JPS5994349A - X-ray tube of strap anode - Google Patents

X-ray tube of strap anode

Info

Publication number
JPS5994349A
JPS5994349A JP20204682A JP20204682A JPS5994349A JP S5994349 A JPS5994349 A JP S5994349A JP 20204682 A JP20204682 A JP 20204682A JP 20204682 A JP20204682 A JP 20204682A JP S5994349 A JPS5994349 A JP S5994349A
Authority
JP
Japan
Prior art keywords
target
anode
tube
hot cathode
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20204682A
Other languages
Japanese (ja)
Inventor
Junichi Murakami
純一 村上
Tatsuo Tsujii
辻井 龍男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP20204682A priority Critical patent/JPS5994349A/en
Publication of JPS5994349A publication Critical patent/JPS5994349A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/24Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray

Abstract

PURPOSE:To secure an X-ray tube that generates a surface-formed X-ray focusing by means of X-rays paralleled with each other, by installing a specific strap anode and a pair of deflecting coils in the X-ray tube respectively. CONSTITUTION:A pair of deflecting coils 14 are disposed by facing each other with a tube's flat two surfaces between at the outside of a tube 11, using a part a little to a hot cathode 12 located between a strap anode 13 and the hot cathode 12. When the specified high voltage is impressed in space between the strap anode 13 and the hot cathode 12, an accelerated electron flow (e) emitted out of the hot cathode 12 is deflected by the deflecting coil 14 and distributively collides with an interspace between both end parts of a target 13a of the strap anode 13 whereby a surface-formed X-ray focusing 21 by X-rays paralleled with each other is emitted out of the target 13a. The X-rays comprising this X-ray focusing 21 is generated at a point inside a metal nearby the electron flow collision point of the target 13a and radiated from a surface opposite to the target in the direction of the electron flow after transmitting the metal's thickness of the target 13a.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、xl管に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to xl tubes.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

第1図に従来形X線管の一例を示す。陽極(2)と、フ
ィラメント(3)を有する陰極(4)間に印加された高
電圧によシ加速された電子流は陽極(2)のターゲラ)
 (2a)に衝突してX5(1)を放射する。このよう
にして得られたX線はターゲット焦点が極小であるため
点線源として扱われる。
FIG. 1 shows an example of a conventional X-ray tube. The electron flow accelerated by the high voltage applied between the anode (2) and the cathode (4) having the filament (3) is the target of the anode (2).
(2a) and emits X5(1). The X-rays obtained in this manner are treated as a point ray source because the target focus is minimal.

したがって、棒状あるいは帯状の物体を透過させる必要
のある工業用X緑透過検査装置では、しばしば長い棒状
のX綜検出器を使用したシ、X綜管自牙を走査したシし
なければならなかった。前者の方法では、点線源から拡
がシ角をもって放射されたX線が被測定物を斜めに透過
するので、正確な断面情報を得るためには角度補正を行
々わねばならない。また、後者の方法は、機械的走査の
ためX線管の劣化を招いたシ、雑音を伴なうという欠点
がある。
Therefore, in industrial X-ray transmission inspection equipment that needs to transmit rod-shaped or band-shaped objects, it is often necessary to use a long rod-shaped X-shaped detector and scan the X-shaped tube's own tooth. . In the former method, X-rays emitted from a point source with a divergence angle pass through the object to be measured obliquely, so angle correction must be performed in order to obtain accurate cross-sectional information. Furthermore, the latter method has disadvantages in that mechanical scanning causes deterioration of the X-ray tube and is accompanied by noise.

〔発明の目的〕[Purpose of the invention]

本発明は、上記のような工業用X線透過検査装置におけ
る問題を解決するために、互いに平行々X線による面状
のX線束を発生する帯状陽極X線管を提供することを目
的とする。
SUMMARY OF THE INVENTION In order to solve the above problems in industrial X-ray transmission inspection equipment, the present invention aims to provide a strip-shaped anode X-ray tube that generates a planar X-ray flux of parallel X-rays. .

〔発明の概要〕[Summary of the invention]

本発明は、平面形状がほぼ二等辺三角形状に形成された
チューブと、このチューブの二等辺の頂点部位内に配置
されチューブの底面に直角な方向に阻子流を放出する熱
陰極と、前記チューブ内の底面と平行に配置され底面の
長手方向に細長いターゲットを有する帯状陽極と、この
帯状陽極と前記熱陰極との間の熱隘極寄りの部位をとっ
て前記チューブの外側に配置され前記熱陰極から放出さ
れたに電流を前記帯状陽極のターゲットの両端部間に分
布して衝突するように偏向する1対の偏向コイルとを具
備してなシ、前記帯状陽極と熱陰極間に所定の高電圧印
加時に帯状陽極のターゲットから互いに平行したX線に
よる面状のX線束を発生することを特徴とする帯状陽極
X線管を実現して所期の目的を達成した。
The present invention provides a tube having a substantially isosceles triangular planar shape, a hot cathode disposed within the isosceles apex portion of the tube and emitting an obstructive flow in a direction perpendicular to the bottom surface of the tube; a strip anode disposed parallel to the bottom surface of the tube and having an elongated target in the longitudinal direction of the bottom surface; a pair of deflection coils for deflecting current emitted from the hot cathode so as to distribute the current between both ends of the target of the strip anode and collide with the target; We have achieved the intended purpose by realizing a band-shaped anode X-ray tube that is characterized by generating a planar X-ray flux of mutually parallel X-rays from the band-shaped anode target when a high voltage is applied.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の実施例を図面を参照して説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第2図に本発明一実施例の帯状陽極X線管を示す。第2
図において、aυはチューブで、平面形状がほぼ二等辺
三角形状で偏平な箱状に例えばシリコンガラスで形成さ
れ内部を真空引きされている。
FIG. 2 shows a strip-shaped anode X-ray tube according to an embodiment of the present invention. Second
In the figure, aυ is a tube, which is formed of silicon glass, for example, into a flat box shape with a substantially isosceles triangular planar shape, and whose interior is evacuated.

