JPS584140A - Applying method for liquid type photosensitive resin - Google Patents
Applying method for liquid type photosensitive resinInfo
- Publication number
- JPS584140A JPS584140A JP10264681A JP10264681A JPS584140A JP S584140 A JPS584140 A JP S584140A JP 10264681 A JP10264681 A JP 10264681A JP 10264681 A JP10264681 A JP 10264681A JP S584140 A JPS584140 A JP S584140A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- flexible carrier
- substrate
- liquid
- liquid photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0091—Apparatus for coating printed circuits using liquid non-metallic coating compositions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は液体型感光性樹脂を基材上に一定厚で効率良く
均一に塗布する液体型感光性樹脂の塗布方法に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for coating a liquid photosensitive resin efficiently and uniformly on a substrate with a constant thickness.
近年、感光性樹脂は印刷用レリーフに限らず種々の用途
に使用されるようになって来た。In recent years, photosensitive resins have come to be used not only for printing reliefs but also for various other purposes.
その−例を挙げると電子工業分野におけるプリント配線
基板製造時にレジスト材として使用されるプリント配線
基板製造用の感光性樹脂がある。このプリント配線基板
製造用感光性樹脂は、銅貼シ積層板の如き導電性金属貼
多積層板上にできるだけ一定厚になるように塗布又は積
層され、その上にネガフィルムなどの透明画像担体を載
置してその透明画像担体側よシ活性光線を照射し、透明
画像担体を通過した活性光線によってプリント配線基板
製造用感光性樹脂を部分的に重合させる露光によって感
光性樹脂を感光硬化させてウォッシュアウト液及び導電
性金属用腐食液に対して不溶化せしめて後、透明画像担
体を除去してから感光硬化した部分以外の感光性樹脂を
ウォッシュアウト工程で除去し１次いで感光硬化した部
分がそのまま残っておシ且つウォッシュアウト工程で感
光性樹脂を除去されて導電性金属が露出した導電性金属
貼シ積層板を直接エツチングして露出した導電性金属を
溶解除去し、しかる後に残っている感光硬化した感光性
樹脂を剥離液で剥離してプリント配線基板とするもので
ある。An example of this is a photosensitive resin for manufacturing printed wiring boards that is used as a resist material when manufacturing printed wiring boards in the electronics industry. This photosensitive resin for manufacturing printed wiring boards is coated or laminated on a conductive metal laminated board such as a copper laminated board to maintain a constant thickness as much as possible, and a transparent image carrier such as a negative film is placed on top of the photosensitive resin. The transparent image carrier side is placed on the transparent image carrier and exposed to active light, and the active light that passes through the transparent image carrier partially polymerizes the photosensitive resin for manufacturing printed wiring boards.The photosensitive resin is photocured by exposure. After making it insolubilized in the washout liquid and corrosive liquid for conductive metals, the transparent image carrier is removed, and the photosensitive resin other than the photocured areas is removed in a washout process, and the photocured areas remain as they are. The conductive metal laminated laminate with the remaining sheet and conductive metal exposed after the photosensitive resin was removed in the washout process is directly etched to dissolve and remove the exposed conductive metal, and then the remaining photosensitive resin is removed. The cured photosensitive resin is peeled off using a peeling solution to form a printed wiring board.
