JPS59182338A - Optical measuring device - Google Patents

Abstract

PURPOSE:To take a high-precision measurement by making an optical element stable to large-output laser light in a measuring device for the fine amounts of absorption of optical products for a laser, and to support optical products in various shapes easily by improving a supporting mechanism. CONSTITUTION:A sample 9 to be measured is placed in a calorie meter container 8' by a three-point supporting two-axis angle adjusting support 13. The calorie meter container has double structure and cooling water 20 under temperature control is flowed between the internal wall 8 and external wall 8''. Measuring laser light 2 from an infrared laser 1 and a visible light beam 11 for alignment from an He-Ne laser 10 are superposed on each other by a holed mirror 3 whose heat generation is suppressed and strike the sample 9. When the sample 9 is made of transparent parts, transmitted light is made incident to a power meter 15 and its reflected light enters an absorber 12. The heat generation of the sample 9 resulting from the passing of the laser light for measurement is measured by a thermocouple 18.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an optical measuring device for measuring the weak absorption amount of optical products in the field of optical products for lasers.

Conventional Structure and Problems Conventionally, this type of measurement method has been used as a method that allows relatively easy measurement of low absorption amounts.

FIG. 1 is a schematic diagram of a conventional measuring device. Laser light 2 from an infrared laser (C02) 1 is separated by a beam splitter 3 into transmitted light 4 and reflected light 4'. The laser beam 4' reflected by the beam splitter 3 is
A power meter 6 constantly monitors the laser output. - The transmitted laser beam 4 passes through the printer 6 and the transparent window 7 and is irradiated onto the object to be measured 9 placed in the calorimeter container 8 . To facilitate the alignment of the measurement sample 9 and the laser beam 4, He-N
A visible light beam 11 from an e-laser 10 is reflected by a beam sinter 3 and superimposed on a laser beam 4 for measurement. The measurement sample 9 is protected from air circulation with the outside by the calorimeter container 8 described above in order to improve the stability of the surrounding temperature. Furthermore, the measurement sample 9 is supported by two threads 12 and is mounted on a bench that can be moved up and down in order to minimize the loss of heat generated by the passage of the incident measurement laser beam 4 and to minimize the contact area. It is listed on 13.

The measurement laser beam 4 that has passed through the sample 9 passes through a transmission window 14 at the rear and is received by a power meter 16.
After being amplified by an amplifier 16, it is recorded by a recorder 17.

The heat generated as the measurement laser beam 4 passes through the sample 9 in the calorimeter container 8 is measured by a thermocouple 18 attached to the surface of the sample 9 with adhesive or the like.
The signal is amplified by an amplifier 19 and then recorded by a recorder 17. In such conventional devices, the measurement sample is generally suitable for a rod-shaped sample (for example, about 1010X1X1), and is used as a means of elucidating the physical characteristics of transparent optical materials, and generally used laser optical products, It is unsuitable for evaluating finished products such as total reflection mirrors and transparent windows. The reason for this is that the reflectance of the measurement sample ranges over a wide range, making it difficult to process the reflected light, especially in the case of a reflecting mirror.Another reason is that the measurement sample has a variety of shapes, especially when used outside. The diameter ranges from 25mm to 150mm.
However, the sample thickness is generally around 3 mm, which means that less heat is generated during measurement. Measurement: In order to increase the intensity, a measurement light with high output (for example, 200 W or more) is required. However, in the case of the conventional method, it is necessary to use a transparent material (such as ZnSe) for the beam splitter. This beam splitter generates heat in response to high-output laser light, which increases the instability of splitting reflected light and passing light, and causes beam position deviation, making highly accurate measurements difficult. A problem has arisen.

Purpose of the Invention The present invention provides an optical measurement device that improves the drawbacks of the prior art and enables optical evaluation of practical laser optical products with high accuracy and stability. It is.

