JPS60227078A - Flow control valve - Google Patents

Abstract

PURPOSE:To control the flow precisely under high speed by applying the bias voltage and the control voltage simultaneously onto all Piezo elements and choking the opening of valve seat with valve body when the control voltage is zero. CONSTITUTION:A drive unit 22 is made by laminating a plurality of Piezo elements 23 through thin electrode plates 24 of same shape in the direction of thickness. Control signal from a control signal source is applied thrugh an amplifier onto the Piezo element group 23 in parallel. Upon application of bias voltage onto all Piezo elements 23 in parallel, the valve body 3 will choke the opening of valve seat 9. Upon variation of the voltage to be applied onto the Piezo elements through variation of control voltage, that voltage will never exceed over the bias voltage thus to vary the extension of the drive unit 22 linearly in the decreasing direction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a flow control valve, and particularly relates to a flow control valve for controlling a flow of a fluid such as air.
The amount can be controlled at high speed and precisely on the Vc side.

Furthermore, the present invention relates to a flow control valve that has a simple structure and high reliability.

Examples of devices that require high-speed and precise control of the fluid flow rate include ink-jet enlargement printing devices (Japanese Patent Publication No. 42-6533, Japanese Patent Publication No. 47-2
There is an ink spray gun (No. 1326). The above-mentioned enlarging printing device optically scans the manuscript in two dimensions, such as a photographic electrotransmission device or a scanner for printing plate making, and detects the strength and weakness of the superior image signal (a signal that indicates the density of the image) from time to time. The ink jetting machine prints a skin image on a recording medium such as paper that moves in synchronization with the scanning of the calligraphic original.

[Conventional technology]

The ink spray gun is an output device of this enlarged printing apparatus, and is constructed as shown in FIG. 1, for example. ``4'', the first white S and the symbol l indicate the entire airflow flow tN control valve (hereinafter referred to as 1tll in the car, control valve), and this 1111 valve 1 is a disc-shaped The valve body 3 has a vertically installed valve body 3 in the center of the spring 42. The valve body 3 is integrally attached to the spring plate 2, and has a moving coil 4 and a moving coil 4 supplied with a current according to the image signal. , the valve body 3 is driven in its axial direction by interaction with the annular magnetic field formed between the first and second magnetic poles 5 and 6, and the valve chamber is supplied from a pressurized air source (not shown) via the air supply pipe 7. The pressure Wi nitrogen introduced into the chamber 8 is passed through the air supply pipe 11 from the curved annular gap between the tip of the valve body 3 and the valve seat 9, whose opening degree changes according to the strength of the image signal. The ink is then operated to feed the ink to the ink jet nozzle 12. This ink ejection nozzle 12 has an ink nozzle 14 coaxially and nestedly arranged in a cylindrical air nozzle 13 (IIll), and sucks ink from the ink nozzle 14 according to Bernoulli's principle, and generates an air flow. It is called an ink mist, and its operating principle is publicly available, so I will omit the detailed explanation of 1FF.Huh?
In Fig. 41, the reference numeral 15 indicates a permanent magnet for generating a play field, and the reference numeral 16 indicates a needle valve for adjusting the ink flow.

Of course, the control valve 1 having the above-mentioned configuration is fully capable of achieving the desired 8! Although it has been effective for many years,
Since the electromagnetic force acting on the moving coil 4 is relatively small, it is not possible to increase the spring constant of the spring plate 2. Therefore, the valve body 3, the moving coil 4, the bobbin 17 around which it is wound, etc., have an inertial property. Since it is not possible to increase the natural frequency of the photographing thread used as a violet, there is a problem that the response frequency as a sapphire is also limited to the number of islands ffh (hertz) K. Even if the moving coils 4 are stacked in multiple layers to increase the ringing force, the effect of improving responsiveness is small because the inertia increases accordingly.

+ttll@I valve response frequency is small,
This means that the ink mist cutting interval in the ink jet nozzle 12 cannot be shortened, and the resolution and sharpness of the resulting image are reduced.

