JPS5890173A - Detecting device for deflection of accelerometer - Google Patents

Detecting device for deflection of accelerometer

Info

Publication number
JPS5890173A
JPS5890173A JP18892281A JP18892281A JPS5890173A JP S5890173 A JPS5890173 A JP S5890173A JP 18892281 A JP18892281 A JP 18892281A JP 18892281 A JP18892281 A JP 18892281A JP S5890173 A JPS5890173 A JP S5890173A
Authority
JP
Japan
Prior art keywords
pendulum
light
emitting element
receiving elements
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18892281A
Other languages
Japanese (ja)
Inventor
Michio Fukano
深野 道雄
Shigeru Nakamura
茂 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Keiki Inc
Original Assignee
Tokyo Keiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Keiki Co Ltd filed Critical Tokyo Keiki Co Ltd
Priority to JP18892281A priority Critical patent/JPS5890173A/en
Publication of JPS5890173A publication Critical patent/JPS5890173A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

PURPOSE:To facilitate zero-point adjustment by fitting a pickup holder to a base frame oppositely to a reflecting part provided on a plane perpendicular to the direction wherein a pendulum is movable, and by fitting a light-emitting element and two light-receiving elements at an angle of intersection equal to the axial line of the direction wherein the pendulum is movable. CONSTITUTION:A plate-shaped pendulum 1 for detecting acceleration is made of a material reflecting a light, and is supported by a base frame 4 at one end 3 thereof through the intermediary of a hinge 2. Moreover, a cylindrical torque coil 7 is fitted to the pendulum 1 in the direction perpendicular to the surface of the plate and driven. A differential reflection type deflection detector for detecting the deflection of the pendulum, which consists of light-receiving elements 10 and 10' and a light-emitting elements 11, is fitted to the end part positioned opposite to the hinge 2. The optical axis P-P' of the element 11 and the parallel optical axis R-R' of the elements 10 and 10' are set so that they are on the same plane and have an angle of intersection equal to the axial line of the dirction wherein the pendulum 1 is movable, and are fixed to a pickup holder 19 of the base frame 4. The holder 19 is provided with a pinhole 21, whereby the optical point of the element 11 is restricted in a prescribed manner on the reflecting surface 1a of the pendulum 1. Thus, the zero-point adjustment is facilitated and the precision in detection can be improved.

Description

【発明の詳細な説明】 本発明は、加速度1’!+の偏位検出装置、特に加速度
肘用の反則差動型の偏位検出装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention provides acceleration of 1'! The present invention relates to a + deflection detection device, particularly a foul differential type deflection detection device for acceleration elbow.

従来、小t(旨W,精度の加速度財用の偏位検出装置は
、偏位を静電界−二の変化として検出する形式のものが
多く用いらわてきたが、この形式の偏位検出装置は、助
出用の発揚器等が心安であり、電気回路が複雑になると
いう欠点を有している。
Conventionally, many displacement detection devices for acceleration goods with small t (accuracy) have been used that detect displacement as a change in the electrostatic field. The device has the disadvantage that a lifter or the like for rescue is not necessary and the electric circuit is complicated.

一方、光[素子を用いた従来の偏位検出装置は、発光素
子及び受光素子を対問して配首する透過型又は、発光素
子及び受光素子を反射板に対し同一側に配111−1る
反射型があるが、共に発光素子1個。
On the other hand, conventional deviation detection devices using optical elements are either a transmission type in which a light-emitting element and a light-receiving element are arranged face-to-face; There is a reflective type, but both have one light emitting element.

受光素子1個の構成であるので、これでは、発光量の変
化によって零点が変動するという欠点がある。
Since it is configured with one light receiving element, this has the disadvantage that the zero point fluctuates due to changes in the amount of light emitted.

又、従来透過型の偏位検出装置において受光素子を2個
とし、その差動出力を検出丁ることによリ、上記零点が
変動するという欠点を除去した偏位検出装置もあるが、
これでは、零点調整がむずかしいという欠点もある。
In addition, there is a deflection detecting device that eliminates the drawback of the zero point fluctuation by using two light receiving elements and detecting the differential output of the conventional transmissive deflection detecting device.
This also has the disadvantage that zero point adjustment is difficult.

