JPS6039855A - Liquid-cooled module - Google Patents

Liquid-cooled module

Info

Publication number
JPS6039855A
JPS6039855A JP14777783A JP14777783A JPS6039855A JP S6039855 A JPS6039855 A JP S6039855A JP 14777783 A JP14777783 A JP 14777783A JP 14777783 A JP14777783 A JP 14777783A JP S6039855 A JPS6039855 A JP S6039855A
Authority
JP
Japan
Prior art keywords
cooling
refrigerant
substrates
cooling plate
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14777783A
Other languages
Japanese (ja)
Other versions
JPH0342511B2 (en
Inventor
Kishio Yokouchi
貴志男 横内
Koichi Niwa
丹羽 紘一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14777783A priority Critical patent/JPS6039855A/en
Publication of JPS6039855A publication Critical patent/JPS6039855A/en
Publication of JPH0342511B2 publication Critical patent/JPH0342511B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • H01L23/427Cooling by change of state, e.g. use of heat pipes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To obtain a liquid-cooled module having an excellent cooling function by vertically dipping and receiving wiring substrates constituting the module in a sealed vessel into which a refrigerant liquid is contained while a cooling plate is positioned between the wiring substrates and forcibly cooling the wiring substrates by cooling the cooling plate. CONSTITUTION:Connector terminals 8 having airtight structure are fitted to the bottom of a sealed vessel 7, and male contacts for substrates 9 are inserted and mounted. Cooling plates 10, the outsides thereof have a porous metal and the insides thereof have hoses, are arranged amoung substrates 9 vertically disposed in parallel, and a refrigerant is circulated from an upper section. The refrigerant 11 is entered in a shape that the substrates 9 are dipped completely. The cooling plate 10 is manufactured by covering the outside of the hose 12 with the porous tabular expanded metal, and bubbles generated by boiling and the refrigerant freely pass through the cooling plate through foamy void sections 13. Since the speed of passage of bubbles slows down, a large cooling effect is generated when water is passed through the hoses 12 to cool the title module.

Description

【発明の詳細な説明】 (a) 発明の技術分野 本発明は高密度5A装したプリント配線モジュールの強
制冷却構造に関する。
DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a forced cooling structure for a printed wiring module loaded with high density 5A.

(b) 技術の背景 半導体IC,LSIは年と共に高密度化が進んでお9、
単位素子中の構JJZビット数は年と共に楕加している
。またこれらIC,LSIのプリント配線基板への実装
賃度も増加し従って10層を1′i、丁多屑配線楢造が
とられている。
(b) Technical background Semiconductor ICs and LSIs have become denser over the years9.
The number of structural JJZ bits in a unit element increases with age. In addition, the cost of mounting these ICs and LSIs on printed wiring boards has increased, and accordingly, 10 layers are now 1'i, and the wiring structure is made up of just a few scraps.

こ\でプリント配線基板上に(グ土d[:のIC1LS
Iなどの半導体素子以外にモジュール抵抗iど発熱素子
が数多く設けられているのでプリント配線基板(以下略
して基板)は使用中に〃・ケりの温度上邊−1を伴う。
This is the IC1LS on the printed wiring board.
Since a large number of heating elements such as module resistors and the like are provided in addition to the semiconductor elements such as I, the printed wiring board (hereinafter referred to as the board for short) experiences a temperature increase of -1 during use.