Furthermore, when moving the valve body 3 from one axial position to the other, a so-called overshoot will occur unless effective damping is provided. In other words, due to the inertia of the vibration system, the valve body 3 approaches the target position too much, causing the city control valve to open or close too much. With the addition of the bounce caused by the collision, a complex vibration dust phenomenon is generated. Of course, currently effective control valves reduce the output impedance of the amplifier that supplies current to the moving coil, apply electromagnetic braking using the electromotive force generated by the moving coil tK% due to the above-mentioned overshoot, or The following system is damped by an electric damping means, which will not be explained as it is not the gist of the invention, but overshoot cannot be completely eliminated, and overshoot and breakage of the pregnant airflow due to overshoot can occur. The confusion is the result of getting a picture)
This may appear as a change in density or a decrease in sharpness.

In addition, the operating process of the valve body 3 is, for example, about 100 to 100.
Since it is as small as μ (ξ chron; 1/100011),
A slight displacement of the valve body causes a large change in the flow rate, and therefore strict standards are required for processing and assembling the valve part.As shown in No. 1N, the valve body 3 is elastically supported by the spring plate 2, Therefore, assembly and adjustment is not easy.

[Problem that the invention seeks to solve]

Therefore, an object of the present invention is to accurately control the flow rate by 1111 at high speed.
To provide a highly reliable control 4F that can be controlled, has a simple structure, and is reliable.

[Means to try to solve problems]

In order to achieve the above object, the invention according to the present application includes a valve seat to which the inflow and outflow pipes of the fluid to be received are connected, respectively, and a valve seat #lK arranged with respect to the valve seat,
A block body is formed by stacking a plurality of plate-shaped piezoelectric elements to drive the valve body, with the tip facing close to the valve seat opening, and a block body with the valve body connected to one end and the other. In a device having a drive unit whose end is fixed to the wall surface of the valve chamber, a bias voltage for determining the zero point of the flow rate and a control voltage in the opposite direction to the piezoelectric element group constituting the drive unit are applied to the entire piezoelectric element TIC. An Rt control valve characterized in that the voltages are applied simultaneously, and the valve body closes the opening of the valve seat when the voltage is zero.

Further, another invention according to the present application includes a valve chamber having an inflow pipe and an outflow pipe respectively following the controlled fluid, a valve seat provided in the outflow pipe, and a valve seat disposed on the 4P chamber side with respect to the valve chest. A block body is constructed by laminating a plurality of plate-shaped piezoelectric elements to operate the valve body, and the valve body has the tip thereof facing close to the opening of the valve seat. and a drive unit with the other end fixed to the wall surface of the valve chamber, and the signal for controlling this drive unit is a binary coded n(
(where n is a positive integer of 2 or more, supplied in the form of a λ-bit digital control signal)-1. On the other hand, the piezoelectric element group constituting the drive unit is connected to each digit of the n-bit 1ull IIIJl number. Divide into n groups (2, where the number of piezoelectric elements in the group is the weighting coefficient 2n of the corresponding digit)
−1 m times (m is a positive integer greater than or equal to 1), these n
For a drive unit formed by stacking piezoelectric element groups, the bit content of the corresponding tttU control signal is provided to each piezoelectric element group in the form of voltage, but all bits ≠ 1%.
Since the VCC voltage zero point is set when QI, a bias voltage is applied to each group, and when the bit content is 111, the piezoelectric elements constituting the corresponding piezoelectric element group are biased. It is characterized in that it is driven in the opposite direction to the direction when pressure is applied, and the digital signal output makes the flow of the entertainment market 11 into a bamboo movement 5.

Embodiments of the present invention will be described below with reference to FIGS. 2 to 2 and f1.

[Actual JM example of the invention related to the present application]

In Fig. 2 KU6, reference numeral 18 indicates the valve body, and this valve force is the same as 1.
8 is a cylindrical body made of gold m#, for example, and a front cap 19 is screwed to one end (the right end in FIG. 2), a rear cap 21 is screwed to the other end, and the A valve chamber 8 is formed inside.

The valve chamber 8 is connected to an air pipe 7, which is an inflow pipe for a control fluid (compressed air in the illustrated embodiment), and an air supply pipe 1, which is an outflow pipe.

In FIG. 2, the air supply pipe l] passes through the front cap 19, is coaxially and airtightly screwed thereto, and has an inner end facing into the valve chamber 8. is provided with an annular valve seat 9.

Is this valve seat 9 on the valve #8 side? Near the valve seat,
For example, a valve body 3 having a conically pointed tip is disposed with its pointed end facing the opening of the valve seat 8. This valve body 3 is
The center portion is supported by a spring plate 2, and the base portion is integrally connected with a drive unit indicated by the reference numeral 4 in a tight pressure manner.