従って、本発明の主目的は、1個の発光素子と2個の受
光素子とを用い、特に小型、高精度で、且つ単純な構造
により、零点調整が容易にでき、更に、微少偏位を高精
度に検出できる加速度計の偏位検出装置を提供するにあ
る。
Therefore, the main object of the present invention is to use one light-emitting element and two light-receiving elements, which are particularly compact, highly accurate, and have a simple structure, which allows easy zero point adjustment, and furthermore, allows for slight deviation. An object of the present invention is to provide an accelerometer deflection detection device capable of highly accurate detection.

本発明の要旨は、継手と、該継手の一端が固定される基
台と、上記継手の他端に固定された振子と、上記基台か
ら上記振子に対してトルクを発生させるトルカとを有す
る加速度計の上記基台と上記振子との相対偏位な光電的
に検出すべく、上記基台に取りつけられた発光素子及び
2個の受光素子を有する偏位検出装置において、上記振
子の可動方向と直交する上記振子の面に設けた反射部と
、該反射部に対向する上記基台の位置に取付たピックア
ップホルダと、該ピックアップホルダに上記振子の可動
方向と交角を持たせて上記発光素子を取付けると共に、
上記発光素子の光軸と上記振子の可動方向軸線とを含む
面内に−1−記交角と等しい交角をもって上記2個の受
光素子な上記ピックアップホルダに取付けた加速度計偏
位検出装置にある。
The gist of the present invention is to include a joint, a base to which one end of the joint is fixed, a pendulum fixed to the other end of the joint, and a torquer that generates a torque from the base to the pendulum. In order to photoelectrically detect the relative deviation between the base of the accelerometer and the pendulum, there is provided a deflection detection device having a light emitting element and two light receiving elements attached to the base; a reflecting part provided on the surface of the pendulum perpendicular to the pendulum, a pickup holder mounted on the base opposite to the reflecting part, and a pickup holder having an angle intersecting the moving direction of the pendulum, At the same time as installing the
In the accelerometer deflection detecting device, the two light receiving elements are attached to the pickup holder at an intersection angle equal to the -1 - intersection angle in a plane including the optical axis of the light emitting element and the movable direction axis of the pendulum.

以下、図面を参照して本発明の一例を詳述する。Hereinafter, an example of the present invention will be described in detail with reference to the drawings.

