JPS61129945 A JP S61129945A
Authority
JP
Japan
Prior art keywords
host computer
control computer
manufacturing
diagnostic
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59251153A
Other languages
Japanese (ja)
Inventor
Yoshihiro Negoro
根来 義弘
Shigeki Hazamano
硲野 重喜
Makoto Sotozono
外園 誠
Reiichiro Sensui
泉水 礼一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd filed Critical Toshiba Corp
Priority to JP59251153A priority Critical patent/JPS61129945A/en
Publication of JPS61129945A publication Critical patent/JPS61129945A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Test And Diagnosis Of Digital Computers (AREA)
  • Maintenance And Management Of Digital Transmission (AREA)
  • Selective Calling Equipment (AREA)

Abstract

PURPOSE:To minimize turnaround for maintenance or the like of a manufacture/ test equipment by providing the manufacture/test equipment having a control computer and a host computer existing at a remote location and incorporating a diagnostic program. CONSTITUTION:When a fault generating notice relating to the manufacture/test equipment 1 from the user is given to a device manufacturer or a maintenance service agent A, the A uses a display DP22 to give an identification number (i) of an object control comuter CC12 thereby starting a diagnostic program incorporated in a host computer HC21. The diagnostic program gives a diagnostic command to a CC12i of the user side through a path of 24i-30i-13i, the control computer 12i receives it and applies processing as commanded, returns the resulting data in the opposite path, and the HC21 displays the said return data on the DP22 or prints out it on a printer 23. The CC12 executes the diagnostic command by returning the read result of each device status in the equipment 1 and giving the operation command to each device in the equipment 1 through a process input/output device 11.

Description

【発明の詳細な説明】 [発明の技術分野] 本発明は主に工業製品を製造又は試験するための製造/
試験装置において、サーボ機構の制御およびプロセス制
御を制御用コンピュータでおこなう場合の遠隔診断装置
に関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention mainly relates to manufacturing/testing of industrial products.
The present invention relates to a remote diagnostic device for controlling a servo mechanism and a process in a test device using a control computer.

[発明の技術的背景とその問題点] 従来、工業製品の製造/試験装置は例えば半導体製造装
置はユーザー(使用者側)にとってはそこでの製品例え
ば半導体を製造するための単なる道具にすぎず、製造す
るために必要な取扱方法だけ知っていればよい。一方、
前記製造/試験装置の製作者または保守サービス業者に
とっては製造7/試験装置に関することは全てについて
知っていなければならず、同様の製造/試験装置を複数
のユーザーに納入し、またユーザーの装置設置場所も遠
近嫌々というのが通常の形態である。従って、ユーザー
側に設置されている製造/試験装置をユーザー側では回
復処置ができないばかりか診断さえできない異常が発生
した場合には例えばサービスマンがまず異常診断をおこ
なうための器材を携行してユーザーの設置現場へ急行し
、異常発生原因をつきとめて、一度引き返し、回復(修
理)処置のために再び設置現場へ赴くという事態が数多
くみられる。
[Technical background of the invention and its problems] Conventionally, industrial product manufacturing/testing equipment, such as semiconductor manufacturing equipment, has been viewed by users as nothing more than a tool for manufacturing the products therein, such as semiconductors. You only need to know the handling methods necessary for manufacturing. on the other hand,
The manufacturer or maintenance service provider of the manufacturing/testing equipment must know everything about the manufacturing/testing equipment, and must be able to deliver similar manufacturing/testing equipment to multiple users, and to manage the user's equipment installation. The usual form is that the locations are both far and near. Therefore, if an abnormality occurs in the manufacturing/testing equipment installed at the user's side that the user is unable to repair or even diagnose, for example, a service person must first carry the equipment to diagnose the abnormality and bring it to the user's side. There are many situations where a person has to rush to the installation site, find the cause of the abnormality, return once, and then return to the installation site for recovery (repair) measures.

[発明の目的1 本発明は前記したような製造/試験装置の保守すなわち
異常発生時の診断ざらには回復処置を、前記製造/試験
装置の製作者又は保守サービス業者が前記製造/試験装
置の設置現場まで往復することを最小限にできる遠隔診
断装置を提供することを目的とする。
[Objective of the Invention 1] The present invention provides for the maintenance of the manufacturing/testing equipment as described above, that is, the diagnosis and recovery measures when an abnormality occurs, by the manufacturer of the manufacturing/testing equipment or the maintenance service provider of the manufacturing/testing equipment. The purpose of the present invention is to provide a remote diagnostic device that can minimize the number of trips to the installation site.

