JPS59200083A - Pump - Google Patents
PumpInfo
- Publication number
- JPS59200083A JPS59200083A JP58075383A JP7538383A JPS59200083A JP S59200083 A JPS59200083 A JP S59200083A JP 58075383 A JP58075383 A JP 58075383A JP 7538383 A JP7538383 A JP 7538383A JP S59200083 A JPS59200083 A JP S59200083A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- unimorph
- unimolf
- size
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000007789 sealing Methods 0.000 claims description 7
- 238000012856 packing Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 239000000470 constituent Substances 0.000 claims 4
- 239000007788 liquid Substances 0.000 abstract description 12
- 239000000446 fuel Substances 0.000 abstract description 7
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000010276 construction Methods 0.000 abstract 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
【発明の詳細な説明】
く技術分野〉
本発明は流体を加圧する振動部に電気を振動に直接変換
する圧電磁器薄板と金属製薄板を貼り合わせたユニモル
フ振動子を用いたポンプに関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a pump that uses a unimorph vibrator in which a piezoelectric ceramic thin plate and a metal thin plate are bonded together to directly convert electricity into vibration in a vibrating part that pressurizes a fluid.
〈従来技術〉
従来のポンプは、電動機やツレ/イドを使い、羽根車や
ピストン又はプランジャーを作動させその回転運動や往
復運動により、液体燃料に遠心力を与えて吐出したり、
シリング−内容積の拡大と縮小により吐出したりする構
造であった。しかし、この従来のポンプでは、液体燃料
に直接作用する羽根車やピストン又はプランツヤ−等は
、電気信号を与えても自ら運動できず、羽根車やピスト
ンは電動機の回転運動を伝達軸により受け、またプラン
ジャーはソレノイドに流れる電流による磁界(電磁力)
によりその働ぎを行うものであるが、このような中間的
な伝達機構を持つことは、ポンプ白木の大型化を招き、
また内部構造を複雑にしていた。<Prior art> Conventional pumps use electric motors and shafts to operate impellers, pistons, or plungers, and their rotational and reciprocating motion applies centrifugal force to liquid fuel and discharges it.
Schilling - It had a structure that discharged by expanding and contracting the internal volume. However, in this conventional pump, the impeller, piston, planter, etc. that act directly on the liquid fuel cannot move by themselves even if an electric signal is applied. In addition, the plunger has a magnetic field (electromagnetic force) caused by the current flowing through the solenoid.
However, having such an intermediate transmission mechanism leads to an increase in the size of the pump plain wood.
Moreover, the internal structure was complicated.
〈目的〉
そこで本発明は、上記の点に鑑み、電気エネルギーを往
復運動である振動に直接変換するユニモルフ振動子をポ
ンプの機構部に用いることにより、構造を簡単にしかつ
小型化するとともに、相料費低減および生産性向上を図
り得るポンプの提供を目的としている。<Purpose> In view of the above points, the present invention uses a unimorph vibrator, which directly converts electrical energy into reciprocating vibration, in the mechanical part of the pump, thereby simplifying and downsizing the structure, and achieving a mutually The aim is to provide a pump that can reduce costs and improve productivity.
〈実施例〉
以下、本発明の実施例を図面に基づいて説明する。まず
本発明の流体用例えば液体燃料用の液送ポンプの一例を
、一枚の円板状ユニモルフ振動子を用いすこ場合につい
て図面と共に説明する。<Example> Hereinafter, an example of the present invention will be described based on the drawings. First, an example of a liquid feed pump for fluid, for example, liquid fuel, according to the present invention will be described with reference to the drawings, with reference to a case where a single disc-shaped unimorph vibrator is used.