社1図及び@2図は本発明の偏位検出装置の一例を用い
た7JII速度針の一具体例の断面図及び一部を除いた
正面図である。同図に於て、(1)は加速度を検出する
板状の振子で、これは、光を効率よ〈反射する材質又は
反射処理tした材料で製作され、かつそのJワ、さを助
〈シて形成した可撓部から成る継手、即ちヒンジ(2)
を介して、その一端+3)17c於て、後述の基台(4
)K支持されている。この振子(1)は、ヒンジ(2)
を支点と(−て、M1図の紙面と平方な方向X−Xのみ
に回動できる。ヒンジ(2)の一端(3)は、基台、即
ちフレーム(4)のヒンジ取付台部(5)に、ヒンジ押
え板(6)により取付けられている。又、振子(1)に
は、その板面に垂直な方向に円筒状のトルカコイル(7
)が取付けられている。円板状の永久磁石(8)及び円
筒状のポールピース(9)が、トルカコイル(力に接触
することなくその内部に挿入されるようにフレーム(4
)に接着により取付けられている。このフレーム(4)
は、電磁軟鉄で成形されているため、永久磁石f811
cより、ポールピース(9)とのf[−1磁気回路を構
成し、ヨーク(リターンパス)の役目をしており、上記
トルカコイル(7)と共に、振子(1)を駆動するトル
カを構成する。フレーム(4)には、本発明の主要部で
あり、振子(1)の偏位を検出する2個の受光素子(1
0) 、 (1■と、1個の発光素子αυとからなる反
射差動型の偏位検出器が、振子(1)に関し、ヒンジ(
2)とは反対の端部に対向してとりつけられる。
Figures 1 and 2 are a sectional view and a partially removed front view of a specific example of a 7JII speed needle using an example of the deviation detection device of the present invention. In the figure, (1) is a plate-shaped pendulum that detects acceleration, which is made of a material that reflects light efficiently or a material that has been treated with reflective treatment. A joint or hinge (2) consisting of a flexible portion formed by
At one end (+3) 17c, attach the base (4) to be described later.
) K is supported. This pendulum (1) has a hinge (2)
can be rotated only in the direction X-X, which is square to the plane of the paper in Figure M1, using the fulcrum (-). ) is attached to the pendulum (1) by a hinge holding plate (6).The pendulum (1) also has a cylindrical torque coil (7) extending perpendicular to the pendulum (1).
) is installed. A disk-shaped permanent magnet (8) and a cylindrical pole piece (9) are inserted into the torque coil (frame (4) without contacting the force).
) is attached by adhesive. This frame (4)
is made of electromagnetic soft iron, so the permanent magnet F811
From c, it forms an f[-1 magnetic circuit with the pole piece (9), serves as a yoke (return path), and together with the torquer coil (7), forms a torquer that drives the pendulum (1). . The frame (4) has two light receiving elements (1) which are the main part of the present invention and which detect the deflection of the pendulum (1).
A reflection differential type deflection detector consisting of 0),
2) is attached facing the opposite end.

上述した構成部品は、丁でに加速度計としての機能を備
えており、これらを、ケースα2に、複数のネジQ3で
固定し、ケースと一体化すると共K、特性名板兼蓋α滲
をケース03に接着し、ケース(12内を気密保持でき
るようにする。
The above-mentioned components already have the function of an accelerometer, and when they are fixed to the case α2 with a plurality of screws Q3 and integrated with the case, a characteristic name plate and cover α is formed. It is glued to the case 03 so that the inside of the case (12) can be kept airtight.

偏位検出器を構成する受光素子αω、(IG等よりの電
気信号や、トルカコイル(7)にフィードバック電流を
供給するためのリード線(図示せず)が接続される外部
端子(15)を、端子ケース(IG)に、それぞれ気密
構造に接着すると共に、それ等の一端がケースazの内
部に在る如く、端子ケース(16)をケース(12+に
気密に接着する。
The external terminal (15) to which a lead wire (not shown) for supplying electric signals from IG, etc. and feedback current to the torquer coil (7) is connected to the light receiving element αω that constitutes the deflection detector. The terminal case (16) is hermetically bonded to the terminal case (IG), and the terminal case (16) is hermetically bonded to the case (12+) so that one end thereof is inside the case az.

斯くして、端子ケースUfi)の中央の開口部(1ηを
介して、内部の装置の電気系の結線等を行い、ケース0
zの内部な直空、又は不活性気体(例えばヘリウムガス
)等を充填しながら、蓋(1印を開口部側に接着し、ケ
ース(1,21の内部を気密状態に保持し、部品の劣化
等を防11−シ、長期間に亘り性能を安定に保持する。
In this way, the electrical system of the internal device is connected through the central opening (1η) of the terminal case Ufi), and
While filling the inside of the case with direct air or inert gas (e.g. helium gas), glue the lid (mark 1) to the opening side, keep the inside of the case (1, 21 airtight, and close the parts). 11- Prevents deterioration etc. and maintains stable performance over a long period of time.