Structure of the Invention In the present invention, in order to stably and accurately measure the weak absorption amount of various practical laser optical products,
It has a reflector with a hole for visible light superimposition that can be used for a 600W (W) light source, and a three-point support mechanism that makes it easy to support optical products of various shapes. The calorimeter container has a function that can adjust the angle on two axes so that it can be used even in This is an optical measurement device characterized by a layered structure that allows temperature-controlled cooling water to pass through it.

DESCRIPTION OF EMBODIMENTS FIG. 2 is a schematic diagram of an embodiment according to the present invention. The laser beam 2 from the infrared laser (C02) 1 is transmitted to the shutter 6
It is controlled by opening and closing of the visible light laser, and is separated into reflected laser light 4 and partially transmitted light 4' by a mirror 3 with a hole for superimposing visible light laser. The transmitted light 4' is arranged to be absorbed by a power meter or absorber 6.

The measuring laser beam 4 reflected by the holed mirror 3 is beam-shaped by the aperture σ and then guided into the calorimeter container 8 through the transparent window 7.

In order to facilitate alignment of the measurement sample 9 and the measurement laser beam 4, the visible light beam 11 from the He-Ne laser 10 passes through the opening of the mirror 3 with a hole and is superimposed on the measurement laser beam 4.

The measurement sample 9 in the calorimeter container 8 is attached to a sample support 13 having three support contacts each having a dotted, linear, or linear contact portion. Sample support 13
is configured, for example, as shown in FIG.

An angle adjustment plate 133 is attached to the support housing 131 by two center pins 132, upper and lower, and its angle is adjusted left and right by left and right angle adjustment screws 134. The substrate support ring 135 has a tilt angle center pin 136 provided at a position orthogonal to the rotation axis of the center pin 132.
Due to this, it is attached to the angle adjustment plate 133.
An angle adjustment screw 137 allows the angle to be adjusted in the vertical direction. The measurement sample 9 is attached to the substrate support ring 136
It is supported at its outer periphery by a 31-strong board support pin 138 provided on the board. Reflected light 4' on the measurement sample 9 of the measurement laser beam 4 incident on the measurement sample 9
is an angle adjustment screw 134 provided on the substrate support 13
It has an angle adjustment mechanism that can control the direction of reflection by +i37 and make the reflected light 4'' enter the calorimeter or the absorber 12.

When the sample 9 is a transparent optical component, the measurement laser beam 4 that has passed through the sample 9 passes through the opening 139 provided in the substrate support housing 131 and passes through the transmission window 14 at the rear. , is received by a power meter 15, amplified by an amplifier 16, and then recorded by a recorder 17. When the power meter 16 is installed at the position of the transmission window 14 or behind the measurement sample 9 in the calorimeter container 8, the transmission window 14 is not necessarily required.

In order to measure the heat generated as the measurement laser beam 4 passes through the sample 9 in the calorimeter container 8, the first contact point is provided on the outer peripheral surface of the sample 9 and is in contact with the calorimeter container 8. A thermocouple 18 having a second contact and using the second contact as a reference temperature is installed, and its output is recorded by a recorder 17 via an amplifier 19. The calorimeter container 8 (has a double structure, allowing cooling water 20 to flow between the inner wall 8' and the outer wall 8''. If necessary, measurements can be taken even when the cooling water is stopped.If the temperature is not controlled, the cooling water will be in a running state, and if there is no temperature control, the cooling water will not flow and it will be insulated. The former is effective for long-term measurements, while the latter is effective for short-term measurements.

In this case, depending on the shape of the calorimeter container 8, the double structure of the calorimeter container 80 does not necessarily need to be provided on the entire wall. A similar effect can be obtained by creating a double structure.

Furthermore, the calorimeter container 8 has a function of maintaining the inside of the container in a vacuum state, and is capable of handling large samples (KCI) with poor thermal conductivity.
plays an important role in improving measurement precision and stability in the measurement of
is playing.

Note that 23 is a transparent window through which the angle of the reflected light 4'' or the abnormal state of the measurement sample 9 during measurement can be observed.

It is provided in the calorimeter container 8 so that it can be used.