第1.2.3図は夫々液送ポンプの平面図、断面図、底
面図であり、第4,5図は夫々その振動部に用いられる
一枚の圧電磁器薄板に一枚の金属製薄板を貼り合すせた
円板状ユニモルフ振動子の底面図、断面図である。Figures 1, 2, and 3 are a plan view, a sectional view, and a bottom view of the liquid pump, respectively, and Figures 4 and 5 are a piezoelectric ceramic thin plate and a metal thin plate used for the vibrating part, respectively. FIG. 2 is a bottom view and a cross-sectional view of a disc-shaped unimorph resonator bonded together.
第1. 、2 、3図において、1は振動部に圧電磁器
薄板くピエゾ素子)2を用いた円板状のユニモルフ振動
子であり、三個の構成片からなるポンプ本体3の内部の
液体加圧部4に、その容積を拡大、縮小させる如く円板
状のユニモルフ振動子1が配置されている。5は前記圧
電磁器薄板2と共にユニモルフ振動子1を構成する金属
製薄板、6は吐出側逆止弁、7は吸入側逆止弁、8は吐
出側継手、9は導線、10はユニモルフ振動子の外周部
を固定しかつ加圧部4を密閉するパツキン、11は吸入
側継手である。1st. , 2 and 3, 1 is a disk-shaped unimorph vibrator using a piezoelectric ceramic thin plate (piezo element) 2 in the vibrating part, and a liquid pressurizing part inside the pump body 3 consisting of three components. A disk-shaped unimorph resonator 1 is arranged at 4 so that its volume can be expanded or contracted. Reference numeral 5 denotes a metal thin plate that constitutes the unimorph vibrator 1 together with the piezoelectric ceramic thin plate 2, 6 a discharge side check valve, 7 a suction side check valve, 8 a discharge side joint, 9 a conductive wire, and 10 a unimorph vibrator. A gasket 11 is a suction side joint that fixes the outer circumference of the pump and seals the pressurizing part 4.
上記構造の液送ポンプにおいて、ユニモルフ振動子1に
接続されている導線9に一定周波数の正負の電圧を印ツ
ノ1けると、第5図(a)、 (b)の如く、ユニモル
フ振動子1は凹凸状に交互に変形する。In the liquid pump having the above structure, when positive and negative voltages of a constant frequency are applied to the conductor 9 connected to the unimorph oscillator 1, the unimorph oscillator 1 as shown in FIGS. 5(a) and 5(b) is deformed alternately into a concave and convex shape.
このユニモルフ振動子1の前方に2個の逆止弁6゜7が
あり、ユニモルフ振動子1が第5図(1〕)の如く凹状
に変化するとき、吐出側逆止弁6は閉じ、吸入側逆止弁
7が開き液体燃料は液体加圧部4に流入する。There are two check valves 6°7 in front of the unimorph oscillator 1, and when the unimorph oscillator 1 changes into a concave shape as shown in FIG. 5 (1), the discharge side check valve 6 closes and the suction side The side check valve 7 opens and liquid fuel flows into the liquid pressurizing section 4.
次にユニモルフ振動子1が第5図(ll)の如く平面状
ないし凸状に変化するとき、吸入側逆止弁7は閉じ、吐
出側逆止弁6が開き液体加圧部4にある1本燃料は、吐
出側逆止弁6を通))圧送される。Next, when the unimorph vibrator 1 changes from a planar shape to a convex shape as shown in FIG. 5 (ll), the suction side check valve 7 closes and the discharge side check valve 6 opens. This fuel is fed under pressure through the discharge side check valve 6).
なおユニモルフ振動子1は導線9に一定周波数の正負の
電圧を印加すると、第5図(a)、(1+)の如く凹凸
状に交互に変形するが、その大外さΔIは電圧の大きさ
に比例したたわみ量で得られ、ポンプの吐出流量を電圧
により制御できることになる。When a positive and negative voltage of a constant frequency is applied to the conductor 9, the unimorph resonator 1 deforms alternately into concave and convex shapes as shown in FIG. A proportional amount of deflection can be obtained, and the discharge flow rate of the pump can be controlled by voltage.