上述の構成による加速度計において、ケースO2の中心
11(11X −i軸方向に加速度が作用すると、振子
(1)は、ヒンジ(2)を支点と1−て微少偏位し、発
光素子0Dより振子(1)で反射され、偏位検出器の受
光素子(101及び06に入射する光が変化するので、
これ等より、偏位に対応した電気信号が得られる。との
偏位に比例した電気信号ン、l・ルカコイル(7)にフ
ィードバックし、これにより、振子(1)を、受光素子
α〔及び(L6の電気信号が零になるように拘束する。
In the accelerometer configured as described above, when acceleration is applied in the direction of the center 11 (11 Since the light reflected by the pendulum (1) and incident on the light receiving elements (101 and 06) of the deflection detector changes,
From these, an electrical signal corresponding to the deviation can be obtained. An electric signal proportional to the deviation of L6 is fed back to the L.L. coil (7), thereby restraining the pendulum (1) so that the electric signals of the light receiving elements α and (L6 become zero).

この電気信号、即ち拘束電流は、加速度に比例している
ため、この電流を計測することにより。
This electrical signal, or restraint current, is proportional to acceleration, so by measuring this current.

入力加速度を知ることができるものである。This allows you to know the input acceleration.

次に、第2図のI−1線に沿った断面図である第3図を
用いて、本発明の反射差動型の偏位検出装置の詳細な説
明をしよう。
Next, using FIG. 3, which is a sectional view taken along line I-1 in FIG. 2, a detailed explanation of the reflective differential type deviation detection device of the present invention will be given.

本発明に於ては、1個の発光素子(Iυ及び2個の受光
素子αα、a西は前者の中心線、即ち光軸P−Pと後者
の夫々の光軸に平行で且つそれ等間の中央の軸1%−R
とは、互に同一平面に在り且つ角度ψを持つように、ピ
ックアップホルダ(1!1に固定される。このピックア
ップホルダHは、第1図及び第2図に示したフレーム(
4)K固定される。このため、ピックアップホルダ醤に
発光素子(1,1)用の取付孔(イ)を設げ、その先端
に発光素子(Iυよりの光をビーム状にするためのピン
ホール(21Jを設け、発光素子(11Jからの光軸P
−Pに涜った光束が、振子(1)の反射面(1a)上で
、微小楕円形の光点を形成するよう制限している。又、
弼は受光素子+10) 、 +101用の取付孔で、ピ
ックアップホルダa9に設けられ、各素子Q■及び06
の光軸が上述の如く、トdに平行且つ光軸几−alC垂
直なY−Y方向に沿って離間するようkなされている。
In the present invention, one light-emitting element (Iυ and two light-receiving elements αα, a west are parallel to the center line of the former, that is, the optical axis P-P, and the respective optical axes of the latter, and the distance between them is center axis 1%-R
are fixed to the pickup holder (1!1) so that they are on the same plane and have an angle ψ.This pickup holder H is attached to the frame (1!1) shown in FIGS.
4) K is fixed. For this purpose, a mounting hole (A) for the light emitting element (1, 1) is provided in the pickup holder, and a pinhole (21J) is provided at the tip of the light emitting element (Iυ) to make the light into a beam. element (optical axis P from 11J
-P is restricted to form a minute elliptical light spot on the reflecting surface (1a) of the pendulum (1). or,
弼 is the mounting hole for the light receiving elements +10) and +101, which are provided in the pickup holder a9, and each element Q■ and 06
As described above, the optical axes of the two are spaced apart along the Y-Y direction parallel to and perpendicular to the optical axis.

この場合、光軸IL−几、P−Pの交角ψは光軸p−p
が振子(1)の反射面(la)K対する入射角ψ、(p
−1;とX−父とのなす角)及び光軸几−RとX−Xと
のなす反射角ψ2との和である。
In this case, the intersection angle ψ of the optical axis IL-⇠ and P-P is the optical axis p-p
is the angle of incidence ψ, (p
-1;

勿論、ψ1は0より大きく90°より小である。Of course, ψ1 is larger than 0 and smaller than 90°.

