JPS61124816A - Non-contact type three-dimensional measuring apparatus - Google Patents

Abstract

PURPOSE:To make it possible to automatically measure three-dimensional matter in a non-contact manner, by relatively driving a detection sensor and the matter to be detected so as to allow the distance between the detection sensor and the matter to be detected to be always present in a definite measurement region. CONSTITUTION:In an apparatus for measuring the shape of matter 1 having a three-dimensional free curved surface, a detection sensor 4 for detecting the distance up to the surface of the matter 1 in a non-contact manner is provided, and the matter 1 and the detection sensor 4 are made relatively movable by a drive apparatus 2. As the detection sensor 4, for example, a laser length measuring machine may be used. The shape of the matter 1 is inputted as a three-dimensional coordinates value in a dot line state by a recording medium 8 and processed by an operational processing apparatus 6 to be applied to the drive apparatus 2 as an order value to perform control so as to allow the detection sensor 4 to be always present in a definite measurable region.

Description

Detailed Description of the Invention [Field of Application of the Invention] The present invention relates to a non-contact three-dimensional measuring device, and in particular, a non-contact three-dimensional measuring device suitable for measuring an object having a three-dimensional free-form surface in a non-contact state. This relates to a type three-dimensional measuring device.

[Background of the invention]

A measurement technology that has started to attract attention in recent years involves measuring the shape of objects using a non-mM method using light point detection sensors. Regarding the measurement of object shape in a non-contact manner using this light point detection sensor, there is a document titled "Measurement of object shape by light point detection" by Toru Fukuzawa of Tokyo University of Agriculture and Technology in the magazine 1 "Sensor Technology". It is discussed in

This document introduces the measurement principle, introduces product examples of detection sensors that utilize this principle, and introduces application examples of these sensors.

An example of a measuring device using these sensors will be described with reference to FIG.

FIG. 6 is a diagram showing the principle of measurement of the detection sensor.

1 is the object to be measured, 4' is a detection sensor, and the detection sensor 4' includes a light source 13, a light transmitting lens 14, and a light receiving lens 1.
5 and a detector 16. The light source 13 is, for example, a laser beam.

Let the reference plane of object 1 be 1. Then, the laser beam is transmitted to the reference surface 1. reflected by the light receiving lens 15t
- the laser beam is focused on 168 of the detector 16 on the vertical axis of the lens, and the reflection on the surface 1b is focused on 16bK, and the diffused reflection of the laser beam is focused on the detector 16 surface. The distance between objects 1 is measured.

The measurement range of the detection senna, that is, the measurable area, is, for example, as shown in Figure 6, *±16 m based on the distance between the body 1 and the detection senna 4', and the range where light can be received is limited to 6t. ), therefore, the detection sensor 4
An important problem is how to move the object l around the object l without leaving the measurable area.

However, the above literature does not discuss drive control of the senna.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and the present invention has been made in view of the above-mentioned circumstances. Alternatively, it is possible to drive and control both the detection sensor and the object, and this allows objects with three-dimensional free-form surfaces to be moved in a non-contact state.

The purpose of this invention is to provide a non-contact three-dimensional measuring device that can automatically measure.

[Summary of the invention]

The configuration of the non-contact three-dimensional measuring device according to the present invention includes a measuring means for measuring an object having a three-dimensional free-form surface in a non-contact state and a distance between the object and the measuring means; A drive having a plurality of drive shafts for moving the measuring means, the object, or both the measuring means and the object so that the distance between the object and the object is always within a certain measurable area. an input means for inputting the shape of the object as a three-dimensional coordinate value in the form of a series of points;
A signal converter converts the input into coordinate position command signals for the plurality of drive axes of the drive device, and converts the distance P@ signal measured by the measuring means into distance information in a coordinate system and outputs the signal. and control command means for commanding the coordinate position 1t of each axis so that the driving device 1t and the measuring means always move around the object within a measurable region according to the coordinate position command signal. It is something that

To add more information, the following points are true.