次に、本発明実施例の要部を第6図以降についてさらに
詳細に説明する。Next, the main parts of the embodiment of the present invention will be explained in more detail with reference to FIG. 6 and subsequent figures.
第6,7図の如く、ユニモルフ振動子1は円板状の薄板
であり、その特徴を製品の形として又祠料費低減や生産
性(成形、加工、組立)の向上のために、ポンプ本体3
は第一構成片12、第二構成片13、第三構成片14の
三個に分割される。第6図の第一構成片12には、液体
燃料の吐出側接続継手8、吸入側接続継手j1、と、各
継手8゜11に貫通形成された第一吸入通路15、第二
吐出通路16、各通路15.16の一端側に形成された
吸入側弁座17、吐出側弁退部18及び密閉用パツキン
溝19が設けられる。第7図の第二構成片13には、吐
出側弁座20、その中央部を貫通する第二吐出通路21
と吸入側弁退部22、第二吸入通路23、更に密閉用パ
ツキン溝32及びクッション兼密閉用パツキン支持面2
4aが設けられている。第三構成片14には、ユニモル
フ振動子1の支持面25、クッション兼密閉用パツキン
支持面241〕が設けられる。As shown in Figures 6 and 7, the unimorph oscillator 1 is a disk-shaped thin plate, and the pump was designed to take advantage of its characteristics in the form of a product and to reduce grinding costs and improve productivity (molding, processing, assembly). Main body 3
is divided into three pieces: a first component piece 12, a second component piece 13, and a third component piece 14. The first component 12 in FIG. 6 includes a liquid fuel discharge side connection joint 8, a suction side connection joint j1, and a first suction passage 15 and a second discharge passage 16 formed through each joint 8°11. , a suction side valve seat 17, a discharge side valve recess 18, and a sealing gasket groove 19 are provided at one end side of each passage 15,16. The second component piece 13 in FIG. 7 includes a discharge side valve seat 20 and a second discharge passage 21 passing through the center thereof.
and the suction side valve recess 22, the second suction passage 23, the sealing gasket groove 32, and the cushion-cum-sealing gasket support surface 2.
4a is provided. The third component piece 14 is provided with a support surface 25 for the unimorph vibrator 1 and a cushion/sealing packing support surface 241].
なお、ユニモルフ振動子1の支持面25は、第14図の
変形側の如く第二構成片13に設けることもできる。Note that the support surface 25 of the unimorph vibrator 1 can also be provided on the second component piece 13 as shown on the modified side in FIG.
また三分割した第一構成片12、第二構成片13、第三
構成片14の結合には、その締結用ネジ孔33、同じく
通孔33aと締結用ネジ34又は接着剤等の手段が用い
られる。そして前記第−構成片12、第二構成片13、
第三構成片14の形状は、@9図(a)の如く同一径の
丸形26や、第9図(b)の如く同一の三角形27、又
は第9図(c)の如く同一の四角形28とされ、その中
心からの最大寸法Rはユニモルフ振動子1の半径rの1
゜2〜2倍とされる。例えば、半径rの小さいユニモル
フ振動子1の場合、その半径1・力弓Ommの時、ポン
プ本体3の大きさは、ユニモルフ振動子の大きさの1.
5〜2倍である15〜20mmとされ、半径rか25m
mと大きい時、ユニモルフ振動子の1.2−1.6倍で
ある3 0−−40nonの大きさとされる。Further, to connect the first component piece 12, second component piece 13, and third component piece 14, which are divided into three parts, the fastening screw hole 33, the same through hole 33a and the fastening screw 34, or means such as adhesive are used. It will be done. and the first component piece 12, the second component piece 13,
The shape of the third component piece 14 is a round shape 26 with the same diameter as shown in @9(a), a same triangular shape 27 as shown in FIG.9(b), or a same square shape as shown in FIG.9(c). 28, and the maximum dimension R from the center is 1 of the radius r of the unimorph resonator 1.