第3図において、振子(1)の反射面(1a)が、発光
素子αυ及び受光素子αa 、 aiの中心線]’−P
及びR−凡の交点に位置している場合、発光素子aυか
ら出た光束(B)は、振子(1)の反射面(1a)で反
射され、2個の受光素子+101 、 (Iαの受光面
上で、第4図に示す如く、この2個の受光素子+It)
 、 Qlの多くとも各半分の面に等しい光量が照射さ
れるような光点を形成する。この時、受光素子0α、 
(11)の差動出力電流は零である。然し、振子(1)
がその反射面(1a)と和直なX−X方向に関1.、X
方向に微小偏位した場合、受光素子01.α6の受光面
上に形成された光点が、中心線It−几と垂直なY−Y
方向に関しY方向に移動し、例えば受光素子(IQIV
c当る光量が、受光素子α6に当る光量よりも多くなる
ので、図示せずも受光素子001 、 +1.01より
導出した差動出力端子には、振子(1)の偏位に対応し
た光電流が発生する。
In FIG. 3, the reflecting surface (1a) of the pendulum (1) is aligned with the center line of the light emitting element αυ and the light receiving elements αa, ai]'-P
When the light flux (B) emitted from the light-emitting element aυ is reflected by the reflecting surface (1a) of the pendulum (1), the light flux (B) emitted from the light-emitting element aυ is reflected by the two light-receiving elements +101, (Iα). On the surface, as shown in Fig. 4, these two light receiving elements + It)
, to form a light spot such that at most each half of Ql is irradiated with an equal amount of light. At this time, the light receiving element 0α,
The differential output current of (11) is zero. However, the pendulum (1)
is related to the X-X direction that is harmonious with the reflecting surface (1a).1. ,X
If there is a slight deviation in the direction, the light receiving element 01. The light spot formed on the light receiving surface of α6 is perpendicular to the center line It-Y
For example, the light receiving element (IQIV
Since the amount of light hitting c is larger than the amount of light hitting the light receiving element α6, the differential output terminal derived from the light receiving elements 001 and +1.01 has a photocurrent corresponding to the deflection of the pendulum (1), even though it is not shown. occurs.

所で、通常、振子(1)の零位置は、上述のように、発
光素子αD及び受光素子αα、06の中心線P−P及び
R−Rの交点にあるとは限らず、又受光素子(11゜α
aの特性のバラツキ等により、振子(1)に加速度が加
わらない状態でも出力電流が生ずるので、装置の調整段
階において、これの出力電流を零に調整することが重要
な要素となる。
However, as mentioned above, the zero position of the pendulum (1) is not necessarily at the intersection of the center lines PP and RR of the light emitting element αD and the light receiving element αα, 06, and the zero position of the pendulum (1) (11゜α
Due to variations in the characteristics of a, an output current is generated even when no acceleration is applied to the pendulum (1), so adjusting the output current to zero is an important factor in the adjustment stage of the device.

本発明においては、ピックアップホルダalを、第3図
のX−X方向に微小偏位させ、発光素子αυよりの光で
形成される受光素子aα、aαの受光面上の光点を、振
子(1)の零位置に応じ、Y−Y方向に移動させて、零
位置調整を実施することが可能となる。
In the present invention, the pickup holder al is slightly deviated in the X-X direction in FIG. It becomes possible to carry out zero position adjustment by moving in the Y-Y direction according to the zero position of 1).

即ち、本発明の特徴の第一は、反射型偏位検出装置を用
いることにより、小屋の加速度計を製作可能としたこと
である。
That is, the first feature of the present invention is that an accelerometer for a shed can be manufactured by using a reflective displacement detection device.

本発明の特徴の第二は、従来用いられていた発光素子、
受光素子各1個の反射型偏位検出装置の温度変化による
零点の変動という欠点を、受光素子を2個にし、差動出
力を検出することにより改善したことにある。
The second feature of the present invention is that the conventionally used light emitting element,
The drawback of a reflective displacement detection device having one light-receiving element, that is, the zero point fluctuates due to temperature change, has been improved by using two light-receiving elements and detecting the differential output.