このよりにプリント配線基板製造用などに使用される感
光性樹脂としては、既にフィルム状又はシート状に製作
されている固体型と、使用直前に基材上に塗布される液
体型とがある。かがる固体型と液体型との感光性樹脂を
比較すると、固体型の場合にはほぼ均一な厚さに予め製
作されているので作業性においては優れているが、露光
されなかった感光性樹脂はウォッシュアウト工程ですべ
てウォッシュアウト液によって除去されて再使用されな
いために非常に不経済である欠点かあハまた液体型の場
合には現場で基材上に均一な厚さに塗布することが困難
ではあるが、液体状の感光性゛樹脂を基材上に塗布して
露光後にウォッシュアウト工程に移送せしめる工程で感
光性樹脂の粘着力を利用して他の部材に未露光の感光性
樹脂を付着させて回収して再使用できるため高価な感光
性樹脂をウォッシュアウト工程で除去する量が少なくて
済み、且つウォッシュアウト液の使用量も少なくて良い
ため老化したウォッシュアウト液の処理も容易であると
いう非常に大きな長所を備えているのである。Accordingly, photosensitive resins used for manufacturing printed wiring boards include solid type resins that are already produced in the form of films or sheets, and liquid type resins that are coated onto a substrate immediately before use. Comparing solid type and liquid type photosensitive resins, the solid type is prefabricated to a nearly uniform thickness and is therefore easier to work with, but the photosensitive resin that has not been exposed to light The drawback is that the resin is completely removed by the washout liquid in the washout process and is not reused, making it very uneconomical.Also, in the case of a liquid type, it must be applied to a uniform thickness on the substrate in the field. Although it is difficult to do so, in the process of coating a liquid photosensitive resin on a base material and transferring it to a washout process after exposure, the adhesive strength of the photosensitive resin is used to transfer the unexposed photosensitivity to other materials. Because the resin can be collected and reused after adhering to it, the amount of expensive photosensitive resin that needs to be removed in the washout process is small, and the amount of washout liquid used is also small, so it is also possible to dispose of aged washout liquid. It has the great advantage of being easy.
本発明者らは、このように経済上及び作業上の長所を有
している液体型感光性樹脂の欠点である基材上に一定厚
に均一に塗布することの困難性を解決すべく鋭意研究の
結果、可撓性を有し且つ露光硬化せしめられた液体型感
光性樹脂からの剥離性の良い透明なフレキシブル担体に
液体型感光性樹脂を均一な厚さに塗布し、直ちにそのフ
レキシブル担体を移動せしめて液体型感光性樹脂の塗布
面を基材に対向させた状態でフレキシブル担体を基材に
一定圧で押圧すれば基材の厚さが多少変化していたシ、
平板状を成していなかったシ、可撓性を有していたシし
ても良好に基材上に一定厚に感光性樹脂を塗布し得ると
とを究明して本発明を完成したのである。The inventors of the present invention have worked diligently to solve the drawback of liquid photosensitive resins, which have such economical and operational advantages, that is the difficulty of uniformly coating a substrate with a constant thickness. As a result of research, a liquid photosensitive resin was applied to a uniform thickness on a transparent flexible carrier that had good peelability from a liquid photosensitive resin that had been cured by exposure to light, and the flexible carrier was immediately removed. If the flexible carrier was pressed against the base material with a constant pressure with the surface coated with the liquid photosensitive resin facing the base material, the thickness of the base material would change somewhat.
The present invention was completed by discovering that it is possible to coat a photosensitive resin to a constant thickness on a substrate even if the substrate is not flat or flexible. be.
す表わち、本発明は可撓性を有し且つ露光硬化せしめら
れた液体型感光性樹脂からの剥離性が良い透明なフレキ
シブル担体に液体型感光性樹脂を均一な厚さに塗布し、
直ちにそのフレキシブル担体を移動せしめて液体型感光
性樹脂の塗布面を基材に対向させた状態で７レキシプル
担体を基材に一定圧で押圧することによシ基材上に液体
型感光性樹脂を一定厚で均一に塗布することを特徴とす
る液体型感光性樹脂の塗布方法に関するものである。In other words, the present invention applies a liquid photosensitive resin to a uniform thickness on a transparent flexible carrier that is flexible and has good peelability from a liquid photosensitive resin that has been cured by exposure.
Immediately move the flexible carrier and place the liquid photosensitive resin coating surface on the substrate by pressing the 7 lexiple carrier against the substrate with a constant pressure to apply the liquid photosensitive resin onto the substrate. The present invention relates to a method for coating a liquid type photosensitive resin, which is characterized by uniformly coating a liquid photosensitive resin with a constant thickness.
以下、図面によシ本発明に係る液体型感光性樹脂の塗布
方法について詳細に説明する。Hereinafter, a method for applying a liquid photosensitive resin according to the present invention will be explained in detail with reference to the drawings.