The spring plate 2 is, for example, an elastic plate with a circular outer shape, and is
The valve chamber 8 is provided to cover the opening of the valve chamber 8, and at least one round slit is opened in the circumferential direction or the radial direction of the valve chamber 8. 1 pressure @Nitrogen supply bone 1] It is more crowded than it can escape at 1tl11. Note that this spring plate 2 is provided simply to facilitate alignment between the center line of the valve body 3 and that of the valve seat 9, and is not an essential component of the invention, but is actually required. It can be omitted.

Therefore, the above-mentioned one unit η of the driving weapon is
As shown in the figure, the outer shape is circular (for example, double ασ) root shape)
The l-E element elements zi, z'+, ..., B are placed horizontally in the thickness direction through a thin cap plate of the same shape, for example, a conductive contact layer 1lJK, so that these are alternately @ A plurality of layered) E-ton element wings, Otsu,..., algae R and electrode plates, of course, are separate.

..., 24 are integrally connected to each other, and the second
As shown in the figure, 70-leprosy face (end face of stone 1111) VC
is attached to the front of the rod 3, for example, and the other end surface is coaxially attached to the center of the inner surface of the rear cap 2, which forms a part of the inner wall surface of the square.

The material for the piezoelectric element is preferably a ceramic material such as PZT (lead zirconium titanate) or barium titanate, which are used as ultrasonic oscillation elements. A piezoelectric element is manufactured by sintering.

In addition, connection pieces 271a are protruded from the outer periphery of the upper dU2′ plate.As shown in FIG. It is inserted between two pressing elements as shown in FIG. And the city is on the bus line of drive unit 4, and the center! 111 (see Figure 2) Connection piece group a, 'lA of 22 rows
a, . Is (FIG. 2) is led out of the valve chamber 8 through a Vc-equipped connector, and is connected to, for example, a control signal source (not shown) of a printing device via an amplifier (not shown). With the above-mentioned configuration, as is clear from FIG.
, 23. . . , 2:3, the control voltage from the r-sampling signal source is applied in parallel via an amplifier. For reinforcement, the drive unit 22 is made of soft synthetic +11
There is no harm in substituting M with 4 fats. As mentioned in the previous section, the force generated when voltage is applied to element A is strong, and the resistance of the above-mentioned breakdown is minute compared to that.

[Function] As shown in Figure 5, the valve 11 (valve 11) according to an embodiment of the invention of the present application, which is constructed as described above, has a constant bias in the positive direction 'vomiting pressure vb' and a bias in the negative direction. A voltage vb-Ve weighted with a control voltage VC that changes over time is applied to each of the drive unit pressure 1! For example, it is of course proportional to the image signal obtained by the animal document scanning system of the printing device.Here, the positive recovery pressure refers to the voltage in the direction of extending the drive unit. The negative direction refers to the opposite direction.It goes without saying that a large voltage is applied in advance to the piezoelectric element B of the R1 drive unit, and the polarization direction of the crystal grains is aligned in the thickness direction of the piezoelectric element B. Assuming □ Then, the bias voltage Vb 0) eR value is set to the pressure 'f
Depending on the material and thickness of the IL element Z3 or the number of IL elements in the drive unit ρ, when the pressure Vc in the control chamber is 00, that is, all the piezoelectric elements B forming the drive unit.

When bias voltage vb is applied in parallel to B.

The valve body 3 (FIG. 2) is set to take the zero flow point position of the compressed air flow, that is, the valve body 3 is set to close the opening of the valve seat 9. Here, the valve body 3 closing the opening of the valve seat 9 means that even if a small amount of compressed nitrogen leaks, including when the tip of the valve body 3 contacts the opening of the valve seat 9, This refers to a state in which ink is not ejected from the ink ejection nozzle 12 (see FIG. 1).