本発明の特徴の第三は、発光素子及び受光素子を同一の
ピックアップホルダに取付けるという単純な構造、構゛
成と手順とにより、熟練と時間を要する偏位検出装置の
零位Ill!14整を、簡単かつ短時間に行うことが可
能となったことにある。
The third feature of the present invention is that the simple structure, configuration, and procedure of attaching the light emitting element and the light receiving element to the same pickup holder eliminate the zero position of the deflection detection device, which requires skill and time. The reason for this is that it has become possible to perform 14 adjustments easily and in a short time.

本発明の特徴の第四は、ビンポールの径と取付角ψを適
当に選定することKより、装置の精度や素子の特性に応
じて自由1cvJ4整感度を選定することができる点に
ある。
The fourth feature of the present invention is that by appropriately selecting the diameter of the bin pole and the mounting angle ψ, the 1cvJ4 tuning sensitivity can be freely selected according to the accuracy of the device and the characteristics of the element.

尚、上述は、本発明の一例を図示し、説明したが、本発
明の要旨を逸脱せずに、多くの変化変形が当核業者によ
り作られ得ることは、明らかであろう。
Although the foregoing has illustrated and described one example of the invention, it will be obvious that many modifications may be made by those skilled in the art without departing from the spirit of the invention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による偏位検出装置の−例Z適用した加
速度計の断面図、第2図は第1図の端子ケースを除いた
正面図、第3図は第2図の1−1線に沿った断面図、第
4図は本発明の説明に供する路線図である。 図に於て、(1)は撮子、(2)はヒンジ、(4)はフ
レーム、(7)はトルカコイル、(8]は永久磁石、(
9)はポールピース、σ0) 、 (101は受光素子
、■)は発光素子、(11はピックアップホルダ、(イ
)、 +221は取付孔、(B)は光束を夫々示す。
Fig. 1 is a sectional view of an accelerometer to which Example Z of the deviation detection device according to the present invention is applied, Fig. 2 is a front view of Fig. 1 with the terminal case removed, and Fig. 3 is 1-1 of Fig. 2. A sectional view taken along the line, FIG. 4 is a route map for explaining the present invention. In the figure, (1) is the camera, (2) is the hinge, (4) is the frame, (7) is the torque coil, (8) is the permanent magnet, (
9) is a pole piece, σ0), (101 is a light receiving element, ■) is a light emitting element, (11 is a pickup holder, (A), +221 is a mounting hole, and (B) is a luminous flux, respectively.

Claims (1)

【特許請求の範囲】 1、 継手と、該継手の一端が固定される基台と、上記
継手の他端に固定された振子と、上記基台から上記振子
に対してトルクを発生させるトルカとを有する加速度計
の上記基台と上記振子との相対偏位を光電的に検出すべ
く、上記基台に取りつけられた発光素子及び2個の受光
素子を有する偏位検出装置において、上記振子の可動方
向と直交する上記振子の面に設けた反射部と、該反射部
に対向する上記基台の位置に取付だピックアップホルダ
と、該ピックアップホルダに上記振子の可動方向と交角
を持たせて上記発光素子を取付けると共に、上記発光素
子の光軸と上記振子の可動方向軸線とを含む面内に上記
交角と等しい交角をもって上記2個の受光素子を上記ピ
ックアップホルダに取付けたことを特徴とする加速度計
の偏位検出装置。 2、上記発光素子の発光面にピンホールな設げたととを
特徴とする特許 載の加速度組の偏位検出装lf。
[Claims] 1. A joint, a base to which one end of the joint is fixed, a pendulum fixed to the other end of the joint, and a torquer that generates torque from the base to the pendulum. In order to photoelectrically detect the relative deviation between the base of the accelerometer having the accelerometer and the pendulum, there is provided a deflection detection device having a light emitting element and two light receiving elements attached to the base. a reflective part provided on the surface of the pendulum perpendicular to the movable direction; a pickup holder mounted on the base opposite to the reflective part; Acceleration characterized in that a light emitting element is attached, and the two light receiving elements are attached to the pickup holder with an intersection angle equal to the intersection angle within a plane that includes the optical axis of the light emitting element and the movable direction axis of the pendulum. meter deviation detection device. 2. A patented acceleration set deflection detecting device lf characterized in that a pinhole is provided in the light emitting surface of the light emitting element.
JP18892281A 1981-11-25 1981-11-25 Detecting device for deflection of accelerometer Pending JPS5890173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18892281A JPS5890173A (en) 1981-11-25 1981-11-25 Detecting device for deflection of accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18892281A JPS5890173A (en) 1981-11-25 1981-11-25 Detecting device for deflection of accelerometer