第１図は従来の基材上に液体型感光性樹脂を塗布してい
る状態を示す縦断面図、第２図は従来の方法によ多液体
型感光性樹脂が塗布された基材に透明画像担体を介して
露光した際の感光硬化した感光性樹脂の状態を示す縦断
面図、第３図は本発明方法によ多液体型感光性樹脂を塗
布し露光する工程図である。Figure 1 is a vertical cross-sectional view showing a state in which a liquid photosensitive resin is coated on a conventional base material, and Figure 2 is a transparent view of a base material coated with a multi-liquid type photosensitive resin using a conventional method. FIG. 3 is a longitudinal cross-sectional view showing the state of the photosensitive resin that has been photocured when exposed to light through an image carrier. FIG.
図面中、人は基材、Ｂは基材Ａ上に塗布された液体型感
光性樹脂、Ｃは基材Ａ上に塗布含れる液体型感光性樹脂
の塗布厚を制御するドクターなどの塗布厚制御手段、Ｄ
は透明画像担体である。In the drawing, person is the base material, B is the liquid type photosensitive resin coated on the base material A, and C is the coating thickness of the doctor etc. that controls the coating thickness of the liquid type photosensitive resin coated on the base material A. control means, D
is a transparent image carrier.
従来の液体型感光性樹脂の塗布方法においては、基材Ａ
にその製作上の問題などによって多少の厚さの変化があ
っても液体型感光性樹脂Ｂは第１図に示す如くその表面
が平面状になるように塗布厚制御手段Ｃによって塗布さ
れるため、基材Ａ上に塗布された液体型感光性樹脂Ｂの
厚さは一定とはならない。このように一定厚に塗布され
ない液体型感光性樹脂Ｂを透明画像担体りを介して活性
光線によって露光すると、同じ面積だけ露光しても液体
型感光性樹脂Ｂの厚さにバラツキがあると露光のエネル
ギーが同一であるので第２図に示す如く液体型感光性樹
脂Ｂの厚さが薄いと基材Ａ側が太くなシ、また第２図に
示す如く液体型感光性樹脂Ｂの厚さが厚いと基材Ａ側が
細くなってしまう現象が生じて良好な露光を実施したこ
とにならない現象が生じてしまうのである。In the conventional coating method of liquid type photosensitive resin, base material A
Even if there is a slight change in thickness due to manufacturing problems, the liquid photosensitive resin B is coated by the coating thickness control means C so that the surface becomes flat as shown in FIG. , the thickness of the liquid photosensitive resin B applied onto the substrate A is not constant. When liquid type photosensitive resin B, which is not coated to a constant thickness, is exposed to actinic light through a transparent image carrier, even if the same area is exposed, if the thickness of liquid type photosensitive resin B varies, exposure will occur. Since the energies of are the same, if the thickness of the liquid photosensitive resin B is thin as shown in Fig. 2, the base material A side will not be thick, and as shown in Fig. 2, the thickness of the liquid photosensitive resin B will be If it is too thick, a phenomenon occurs in which the base material A side becomes thinner, resulting in a phenomenon in which good exposure is not achieved.
かかる現象の発生は基材真上に塗布される液体型感光性
樹脂Ｂの塗布厚さを一定に制御できなかったことに起因
しているのであり、これを改良するのが第６図にその１
実施例を示した本発明方法である。The occurrence of this phenomenon is due to the fact that the coating thickness of the liquid photosensitive resin B applied directly on the substrate could not be controlled at a constant level. 1
This is a method of the present invention showing an example.