そこでこの対策として基板4ポリイミド樹脂のような耐
熱性有機絶縁材料で形成するか或はアルミナなどの磁器
で形成して基板の111j熱性?高めている。−万基板
上への装汚部品は一般に最晶伊用温度として85(℃、
]の1iiiがとられているので、部品の信頼性と寿命
全保持するた・りにはこの規定温度以内に保つことが必
要でそのため冷却が必要となる0本発明は高密度実装基
板の冷却機構に関するものである0 従来の冷却法は、IC,LSIなどの手尋体部品につい
て(゛よパッケージ上に放熱フィンを設けこれに扇J虱
礪(以後ファン)?用いて空冷・するのが一般的である
。−jなゎち架台に部品の実装高をこ見合った間隔金と
って配夕1」シている多数のコネクタに部品装眉が終り
上基板の雄コンタクト部を挿入することにより全部の基
板を装庸し、架台のF部に設りられたンアンを用いて送
風することによ)並列に並んでいる基板の間全通って風
が通り強制空冷が行われている。然し乍ら部品の実装色
度特にIC’、LSI(1)実装・合度が嘴大しまたI
C,LSI自、体の構成ビット数が増かfると強制通風
によっては部品の温度を最高使用温度以内に保持丁6c
とは不可能と7よシ、別の方法を必要とjるよりシこな
りた。
Therefore, as a countermeasure to this problem, the substrate 4 should be made of a heat-resistant organic insulating material such as polyimide resin, or made of porcelain such as alumina to reduce the heat resistance of the substrate 4. It's increasing. - Generally, the maximum crystallization temperature for contaminated parts on 10,000 substrates is 85 (℃,
] 1iii is taken, so in order to maintain the reliability and lifetime of the parts, it is necessary to maintain the temperature within this specified temperature, and therefore cooling is required. 0 The conventional cooling method is to provide air cooling for handheld components such as ICs and LSIs (by providing heat dissipation fins on the package and using a fan (hereinafter referred to as fan)). It is common to insert the male contact part of the upper board after mounting the components into a large number of connectors that are mounted on the mount with a spacing commensurate with the mounting height of the components. By loading all the boards and blowing air using the fan provided at the F section of the mount, forced air cooling is performed by allowing air to pass through all the boards lined up in parallel. However, the mounting chromaticity of components, especially IC', LSI (1), is large and the degree of mounting is large.
C.As the number of bits constituting the LSI increases, forced ventilation will maintain the temperature of the parts within the maximum operating temperature.
I thought it was impossible and needed another method.

本発明に係る液冷モジュールは力)\る必要性から生じ
tものである。
The liquid cooling module according to the present invention arises from the need for power.

第1図は従来の液冷モジュールの構造でLSI、抵抗な
どの発熱素子!?装沼した基板24市封容器3の底部に
置き容器3の上部にはフィン4を備えた冷却板5があ勺
、この中に冷媒6が入れである。こ\で発熱素子1が通
電に、よ勺発7i’fi l、・C牛じた気泡或は冷I
JJ、6の温度上井によ#1液Julから発生した冷媒
の蒸気は冷却板5で冷却されて液化し、滴下すると云う
サイクル全繰返すことにより発熱素子1全含む基板2の
冷却が行われてぃ75゜然し乍ら容器30内部を冷媒6
のガスだりで充すことは困難であり、窒気などが混在し
と・<、この場合は冷却NF’力が著しく低下する歌点
かあり、優れた冷却構造であるとは云えなが一ノた。
Figure 1 shows the structure of a conventional liquid cooling module, with heat generating elements such as LSI and resistors! ? The swamped substrate 24 is placed at the bottom of a sealed container 3, and a cooling plate 5 with fins 4 is placed on the top of the container 3, into which a refrigerant 6 is placed. Now that the heating element 1 is energized, there will be no bubbles or cold air.
At the temperature of JJ, 6, the refrigerant vapor generated from the #1 liquid Jul is cooled by the cooling plate 5, liquefied, and dripped. By repeating the entire cycle, the substrate 2 including all the heating elements 1 is cooled. However, the inside of the container 30 is filled with refrigerant 6.
It is difficult to fill it with a gas tank, and if nitrogen etc. are mixed in, there is a point where the cooling NF' power decreases significantly, and it cannot be said that it is an excellent cooling structure. Nota.

(dJ 発明の目的 本発明の目的は冷却機能のぼれた液冷モジュールの構造
全提供するにある。
(dJ Object of the Invention The object of the present invention is to provide an entire structure of a liquid cooling module with improved cooling function.