Publications (1)

Publication Number Publication Date
JPS5890173A true JPS5890173A (en) 1983-05-28

Family

ID=16232226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18892281A Pending JPS5890173A (en) 1981-11-25 1981-11-25 Detecting device for deflection of accelerometer

Country Status (1)

Country Link
JP (1) JPS5890173A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6152269U (en) * 1984-09-10 1986-04-08
JPS61239164A (en) * 1985-04-16 1986-10-24 Katsuhiko Nishida Optical seismoscope
JPH03122569A (en) * 1989-10-04 1991-05-24 Seiyoo Denshi Kk Impact force detection sensor
EP0716291A3 (en) * 1994-12-07 1997-05-07 Phone Or Limited A sensor and a method for measuring distances to, and/or physical properties of,a medium
EP1837662A1 (en) * 2006-03-20 2007-09-26 Innalabs Technologies, Inc. Compensating accelerometer with optical angle sensing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934344A (en) * 1972-07-28 1974-03-29
JPS5238218U (en) * 1975-09-01 1977-03-17
JPS5618710A (en) * 1979-07-23 1981-02-21 Matsushita Electric Ind Co Ltd Distance measuring instrument

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4934344A (en) * 1972-07-28 1974-03-29
JPS5238218U (en) * 1975-09-01 1977-03-17
JPS5618710A (en) * 1979-07-23 1981-02-21 Matsushita Electric Ind Co Ltd Distance measuring instrument

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6152269U (en) * 1984-09-10 1986-04-08
JPH035907Y2 (en) * 1984-09-10 1991-02-14
JPS61239164A (en) * 1985-04-16 1986-10-24 Katsuhiko Nishida Optical seismoscope
JPH03122569A (en) * 1989-10-04 1991-05-24 Seiyoo Denshi Kk Impact force detection sensor
EP0716291A3 (en) * 1994-12-07 1997-05-07 Phone Or Limited A sensor and a method for measuring distances to, and/or physical properties of,a medium
US5771091A (en) * 1994-12-07 1998-06-23 Phone-Or Ltd Sensor and a method for measuring distances to, and/or physical properties of, a medium
EP1837662A1 (en) * 2006-03-20 2007-09-26 Innalabs Technologies, Inc. Compensating accelerometer with optical angle sensing

Similar Documents

Publication Publication Date Title
KR860700296A (en) Modular stabilization system
EP0264509B1 (en) Optical seismic detector
US4649748A (en) Accelerometer
US4869108A (en) Accelerometer system
JPS5890173A (en) Detecting device for deflection of accelerometer
JP2789218B2 (en) Accelerometer
SE8602528D0 (en) NAVIGATION DEVICE
JPS5890174A (en) Accelerometer
US4470682A (en) Optical element positioning method and optical element assembly utilizing the same
US6739179B2 (en) Device for measuring the oxygen concentration in gases
JPH0236130Y2 (en)
JPS6217164B2 (en)
JPS5890175A (en) Accelerometer
JP4299395B2 (en) Image stabilization mechanism
JPH0668500B2 (en) Accelerometer
JPS60205370A (en) Accelerometer
SU983398A1 (en) Tracking system pickup
JPH0668499B2 (en) Accelerometer
JPH01173434A (en) Optical pickup
JPH01141359A (en) Optical deflection detecting device
JPS60186708A (en) Photoelectric device
JPH11120591A (en) Turning position detector of deflection mirror
JPS6159442B2 (en)
JPS61190309A (en) Autofocus device
JP3203567B2 (en) Accelerometer