When the positive voltage applied to the piezoelectric element 23 is partially increased by #i, as shown in FIG. As a result, the amount of extension d of the drive unit 22 increases, and the bias voltage vb
The maximum set expansion amount dm is reached. Then, as the applied voltage V is reduced, the above elongation -Jld gradually decreases due to the nearly straight curve β, and even when the applied voltage is 01C, the strain ε
remains. After that, when the applied voltage V is increased conversely, the elongation -ld of the drive unit starts from a strain amount of 6, and the interlayer reaches a curve γ, which is close to the above curve β and is also close to a straight line. When the bias voltage vb is applied, K becomes the maximum set extension amount dm. Thereafter, when the voltage applied to the piezoelectric element B changes due to a change in the control voltage VC, the sled wheel pressure does not exceed the bias wheel pressure vb, so the drive unit η
The amount of expansion d changes from the maximum amount dm that closes the control valve for one hour as a starting point, in the direction of decreasing in the Il curve. In other words, the distance between the valve body 3 (FIG. 2) and the valve seat 9 changes in proportion to the voltage Vc, and this distance is
It is proportional to the amount of If condensed nitrogen ejected from (Figure 42). Therefore, the amount of ink ejected from the ink ejection nozzle 12 is proportional to the image signal.

Of course, the amount of elongation of 1M per piezoelectric element B is small on the order of μ, but if multiple piezoelectric elements are stacked together, the valve body as a control valve of the printing device can operate in several 100μ units.
can be easily obtained.

In addition, the piezoelectric element has the characteristic that its expansion and contraction can be precisely controlled by vehicle pressure, and the amount of expansion and contraction of the drive unit 4 can be controlled to 0.
As can be seen from the fact that it can be controlled with an accuracy of 0.1μ, and is also used as a supersonic fatigue oscillator,
Its) @mantissa response is also very high, at about 100 kHz to several hundred kHz.

In addition, the driving force of the drive unit 22 is as strong as several tens to several kilograms, and drives the valve body 3 lightly.

[Examples of other inventions related to the present application]

FIG. 7 shows a drive unit for a countersunk valve according to another invention according to the present application, and this drive unit 22 is configured to drive a valve body using a binary control signal.

That is, this side @ valve is compared to the enlarged printing device KiM.
When used, the image signal as an analog quantity output from the calligraphy manuscript scanning system every moment is scanned at fixed short time intervals, and then converted using an analog-digital converter (not shown). For example, it is converted into a binary control signal CCC . . . 1C7 having an 8-bit configuration.

This 8-bit Q+ 11 21 bit configuration digital electric LXI signal is
There are 56 discontinuous quantities, but if the printing device can divide the image loss into 256 stages, it can be regarded as a continuous quantity of light.Moreover, the number of bits of the digital side 1i141 signal can be changed as necessary. It can be increased or decreased.

On the other hand, depending on the number n of bits (n=8 in the illustrated embodiment) of the digital control number 1g, as shown in FIG. ) Double piezoelectric elements are laminated via the electrode plate body in the same way as in the previous example. In the illustrated embodiment, in order to make the drawings clearer, m = 1, so the drive unit 22 has 1 module and 255 elements.

These 255 piezoelectric element groups 23 , 23 ,
....

Divide Z3 into eight groups, 1st to 8th, which are the same as the focus number of Digital City II @J <K, and
(1=1.2...,8) The number of piezoelectric elements in the group is mX2 = 2. That is, as shown in FIG. 7, for example, the uppermost piezoelectric element 23-1 in the figure is
The following two piezoelectric elements Z3-2 and 23
-3 is the second group, and the next four piezoelectric elements 23-4
- Feather-7 is set as the third group, and piezoelectric element group 23-128 - Miyako-255 are set as the eighth group. It is possible to apply a voltage in parallel to an electric element.
Connect Iwao 5°δ.

Then, each of the first to eighth groups is digitally
ITll@corresponds to signals C6-C7, and each digit's O
Depending on the bitwise σ of I or 111, 11! When , a constant negative vehicle pressure Va whose absolute value is smaller than vb is applied in parallel (see FIG. 6). - If the bias vehicle pressure vb is permanently applied in parallel to all piezoelectric elements of the drive unit 22, and each bit of the digital signal C is %Ql, then the drive unit 22 is It is set so that the valve body 3 expands by the maximum amount and takes the zero flow point position to close the opening of the valve seat. tyx, 11 of the constant negative control voltage 'Va' is the total pressure of the drive unit 4'
When a negative voltage Va is applied to the element, when the digital control signal C is 11N for all bits, the length of each drive unit becomes the minimum, and the length of the valve body 3 (second
Set so that the opening degree of the annular gap σ) between the valve seat 9 and the valve seat 9 is maximized.