゜2 to 2 times. For example, in the case of a unimorph vibrator 1 with a small radius r, when the radius is 1 and the power bow is Omm, the size of the pump body 3 is 1.
It is 5 to 2 times 15 to 20 mm, and the radius is r or 25 m.
When m is large, the size is 30 to 40 non, which is 1.2 to 1.6 times that of a unimorph oscillator.
この大きさが三分割した第一、第二、第三構成片12,
13.14を結合するためと、ユニモルフ振動子1を支
持するための最適小形化寸法である。The first, second, and third component pieces 12 are divided into three by this size,
13 and 14 and for supporting the unimorph resonator 1.
次に三分割した第一、第二、第三構成片の結合した厚み
Tについては、第10.13図の様に吸入側接続継手1
1と吐出側接続継手8、及びネジ34の頭部の高さ司法
を除外、15〜30mmの大きさとする。例えば第一構
成片12と第二構成片13との間に吸入側逆止弁7と吐
出側逆止弁6の二個の逆止弁が位置するが、この逆止弁
の形式が第10.11図のような切目30aを有するリ
ング弁30や、第12図の切目29aを有する一対の弁
6,7を具えたり−ド弁29のような形式のものは、ポ
ンプ全体を薄く設計することが可能となり、厚みTを1
5〜20mmにすることができる。Next, regarding the combined thickness T of the first, second, and third components divided into three parts, as shown in Figure 10.13, the suction side connection joint 1
1, the discharge side connection joint 8, and the height of the head of the screw 34, excluding the height, shall be 15 to 30 mm. For example, two check valves, the suction side check valve 7 and the discharge side check valve 6, are located between the first component piece 12 and the second component piece 13. .For types such as the ring valve 30 having a cut 30a as shown in Figure 11 or the door valve 29 equipped with a pair of valves 6 and 7 having a cut 29a as shown in Figure 12, the entire pump is designed to be thin. This makes it possible to reduce the thickness T to 1
It can be 5 to 20 mm.
なお、第13図の如き逆止弁6,7にチェックスプリン
グ形式のスプリング31と球弁32を利用したものは、
20〜30mmの厚みTを必要とする。In addition, a check valve 6, 7 using a check spring type spring 31 and a ball valve 32 as shown in FIG.
A thickness T of 20 to 30 mm is required.
く効果〉
以上の説明から明らかな通り、本発明によれば、下記の
効果が期待できる。Effects> As is clear from the above description, according to the present invention, the following effects can be expected.
(イ)ユニモルフ振動子の利用により、機能及び構造が
簡素化され、小型化が可能となる。(b) By using a unimorph resonator, the function and structure are simplified and miniaturization becomes possible.
(ロ)機能部品点数が少なくなり、各部品形状精度の累
積影響度が小さくなり高品質が望める。(b) The number of functional parts is reduced, and the cumulative influence of shape accuracy of each part is reduced, so high quality can be expected.
(ハ)従来の中間伝達機構が省け、この機構における損
失がなくなり高効率が望める。(c) The conventional intermediate transmission mechanism can be omitted, and loss in this mechanism can be eliminated, resulting in high efficiency.
(ニ) コスト的に安価なものとなる。(d) It is inexpensive in terms of cost.
(ホ)往復運動がないため、摩耗なじみによる品質トラ
ブルがない。(e) Since there is no reciprocating movement, there are no quality problems due to wear and tear.
(へ)電圧の大きさによりリニアに吐出量を制御できる
。(f) The discharge amount can be controlled linearly by the magnitude of the voltage.
(ト)ポンプ本体は第一、第二、第三の構成片から構I
&すれているので、この本体を一体的に形成する場合に
比して、材料、生産面での低コスト化が図れ、形状にお
いて軽く、薄く、小型化できる。(g) The pump body consists of first, second, and third component pieces.
Since the main body is formed in one piece, costs can be reduced in terms of materials and production, and the shape can be made lighter, thinner, and smaller.