α2)はフィラメントを有する熱陰極で、チューブIの
二等辺の頂点部位内に配置され、チューブ←υの底面(
lla)に直角な方向に電子流を放出する。(131は
帯状陽極で、前記チューブaυの底面(lla)寄シの
部位に底面(11a)と平行に配置され、底面(lla
)の長手方向に細長いターゲラ) (13a)を有する
薄い帯状に形成されている。(14)は偏向コイルで、
帯状陽極03)と熱陰極a2との間の熱陰極寄シの部位
をとってチューブαDの外側にチューブの偏平2面をは
さんで1対が配置され、前記熱陰極σ渇から放出された
電子流(e)を帯状陽極a〜のターゲット(13a)の
両端部間陽極X線管、では、帯状陽極(i3)と熱陰極
αaとの間に所定の高電圧を印加すると、熱陰極(12
+から放出されて加速された電子流(e)が偏向コイル
α→によって偏向されて帯状陽極(I(6)のターゲッ
ト(13a)の両端部間に分布して衝突し、ターゲラ)
 (13a)から図示のように互いに平行したX線によ
る面状のX線束(2υを放射する。とのX線束(21)
を構成しているX線はターゲラ) (13a)の電子流
衝突点に近い金属内部の点で発生して電子流の方向にタ
ーゲラ) 、 (13a)の金属の厚みを透過してター
ゲットの反対側の面か示す。この変形例のX線管は、帯
状陽極(23)のターゲラ) (23a)が電子流(e
)の進入方向(複数の阻子流が形成する而)に対し45
°傾斜した面を重子流(e)に対向した棒状に形成され
ている点が第2図のものと異なシ、他は同様な構成であ
る。偏向コイルa→で偏向された電子流(e)がターゲ
ラ) (23a)の45°傾斜面に衝突し、図示のよう
に電子流(e)の進入方向に直角な方向に互いに平行し
たX線による面状のX線束(31)を放射する。
α2) is a hot cathode with a filament, which is placed within the isosceles apex region of tube I, and the bottom surface of tube ←υ (
lla) emits an electron flow in a direction perpendicular to (131 is a band-shaped anode, which is arranged parallel to the bottom surface (11a) at a portion near the bottom surface (lla) of the tube aυ.
) It is formed in a thin strip shape having a long and narrow tagera) (13a) in the longitudinal direction. (14) is a deflection coil,
A pair is placed on the outside of the tube αD with the two flat surfaces of the tube in between, taking the hot cathode area between the band-shaped anode 03) and the hot cathode a2, and the hot cathode a2 emitted from the hot cathode σ. In an anode X-ray tube, the electron flow (e) is transferred between both ends of the target (13a) of the strip anode a~, and when a predetermined high voltage is applied between the strip anode (i3) and the hot cathode αa, the hot cathode ( 12
The electron current (e) emitted from + and accelerated is deflected by the deflection coil α→ and is distributed between both ends of the target (13a) of the strip anode (I (6)) and collides with the target (13a).
From (13a), as shown in the figure, a planar X-ray flux (2υ is emitted) due to mutually parallel X-rays, and an X-ray flux (21)
The X-rays that make up the target are generated at a point inside the metal close to the electron flow collision point (13a), and are transmitted in the direction of the electron flow through the thickness of the metal (13a) to the opposite side of the target. Indicates the side surface. In the X-ray tube of this modification, the target layer (23a) of the band-shaped anode (23) is
) with respect to the approach direction (formed by multiple barrier flows)
The structure differs from that in FIG. 2 in that the inclined surface is formed into a rod shape facing the heavy particle flow (e), but otherwise the structure is the same. The electron flow (e) deflected by the deflection coil a collides with the 45° inclined surface of the target layer (23a), and as shown in the figure, X-rays are generated parallel to each other in a direction perpendicular to the direction of entry of the electron flow (e). A planar X-ray flux (31) is emitted.