In addition, this invention is based on another invention equipped with the drive unit shown in the lower part of FIG. The other structure of ff1l @ masu is socket 26
(FIG. 2) Since it is the same as the one in the lower part of FIG. 2 except that the notation of the conducting wires 5, 5 for K is slightly different, the diagram and detailed explanation thereof will be omitted.

[For production]

The control valve according to another embodiment of the present invention configured as described above, for example, samples one image (No.
8-bit digital, 49g control with digital converter
The stage converted to J No. C9 to C7, as shown in Fig. 7,
The voltage is supplied to each corresponding group via an amplifier, and as described above, a negative voltage Va smaller than the positive bias voltage Vb is applied. - The application time of Va for each sampling is set to be approximately the same as the normal sampling interval.

According to this, iUl,l n polarization C becomes 2
As a result of applying a voltage Va in the negative direction to the piezoelectric elements C1xl...,'lA, the amount of compressed air leaking between the valve disc and the valve body [N] and the valve chamber 8 reaches the control key. The amount of ink ejected from the ink ejection nozzle 12 (first quotient) changes linearly with respect to the control signal Cl7m that is proportional to the image note.

[Other Examples]

FIG. 8 shows another embodiment of the present invention, in which a plurality of thin piezoelectric element units n having the following configuration are arranged, each with its angular position around the central axis of the electrode piece 2'7a slightly changed. Even +! : The drive unit 22 is constructed by stacking the drive unit 22 in a stacked state. In addition, in FIG. 8, the piezoelectric element units 270 are shown with larger intervals in order to make the drawing clearer, and the piezoelectric element units 27 are shown as the 9th
As shown in the above, powdered piezoelectric material crystals are twisted with, for example, organic glue and stretched into a piezoelectric material sheet 27b having a thickness of, for example, several tens of microns to several hundred microns, and this piezoelectric material is sheet 2
7b is printed with an electrolyte film of, for example, a silver/('radium alloy), and punched out into a disk shape with a 111.m piece and a 27m protrusion.

As shown in FIG. 8, these piezoelectric element units 2'7 and 27 were formed into a cylindrical shape with electrode pieces Z7a and 27m protruding spirally on the outer surface, and sintered with a laminated cape. , constitutes the drive unit 22.

As is well known, the piezoelectric effect occurs at a lower voltage as the spacing between piezoelectric elements becomes smaller. However, the fourth
As is clear from the drawings and FIG. 7, when the distance between the electrodes becomes small, it becomes difficult to connect the conducting wire to the connecting piece 24a.s1.
However, in the lower part of Fig. 8, the electrode pieces 27a and Z7a, which correspond to the connection piece lamina K in Fig. 4 or Fig. 7, unfold in a spiral.
The connection of 4 Hi δ to each electrode piece 271L becomes easy.
Another advantage arises.

[Other Examples]

FIG. 10 shows another embodiment of the invention, which includes:
The dimension of the valve body 3 in the 1fII line direction is increased, that is, the valve body 3 is lengthened, and the valve opening/closing portion by the valve seat 9R and the valve body 3 is made larger than the ink jet port of the ink jet nozzle 12 (see first axis). It is located nearby.

In the illustrated embodiment, in order to prevent the valve body 3 from wobbling in the radial direction, the central portion of the valve body 3 is supported and guided by, for example, a slippery sleeve made of Teflon.

As shown in Figure 1(), the valve opening/closing part is connected to the ink jet nozzle 1.
If it is placed close to the ink ejection port No. 2, the volume of the air flow pipe from the valve opening/closing part to the ink ejection port becomes smaller, which improves the ability of the ink ejection amount to follow the side control 2Y, and the resulting print. The advantage is that the mapping becomes sharper. That is, if the volume of the pipe between the valve opening/closing part and the ink injection port is large as shown in Fig. 1, for example, when the valve is fully opened from the fully closed state, ink is discharged from the valve opening/closing part into the w passage. Since the pressure of the compressed air gradually increases until it reaches the maximum pressure, the airflow flowing to the ink jet port does not change instantaneously but gradually increases. Therefore, coolness with sharp edges
11! The edges of the printed image are distorted and the image is no longer sharp, but the tenth factor can minimize the above-mentioned disadvantages and the printed image becomes sharp.