図面は本発明の実施例を示すもので、第1図は一実施例
の全体の一部切欠乎面図、第2図は同縦断面図、第3図
は同一部切欠底面図、第4図はユニモルフ振動子の底面
図、第5図(a)、(b)はユニモルフ振動子の作動説
明用断面図、第6図(a)、(b)、(C)は夫々第一
構成片の平面図、縦断面図、底面図、第7図(a)、(
b)、(c)は夫々第二構成片の平面図、縦断面図、底
面図、第8図(a)、 (+))、 (C)は夫々第三
構成片の平面図、縦断面図、底面図、第9図(a)、
(b)、(c)は夫々異なる変形例における底面側全体
斜視図、第1()図は一実施例の全体側面図、第11図
は同逆止弁の平面図、第12図は逆止弁の変形例の平面
図、第13図は他の変形例の全本側面図、第14図はさ
らに別の変形例の全体縦断面図である。
1:ユニモル7振動子、3:ポンプ本体、6,7:逆止
弁、8:吐出側接続継手、10:加圧部密閉用パツキン
、11:吸入側接続継手、12:第一構成片、13:第
二構成片、14:第三構成片、15:第一吸入通路、1
6:第一吐出通路、17二吸入側弁座、20:吐出側弁
座、21:第二吐出通路、23:第二吸入通路、24a
、24b:パツキン支持面、25:ユニモルフ振動子の
支持面。
出 願 人 シャープ株式会社
代理人 中村恒久
第6図 第7図
(a) (a)
第9図
第10図
第14図The drawings show an embodiment of the present invention, and FIG. 1 is a partially cutaway top view of the entire embodiment, FIG. 2 is a longitudinal sectional view of the same, FIG. 3 is a partially cutaway bottom view of the same, and FIG. The figure is a bottom view of the unimorph resonator, FIGS. 5(a) and (b) are sectional views for explaining the operation of the unimorph resonator, and FIGS. 6(a), (b), and (C) are the first component pieces, respectively. Plan view, vertical sectional view, bottom view, Fig. 7(a), (
b) and (c) are respectively a plan view, a vertical cross-sectional view, and a bottom view of the second component; FIG. 8 (a), (+)) are respectively a plan view and a vertical cross-section of the third component Figure, bottom view, Figure 9(a),
(b) and (c) are perspective views of the entire bottom side of different modifications, Figure 1 () is an overall side view of one embodiment, Figure 11 is a plan view of the same check valve, and Figure 12 is a reverse view of the check valve. FIG. 13 is a plan view of a modification of the stop valve, FIG. 13 is a side view of another modification, and FIG. 14 is a longitudinal sectional view of still another modification. 1: Unimol 7 vibrator, 3: Pump body, 6, 7: Check valve, 8: Discharge side connection joint, 10: Pressure part sealing seal, 11: Suction side connection joint, 12: First component piece, 13: second component piece, 14: third component piece, 15: first suction passage, 1
6: first discharge passage, 17 second suction side valve seat, 20: discharge side valve seat, 21: second discharge passage, 23: second suction passage, 24a
, 24b: Packing support surface, 25: Unimorph resonator support surface. Applicant Sharp Corporation Agent Tsunehisa Nakamura Figure 6 Figure 7 (a) (a) Figure 9 Figure 10 Figure 14
Claims (1)
ユニモルフ振動子が設けられ、被圧送物の吸入通路と吐
出通路に夫々逆止弁が設けられたポンプにおいて、ポン
プ本体(3)は互に刷本に形成された第一構成片(12
)、第二構成片(13)、第三構成片(14)が互に順
次固定されて構成され、前記第一構成片(12)には被
圧送物の吸入側接続継手(11)、吐出側接続継手(8
)、各継手に貫通状態で形成された第一吸入通路(15
)、第一吐出通路(16)及び吸入側弁座(17)が設
けられ、前記第二構成片(13)には、吐出側弁座(2
0)、第二吸入通路(23)、第二吐出通路(21)及
び加圧部密閉用パツキン(10)の支持面(24a)が
設けられ、前記第三構成片(14)には、加圧部密閉用
パツキン支持面(24b)が設けられ、前記第二、第三
の構成片(13,14)の一方にユニモルフ振動子(1
)の支持面(25)が設けられたことを特徴とするポン
プ。In a pump in which a unimorph vibrator that directly converts electricity into vibration is provided in the vibrating part that pressurizes the material to be pressurized, and check valves are provided in the suction passage and the discharge passage of the material to be pressurized, the pump body (3) is The first constituent pieces (12
), a second constituent piece (13), and a third constituent piece (14) are fixed to each other in sequence, and the first constituent piece (12) has a suction side connection joint (11) for the pressurized material, and a discharge side connection joint (11). Side connection joint (8
), a first suction passage (15
), a first discharge passage (16) and a suction side valve seat (17), and the second component (13) is provided with a discharge side valve seat (2).