第６図中、１は液体型感光性樹脂、２は可撓性を有し且
つ露光硬化せしめられた液体型感光性樹脂１からの剥離
性が良い透明なフレキシブル担体、６はフレキシブル担
体２を平面状になるように保持する剛体基盤、４は剛体
基盤６上に位置せしめられたフレキシブル担体２上に供
給された液体型感光性樹脂１の塗布厚を一定に制御する
ドクターやロールコータ−などの塗布厚制御手段、５は
液体型感光性樹脂１を一定厚に塗布されたフレキシブル
担体２を基材６への押圧部へ移送せしめるためのガイド
ローラ、７は基材６をフレキシブル担体２との抑圧部へ
移送せしめるだめのガイド、８は液体型感光性樹脂１を
一定厚に塗布されたフレキシブル担体２の液体型感光性
樹脂１の塗布面を基材６に対向せしめられた押圧部でフ
レキンプル担体２を基材６を一定厚で押圧する押圧体で
あυ、この押圧体８としては図示した実施例の如くフレ
キンプル担体２の移動方向を小さな曲率半径部を経て変
向させる剛体状のものや、実質的に弾性の表面を有する
ロール状のものや、通常の金属製ロールなどが使用でき
る。９は液体型感光性樹脂１を一定厚に塗布されたフレ
キシブル担体２を基材６に一定圧で押圧体８によシ押圧
せしめるためのスプリング、１０は抑圧体８によって一
定圧で押圧されて基材６上に一定厚の液体型感光性樹脂
１が更にその上にフレキシブル担体２が積層された積層
体の７レキシプル担体２上に透明画像担体１１を位置せ
しめて液体型感光性樹脂１に活性光線を照射する露光装
置、１２は露光後の積層体からフレキシブル担体２を剥
離させるための剥離ロール、１３は剥離ロール１２を経
て巻取ロール１４に至るフレキシブル担体２からその７
レキシプル担体２に付着している未硬化の液体型感光性
樹脂１を回収する主回収装置、１５はフレキシブル担体
２が剥離ロール１２によって剥離され基材６上には感光
硬化した液体型感光性樹脂１と未硬化のわずかな液体型
感光性樹脂１とが残留している状態の基材６の感光性樹
脂塗布面に圧接されて未硬化の液体型感光性樹脂１をそ
の表面に付着させる弾性体ロールやブラシロールなどの
樹脂回収ロールとその樹脂回収ロールが回転する過程で
そのロールに付着している未硬化の液体型感光性樹脂１
を掻き取るドクターとよシ成る補助回収装置である。In FIG. 6, 1 is a liquid photosensitive resin, 2 is a transparent flexible carrier that is flexible and has good peelability from the liquid photosensitive resin 1 that has been cured by exposure, and 6 is a flexible carrier 2. A rigid base 4 is held to hold the rigid base 6 in a planar shape, and 4 is a doctor, roll coater, etc. that controls the coating thickness of the liquid photosensitive resin 1 supplied onto the flexible carrier 2 placed on the rigid base 6 to be constant. 5 is a guide roller for transferring the flexible carrier 2 coated with the liquid type photosensitive resin 1 to a constant thickness to a pressing part for the base material 6; 7 is a guide roller for transferring the base material 6 to the flexible carrier 2; A guide 8 for transferring the liquid photosensitive resin 1 to the suppressing portion of the flexible carrier 2 is a pressing portion that makes the surface coated with the liquid photosensitive resin 1 face the base material 6. It is a pressing body that presses the flexible pull carrier 2 against the base material 6 with a constant thickness, and the pressing body 8 is a rigid body that changes the moving direction of the flexible pull carrier 2 through a small radius of curvature, as in the illustrated embodiment. A roll, a roll having a substantially elastic surface, a regular metal roll, etc. can be used. 9 is a spring for pressing the flexible carrier 2 coated with the liquid photosensitive resin 1 to a constant thickness against the base material 6 with a constant pressure, and 10 is a spring for pressing the flexible carrier 2 with a constant pressure by the presser 8; A transparent image carrier 11 is placed on the 7-lexiple carrier 2 of a laminate in which a liquid photosensitive resin 1 of a constant thickness is layered on a base material 6 and a flexible carrier 2 is further layered on top of the liquid photosensitive resin 1. An exposure device that irradiates actinic rays, 12 a peeling roll for peeling the flexible carrier 2 from the exposed laminate, and 13 a 7 from the flexible carrier 2 to the take-up roll 14 via the peeling roll 12.
A main recovery device 15 collects the uncured liquid photosensitive resin 1 adhering to the flexible carrier 2, the flexible carrier 2 is peeled off by a peeling roll 12, and the photocured liquid photosensitive resin is placed on the base material 6. 1 and a small amount of uncured liquid photosensitive resin 1 remain in pressure contact with the photosensitive resin-coated surface of the base material 6 to adhere the uncured liquid photosensitive resin 1 to the surface. Resin collection rolls such as body rolls and brush rolls, and uncured liquid photosensitive resin 1 that adheres to the resin collection rolls as they rotate.
This is an auxiliary recovery device consisting of a doctor and a scraper.