[発明の概要] 本発明は前記目的を達成するため、工業製品を製造又は
試験するものであって、制御用コンピュータを有する製
造/試験装置と、前記制御用コンピュータに接続した通
信アダプタと、前記製造/試験装置とは離れた遠隔地に
存在し、かつこの診断プログラムを内蔵したホストコン
ピュータと、このホストコンピュータに接続した通信ア
ダプタと、このホストコンピュータの通信アダプタと前
記制御用コンピュータの通信アダプタを接続する通信回
線と、前記制御用コンピュータ上で得られる製造/試験
装置の状態情報を前記ホストコンピュータへ伝送する第
1の手段と、前記ホストコンピュータからの制御動作指
示を前記制御コンピュータへ伝送する第2の手段とから
なるものである。
[Summary of the Invention] In order to achieve the above object, the present invention manufactures or tests an industrial product, and includes a manufacturing/testing device having a control computer, a communication adapter connected to the control computer, and a communication adapter connected to the control computer. A host computer located in a remote location away from the manufacturing/testing equipment and containing this diagnostic program, a communication adapter connected to this host computer, a communication adapter of this host computer, and a communication adapter of the control computer. a first means for transmitting state information of the manufacturing/testing equipment obtained on the control computer to the host computer; and a first means for transmitting control operation instructions from the host computer to the control computer. It consists of two means.

[発明の実施例] 以下、本発明の一実施例について図面を参照して説明す
る。第1図はこの概略構成を示す図である。
[Embodiment of the Invention] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing this schematic configuration.

ここで対象となる製造/試験装置の一例として製品材料
〈被試験品)2から製品(試験製品)3を生産するもの
である。前記製造/試験袋[1はユーザー側にあり、制
御用コンピュータシステム10を備え、これはプロセス
入出力装置11、制御用コンピュータ12からなり、こ
の制御用コンピュータ12には制御用コンピュータ通信
アダプタ13を有している。制御用コンピュータ12が
内蔵プログラムの指令によりプロセス入出力装置11を
介して前記製造/試験装置1内の各機器を駆動およびそ
れらの状態の読込みをおこなう。一方、装置製作者また
は保守サービス業者の事業所に設置されているホストコ
ンピュータシステム20は、診断プログラムを内蔵、し
たホストコンピュータ21と、サービスマンがこのホス
トコンピュータ21と対話するためのディスプレー22
と、診断結果を記録するプリンタ23を備え、しかもホ
ストコンピュータ通信アダプタ24を備えている。そし
て前記通信アダプタ24と前記通信アダプタ13との間
は通信回線30が接続され、これによってホストコンピ
ュータ21と制御用コンピュータ12との間に通信路が
形成されている一0前記ユーザーは複数が各地に散在し
ていることが普通であるため、利用する通信回線の種類
にもよるがホストコンピュータ側の通信アダプタ24お
よび通信回線30は制御用コンピュータ12の通信アダ
プタ13が設置される数だけ必要である。
An example of a manufacturing/testing apparatus that is considered here is one that produces a product (test product) 3 from a product material (product under test) 2. The manufacturing/test bag [1] is located on the user side and includes a control computer system 10, which includes a process input/output device 11 and a control computer 12, and this control computer 12 is equipped with a control computer communication adapter 13. have. A control computer 12 drives each device in the manufacturing/testing apparatus 1 and reads their status via the process input/output device 11 according to instructions from a built-in program. On the other hand, a host computer system 20 installed at an office of a device manufacturer or a maintenance service provider includes a host computer 21 with a built-in diagnostic program and a display 22 for service personnel to interact with the host computer 21.
and a printer 23 for recording diagnostic results, and a host computer communication adapter 24. A communication line 30 is connected between the communication adapter 24 and the communication adapter 13, thereby forming a communication path between the host computer 21 and the control computer 12. Generally, the number of communication adapters 24 and communication lines 30 on the host computer side is equal to the number of communication adapters 13 of the control computer 12 installed, depending on the type of communication line used. be.