(e) 発明の構成 本発明の目的は冷媒液金入れた密封容器の中にモジュー
ル全構成する配線基板を垂直にして浸漬して格納すると
共に、この配線基板の相互間に冷却板をおき、この冷却
板全冷却することにより配線基板全強制冷却する構造を
とることにより達成することができるり (f) R”JJ v実hlJx WIJ不発明は複数
個の基板を&にして冷媒液中に配列すると共にこの基板
の間に冷却板を介在させて冷却金行うものである。
(e) Structure of the Invention The object of the present invention is to store the wiring boards that make up the entire module vertically and immerse them in a sealed container containing liquid refrigerant, and to place a cooling plate between the wiring boards. This can be achieved by using a structure in which the entire wiring board is forcibly cooled by completely cooling the cooling plate. The cooling is performed by interposing a cooling plate between the substrates.

第2図は本発明の実施例でL&i封答器7の底部には気
密構造のコネクタ端子8が設けられておシ、=3板9の
オスコンタクトが挿着されべ)よう構成されている。次
に縦に平行に配列し”Cいる基板9の間には多孔金iを
外側に持ち内部に配管を備えたff1t fJI板10
が配列しておシ、上部より/Ti媒(この実施例の場合
は水)が供給され循還している。
FIG. 2 shows an embodiment of the present invention, in which a connector terminal 8 having an airtight structure is provided at the bottom of an L&I sealing device 7, and a male contact of a three-plate plate 9 is inserted into the connector terminal 8. . Next, between the substrates 9 arranged vertically and in parallel, there is a ff1t fJI board 10 with porous gold on the outside and piping inside.
are arranged, and a Ti medium (water in this example) is supplied from the top and circulated.

−jlこ基板9を完全に浸漬する形で冷媒11が入れて
あ6つ こ\で冷媒としては化学的に安定であって腐食作用全件
わずまた沸点が室昌から+35(’C)以内の液体音用
いることが必要でめ9、この条件奮満すものとしてはC
mF*m+2(但し■1は正数)の分子式で表わされる
フルオロカーd?ンがある。例えばCqFltの沸点は
30(C)であシ、eflII’+t1”! 56(C
〕であシ、かつ腐食性はない。また冷却板10は第3図
に断面侑造を示すように銅(CuJ哀のに晋12の外側
t−極めて多孔質な板状V)発泡金属で覆ったもので泡
状の窒i1+!it[113を通っ゛C訃艙によって生
じた気泡および冷媒は自由に通過する仁とができ、気泡
の通過速度は、ゆるやかになるので蛇管12に水を通じ
て?11tれば通電の蛇管だけに較べて遥かに大きな冷
却効果を生ずることができる。
-JlThe refrigerant 11 is put into the refrigerant 11 in such a way that the substrate 9 is completely immersed.As a refrigerant, it is chemically stable, has no corrosive effects, and has a boiling point within +35 ('C) from Muro. It is necessary to use the liquid sound of Me9, and to satisfy this condition, C
A fluorocarbon d? expressed by the molecular formula mF*m+2 (where 1 is a positive number) There is a For example, the boiling point of CqFlt is 30 (C), eflII'+t1"! 56 (C
] Ash and non-corrosive. In addition, the cooling plate 10 is covered with a foam metal made of copper (extremely porous plate-like V) made of copper, as shown in the cross-section of FIG. 3. The air bubbles and refrigerant generated by the oven pass through it [113].The air bubbles and refrigerant pass through freely, and the passing speed of the air bubbles becomes slow, so water is passed through the flexible pipe 12. With 11 tons, it is possible to produce a much greater cooling effect than with only an energized coiled pipe.

さて基板9の土に股り°られでぃゐLSI や抵抗モジ
エールなどの発熱素子IQよ迎−の庁の鉱区上昇によ’
) Iy+> g 11の沸点以上のぬi+こなるので
発熱素子lがυし1落OKとなって気泡の発生が起る。
Now, as the mining area of the agency rises, heat-generating elements IQ such as Redy LSI and resistor module will be added to the soil of board 9.
) Iy+> g Since the i+ is higher than the boiling point of 11, the heating element l is υ and 1 drop is OK, causing the generation of bubbles.