The measurement results of a total reflection mirror for a CO2 laser and a transparent window measured using this device are shown below.

(1) Total reflection mirror φ76X13mm Diamond cutting, copper substrate Absorption rate: 0.70 ball 0.05 ratio Reflectance 99.3%a
Transparent window φ76 x 10mm, transmittance 92.796 double-sided mirror polish KCI substrate absorption rate: o, 11+o, 03% (3) Transparent window φ25.4 x 3mm, transmittance 82.
9% double-sided axillary polishing Zn5e substrate single side AR coating (pbF2/4) absorption rate: 0.12+0.01% As described above, according to this example, various shapes can be obtained.

Material? It has become possible to stably and accurately measure the reflectance of optical products. This is the position for measuring the superposition of He-Ne light (visible) and CO2 laser light.Since the reproducibility of the beam incidence angle is high and a high output laser light source can be used, it is possible to use transparent optical products with low absorption. Furthermore, since the container is kept in a vacuum, heat dissipation on the sample surface can be kept to a minimum and constant even in large optical products with poor thermal conductivity. moreover,
By filling the enclosure of the container with cooling water, we were able to stabilize the reference temperature, which greatly contributed to ensuring the quality of laser optical products and designing laser resonators. .

Effects of the Invention As described above, the present invention includes a reflector with a hole for superimposing an infrared laser measurement light and a visible laser beam, a casing for accommodating an object to be measured, and a visible A window section that guides the superimposed infrared laser measurement light to the object to be measured, a power measuring means provided on the opposite side of the object to the window section, and a power measuring means that measures the temperature rise of the object to be measured. temperature measuring means;
An optical measurement device comprising: a support mechanism that holds the outer circumferential surface of the object to be measured at at least three locations, and wherein the support mechanism has an angle adjustment mechanism having two rotation axes that are substantially perpendicular to each other. This method has the advantage that optical products of various shapes, materials, and reflectances can be measured stably and with high precision.

[Brief explanation of the drawing]

FIG. 1 is a schematic configuration diagram of a conventional optical measurement device, FIG. 2 is a schematic configuration diagram of an optical measurement device according to the present invention, and FIG.
(b) is a side view and a plan view of the same part. 1...C02 laser light source, 2...Beam (106μ), 3...Perforated reflector (φ25
．． 6 hole diameter 1mmφcu/Au vapor deposition), 4...Reflector (1o6μ and He-Ne light superimposed), 4'...
- Passing light (10,6μ), 4''... Reflected light from the measurement object, 5... Absorber, 6... Beam shutter, 6'...・Aperture, 7...
... Transparent window, 8 ... Calorimeter container, 8
'...Inner wall, 8'4...Outer wall, 9...
...Measurement object, 10...He-Ne laser, 1
1... Visible laser light (6328 people), 12.
...Absorber, 13 ... Sample support, 14
...Transparent window, 16...Mountain power meter, 1
6...Amplifier, 17...2 Pen recorder, 18...Thermocouple, 19...Amplifier, 2o...Cooling liquid, 21.22 ...Stop pulp.

Claims (1)

[Scope of Claims] (1) A reflector with a hole for superimposing an infrared laser measurement light and a visible laser beam, a casing for storing an object to be measured, and a casing provided in the casing to emit a visible laser beam. A window section that guides the superimposed infrared laser measurement light to the object to be measured, and a
A power measuring means provided on the opposite side of the window, a temperature measuring means for measuring the temperature rise of the object to be measured, and a support mechanism for holding the outer circumferential surface of the object to be measured at at least three places, An optical measurement device characterized in that the mechanism has an angle adjustment mechanism having two rotation axes that are substantially orthogonal to each other. (2) The optical measuring device according to claim 1, wherein the power measuring means is attached to a housing. (■ The power measurement means is installed outside the housing,
2. The optical measuring device according to claim 1, further comprising another window provided in a part of the housing between the power measuring means and the object to be measured. (4) The optical measuring device according to any one of claims 1 to 3, wherein a part or all of the housing has a double structure.