かかる構造の本発明方法を実施する装置を使用して液体
型感光性樹脂１を基材６上に塗布するには、先ず７レキ
シプル担体２を剛体基盤３上、ガイドローラ５、抑圧体
８、露光装置１０、剥離ロール１２を経て巻取ロール１
４に供給しておく、次いで剛体基盤乙に対向した位置に
液体型感光性樹脂１を供給すると共にガイド７上に基材
６を供給し、フレキシブル担体２と基材６とを同速で駆
動する。かくしてフレキシブル担体２上に塗布厚制御手
段４によって一定厚に塗布された液体型感光性樹脂１は
、ガイドローラ５を経て抑圧体８の直下に移動せしめら
れるが、液体型感光性樹脂１は通常１０〜２００ 、０
００ ｃａｐの範囲内にある高粘性物質であるのでフレ
キシブル担体２上でその厚さが大幅に変更することはな
いが、中でも１００〜５０．０００ｃｐの粘性を有する
ものが本発明方法の実施に適している。このようにして
抑圧体８の直下に液体型感光性樹脂１が一定厚に塗布さ
れたフレキシブル担体２と基材６とが同時に移動せしめ
られて来てフレキシブル担体２の液体型感光性樹脂塗布
面を基材６に対向させた状態で７レキシプル担体２が押
圧体８によって基材６に一定圧で押圧せしめられること
によシ、基材６の液体型感光性樹脂塗布面に多少の凹凸
があったシ平面状を成していなかったシしても、液体型
感光性樹脂１の塗布厚は一定になるのである。In order to apply the liquid type photosensitive resin 1 onto the base material 6 using the apparatus for carrying out the method of the present invention having such a structure, first, the 7 lexical carriers 2 are placed on the rigid base 3, the guide roller 5, the suppressor 8, Winding roll 1 via exposure device 10 and peeling roll 12
Next, the liquid photosensitive resin 1 is supplied to a position facing the rigid substrate B, and the base material 6 is supplied onto the guide 7, and the flexible carrier 2 and the base material 6 are driven at the same speed. do. The liquid photosensitive resin 1 coated onto the flexible carrier 2 to a constant thickness by the coating thickness control means 4 is moved directly below the suppressor 8 via the guide roller 5, but the liquid photosensitive resin 1 is normally 10-200, 0
Since it is a highly viscous substance within the range of 0.00 cp, its thickness will not change significantly on the flexible carrier 2, but among them, those having a viscosity of 100 to 50.000 cp are suitable for carrying out the method of the present invention. ing. In this way, the flexible carrier 2 on which the liquid photosensitive resin 1 is coated with a constant thickness directly under the suppressor 8 and the base material 6 are simultaneously moved, and the liquid photosensitive resin coated surface of the flexible carrier 2 is moved simultaneously. By pressing the 7 lexiple carrier 2 against the base material 6 with a constant pressure by the pressing member 8 while facing the base material 6, some unevenness is created on the liquid type photosensitive resin coated surface of the base material 6. Even if the surface is not flat, the coating thickness of the liquid photosensitive resin 1 remains constant.
しかる後、基材６上に一定厚の液体型感光性樹脂１が、
更にその上にフレキシブル担体２が積層された積層体は
露光装置１０において透明画像担体１１よシ活性光線を
照射されて液体型感光性樹脂１の所定部分が感光硬化せ
しめられ、その後更に移動せしめられる過程で未硬化の
液体型感光性樹脂１の大部分が未だ付着しているフレキ
シブル担体２が感光硬化した液体型感光性樹脂１の付着
している基材６から剥離ロール１２によって剥離され、
フレキシブル担体２は剥離ロール１２を経て巻取ロール
１４に至る過程で主回収装置１３によシ液体型感光性樹
脂１を回収される。After that, a liquid type photosensitive resin 1 of a certain thickness is placed on the base material 6.
Further, the laminate on which the flexible carrier 2 is laminated is irradiated with actinic rays from the transparent image carrier 11 in the exposure device 10 to photocure a predetermined portion of the liquid type photosensitive resin 1, and is then further moved. In the process, the flexible carrier 2 to which most of the uncured liquid photosensitive resin 1 is still attached is peeled off by the peeling roll 12 from the base material 6 to which the photocured liquid photosensitive resin 1 is attached.
The liquid type photosensitive resin 1 is collected from the flexible carrier 2 by the main collection device 13 during the process of passing through the peeling roll 12 and reaching the take-up roll 14 .