こ\で発りs集子lは醍に並んだ基板9の上に密に装着
されているので下方の発熱素子りで発生した気泡が、上
方におる発熱素子1をしいf′ン媒とのJ妾触全遮断し
易く、この場6rよ冷却効果音)fi、<<してしまシ
0それ故に発生した気riは速かに冷却して戻すことが
必要で液面に1で上昇しないよう工夫する必要がある0
本光ツJに係る冷却板10はこの対策の1つで冷却板l
Oと発熱素子1との間隔を狭めて配置することが必要で
套る。更Fc有効な方法は第4図に示すように基板9の
上に配列している9a熱x子1の間にガス誘導板14’
に基板9に直角に且つ容器の底面に平行に設け、下刃の
発熱系子lから発生した気泡15が上方の発熱系子1に
当らないよう工夫されてい、S)。
Since the collectors 1 are closely mounted on the substrates 9 arranged in a row, the air bubbles generated in the heat generating elements 1 at the lower side cause the heat generating elements 1 at the upper side to become an ion medium. It is easy to completely cut off the J concubine's touch, and at this point 6r cooling effect sound) fi, It is necessary to devise ways to avoid this.0
The cooling plate 10 according to Honkotsu J is one of these measures.
It is necessary to narrow the distance between O and the heating element 1. A further Fc effective method is to install a gas guide plate 14' between the thermal xing elements 9a arranged on the substrate 9 as shown in FIG.
It is provided perpendicularly to the substrate 9 and parallel to the bottom surface of the container, so that air bubbles 15 generated from the heat generating element 1 of the lower blade do not hit the heat generating element 1 above.S).

′if7′c′A范15は冷却砲10’に触れ急進に液
化することが望ましくそのためにはガス肋尋板14は冷
却&lOに殆んど接触する嶺度に′よで近づけることが
必要でφる0仄に冷′i4仮10への冷却r工法2図の
2r−実施例の楊曾、循刊容器7の上部に設けた送入管
17と送入管との間全冷却板lOの中の蛇管12が結ぶ
構造をとシ冷縄として水を用いているが、これよシも低
温冷却が可114なフレオン等の冷媒?用いれば更に冷
却温度を下げることができる。このように基板全垂直に
配列すると共にこの間に冷却板?置き浸漬液冷する構造
金とることにより効果的な冷却が可能となる。
'if7'c'A range 15 is preferably brought into contact with the cooling cannon 10' and liquefied rapidly, and for this purpose the gas interlayer plate 14 must be brought close to the point where it almost touches the cooling &lO. φru0 to cool'i4 Temporary 10 Cooling method 2 Figure 2r - Yang Tseng of the embodiment, the entire cooling plate lO between the inlet pipe 17 provided at the top of the circulation container 7 and the inlet pipe Water is used as a cooling rope to connect the connecting pipes 12 inside, but is there a refrigerant such as Freon that can also cool at low temperatures? If used, the cooling temperature can be further lowered. In this way, all the boards are arranged vertically and a cooling plate is placed between them? Effective cooling is possible by using a structure that cools the liquid by immersing it in water.

(−発明の効果 本発明はプリント配線基板への高密度実装によp従来の
空冷構造では規矩された最高使用温度以下に部品温度葡
保つことが困難なことからなされ友もので本発明の実施
により、規矩温度以内に保持することが可能となる。
(-Effects of the Invention The present invention was made because it is difficult to maintain component temperatures below the specified maximum operating temperature with conventional air cooling structures by high-density mounting on printed wiring boards. This makes it possible to maintain the temperature within the standard range.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の液冷モジエールの断面構成図、第2図μ
不発明に係る液冷モジュールの断面構成図、第3図は?
’?却板の部分断面図ま7を第4図(tエガス訪導板金
備えた実施例の部分断面図である。 図において1は発熱素子、2.9はプリント配線基板、
3,7は′Iff列容器、6.11は冷媒、10は冷却
板、12は蛇管、13は仝隙部、14はガス縛導板。
Figure 1 is a cross-sectional diagram of a conventional liquid-cooled module, Figure 2 is μ
What is the cross-sectional configuration diagram of the liquid cooling module according to the invention, FIG. 3?
'? FIG. 4 is a partial cross-sectional view of an embodiment equipped with a gas-conducting sheet metal. In the figure, 1 is a heating element, 2.9 is a printed wiring board,
3 and 7 are 'If column containers, 6.11 is a refrigerant, 10 is a cooling plate, 12 is a serpentine pipe, 13 is a gap, and 14 is a gas binding guide plate.