0), a second suction passage (23), a second discharge passage (21), and a support surface (24a) for the pressurized part sealing gasket (10), and the third component (14) is provided with a A pressure part sealing packing support surface (24b) is provided, and a unimorph vibrator (1) is provided on one of the second and third component pieces (13, 14).
) A pump characterized in that it is provided with a support surface (25).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58075383A JPS59200083A (en) | 1983-04-27 | 1983-04-27 | Pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58075383A JPS59200083A (en) | 1983-04-27 | 1983-04-27 | Pump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59200083A true JPS59200083A (en) | 1984-11-13 |
Family
ID=13574611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58075383A Pending JPS59200083A (en) | 1983-04-27 | 1983-04-27 | Pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59200083A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4944659A (en) * | 1987-01-27 | 1990-07-31 | Kabivitrum Ab | Implantable piezoelectric pump system |
US5542921A (en) * | 1994-11-04 | 1996-08-06 | Gerber Products Company | Electric breast pump |
CN108506195A (en) * | 2017-02-24 | 2018-09-07 | 研能科技股份有限公司 | Fluid delivery system |
CN108506196A (en) * | 2017-02-24 | 2018-09-07 | 研能科技股份有限公司 | Fluid delivery system |
CN110863977A (en) * | 2018-08-27 | 2020-03-06 | 研能科技股份有限公司 | Miniature fluid conveying device |
US10598169B2 (en) | 2017-02-24 | 2020-03-24 | Microjet Technology Co., Ltd. | Fluid transportation device comprising a valve body, a valve membrane, a valve chamber seat, and an actuator each sequentially stacked within a accommodation space of an outer sleeve having a ring-shaped protrusion structure |
-
1983
- 1983-04-27 JP JP58075383A patent/JPS59200083A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4944659A (en) * | 1987-01-27 | 1990-07-31 | Kabivitrum Ab | Implantable piezoelectric pump system |
US5542921A (en) * | 1994-11-04 | 1996-08-06 | Gerber Products Company | Electric breast pump |
CN108506195A (en) * | 2017-02-24 | 2018-09-07 | 研能科技股份有限公司 | Fluid delivery system |
CN108506196A (en) * | 2017-02-24 | 2018-09-07 | 研能科技股份有限公司 | Fluid delivery system |
US10598169B2 (en) | 2017-02-24 | 2020-03-24 | Microjet Technology Co., Ltd. | Fluid transportation device comprising a valve body, a valve membrane, a valve chamber seat, and an actuator each sequentially stacked within a accommodation space of an outer sleeve having a ring-shaped protrusion structure |
CN108506196B (en) * | 2017-02-24 | 2020-04-21 | 研能科技股份有限公司 | Fluid delivery device |
CN110863977A (en) * | 2018-08-27 | 2020-03-06 | 研能科技股份有限公司 | Miniature fluid conveying device |
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