In order to achieve the above object, the present invention provides K, such that the distance between the detection sensor and the object is always within a certain range.
The detection sensor or object, or both the detection sensor and the object, are mounted on a drive device with multiple degrees of freedom, that is, a drive device with multiple drive axes, and the seven drive devices are connected to the detection sensor and the object. The drive is controlled by the control command means so that the object always moves within the measurement range, that is, within the measurable area.

On the other hand, as this control command means, the shape of the object is input in advance as a three-dimensional coordinate value in the form of a point sequence to a NO tape or a 70-tube desk, and this is converted into a coordinate position command signal for each axis. By controlling a drive device equipped with a plurality of drive axes, or by calculating and predicting the coordinate position to proceed to the first stage based on the coordinate values of each axis already measured by the detection sensor itself, The drive device is configured to control a drive device including a plurality of drive shafts.

[Embodiments of the invention]

Embodiments of the present invention will be described below with reference to FIGS. 1 to 5.

FIG. 1 is a configuration diagram of a non-contact three-dimensional measuring device according to an embodiment of the present invention, and FIG. 2 is a configuration diagram of a non-contact three-dimensional measuring device according to another embodiment of the present invention. , Fig. 3 is a block diagram of the measurement and drive control system of these devices, and Fig. 4 and Fig. 5 are diagrams showing experimental results using these devices. are indicated by the same symbol. FIG. 1 shows an example in which the object and the drive IT are installed separately, that is, the 4E body is fixed and only the measuring means is driven, and FIG. 2 shows an example in which the object is installed on the drive device. An example will be shown in which the apparatus is installed, that is, both the object and the measuring means are driven.

Here, the embodiment of the 5$1 figure will be mainly described.

In FIG. 1, l is an object, for example, a three-dimensional free-form pit object such as a blade of a water wheel runner. Reference numeral 2 denotes a drive device having multiple degrees of freedom, and has a plurality of drive shafts for linear movement in the X, Y, and Z axis directions, rotation in the θ axis direction, and elevation and elevation in the ζ axis direction, as indicated by arrows. 3a and 3b are controllers for directly controlling the drive device 2; in the embodiment shown in FIG. ) and the elevation axis (ζ axis) are installed separately, but it is also possible to combine them into one.

Further, reference numeral 4 indicates a detection sensor related to the measuring means, and the detection sensor 4 is a detector having a finite measurable area using a laser beam as shown in FIG.

6.7 and 8 are a control command means for giving a command signal to the drive device 2 so that the top/stool 4 always moves around the object at a constant distance, and a distance signal measured by the detection sensor 4. Convert to distance information in the required coordinate system, and
This figure shows a computer, a desk driver, and a floppy disk, each of which has a built-in signal processing means for output processing.

Next, the measurement procedure will be explained using FIGS. 1 and 43.

First, as a control command means, the shape of the object 1 is input in advance as a three-dimensional coordinate value in the form of a point sequence to the floppy disk 8, which is an input means, and the coordinate position command signal of the drive axis corresponding to the input ta number is input in advance. A case will be explained in which the coordinate position of each axis is commanded by the conversion.

Before starting measurement, the coordinate system is first linked between the drive device 2 and the object 1. Here, the linkage of the coordinate system means to match the coordinate system of the object 1 with the coordinate system of its design values.

This means that the three-dimensional coordinate system (X, Y, Z axes) of the object 1 to be measured now is axes of multiple drive directions (X, Y, Z, θ, ζ axes) on the drive device z side. This is to define where the object is located as the coordinate values of the object 1, and can be done by measuring several points on a certain reference plane of the installed object 1.

This function enables so-called free setting, in which the scoop xfe can be installed and processed at any desired position.

Once the coordinate system linkage is completed in this way.

Next, the three-dimensional point sequence data of the object previously input to the floppy disk 8 is transferred to the disk driver 7 and the interface 9? The data is sent to the computer 6 via the computer 6.

Therefore, using the control command means built into the computer 6, the three-dimensional point sequence data of the object 1 is used as the amount of movement of the plurality of drive axes of the drive device 2, so that the distance between the object 1 and the detection sensor 4 is always a constant value. The command signal is arithmetic converted into the range Z, and the command signal is transmitted to the drive device 2 via the interface 11 and the controllers 3a and 3b.