また剥離ロール１２によってフレキシブル担体２を剥離
された後の基材６上に付着している未硬化の液体型感光
性樹脂１は、基材６が更に移動する過程で補助回収装置
１５にょシ回収されるのである。Further, the uncured liquid type photosensitive resin 1 adhering to the base material 6 after the flexible carrier 2 has been peeled off by the peeling roll 12 is collected by the auxiliary collection device 15 while the base material 6 is further moved. It will be done.
なお、以上の説明は基材６の片面のみに液体型感光性樹
脂１を塗布する場合の説明であるが、基材６の両面に液
体型感光性樹脂１を塗布する場合には押圧体８を対向し
て配置することによって簡単に実施できるのである。Note that the above explanation is for applying the liquid type photosensitive resin 1 to only one side of the base material 6, but when applying the liquid type photosensitive resin 1 to both sides of the base material 6, the pressing body 8 This can be easily carried out by arranging them facing each other.
以下に実施例について詳細に説明する。Examples will be described in detail below.
第３図に示す本発明方法を実施する装置によって、フレ
キシブル担体どして２０μのポリプロビレを
ンフイルムを使用し、このフレキシブル担体５０ ”ｍ
７ｅｃで移動させながらエポキシアクリレートとアクリ
レートモノマーと増感剤とよシ成る液体型感光性樹脂を
剛体基盤上でフレキシブル担体上に５５μの厚さに塗布
し、同時にガラスエポキシ片面銅貼シ積層板Ｒ４７００
（厚さ０ ＊ ８ ｍｍ、机下電工（彬製）よシ成る基
材をフレキシブル担体と同速でガイドによって供給し、
押圧体としてスポンジライニングロールを使用してガラ
スエポキシ片面銅貼シ積層板上に液体型感光性樹脂を塗
布した。この積層体に透明画像担体を介して露光し、フ
レキシブル担体を剥離し、ウォッシュアウト及び銅のエ
ツチングを行なった後、感光硬化していた液体型感光性
樹脂を除去した処、所望していた線幅６０μのエツチン
グ部では細太シや線維シが全くなく、良好なプリント配
線基板が製造できた。With the apparatus for carrying out the method of the present invention shown in FIG.
A liquid type photosensitive resin consisting of epoxy acrylate, acrylate monomer, and sensitizer was applied to a thickness of 55 μm on a flexible carrier on a rigid base while moving at 7 ec, and at the same time a glass epoxy single-sided copper-clad laminate R4700 was coated.
(A base material having a thickness of 0 * 8 mm and made of desk electric work (manufactured by Akira) was fed by a guide at the same speed as the flexible carrier,
A liquid photosensitive resin was applied onto a glass epoxy single-sided copper-clad laminate using a sponge lining roll as a pressing member. This laminate was exposed to light through a transparent image carrier, the flexible carrier was peeled off, and after washing out and copper etching, the liquid type photosensitive resin that had been photocured was removed and the desired line was formed. In the etched portion with a width of 60 μm, there were no thin lines or fiber lines, and a good printed wiring board could be manufactured.
実施例 ２
実施例１と同様に第３図に示す本発明方法を実施する装
置によって、フレキシブル担体として２０μのポリプロ
ピレンフィルムを使用し、このフレキシブル担体を７０
ＷＩｆｎ／Ｂｅ０で移動させながら、不飽和ポリエステ
ルと光重合増感剤と熱重合禁止剤等から成る液体型感光
性樹脂をフレキシブル担体上に２００μの厚さに塗布し
、同時にテレビブラウン管表面用の厚さ５ｍｍのガラス
板をフレキシブル担体と同速でガイドによって供給し、
抑圧体としてフレキシブル担体の移動方向に０．３ｍｍ
の曲率半径を有する金属パーを使用してガラス板上に液
体型感光性樹脂を塗布した。この積層体に透明画像担体
を介して画像露光し、フレキシブル担体を剥離して未硬
化樹脂をウォッシュアウトし、後露光。Example 2 As in Example 1, a 20μ polypropylene film was used as a flexible carrier, and the flexible carrier was
While moving with WIfn/Be0, a liquid photosensitive resin consisting of unsaturated polyester, a photopolymerization sensitizer, a thermal polymerization inhibitor, etc. is coated onto a flexible carrier to a thickness of 200μ, and at the same time a thickness of 200μ is applied to the surface of a television cathode ray tube. A glass plate with a diameter of 5 mm is fed by a guide at the same speed as the flexible carrier,
0.3 mm in the moving direction of the flexible carrier as a suppressor
A liquid photosensitive resin was applied onto a glass plate using a metal par with a radius of curvature of . This laminate is image-exposed through a transparent image carrier, the flexible carrier is peeled off, the uncured resin is washed out, and post-exposure is performed.
