JPS6088336U - mask holder - Google Patents

mask holder

Info

Publication number
JPS6088336U
JPS6088336U JP1983181080U JP18108083U JPS6088336U JP S6088336 U JPS6088336 U JP S6088336U JP 1983181080 U JP1983181080 U JP 1983181080U JP 18108083 U JP18108083 U JP 18108083U JP S6088336 U JPS6088336 U JP S6088336U
Authority
JP
Japan
Prior art keywords
mask holder
mask
directions
inclined surface
reference surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983181080U
Other languages
Japanese (ja)
Inventor
沼賀　拓興
岩瀬　昭
二宮　正治
Original Assignee
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝機械株式会社 filed Critical 東芝機械株式会社
Priority to JP1983181080U priority Critical patent/JPS6088336U/en
Publication of JPS6088336U publication Critical patent/JPS6088336U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案によるマスクホルダの一実施例を示す一
部破断乎面図、第２図は第１図の■−■線による断面図
である。 １・・・本体、２・・・マスク、３・・・窓、４ａｔ４
ｂ・・・Ｚ方向の基準面、７・・・傾斜面（Ｙ方向の基
準面）、８，１３・・・押付は片、１０．１４・・・バ
ネ、１１・・・傾斜面。FIG. 1 is a partially cutaway view showing an embodiment of a mask holder according to the present invention, and FIG. 2 is a cross-sectional view taken along the line ■--■ in FIG. 1...Body, 2...Mask, 3...Window, 4at4
b... Reference plane in the Z direction, 7... Inclined surface (reference plane in the Y direction), 8, 13... Single pressing, 10.14... Spring, 11... Inclined surface.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] マスクを２方向とＸ、　Ｙ方向の一方または両方に位置
決めクランプするマスクホルダにおいて、Ｘ−Ｙ方向の
少なくとも１方向の基準面とマスクを該基準面へ押付け
る押付は片のマスクに当接する面を傾斜面とし、Ｚ方向
の基準面を前記傾斜面に対向する側に設けたことを特徴
とするマスクホルダ。In a mask holder that positions and clamps a mask in two directions and one or both of the X and Y directions, a reference surface in at least one direction in the is an inclined surface, and a reference surface in the Z direction is provided on a side opposite to the inclined surface.
JP1983181080U 1983-11-24 1983-11-24 mask holder Pending JPS6088336U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983181080U JPS6088336U (en) 1983-11-24 1983-11-24 mask holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983181080U JPS6088336U (en) 1983-11-24 1983-11-24 mask holder

Publications (1)

Publication Number Publication Date
JPS6088336U true JPS6088336U (en) 1985-06-17

Family

ID=30392471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983181080U Pending JPS6088336U (en) 1983-11-24 1983-11-24 mask holder

Country Status (1)

Country Link
JP (1) JPS6088336U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433927A (en) * 1987-07-30 1989-02-03 Canon Kk Mask holder and mask conveying method using the same
JP2004328014A (en) * 2004-08-10 2004-11-18 Nikon Corp Projection lithography system and pattern forming method using same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433927A (en) * 1987-07-30 1989-02-03 Canon Kk Mask holder and mask conveying method using the same
JP2004328014A (en) * 2004-08-10 2004-11-18 Nikon Corp Projection lithography system and pattern forming method using same

Similar Documents

Publication Publication Date Title
JPS6088336U (en) mask holder
JPS589833U (en) collector wire
JPS58153074U (en) clip
JPS59181518U (en) electromagnetic relay
JPS6034290U (en) Screen edge gripper
JPS6139358U (en) vice
JPS6084032U (en) contact device
JPS608997U (en) belt caster
JPS6038779U (en) clip
JPS5919606U (en) sheet material
JPS6088545U (en) Holder for masks etc.
JPS60116266U (en) substrate
JPS58171702U (en) wheelbarrow tire
JPS5853377U (en) connector
JPS6026897U (en) Drawing ruler for learning shapes
JPS5947603U (en) pants
JPS58155305U (en) diaper aids
JPS6087769U (en) car body
JPS60122345U (en) adhesive tape
JPS60187114U (en) belt conveyor
JPS6067828U (en) Workpiece holder
JPS58106246U (en) protection plate
JPS585470U (en) battledore bolt
JPS60136343U (en) Adhesive tape for joints
JPS6031297U (en) pipe