R, as shown in Fig. 1υ, when the valve body 3 is lengthened, its inertial resistance increases, and frictional resistance is also generated by the sleeve, but these are difficult for the drive unit 22, which has a strong driving force due to the piezoelectric effect The resistance is so small that it can be ignored. That is, the configuration shown in the drawings becomes OJ capable for the first time with the present invention.

〔effect〕

As is clear from the above description, in the present invention, a piezoelectric element with good frequency response characteristics is driven in a valve body by a drive unit, so that the flow rate of the fluid to be controlled is controlled in a short time interval. can.

Therefore, if the control valve according to the present invention is applied to the enlarged printing device, the resolution of the printed image obtained is? and sharpness can be improved.

Since there is good correspondence between the side l114I city pressure and the amount of expansion and contraction of the drive unit, the opening degree of the valve, that is, the flow rate of the controlled fluid can be precisely controlled. Therefore, if the control valve according to the present invention is applied to the above-mentioned enlarged printing device,
Horizontal af: Gradation can be expressed faithfully.

Furthermore, since the driving force of the drive unit is strong in Q units, the control valve not only operates reliably, increasing reliability, but also eliminates the need for damping of the imaging system, simplifying the structure. Become.

In addition, when a constant bias voltage is applied to all piezoelectric elements, the valve opening/closing part is fully closed, and the m1i111 voltage is applied in the direction in which the bias voltage decreases, so that the voltage applied to the piezoelectric elements is It has various effects such as being able to utilize the hysteresis characteristic of the amount of expansion and contraction (see Figure 6) for rational fishing.

In the illustrated embodiment, the rupture fluid is air, but it goes without saying that the control valve according to the present invention can be used to control the flow rate of not only air but also any other fluid.

In addition, in the above description, it is assumed that the bias voltage and control signal voltage for positioning the piezoelectric element constituting the drive unit are applied in parallel;
A voltage twice as many as the number of laminated layers may be applied in series to both ends of the voltage element group (in the case of the - invention according to the present application), or in other inventions according to the present application,
For each piezoelectric element groove corresponding to each digit of the t control signal, apply a voltage equal to the number of laminated piezoelectric elements constituting the group by 1.
It may also be applied to the drunken row. In this case, a high-pressure bias source and a split signal output device are required, but the terminal configuration of the drive unit can be easily configured. 5 advantages arise.

[Brief explanation of drawings]

