JPS59109147U - wafer storage case - Google Patents
wafer storage caseInfo
- Publication number
- JPS59109147U JPS59109147U JP247183U JP247183U JPS59109147U JP S59109147 U JPS59109147 U JP S59109147U JP 247183 U JP247183 U JP 247183U JP 247183 U JP247183 U JP 247183U JP S59109147 U JPS59109147 U JP S59109147U
- Authority
- JP
- Japan
- Prior art keywords
- storage case
- wafer storage
- case
- wafer
- lower case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハキャリアを示す斜視図、第２図は
従来のウェハ収納ケースにウェハキャリ−アを収容した
側面図、第３図は本考案の一実施例であるウェハ収納ケ
ースを示す側面図である。
図中１１・・・下部ケース、１２・・・ウェハキャリア
、１３・・・台座（段差部）、１４・・・ウェハ、１５
・・−・上部ケース、１６・・・カードボックス、１７
・・・把手。Fig. 1 is a perspective view of a conventional wafer carrier, Fig. 2 is a side view of a wafer carrier housed in a conventional wafer storage case, and Fig. 3 is a side view of a wafer storage case that is an embodiment of the present invention. It is a diagram. In the figure 11... lower case, 12... wafer carrier, 13... pedestal (step part), 14... wafer, 15
... Upper case, 16... Card box, 17
···handle.
Claims (1)
リアより構成されるウェハ収納ケースであって、複数種
類の該キャリアの脚部を保持し得るように該下部ケース
の底面に複数の段差部を設けると共に、該上部ケースを
該ウェハの湾曲部に対応した形状とし、該下部ケースへ
の装着時に該上部ケースが該ウェハを押圧しうる様にし
たことを特徴とするウェハ収納ケース。A wafer storage case consisting of an upper case, a lower case, and a carrier for holding a plurality of wafers, and a plurality of stepped portions are provided on the bottom surface of the lower case so as to be able to hold legs of a plurality of types of the carriers. The wafer storage case is also characterized in that the upper case has a shape corresponding to the curved portion of the wafer, so that the upper case can press the wafer when attached to the lower case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP247183U JPS59109147U (en) | 1983-01-12 | 1983-01-12 | wafer storage case |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP247183U JPS59109147U (en) | 1983-01-12 | 1983-01-12 | wafer storage case |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59109147U true JPS59109147U (en) | 1984-07-23 |
Family
ID=30134132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP247183U Pending JPS59109147U (en) | 1983-01-12 | 1983-01-12 | wafer storage case |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59109147U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6467933A (en) * | 1987-09-08 | 1989-03-14 | Tel Sagami Ltd | Wafer transfer system |
| JPH0388343U (en) * | 1989-12-22 | 1991-09-10 |
-
1983
- 1983-01-12 JP JP247183U patent/JPS59109147U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6467933A (en) * | 1987-09-08 | 1989-03-14 | Tel Sagami Ltd | Wafer transfer system |
| JPH0388343U (en) * | 1989-12-22 | 1991-09-10 |
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