染色及び乾燥を行なって線幅１ｏｏμ、線間隙１００μ
の良好なテレビブラウン管用反射防止スクリーンを製造
することができた。After dyeing and drying, the line width is 1ooμ and the line gap is 100μ.
We were able to manufacture a good anti-reflection screen for television cathode ray tubes.
以上詳述した如く、本発明に係る液体型感光性樹脂の塗
布方法は、液体型感光性樹脂を基材上にハ
性樹脂を均一な厚さに塗布し、このフレキシブル担体の
液体型感光性樹脂の塗布面を基材に対向させた状態でフ
レキシブル担体を一定圧で押圧することによシ基材に液
体型感光性樹脂を一定厚で均一に塗布する方法であシ、
基材の厚さが多少変化していたシ平板状を成していなか
ったシ可撓性を有していたシ端部にパリが生じていたシ
しても常に均一な厚さで基材に液体型感光性樹脂を塗布
でき、しかもフレキシブル担体として露光硬化せしめら
れた液体型感光性樹脂からの剥離性が良い透明な素材を
使用するので露光硬化しない液体型感光性樹脂の回収が
容易であると共に露光時に液体型感光性樹脂を露出せし
めずにその上にフレキシブル担体が位置しているために
フレキシブル担体上に直接透明画像担体を載置できるた
め作業性も良いなど種々の利点を有しておシ、その工業
的価値は非常に大きなものがある。As described in detail above, the method for applying a liquid photosensitive resin according to the present invention involves coating the liquid photosensitive resin onto a base material to a uniform thickness, and applying the liquid photosensitive resin to the flexible carrier. It is a method of uniformly applying a liquid type photosensitive resin to a substrate at a constant thickness by pressing a flexible carrier with a constant pressure with the resin coating surface facing the substrate,
The thickness of the base material varied slightly, it did not have a flat plate shape, it was flexible, and there were cracks at the edges, but the base material always had a uniform thickness. The liquid photosensitive resin can be coated on the substrate, and since a transparent material is used as a flexible carrier that has good peelability from the liquid photosensitive resin that has been cured by exposure, it is easy to recover the liquid photosensitive resin that has not been cured by exposure. In addition, since the flexible carrier is placed on top of the liquid photosensitive resin without exposing it during exposure, the transparent image carrier can be placed directly on the flexible carrier, which has various advantages such as good workability. In fact, its industrial value is enormous.