なお第1図はユーザー側の制御用コンピュータ・通信ア
ダプタの1セツトについてのみ表現したものである。
Note that FIG. 1 depicts only one set of the user's control computer/communication adapter.

以下、このように構成された遠隔診断装置の作用を第2
図のフローチャートを用いて説明する。
Hereinafter, the operation of the remote diagnostic device configured as described above will be described in a second manner.
This will be explained using the flowchart shown in the figure.

ユーザーからの製造/試験装置1に関する異常発生通報
が装置製作者あるいは保守サービス業者(以下中と略す
)に寄せられた時点で甲はディスプレー22を用いて対
象の制御用コンピュータ12の識別番号iを与えホスト
コンピュータ21に内蔵された診断プログラムを起動す
る。この診断プログラムは与えられたユーザー側の制御
用コンピュータ12iに対して診断指令を24r −3
0i−13iにより送信し、121はこれを受信したな
らば指令通りの動作、をおこない結果のデータを逆経路
で返信し、ホストコンピュータ21は該返信データをデ
ィスプレー22に表示するかまたはプリンタ23に印字
する。前記診断指令はホストコンピュータ21内の診断
プログラムと制御用コンピュータ12内のプログラムの
手順の分担のさぜ方あるいは診断手順とその種類により
その意味す、るところは多岐に及ぶが、何れにしても制
御用コンピュータ12は診断指令にもとづいて製造/試
験装置1内の各機器状態の読込み結果を返送することお
よび製造/試験装置1内の各機器への動作指令をプロセ
ス入出力装置11を通じておこなうことによってこれを
遂行する。
When a user reports an abnormality regarding the manufacturing/testing equipment 1 to the equipment manufacturer or maintenance service provider (hereinafter referred to as "intermediate"), Party A uses the display 22 to display the identification number i of the target control computer 12. The diagnostic program built into the host computer 21 is activated. This diagnostic program issues a diagnostic command 24r-3 to the control computer 12i on the user side.
0i-13i, and when 121 receives this, it performs the operation as instructed and returns the resulting data via the reverse route, and the host computer 21 displays the returned data on the display 22 or sends it to the printer 23. Print. The meaning of the above-mentioned diagnostic command varies depending on the division of procedures between the diagnostic program in the host computer 21 and the program in the control computer 12, the diagnostic procedure, and its type, but in any case, The control computer 12 returns the results of reading the status of each device in the manufacturing/testing device 1 based on the diagnostic command, and issues operational commands to each device in the manufacturing/testing device 1 through the process input/output device 11. This is accomplished by.

以上述べたことから甲はディスプレー22あるいはプリ
ンタ23に出力された結果から製造/試験装置1の状況
を自らの事業所に居ながらにして知ることができ、異常
原因によってはこれを処置することも可能となり、甲が
ユーザーへ装置の異常診断および処置のために往復する
回数は最小限に抑えられる。
As stated above, Party A can know the status of the manufacturing/testing equipment 1 from the results output to the display 22 or the printer 23 while staying at his/her own office, and may be able to take measures depending on the cause of the abnormality. This will minimize the number of times Party A has to travel back and forth to the user to diagnose and treat abnormalities in the device.

なお第1図に示した機器構成図は通信回線を2点間直通
接続方式でおこなう場合を示しているが、交換方式をと
れば物理的な回線数の制約もなく費用も安価にすること
ができる。また第2図に示した診断(処置)フローチャ
ートは甲のサービスマンが診断をスタートさせている例
を示しているが、制御用コンピュータ側で異常発生を検
知したところで自らホストコンピュータへの異常データ
を送信するようにしてもよい。
Note that the equipment configuration diagram shown in Figure 1 shows the case where communication lines are connected using a direct connection method between two points, but if a switching method is used, there is no restriction on the number of physical lines and costs can be reduced. can. In addition, the diagnosis (treatment) flowchart shown in Figure 2 shows an example in which the serviceman of Party A starts the diagnosis, but when the control computer detects the occurrence of an abnormality, he himself sends the abnormal data to the host computer. You may also send it.