What should be noted here is that the three-dimensional point sequence data of the object is
These are the three-dimensional coordinate values of the X, Y, and Z axes that define the shape of the object 1. In the control command means, the shape of the object 1" is monitored within the control command means using this data, and the third
As shown in the figure, it is confirmed that there is no interference between the object 1 and the detection sensor 4 due to the action of the interference prevention proximity switch 12 etc. provided in the drive device 2, and the optimum rotation angle (θ axis) at each point is confirmed. It is determined by calculating the angle of elevation and elevation (ζ axis).

In the axle drive device 2, the drive axes (X-axis, Y-axis, Z-axis) are controlled by command signals from the control command means.

The θ-axis and ζ-axis) are moved by the command signal feedback circuit function until the θ-axis and ζ-axis match the command values.

The distance to the object 1 is measured by the detection unit 4, and the measured distance signal is sent to the signal intensifier 5 and the interface l (
The signal is transmitted to a computer 6 having built-in signal processing means.

The signal processing means outputs the measurement result as the coordinate value of the object based on the coordinate signals of the plurality of drive axes of the drive mechanism 2 and the measurement signal from the detection sensor 4, and also outputs the measurement result as the coordinate value of the object. do.

As mentioned above, the distance between the detection sensor 4 and the object l is
The detection sensor 4 moves around the object 1 within a measurable area that is a certain range in the store, and can measure the distance between the object 1 and the object 1.

The inventors conducted an experiment according to the above-described procedure and obtained the results shown in Figure s4.

FIG. 4 shows the experimental results shown in a three-dimensional coordinate system with X, y, and z axes, and is output from the computer 6. The solid line in the figure shows the three-dimensional shape of the object inputted in advance by the floppy desk 8, and the round x mark on the floppy line shows the actual measurement result, and it can be seen that the result is good. .

Next, as a control command means, based on the coordinate values of the plurality of drive axes of the drive device 2 that have been measured by the detection sensor 4 itself,
Next, calculate and predict the coordinate position to which the detection sensor 4 should move,
Therefore, IN5 when determining the coordinate position ftm of each drive shaft! I will clarify.

To start measurement, first, a coordinate system is established between the drive device 2 and the object 1 in the same manner as in the above procedure. next,
With the detection safety t4, 41 points (minimum 2 points) on the measurement surface of the object 1 are manually operated by the drive device 2, or
Only this point is measured automatically by manual operation of the seat mat, and the measured distance signal is transmitted via the TIG amplifier 5 and the interface 10 to the computer 6 having a built-in control command means. Therefore, the control command means calculates and converts the measurement data into coordinate values of the plurality of drive axes of the drive device 2, and based on the measurement data, determines which of the plurality of drive axes of the drive device 2 should proceed to the next one. The point is calculated and predicted by the calculation unit built in the computer 6 so that the detection sensor 4 falls within the measurable area, and is transmitted as a command signal to the drive device 2 via the interface 7/8 11 and the controller 3a and the controller 3b. be done.

, the drive device d2 receives a command 16 from the control command means.
Depending on the issue, multiple Kakeru! jh axis (X axis, Y axis, z axis.

The feedback circuit function in response to the command signal causes movement until the θ-axis and ζ-axis match the command value.

What should be noted here is that the plurality of drive shafts of the drive device 2 move according to the command signals predicted by calculation, and the detection sensor 4
In this case, the detection sensor 4 enters the unmeasurable area and becomes unmeasurable even though the object 1 is measured using the following methods. By repeatedly calculating and searching for the predicted point until it becomes b.

This procedure involves measuring the distance between the object 1 and the detected object t4 using the ejection sensor 4, and calculating and predicting the next point of each drive shaft based on the result, as well as signal processing. is the same as the above method.

In this way, the distance between the detection sensor 4 and the object l is always within a constant measurable area, and the distance between the detection sensor 4 and the object l is always within a constant measurable area.
Around? It is possible to move and measure the entire distance to the object l.