第１図は従来の基材上に液体型感光性樹脂を塗布してい
る状態を示す縦断面図、第２図は従来の方法によシ液体
型感光性樹脂が塗布された基材に透明画像担体を介して
露光した際の感光硬化した感光性樹脂の状態を示す縦断
面図、第６図は本発明方法によシ液体型感光性樹脂を塗
布し露光する工程図である。
１・・液体型感光性樹脂
２・・フレキシブル担体
６・・剛体基盤
４・・塗布厚制御手段
５・・ガイドローラ
６・・基材
７・・ガイド
８・・抑圧体
９・・スプリング
１０・・露光装置
１１・・透明画像担体
１２・・剥離口〜ル
１３・・主回収装置Figure 1 is a vertical cross-sectional view showing a state in which a liquid photosensitive resin is coated on a conventional base material, and Figure 2 is a transparent view of a base material coated with a liquid type photosensitive resin using a conventional method. FIG. 6 is a longitudinal cross-sectional view showing the state of the photosensitive resin that has been photocured when exposed to light through an image carrier. FIG. 6 is a process diagram of applying and exposing a liquid type photosensitive resin according to the method of the present invention. 1. Liquid type photosensitive resin 2. Flexible carrier 6. Rigid base 4. Coating thickness control means 5. Guide roller 6. Base material 7. Guide 8. Suppression body 9. Spring 10.・Exposure device 11・・Transparent image carrier 12・・Peeling port 13・・Main recovery device
Claims (1)
性樹脂からの剥離性が良い透明なフレキシブル担体に液
体型感光性樹脂を均一な厚さに塗布し、直ちにそのフレ
キシブル担体を移動せしめて液体型感光性樹脂の塗布面
を基材に対向させた状態でフレキシブル担体を基材に一
定圧で押圧することによシ基材上に液体型感光性樹脂を
一定厚で均一に塗布することを特徴とする液体型感光性
樹脂の塗布方法。 ２ フレキシブル担体を基材に一定圧で押圧するに際し
、フレキシブル担体の移動方向を小さな曲率半径部を経
て変向させる剛体状の押圧体を使用する特許請求の範囲
第１項に記載の液体型感光性樹脂の塗布方法。 ６ フレキシブル担体を基材に一定圧で押圧するに際し
、実質的に弾性の表面を有するロール状の押圧体を使用
する特許請求の範囲第１項に記載の液体型感光性樹脂の
塗布方法。[Scope of Claims] 1. A liquid photosensitive resin is applied to a uniform thickness on a transparent flexible carrier that is flexible and has good peelability from a liquid photosensitive resin that has been cured by exposure, and then immediately By moving the flexible carrier and pressing the flexible carrier against the substrate with a constant pressure with the surface coated with the liquid photosensitive resin facing the substrate, the liquid photosensitive resin is uniformly applied on the substrate. A coating method for liquid photosensitive resin that is characterized by thick and uniform coating. 2. The liquid photosensitive material according to claim 1, which uses a rigid pressing body that changes the moving direction of the flexible carrier through a small radius of curvature when pressing the flexible carrier against the base material with a constant pressure. How to apply sex resin. 6. The method for applying a liquid photosensitive resin according to claim 1, wherein a roll-shaped pressing body having a substantially elastic surface is used when pressing the flexible carrier against the base material with a constant pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10264681A JPS584140A (en) | 1981-07-01 | 1981-07-01 | Applying method for liquid type photosensitive resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10264681A JPS584140A (en) | 1981-07-01 | 1981-07-01 | Applying method for liquid type photosensitive resin |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12531182A Division JPS5824144A (en) | 1982-07-19 | 1982-07-19 | Formation of resist image |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS584140A true JPS584140A (en) | 1983-01-11 |
Family
ID=14332996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10264681A Pending JPS584140A (en) | 1981-07-01 | 1981-07-01 | Applying method for liquid type photosensitive resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584140A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4853253A (en) * | 1987-03-30 | 1989-08-01 | Director General Of Agency Of Industrial Science And Technology | Method of activating surface of shaped body formed of synthetic organic polymer |
| RU2504626C1 (en) * | 2012-07-03 | 2014-01-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Cantilever overhang of building roof |
| RU2509190C2 (en) * | 2011-04-04 | 2014-03-10 | Петр Никифорович Лищук | Device to remove ice and icicles from cornices of building roofs, structures and around hopper heads |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5528060A (en) * | 1978-08-22 | 1980-02-28 | Fuji Xerox Co Ltd | Fixing device |
| JPS583540A (en) * | 1981-06-26 | 1983-01-10 | 東芝テック株式会社 | Charging circuit |
-
1981
- 1981-07-01 JP JP10264681A patent/JPS584140A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5528060A (en) * | 1978-08-22 | 1980-02-28 | Fuji Xerox Co Ltd | Fixing device |
| JPS583540A (en) * | 1981-06-26 | 1983-01-10 | 東芝テック株式会社 | Charging circuit |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4853253A (en) * | 1987-03-30 | 1989-08-01 | Director General Of Agency Of Industrial Science And Technology | Method of activating surface of shaped body formed of synthetic organic polymer |
| RU2509190C2 (en) * | 2011-04-04 | 2014-03-10 | Петр Никифорович Лищук | Device to remove ice and icicles from cornices of building roofs, structures and around hopper heads |
| RU2504626C1 (en) * | 2012-07-03 | 2014-01-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" | Cantilever overhang of building roof |
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