[発明の効果コ 以上述べた本発明によれば製造/試験装置の異常発生時
の診断さらには回復処置を、前記製造/試験装置の製作
者又は保守サービス業者が、前記製造/試験装置の設置
現場まで往復することを最小限にでる遠隔診断装置を提
供できる。
[Effects of the Invention] According to the present invention described above, the manufacturer or maintenance service provider of the manufacturing/testing equipment can perform diagnosis and recovery measures when an abnormality occurs in the manufacturing/testing equipment. It is possible to provide a remote diagnostic device that minimizes trips to and from the site.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による遠隔診断装置の一実施例を示す概
略構成図、第2図は本発明の詳細な説明するためのフロ
ーチャートである。 1・・・製造/試験装置、2・・・製品材料、3・・・
製品、10・・・制御用コンピュータシステム、11・
・・プロセス入出力装置、12・・・制御用コンピュー
タ、13・・・制御用コンピュータ通信アダプタ、20
・・・ホストコンピュータシステム、21・・・ホスト
コンピュータ、22・・・ディスプレー、23・・・プ
リンタ、24・・・ホストコンピュータ通信アダプタ、
30・・・通信回線。 出願人代理人 弁理士 鈴江武彦 第1図 第2図
FIG. 1 is a schematic configuration diagram showing an embodiment of a remote diagnostic device according to the present invention, and FIG. 2 is a flowchart for explaining the present invention in detail. 1... Manufacturing/testing equipment, 2... Product materials, 3...
Product, 10... Control computer system, 11.
...Process input/output device, 12...Control computer, 13...Control computer communication adapter, 20
... host computer system, 21 ... host computer, 22 ... display, 23 ... printer, 24 ... host computer communication adapter,
30... Communication line. Applicant's agent Patent attorney Takehiko Suzue Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims]  工業製品を製造又は試験するものであつて、制御用コ
ンピュータを有する製造/試験装置と、前記制御用コン
ピュータに接続した通信アダプタと、前記製造/試験装
置とは離れた遠隔地に存在し、かつこの診断プログラム
を内蔵したホストコンピュータと、このホストコンピュ
ータに接続した通信アダプタと、このホストコンピュー
タの通信アダプタと前記制御用コンピュータの通信アダ
プタを接続する通信回線と、前記制御用コンピュータ上
で得られる製造/試験装置の状態情報を前記ホストコン
ピュータへ伝送する第1の手段と、前記ホストコンピュ
ータからの制御動作指示を前記制御コンピュータへ伝送
する第2の手段とからなる遠隔診断装置。
A device for manufacturing or testing industrial products, where a manufacturing/testing device having a control computer, a communication adapter connected to the control computer, and the manufacturing/testing device are located in a remote location, and A host computer incorporating this diagnostic program, a communication adapter connected to this host computer, a communication line connecting the communication adapter of this host computer and the communication adapter of the control computer, and a product obtained on the control computer. / A remote diagnostic device comprising a first means for transmitting status information of a test device to the host computer, and a second means for transmitting control operation instructions from the host computer to the control computer.
JP59251153A 1984-11-28 1984-11-28 Remote diagnostic device Pending JPS61129945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59251153A JPS61129945A (en) 1984-11-28 1984-11-28 Remote diagnostic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59251153A JPS61129945A (en) 1984-11-28 1984-11-28 Remote diagnostic device

Publications (1)

Publication Number Publication Date
JPS61129945A true JPS61129945A (en) 1986-06-17

Family

ID=17218460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59251153A Pending JPS61129945A (en) 1984-11-28 1984-11-28 Remote diagnostic device

Country Status (1)

Country Link
JP (1) JPS61129945A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5281910A (en) * 1991-07-01 1994-01-25 Mitsubishi Denki Kabushiki Kaisha Test pattern signal generator and inspection method of display device using the same
JP2003177802A (en) * 2001-12-10 2003-06-27 Hitachi Ltd Plant control system
US7225046B2 (en) 2000-07-12 2007-05-29 Hitachi Kokusai Electric, Inc. Semiconductor manufacturing apparatus, remote control system therefor, and remote operation device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5281910A (en) * 1991-07-01 1994-01-25 Mitsubishi Denki Kabushiki Kaisha Test pattern signal generator and inspection method of display device using the same
US7225046B2 (en) 2000-07-12 2007-05-29 Hitachi Kokusai Electric, Inc. Semiconductor manufacturing apparatus, remote control system therefor, and remote operation device
JP2003177802A (en) * 2001-12-10 2003-06-27 Hitachi Ltd Plant control system

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