〔発明の効果〕〔Effect of the invention〕

以上詳述したように本発明によれば、熱陰極から放出さ
れた電子流を偏向コイルにより細長いターゲットを有す
る帯状陽極のターゲットに分布して衝突するように偏向
させるようにしたことKよシ、帯状陽極のターゲットか
ら互いに平行したX線による面状のX線束を発生するこ
とができる。
As detailed above, according to the present invention, the electron current emitted from the hot cathode is deflected by the deflection coil so as to distribute and collide with the target of the strip anode having the elongated target. A planar X-ray flux of mutually parallel X-rays can be generated from the band-shaped anode target.

そのため、とのX線管を工業用xg透過検査装置に用い
れば、□棒状あるいは帯状の物体の透過検査に際してX
線ビームが物体を直角に通過するため角度補正を行なう
必要がなく、またX線管を機械り 的に検査する必要も々くなシ、従来の点線源のX線管を
使用する場合にくらべて、装置の構成の簡単化、信頼性
向上、コストダウン等のメリットを得ることができる。
Therefore, if an X-ray tube is used in an industrial XG transmission inspection device, □
Because the ray beam passes through the object at right angles, there is no need for angle correction, and there is no need to mechanically inspect the X-ray tube, compared to using a conventional point-source X-ray tube. As a result, it is possible to obtain advantages such as simplifying the configuration of the device, improving reliability, and reducing costs.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のX線管を示す構成図、第2図は本発明−
実施例のX線管を示す構成図、第3図は本発明変形例の
X線管を示す構成図である。 11・−・チューブ     lla・・−チューブの
底面12・・・熱陰極     13・・・帯状陽極1
3a・・・ターゲット    14・・・偏向コイル2
]・−・X線束      23・・・帯状陽極23a
・・・ターゲット    31・・・X線束代理人 弁
理士  井 上 −男
Figure 1 is a configuration diagram showing a conventional X-ray tube, and Figure 2 is a diagram showing the structure of a conventional X-ray tube.
FIG. 3 is a configuration diagram showing an X-ray tube according to an embodiment. FIG. 3 is a configuration diagram showing an X-ray tube according to a modification of the present invention. 11...Tube lla...-Bottom surface of tube 12...Hot cathode 13...Striped anode 1
3a...Target 14...Deflection coil 2
]...X-ray flux 23...Striped anode 23a
...Target 31...X-ray flux agent Patent attorney Inoue -Male

Claims (1)

【特許請求の範囲】[Claims] 平面形状が#まぼ二等辺三角形状に形成されたチューブ
と、このチューブの二等辺の頂点部位内に配置されチュ
ーブの底面に直角な方向に電子流を放出□する熱陰極と
、前記チューブ内の底面と平行に配置され底面の長手方
向忙細長いターゲットを有する帯状陽極と、この帯状陽
極と前記熱陰極との間の熱陰極寄シの部位をとって前記
チューブの外側に配置され前記熱陰極から放出された電
子流を前記帯状陽極のターゲットの両端部間に分布して
衝突するように偏向する1対の偏向コイルとを具備して
なシ、前記帯状陽極と熱陰極間に所定の高電圧印加時に
帯状陽極のターゲットから互いに平行したX線による面
状のX線束を発生することを特徴とする帯状陽極X線管
A tube whose planar shape is an isosceles triangle; a hot cathode disposed within the apex of the isosceles of this tube and which emits an electron flow in a direction perpendicular to the bottom surface of the tube; a strip anode arranged parallel to the bottom surface of the tube and having an elongated target in the longitudinal direction of the bottom surface; and a strip anode arranged outside the tube with a hot cathode distance between the strip anode and the hot cathode. a pair of deflection coils for deflecting electrons emitted from the target so as to distribute and collide between both ends of the target of the strip anode; A band-shaped anode X-ray tube characterized in that when a voltage is applied, a planar X-ray flux of mutually parallel X-rays is generated from a target of the band-shaped anode.
JP20204682A 1982-11-19 1982-11-19 X-ray tube of strap anode Pending JPS5994349A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20204682A JPS5994349A (en) 1982-11-19 1982-11-19 X-ray tube of strap anode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20204682A JPS5994349A (en) 1982-11-19 1982-11-19 X-ray tube of strap anode

Publications (1)

Publication Number Publication Date
JPS5994349A true JPS5994349A (en) 1984-05-31

Family

ID=16451026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20204682A Pending JPS5994349A (en) 1982-11-19 1982-11-19 X-ray tube of strap anode

Country Status (1)

Country Link
JP (1) JPS5994349A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010074031A1 (en) * 2008-12-22 2010-07-01 オムロン株式会社 X-ray inspection method and x-ray inspection apparatus
JP2014130815A (en) * 2012-12-27 2014-07-10 Tsinghua Univ Device and method for generating distributed x rays

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010074031A1 (en) * 2008-12-22 2010-07-01 オムロン株式会社 X-ray inspection method and x-ray inspection apparatus
JP2014130815A (en) * 2012-12-27 2014-07-10 Tsinghua Univ Device and method for generating distributed x rays
US9786465B2 (en) 2012-12-27 2017-10-10 Tsinghua University Apparatuses and methods for generating distributed x-rays
US9991085B2 (en) 2012-12-27 2018-06-05 Tsinghua University Apparatuses and methods for generating distributed x-rays in a scanning manner

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