Claims (2)

【特許請求の範囲】[Claims] (1)複数のプリント配線4板が倣少間隔會距て\対向
して配列【7該配線基板上に多数個の?A熱部品を配置
してなるプリント配線基板実装モジュールの強制冷却法
として該モジュール針冷媒液金入れた密封容器内に配線
基板を画直にして浸漬して格納すると共に該配線基板の
相互間に冷却板付置き、該冷却板金冷却して強制冷却す
るia’iとることfc特徴とする液冷モジュール。
(1) A plurality of four printed wiring boards are arranged facing each other with a small distance between each other. A: As a forced cooling method for a printed wiring board mounted module in which thermal components are arranged, the wiring board is immersed and stored in a sealed container containing refrigerant liquid gold, and the wiring boards are placed between each other. A liquid cooling module characterized in that it is equipped with a cooling plate and that the cooling plate is cooled to perform forced cooling.
(2)冷媒液を入れ′fC雷封容器の中に冷却板を挾ん
で対向するプリント配線基板が該基板上に容器の底面に
平行して突出し冷却板に達′ノーるガス評導板全備えて
なることを特徴とする特許請求の範囲第1項記載の液冷
モジュール。
(2) Fill the refrigerant liquid in a sealed container with a cooling plate in between, and the opposing printed wiring board will protrude parallel to the bottom of the container and reach the cooling plate. 2. A liquid cooling module according to claim 1, comprising: a liquid cooling module;
JP14777783A 1983-08-12 1983-08-12 Liquid-cooled module Granted JPS6039855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14777783A JPS6039855A (en) 1983-08-12 1983-08-12 Liquid-cooled module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14777783A JPS6039855A (en) 1983-08-12 1983-08-12 Liquid-cooled module

Publications (2)

Publication Number Publication Date
JPS6039855A true JPS6039855A (en) 1985-03-01
JPH0342511B2 JPH0342511B2 (en) 1991-06-27

Family

ID=15437945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14777783A Granted JPS6039855A (en) 1983-08-12 1983-08-12 Liquid-cooled module

Country Status (1)

Country Link
JP (1) JPS6039855A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006925A (en) * 1989-11-22 1991-04-09 International Business Machines Corporation Three dimensional microelectric packaging
JPH06169039A (en) * 1992-12-01 1994-06-14 Kofu Nippon Denki Kk Submerged dc-dc converter cooler
JP2018018857A (en) * 2016-07-25 2018-02-01 富士通株式会社 Immersion cooler, immersion cooling system, and control method of immersion cooler
CN117840459A (en) * 2024-03-06 2024-04-09 东北大学 Laser directional energy deposition system with cooling system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5006925A (en) * 1989-11-22 1991-04-09 International Business Machines Corporation Three dimensional microelectric packaging
JPH06169039A (en) * 1992-12-01 1994-06-14 Kofu Nippon Denki Kk Submerged dc-dc converter cooler
JP2018018857A (en) * 2016-07-25 2018-02-01 富士通株式会社 Immersion cooler, immersion cooling system, and control method of immersion cooler
CN117840459A (en) * 2024-03-06 2024-04-09 东北大学 Laser directional energy deposition system with cooling system

Also Published As

Publication number Publication date
JPH0342511B2 (en) 1991-06-27

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