The inventors carried out a practical experiment according to the procedure described above and obtained excellent results as shown in FIG.

FIG. 5 is a two-dimensional X, Y diagram, in which the x marks indicate actual measurement results, which are output by the combiator 6. In this experiment, there was no design data in advance, so the measurements were made using calculation predictions, and this measurement data was used as design data. Can be collected.

According to the above embodiment, not only an object with a known shape, that is, a section with three-dimensional coordinate values, but also an object with an unknown shape and a three-dimensional free curve @J can be handled automatically and without contact. This has the effect of being measurable.

As stated above, only the detection sensor 4 is 7f! as shown in the ig1 diagram. In the embodiment shown in FIG. 2, both the object 1 and the detection sensor 4 are driven.

In FIG. 2, an object 1 is placed on a table with two driving devices and moves in the X-axis direction, and a detection sensor 4 detects the driving device [
t2A, and is driven in a plurality of axial directions including linear movement on the Y-axis and Z-axis, rotation on the θ-axis, and elevational movement on the ζ-axis.

Then, the cutting body 1 and the detection sensor 4 are operated by two driving devices.
In this embodiment, the controllers 3a and 3b for moving are configured as one device.

In the case of this embodiment as well, effects similar to those described in the embodiment shown in FIG. 41 are expected.

Further, although not specifically illustrated and described, it is also possible to expect similar effects by configuring so that only the object is driven multidimensionally and measured.

In addition, in the above-mentioned embodiment, the representative g4h device and detection sensor shown in FIGS. 1 and 2 were explained, but the present invention is not limited to these shapes, drive mechanisms, and structures. This does not preclude the adoption of other devices that are expected to have the same effect.

〔Effect of the invention〕

As described above, according to the present invention, the detection sensor, the object, or the detection sensor is arranged so that the detection sensor, the object, or the detection sensor is always within a certain measurable area where the distance m' between the detection sensor and the object is always determined by the distance m' between the detection sensor and the object. It is possible to provide a non-contact three-dimensional measuring device that can drive and control both the object and the object, thereby automatically measuring an object having a three-dimensional free-form surface in a non-contact state.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram of a non-contact three-dimensional measuring device according to an embodiment of the present invention, and FIG. 2 is a configuration diagram of a non-contact three-dimensional measuring device according to another embodiment of the present invention. Figure 3 is a block diagram of the measurement and drive control system of these devices, Figures 4 and 5 show experimental results using these devices, and Figure 6 is a diagram of the measurement principle of the detection sensor. Ru. l... Cutting body, 2, 2A... Drive device, 3a, 3b.
... Controller, 4... Detection sensor, 6... Computer, Inventor Katsuhiro Oshima 3-1 Saiwaimachi, Hitachi City

Claims (1)

[Scope of Claims] 1. Measuring means for measuring the distance between an object having a three-dimensional free-form surface in a non-contact state and the measuring means;
A plurality of drive shafts for moving the measuring means, the object, or both the measuring means and the object so that the distance between the measuring means and the object is always within a certain measurable area. an input means for inputting the shape of an object as three-dimensional coordinate values in the form of a point sequence; converting the input into coordinate position command signals for a plurality of drive axes of the drive device; a signal processing means having a signal conversion unit for converting a distance signal measured by the measuring means into distance information in a coordinate system and outputting the same; and a measuring means that controls the drive device according to the coordinate position command signal. 1. A non-contact three-dimensional measuring device, comprising control command means for commanding the coordinate position of each axis so that the object always moves around an object within a measurable region. 2. The non-contact three-dimensional measuring device according to claim 1, wherein the measuring means uses a detector that uses laser light and has a finite measurable area. 3. In the device described in claim 1, the signal processing means measures the coordinate position of each of the plurality of drive shafts to which the plurality of drive shafts should proceed next at a certain arbitrary point of time, using the measuring means by that arbitrary point of time. The non-contact type is equipped with an arithmetic unit that can perform calculations and predictions based on the coordinate values of each axis, and is configured so that the coordinate position of each axis is commanded by a control command means according to the calculation predictions. Three-dimensional measuring device.