JPS6034279Y2 - Dust-free room equipment - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a sterile room device consisting of a preliminary chamber that is purified using the air exhausted from a highly clean clean room (main working chamber).

FIG. 1 shows an air system diagram of a conventional clean room 1 having a preliminary chamber 2. As shown in FIG.

Clean air blown out from a filter unit 3 consisting of a fan and a high-performance filter installed on the ceiling of the clean room descends inside the clean room 1, and maintains the indoor pressure at a positive pressure and the cleanliness at about class 100 to class 10,000.

The air exhausted from this clean room 1 is transferred to the preliminary room 2.
This is the first air outlet provided at the bottom of the side clean room wall.

The air is sent to the preliminary chamber 2 through the exhaust port 4, and the preliminary chamber 2 is maintained at a relatively low cleanliness level of about 100,000.

The spare room is used as a changing room or work preparation room.

Furthermore, the air pushed into the preliminary room 2 is transferred to the building wall 6 of the preliminary chamber 2.
The air is exhausted through an exhaust port 5, which is a second air exhaust port provided in the probe section.

Here, the exhaust port of clean room 1 and preliminary room 2 is 4゜5.
Generally, louvers, punching, tampering, etc. are used.

In this method, in the preliminary chamber 2, the airflow only flows in the lower part of the chamber, and the air in the upper part of the chamber remains stagnant, and its cleanliness is inferior to that in the lower part.In the end, the objects in the upper part are hardly purified and become clean. The level becomes extremely low.

In addition, since the exhaust port 5 is provided at the lower part of the wall facing the building wall 6 of the auxiliary room 2, the air is discharged from the exhaust port 5 between the wall surface having the exhaust port 5 of the auxiliary room 2 and the building wall 6. A space (duct space) is required to allow air to flow back to the filter unit 3, which poses a problem in that the floor space within the building cannot be used effectively.

The present invention provides a dust-free chamber device that eliminates these conventional drawbacks.

That is, in the present invention, the first air exhaust port of the main work chamber is provided below the wall surface facing the preliminary chamber, and the second air exhaust port is provided in the ceiling section of the preliminary chamber in a direction approximately diagonal to the first air discharge port. It is equipped with an exit.

Embodiments of the present invention will be described below with reference to FIGS. 2 and 3.

In FIG. 2, the air intake port 4' of the preliminary chamber 2 is directly connected to the air discharge port 4 of the clean room 1, and is provided in the lower part of the chamber, and the air discharge port 5 is provided in the ceiling surface thereof.

If the air intake port 4' is located at the lower corner of the preliminary chamber 2, its air outlet 5 is provided at the diagonally upper corner.

With this configuration, the air flowing in from the air intake port 4' becomes a low-velocity air flow inside the preliminary chamber 2, rises and spreads over almost the entire area. The air is collected through the air outlet 5 and discharged to the outside.

Therefore, the entire interior of the preliminary chamber 2 is uniformly purified.

Furthermore, since the air outlet 5 is provided on the ceiling of the auxiliary room 2, the auxiliary room 2 can be installed in close contact with the building wall, and as shown in FIGS. 2 and 3, It is also possible to form a clean room by applying dustproof treatment to the walls of the building and using them as the walls of the preliminary room 2.

FIG. 3 shows an example in which an exhaust damper 7 is provided at the air outlet 5 of the preliminary chamber 2.

This damper 7 is configured to be opened by the exhaust pressure of the preparatory chamber 2, and closed when the operation of the filter unit 3 is stopped and there is no airflow in the chamber 2.

Therefore, when the airflow stops, it is possible to prevent the dust in the ceiling of the auxiliary room 2 from falling into the room from the exhaust port 5.

As explained above, according to the present invention, the clean air supplied from the main work chamber is diffused and flows into the preliminary chamber, so that the preliminary chamber can be uniformly purified and the cleanliness of the preliminary chamber can be increased. Since the second exhaust port is provided in the ceiling of the auxiliary room, a duct space is not required, and it is possible to obtain a dust-free room device that can effectively utilize the floor space within the building.

[Brief explanation of the drawing]

FIG. 1 is a cutaway front view of a conventional dust-free chamber apparatus, FIG. 2 is a cutaway front view of an embodiment of the present invention, and FIG. 3 is a cutaway front view of another embodiment. 1: Main work room, 2: Preliminary room, 3: Filter unit,
4: First air outlet, 5: Second air outlet, 7: Damper for preventing dust from falling.

Claims (1)

[Scope of Claim for Utility Model Registration] 1. A main working room whose interior should be kept at a high level of cleanliness, and an auxiliary room that is provided adjacent to the main working room and whose cleanliness level is lower than that of the main working room. In the dust-free room apparatus, the main working chamber is supplied with clean air from a filter unit mounted on the ceiling, and a first air exhaust communicating with the preliminary chamber is provided at the lower part of the wall facing the preliminary chamber. A dust-free room apparatus characterized in that the preparatory chamber has a second air outlet in a ceiling section substantially diagonally opposite to the first air outlet. 2. The dust-free room apparatus according to claim 1, wherein the second air outlet is provided with a damper that opens by wind pressure to prevent dust from falling.