@1 figure is the conventional Ryūenki i11. FIG. 2 is a cross-sectional view of a first valve according to an embodiment of the invention according to the present application, and FIG. 3 shows the configuration of its drive unit. A perspective view of the appearance of the piezoelectric element and the electric shock plate, FIG. 4 is a line-wise partial side view of the drive unit showing the connection of four wires to the piezoelectric confectionery group, and FIG. 5 is a graph showing the voltage applied to the piezoelectric element. , FIG. 6 is a graph showing an example of the relationship between the applied voltage and the amount of expansion and contraction of the piezoelectric element, and FIG. 7 is a diagram similar to FIG. 4 of the drive unit in another invention related to the present application. Figure 8 is a diagram of the target 1 law surface diagram showing the electric +1i according to another example of the invention.
FIG. 9 is an enlarged cross-sectional view of an element unit showing the structure of the driving unit of the i1 valve, and FIG. 9 is a cross-sectional view of a control valve according to another embodiment of the present invention. 3...Valve body, 7...Inflow pipe, 8...Valve chamber, 9...
・Valve seat, 11...Outflow pipe, ρ...Drive unit, K...Piezoelectric element,...11I electrode plate, 24a...Connection piece, 5...Conductor. Patent Applicant Japan Enlargement, Color Co., Ltd. 1 Figure 4 Figure 5 Figure 6 Figure 8 Figure 9 Figure Proceedings Amendment May 20, 1985 Commissioner of the Patent Office Shiga Number of characters 1, Indication of the case 1988 % Eken Application No. 84675 3, Relationship with the case of the person making the amendment Patent applicant 4, Agent (〒154) IIE story 03 (426) 5
914 Address: 1-chome Gotokuji, Setagaya-ku, Tokyo Kyoto No. 19-6 Number of inventions to be increased by amendment: 0 (The "Claims of the Hour Hand" in the 11th Specification are amended as follows. r2.%iF!F Claims Range ■, a valve chamber to which an inflow pipe and an outflow pipe for the fluid to be subjected to are connected, a valve seat provided in the outflow pipe, and a valve seat disposed on the valve chamber side with respect to this valve seat, the tip of which is connected to the valve chamber. A block body consisting of a valve body disposed close to the opening of the seat and a plurality of plate-shaped piezoelectric elements stacked together to drive the valve body.The valve body is connected to one end, and the valve body is connected to the other end. In a device having a drive unit fixed to an indoor wall, a bias voltage for determining the zero point of the flow rate and a voltage in the opposite direction to the piezoelectric elements constituting the drive unit are applied to all piezoelectric elements. A flow control valve characterized in that the control voltages are applied at the same time, and when the control voltage is zero, the valve body closes the opening of the valve seat. 2. Connect the inflow pipe g and the outflow pipe of the controlled fluid, respectively. a valve chamber provided in the outflow pipe, a valve body disposed on the valve chamber side with respect to the valve seat and having its tip facing close to the opening of the valve seat; A block body in which a plurality of plate-shaped piezoelectric elements are laminated for driving, and has a drive unit to which the above-mentioned valve body is connected at one end and the other end is fixed to the wall surface of the valve chamber, and this drive unit is controlled. The signal shall be supplied in the form of a binary coded n (n is a positive integer of 2 or more) bit digital # signal, and on the other hand,
The piezoelectric element group constituting the drive unit is divided into n groups from 1st to n-th corresponding to each digit of the n-bit control signal. ) The weighting coefficient of the digit corresponding to the number of piezoelectric elements in the group 2L-10
m (m is a positive integer greater than or equal to 1) times these n iv
For the drive unit constructed by laminating piezoelectric element groups A, the bit contents of the corresponding control signal are supplied to each piezoelectric element group in the form of voltage, and when all bits are 101, the flow rate reaches zero point. Bias pressure is applied to each valley glue 2' so that the bits are set at %1.
1, the piezoelectric elements constituting the corresponding piezoelectric element group are driven in the opposite direction to when the bias voltage is applied, and the flow rate side is controlled by the digital signal output. Features a flow control valve. (2) Correct "1 Valve seat 8" on page 0, line 14 of the specification IF to "Valve seat 9." One or more -

Claims (1)

[Scope of Claims] 1. A valve chamber to which an inflow pipe and an outflow pipe of the controlled fluid are respectively connected, a valve seat provided in the outflow pipe, and a valve chamber 1μIIK installed with respect to the valve seat, It is a block body consisting of a valve body whose tip faces close to the opening of the valve seat, and a convex plate-shaped piezoelectric element laminated to drive this valve body.The valve body is connected to one end and the other Does it have a drive unit whose end is fixed to the wall surface of the valve chamber? This drive unit is configured such that a bias voltage for determining the zero point of the flow rate and a control voltage in the opposite direction to the piezoelectric element group 1-6 are simultaneously applied to all piezoelectric elements, and when the side control voltage is zero, This is a flowing 11th year valve that is characterized by the fact that the valve body closes the opening of the valve seat. 2. A valve chamber to which the inflow f2 and outflow U of the temporary control fluid are connected, respectively, a valve seat provided in the above-mentioned outflow pipe, and a valve seat disposed on the valve chamber side with respect to this valve seat, with the tip connected to the valve seat. The valve body faces close to the opening of the valve body, and in order to drive this valve body, a block body is made by laminating a plurality of plate-shaped pressure elements.One end is connected to the valve body, and the other end is connected to the valve chamber. There is a model KM that is fixed to the wall and has one drive unit, and the signal that controls this drive unit is binary coded n(n
is a positive integer greater than or equal to 2) bit digital? The piezoelectric element group constituting the drive unit is divided into n groups corresponding to each digit of the n-bit division @1 signal, and the trough group is divided into n groups. The drive unit 1 is constructed by stacking these n piezoelectric element groups, with the number of piezoelectric elements multiplied by the weighting coefficient 2 of the corresponding digit (m is a positive integer of 1 or more). The bit contents of the corresponding control signal are supplied to the element groups in the form of a voltage, and a bias voltage is applied to each group so that the zero point of the flow rate is set when all bits are 10I. Each bit is 11#
When , the piezoelectric elements constituting the corresponding piezoelectric element group are driven in the opposite direction to when the bias voltage is applied, and the digital signal output changes r#r, material spacing 1 [llll11 to 5. A flow control valve characterized by: