JPS5921193A - Load monitor controller - Google Patents
Load monitor controllerInfo
- Publication number
- JPS5921193A JPS5921193A JP12961182A JP12961182A JPS5921193A JP S5921193 A JPS5921193 A JP S5921193A JP 12961182 A JP12961182 A JP 12961182A JP 12961182 A JP12961182 A JP 12961182A JP S5921193 A JPS5921193 A JP S5921193A
- Authority
- JP
- Japan
- Prior art keywords
- load
- relay
- circuit
- potential
- monitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q9/00—Arrangements in telecontrol or telemetry systems for selectively calling a substation from a main station, in which substation desired apparatus is selected for applying a control signal thereto or for obtaining measured values therefrom
- H04Q9/06—Calling by using amplitude or polarity of dc
Landscapes
- Engineering & Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Selective Calling Equipment (AREA)
Abstract
Description
【発明の詳細な説明】 本発明ｒＪ５、負荷監視・制＃装＋１． Ｋ閣す・る。[Detailed description of the invention] The present invention rJ5, load monitoring/control system +1. K.
遠方にるる負荷の運転・停止を制御すると共に負４Ｗｉ
の状態ｆｃ監・視する従来の負荷監視制御装置において
は、１つの負荷に対し、監視盤ＩＩｆＪｌの監視回路の
２つの表示灯駆動回路と制御ＩＩｌ盤側□の負荷投入指
令用及びしゃ断指令用のリレー金夫々４絡する２本の連
絡線を設けて上記負荷に関する□信号の授受全行うよう
にしていることによシ、Ｆつの負荷増に対して２本の連
絡側全増設・しなければならない為、負荷数が多くなる
と連絡線の本数が非常に多くなｐ１保守・点検が相当に
面倒で、費用もかさむという問題があった。Controls the operation and stopping of loads located far away, and also uses negative 4Wi
In a conventional load monitoring control device that monitors and monitors the status fc, for one load, there are two indicator light drive circuits in the monitoring circuit of the monitoring panel IIfJl, and one for load on command and one for load cutoff command on the control IIl panel side □. By providing two contact lines connecting four relays each to perform all the sending and receiving of □ signals related to the above load, two contact lines must be added for each F load increase. Therefore, when the number of loads increases, the number of connection lines increases, making P1 maintenance and inspection extremely troublesome and expensive.
本発明ｅよ、上記した従来の問題点ＶＣ趙みてなされた
もので、負両投入指令及び賀＋’□４ｊＬや断指令、ス
イッチの入操作時に監視盤１１１１＋及び制御盤側間に
流ｔしる信号′電流の方向が互いに逆方向□とな凶摺成
とすることＶこより、Ｉ１の負荷増に対して４絡細の増
加木故力玉１１木で済ノド、しかも従来回路に大１１〕
な変更音訓える必四のない負イ「工監４Ｍ ｔｊｆｌｌ
仰、装置全提供゛Ｊ−ること金目的とする。
□ −・−以下、不発Ｉｌｌゆ〒実７
ｆｌｉ Ｉｊ！Ｉ全図についそ税関□する。The present invention e was made in view of the above-mentioned problems with the conventional VC. Since the current direction of the signal 'current is opposite to each other □, the number of circuits increases due to the increase in the load on I1. ]
A change sound that can be learned without any negative "Instructor 4M tjflll"
All support and equipment will be provided for financial purposes.
□ −・− Below, misfire Ill Yumi 7
fli Ij! I will do customs □ on all the figures.
ＸＩ １図において、１ｅよ負荷監視１ｌｔｌＪ御装置
の信号電源でろりで、監初盤（Ｉｌｌ膜設られ、ＪＥ負
惰Ｐ及びＮと両極間′電圧の中間ｒｔｔ （Ｉｔ全持つ
中間極Ｇを具えている。２及び３ｔよ夫々制岬盤佃（４
ＪＬ嚇ｉｕ＋＋′）に設けられた高ｍ位極及び低、寵位
他でβつで、’Ａ ７ｔｌ（ｉｔ（ｋ ２ Ｋ ｔよＩ
ｌｉ位線電線介して正極■）の電位Ｅｐが与えられ、低
屯位極３にｅよ「１電線５紮介して負極Ｎの亀ｔｉｚ−
Ｅ、Ｈが与えられている。６は連節１ｒθでろって、監
視ｔｉｌｔ １１１１１ Ｋめる監睨回路７と割β１１
盤側にるる制御ダイオード７２金接続して直列接続しで
なる単一方１’Ｊ ＪＬｌｌ ’；ｌｉ’、の停止衆示
幻駆！ｂｂ回路と、別のホトカプラの発光部７３にダイ
オード７４を直列接続してなる単一方向通電の運転表示
灯、駆動回ｊ１δとが通電方向を逆にして中間極Ｇに並
列接続をれた回路金有し、該回路に連絡線ｏ’ ｉ、＞
−型が接続されている。７５及び７６は夫々調整Ｕ（
抗でろ：り、て人々停止表示幻駆！す０回路及びＡ転衆
示回路に発光部７１及び７３と直列に挿入さ扛ている。In Fig. It is equipped with 2 and 3 tons of cape board Tsukuda (4
'A 7tl(it(k 2 K tyo I
The potential Ep of the positive electrode (1) is applied to the low-potential electrode 3 through the 1 electric wire 5.
E and H are given. 6 is the joint 1rθ, monitoring tilt 11111 Kmeru monitoring circuit 7 and dividing β11
The control diode 72 gold is connected on the panel side and connected in series to stop the single direction 1'JJLll';li'! A unidirectional energized operation indicator light formed by connecting the bb circuit and a diode 74 in series to the light emitting part 73 of another photocoupler, and a circuit in which the driving circuit j1δ is connected in parallel to the intermediate pole G with the energizing direction reversed. If you have money, connect the circuit with o'i,>
- The mold is connected. 75 and 76 are respectively adjusted U(
Resist: People stop displaying illusions! They are inserted in series with the light emitting sections 71 and 73 in the zero circuit and the A transfer circuit.
発光部７１及び７３が大々発する光全受りる受光部（図
示しない）が導通すると監視盤上にめる灼応する停止表
示灯及び運転表示灯（いずれも図示しない）が点灯する
。発光部１１及び７３には夫１々負荷投入指令スイッチ
７７、、、；び負荷しゃ断指令スイッチ７８が並列接続
ヂれている。制☆１１１リレー回路８、高７α位極２に
接続σ！した負ｍｊ投人指令用のリレー（電磁りＶ−）
８１と、低’ｒ（すｉ’Ｌ４戯３に接続きれた負６１ｊ
シゃ断指令用のリレー（電磁リレー）ｂｚを有し、両リ
レー１３１．８２は夫々り撲用のリレー８３の接点８３
８１８３ｂ奮介して連絡線６の他端に接続込れている。When the light receiving parts (not shown) that receive all the light emitted by the light emitting parts 71 and 73 are electrically connected, the corresponding stop indicator light and operation indicator light (both not shown) on the monitoring panel are lit. Each of the light emitting units 11 and 73 is connected in parallel with a load on command switch 77, . . . and a load cut off command switch 78. Control☆111 relay circuit 8, high 7α connected to pole 2 σ! Relay for negative mj throwing command (electromagnetic V-)
81 and low 'r (negative 61j connected to Sui'L4 play 3)
It has a relay (electromagnetic relay) bz for a cutoff command, and both relays 131 and 82 are contacts 83 of a relay 83 for fighting, respectively.
8183b is connected to the other end of the communication line 6.
このリレ−６３１ユ第３図に示す負荷でわるモータＭの
負荷＊＋＃ｂ回路に挿入きれている。同１ン目こあ・い
て、９１は負荷１１０１式、９２はしゃ断器、９３ ａ
ｉｔ ＋ｆｉ、Ｍスイッチ９３の第１埃点でりる。、屯
磁ス、イッチ９３は負萌投入指台用リレー８１の接点８
１ａ及び負荷しゃ１１１州令用’）Ｖ−８２（７）接点
ｕａａ’ｌ介してＪｌｉｌＪ（＋ｌｌＩ、／ＩＩ Ｔ）
嘱、９４の正負イ執間に仲人いれて詮り、リレーｄ３は
屯磁ス・ｆタテ９３の第２接点９Ｊ！〕忙介しで上ｍｌ
正負他同に挿入されている。又ｒヒ磁スイッチ９３の第
３接点９３ｃｔＪＪ’＋丙投入指令用リレー８１の自己
保持回ド？５全構成する。This relay 631 has been fully inserted into the load *+#b circuit of motor M which is divided by the load shown in FIG. The first one is here, 91 is load 1101 type, 92 is breaker, 93 a
it +fi, the first dust point of the M switch 93. , the switch 93 is the contact 8 of the relay 81 for the negative input switch.
1a and load 111 state order') V-82 (7) via contact uaa'l JlilJ (+llI, /II T)
Then, I asked an intermediary to check the positive and negative values of 94, and found that the relay d3 is the second contact 9J of the vertical magnetic field 93! 〕I'm busy so I'm busy.
Positive and negative are inserted in the same way. Also, the third contact 93ctJJ' of the r magnetic switch 93 + the self-holding rotation of the C closing command relay 81? 5 Complete configuration.
負６ｊ投入指令用リレー８１と負荷しゃ断指令用リレー
１２の昨週Ｉｂ屯・流はホトカプラの発光部７１及び１
３の作動電θに、、Ｌ、！、Ｉも犬きくなるよう膜力ｌ
笛れておｐ１監視回路７−Ｃ，ｔＪ、壇、萌艮人指令ス
・ｒソチ７７又ｅ」、負イ’＋ｊｊ’ Ｌ ？ Ｈｇｉ
指令スイッチ７８の役本時に、投入ざｉしたスイッチ金
流ｒＬる屯υ１ｔのレベルが発光部７１．７３の作動ｒ
ｌｊ： 流レベルに超えてリレー１１１、ＩＩｓ！７．
、）作動′電流レベルまで増大するよ’） 、ＩｔＣ、
その回路抵抗が調整逗抗りｊ、７６ ＆てより調整さ
れ−Ｃいる。Last week's Ib flow of the negative 6j closing command relay 81 and the load cutoff command relay 12 was the light emitting part 71 and 1 of the photocoupler.
For the working voltage θ of 3,,L,! , I will also act like a dog.
Whistle p1 monitoring circuit 7-C, tJ, stage, Moe Ai person command su・r Sochi 77matae'', negative i'+jj' L? Hgi
When the command switch 78 is in operation, the level of the switch metal flow rL which has not been turned on is the level at which the light emitting portions 71 and 73 are activated.
lj: Relay 111, IIs beyond flow level! 7.
,) actuation 'will increase to the current level'), ItC,
The circuit resistance is adjusted by the adjustment resistor j, 76 & -C.
次に、この装置の！す９作について説１す」する。Next, of this device! I will explain about the 9 works.
第１図及び第２図はモータ（（ロ）の・装置が１ダ止さ
れている４１局合の回硝犬純ｒ示している。この研１転
停止状、法でＶ」１．正・ｊ虞Ｐ一連、絡歳４−＋鴻屯
泣点２−頁耐投入指令用リレー８１−リレー８３の接点
８３薯］一連絡＃ｉｌ （＋−ダイオード７２−発シ′
（、免子７１−申間極Ｇがしｌる１昌シ号回ｒメｉを通
って実綴欠印の同きｉ／（信号７１１．流（発光！１８
７１の作動′曲流）が訛ね１、発光Ｈ１＋７１が発光し
図示しない停止表示月が魚釣している。Figures 1 and 2 show the 41st position of the motor ((b)) and device being stopped.・P series, contact point 4-+Hongtun contact point 2-page closing command relay 81-relay 83 contact 83] 1 contact #il (+- diode 72-output
(, Menshi 71-Senma Goku G is passed through the 1st issue of rmei, and the same i/(signal 711. flow (luminous! 18
71's operation' curve) is accented 1, the light emission H1+71 emits light, and the stop display moon (not shown) is fishing.
この時、上記１図号回ｈ）６の仇」元１１１〔が高い為
に」二記箱：流のレベルはリレー８１の作動ｒμ流レベ
ルより１八く製、該リレーＩＪ１．ｉ：！ａｌ乍しない
。At this time, the enemy of the above figure No. 1 h) 6 "Yuan 111 [because of the high" box 2: The flow level is 18 times higher than the operating rμ flow level of relay 81, and the relay IJ1. i:! I don't mind.
ｊｔ萌役人指令スイッチ７７が閉路されると、発光部７
１が該スイン：７−７７ Ｖこより短絡される為１．＋
ｊａ 、７．＋１ノチ７−／ｋ）ＩＪＩして１汀号ｒＰ
ｉ Ｄｌｊ ｄｉ （ｙｌｒ。When the jt Moe official command switch 77 is closed, the light emitting section 7
1 is short-circuited from this voltage: 7-77 V. +
ja, 7. +1 nochi 7-/k) IJI and 1st issue rP
i Dlj di (ylr.
れ、１Ｎ、 ＃ｌｊレベルが＋）、Ｖ−８１の作動亀か
Ｃレベルまで増大−ｒる。この結末、発光部７１は兄光
停止して停止表示灯が消灯し、他方、負荷投入指令用リ
レー８１が動作してｒｔｔ磁スイッチ９３が附勢され、
その各接点ｕ３ａ、９３べ９３Ｃ金閉じる。従って、モ
ータ（的が運転され始める。又、切換用リレー８３が１
り１）勢されるのでその接点が切替り、第３図に示す如
く、負荷しゃ断指令用リレー８２が連＃８線６に接続さ
れる。この為、連絡線Ｇを流れるｔｆｆ流の向きは逆方
向となり、中間極Ｇ−発発光子７３−ダイオード４一連
漏廁６−リレー８３の接点１１３１）−負荷しゃ断指令
用’）Ｖ−８２−低′Ｐｕ位極３−酸位憩５−負極Ｎか
らなる信号回路金図示一点鎖線で示す矢印の向きに信号
１電流（発光＋ｘｕ ７３の作！ｂ ’ｒＭ Ｏｆｔ、
）、 ｄＥ’ｆｆｋ： ｉｔ、発光部７３が発光して
図がしな、い運転表示灯が点灯−！−る。この時も、上
記信号回路の抵抗値が高い為、電流レベルがリレー８２
の作ｉ電流レベルより小さく、該リレ−８２ｔユ動作し
ない。1N, #lj level is +), the operation of V-81 increases to C level. As a result, the light emitting unit 71 stops emitting light, the stop indicator light goes out, and on the other hand, the load application command relay 81 operates and the RTT magnetic switch 93 is energized.
Its respective contacts u3a, 93 and 93C are closed. Therefore, the motor (target) starts to operate.
1) The contact is switched and the load cutoff command relay 82 is connected to the #8 wire 6 as shown in FIG. For this reason, the direction of the tff flow flowing through the connection line G is reversed, and the intermediate pole G - the light emitting element 73 - the diode 4 series leakage 6 - the contact 1131 of the relay 83) - for the load cutoff command') V-82 - Signal circuit consisting of low 'Pu position 3 - acid position 5 - negative electrode N Signal 1 current (light emission +xu 73 production! b 'rM Of,
), dE'ffk: It, the light emitting part 73 emits light and the operation indicator light (not shown) lights up. -ru. At this time as well, since the resistance value of the signal circuit is high, the current level is low at relay 82.
If the current level is lower than the current level, the relay 82t will not operate.
この運転状態Ｖｃ６る時に、負荷しゃ断指令スイッチ７
８が投入されると、発光部７３が該スイッチ７．６に′
より、・短絡される為、図に二点ｄＭで示すＩｌｌ」く
、スイッチ７８を通してイｎ号…、流が流れ、屯θ）Ｃ
レベルが負・荷じゃ１９１指令用リレー８２の作動ｍ０
１ｒ、レベルまで、上昇す頴 １− □１１．
１ｖ１す
る。□この為、該リレー８２が動作し、接点８２ａが開
いて電磁スイッチ９３０１ｉｆｔ勢が解□かれるＭ果、
接点９３１，９３ｂ及び９３Ｃが開路■シ、モータ（至
）が電源、） リ−らしゃ断嘔□れて、、停止し、又り
Ｖ−，８３′、の附ｖｄｉ Ｊ’ｒ’Ｆ カｔＬ、第１
図及び第２図の回路状態に：戻□る。勿論、貼Ｙ；部７
３は発光停止する。為、上記運転表示灯り消灯°ｒる４
以上のａｔｘ ＜”’、、本発明によれｔ、ｌ： 、監
視回路が接続される極の電位金、制御リレー回路の負荷
投入指令用及び負１ｔｉｊ ｌシや１町指令用リレーが
、夫々接続される極の亀、位の中＋ｕｊ ｇ位とすると
共に、監視□回路２づの″門氷灯＊Ｗｂ、回路を互い腎
逆向竺の単一方向通電回路と、し監視回路と制ψ１すＶ
−回路ヶつなぐ連絡線に２方向の電流をＯ）こす構成と
したことによｐ１一つの負荷増に対し１本の連絡線を増
設すればよいので、負荷数が増力１１ずればするｆ！ｌ
ど連絡線の本数が従来ｅこ比して大＋１Ｊに少なくて済
む上、従来の２つの爽承り、Ｊ躯Ｎｂ回路金逆ｉｌ１列
接続にし、上記２つのリレーを切替る為のり替用すレー
金附加し、？ｔｃ源から上記中間屯泣金取出−！−だけ
でよいので部分的な複雑化金招くことなく上記効果が得
られる利点が私、る。When this operating state Vc6 is present, the load cutoff command switch 7
8 is turned on, the light emitting section 73 turns on the switch 7.6.
Therefore, since it is short-circuited, a current flows through the switch 78 at the two points dM shown in the figure, and the current flows through the switch 78.
If the level is load/load, operation of relay 82 for 191 command m0
1r, rise to level 1- □11.
1v1. □For this reason, the relay 82 operates, the contact 82a opens, and the electromagnetic switch 9301ift force is released.
Contacts 931, 93b and 93C are open, and the motor (to) is the power supply. , 1st
Return to the circuit state shown in Figures and Figure 2. Of course, paste Y; Part 7
3 stops emitting light. Therefore, the above-mentioned operation indicator light turns off °r4 or more atx <"', according to the present invention, the potential of the pole to which the monitoring circuit is connected, for the load input command of the control relay circuit, and the negative 1tij. The relays for 1 and 1 town commands are respectively connected to the middle +uj and g positions of the poles, and the monitoring □ circuit 2's gate ice light *Wb, the circuits are connected to each other in a single direction opposite to each other. Directional energization circuit, monitoring circuit and control ψ1V
- By adopting a configuration in which current is passed in two directions through the connecting wire connecting the circuits, it is only necessary to add one connecting wire for each increase in load (p1), so the number of loads shifts by 11 points (f). l
The number of connecting wires can be reduced to 1 J compared to the conventional e-coil, and the conventional two relays are connected in one row with the J-frame Nb circuit metal reverse il, and the two relays mentioned above can be switched. With the addition of money? Extracting the above intermediate tonne money from the TC source! I have the advantage that the above effect can be obtained without incurring partial complications because only - is required.
４図而の簡Ｊ１惜ンよ説明
第１図ｅよ本発明による負ｒｉＩ′ｉ監４１ ｉ！ｔｌ
ｌ呻装置の実装置の回路図、第２図は上記実施例の負荷
運転時の回路図、第３図は上記夷ＭｆＪ例における負萌
駆ＪＩＩｂ回路図でるる、
１・・・信号１１ｆ倣
２・・・高電位物
３・・・低軍位極
４．５・・・＋ｉｉ位線
電線・・連絡線
７・・・監視回路
８・・・制御リレー回路
７１．７３・・・ホトカプラの発光部
１２．７４・・・ダイオード
７５．７６・・・ｇ整抵抗
１１・・・負荷投入指令用・ｒツチ
７Ｂ・・・負荷しゃ断指令スイツブー
ｔｉｔ・・・負荷投入指令用リレー
８２・・・負荷しゃ断指令用リレー
８３・・・切換リレー
Ｂ１１，８３１）−接点
代理人 弁理士 桑 原 英 １！Ｉｊ、第３図4. Simple explanation of Figure 1 e. Negative riI'i supervision according to the present invention 41 i! tl
Figure 2 is a circuit diagram of the actual device of the above-mentioned example during load operation, Figure 3 is a circuit diagram of negative drive JIIb in the above-mentioned MfJ example, 1... Signal 11f imitation 2...High potential object 3...Low power pole 4.5...+II position wire...Connection line 7...Monitoring circuit 8...Control relay circuit 71.73...Photocoupler Light emitting part 12.74...Diode 75.76...G rectifying resistor 11...For load application command/rtut 7B...Load cutoff command switch boot tit...Relay for load application command 82... Load cutoff command relay 83...Switching relay B11, 831) - Contact agent Patent attorney Hide Kuwahara 1! Ij, Figure 3
Claims (1)
と低Ｔ毬位極金作る為の第１の電位線及び′第２の電位
線、上紀高電位極と低電位極の夫々に接続葛ｔした負荷
投入指令用リレー及び負荷しゃ断」旨令用リレー及び両
すレー金切換える為の負荷投入直後に動作する切換用リ
レーの接点金具える制御リン二回路、上記中間電極に接
続式れる監視回路、上記制御リレー回路と上記監視回路
をつなぐ連絡線金有し、この監視回路が、ＪＩｔ、ｍ阻
止方向を互いに逆にするｔ）５−一方向通亀の２つの表
示灯駆動回路を具える□と共に両表示灯駆動回路金夫々
の通電向きにバイパス可能な負荷投入指令スイッチと負
荷しや断Ｊｉｉ金スイッチケ具えていること全特徴とす
る負荷監視制御装置。Monitor board 11! A first potential line and a second potential line are connected to the high potential electrode and the low potential electrode, respectively, to make the electrodes with the bipolar potential and the low T-level electrode metal. 2 control circuits containing the contact metals of the relay for commanding the load to be turned on and the relay for commanding the load to be turned off, and the switching relay that operates immediately after the load is turned on to switch the relays, and the monitoring circuit connected to the intermediate electrode. , has a connecting wire connecting the control relay circuit and the monitoring circuit, and this monitoring circuit includes two indicator light drive circuits with JIt, m blocking directions mutually reversed. The load monitoring control device is characterized in that it is equipped with a load-on command switch and a load-off switch that can be bypassed in the energization direction of both indicator light drive circuits.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12961182A JPH0237755B2 (en) | 1982-07-27 | 1982-07-27 | FUKAKANSHISEIGYOSOCHI |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12961182A JPH0237755B2 (en) | 1982-07-27 | 1982-07-27 | FUKAKANSHISEIGYOSOCHI |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5921193A true JPS5921193A (en) | 1984-02-03 |
| JPH0237755B2 JPH0237755B2 (en) | 1990-08-27 |
Family
ID=15013738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12961182A Expired - Lifetime JPH0237755B2 (en) | 1982-07-27 | 1982-07-27 | FUKAKANSHISEIGYOSOCHI |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237755B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62115745U (en) * | 1986-01-16 | 1987-07-23 | ||
| JPS6321877A (en) * | 1986-07-16 | 1988-01-29 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
| US5110751A (en) * | 1990-02-26 | 1992-05-05 | Rohm Co., Ltd. | Method of manufacturing a compound semiconductor device |
| WO1998028725A3 (en) * | 1996-12-20 | 1998-09-03 | Pepperl & Fuchs | Sensor and evaluation system, in particular for double sensors for determining end positions and limit values |
-
1982
- 1982-07-27 JP JP12961182A patent/JPH0237755B2/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62115745U (en) * | 1986-01-16 | 1987-07-23 | ||
| JPS6321877A (en) * | 1986-07-16 | 1988-01-29 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
| US5110751A (en) * | 1990-02-26 | 1992-05-05 | Rohm Co., Ltd. | Method of manufacturing a compound semiconductor device |
| US5296728A (en) * | 1990-02-26 | 1994-03-22 | Rohm Co., Ltd. | Compound semiconductor device with different gate-source and gate-drain spacings |
| WO1998028725A3 (en) * | 1996-12-20 | 1998-09-03 | Pepperl & Fuchs | Sensor and evaluation system, in particular for double sensors for determining end positions and limit values |
| US6429786B1 (en) | 1996-12-20 | 2002-08-06 | Pepperl + Fuchs Gmbh | Sensor and evaluation system, in particular for double sensors for determining positions and limit values |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0237755B2 (en) | 1990-08-27 |
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