JPS58150315A - Production of airtight terminal for oscillator - Google Patents

Abstract

PURPOSE:To improve the quality of an airtight terminal and at the same time to increase the yield of said terminal, by joining a lead member and a supporting member together and then sealing them hermetically. CONSTITUTION:An electrode 2 is formed to a vibrating bar 1 and connected to the outside by means of a lead member 4 via a supporting member 3. An airtight terminal is formed by sealing hermetically a metallic outer ring 6 and the member 4 with the glass 5 and then joining the member 3 to the member 4 by soldering, spot welding, etc. In this way of production, the members 3 and 4 are joined together first and then sealed hermetically.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing an airtight terminal for a vibrator. A vibrator is often used as an oscillation source of a reference frequency. Piezoelectric materials such as crystal, lithium tantalate, lithium niobate, and piezoelectric ceramics are used as the vibrating element, but the vibrating element must be stored in an airtight container because its frequency changes drastically due to dirt and humidity. Furthermore, in order to reduce the change in frequency over time, it is also necessary to create a vacuum inside the airtight container. FIG. 1 is a perspective view for explaining the structure of a vibrator. An electrode (2) is formed on the vibrating piece (1) and is electrically connected to the outside via a support member (3) and a lead member (4). In the airtight terminal, the metal outer ring (6) and the lead member (4) are sealed together with the glass (5), and the support member (3) is joined to the lead member (4) by soldering, spot welding, etc. . This is because the supporting member (3) needs to have various shapes depending on the shape (size, thickness) of the vibrating piece (1), the joining method of the vibrating piece (1) and the supporting member (3), etc. Yes, support member (3
) and the lead member (4) are rarely integrated.

The present invention involves welding separate support members and lead members.
The present invention relates to a method of manufacturing an airtight terminal for a vibrator which is completed by joining by brazing or the like.

In a conventional method for manufacturing an airtight terminal for a vibrator (hereinafter simply referred to as an airtight terminal), a lead member and a metal outer ring are hermetically sealed with glass, and then a support member is bonded to each lead member.

The following problems occurred with the above manufacturing procedure.

a. Because the airtight terminal was small, welding and other work was extremely difficult and required a large amount of man-hours.

b. During hermetic sealing, the glass may wet or scatter onto the joint between the lead member and support member, making it impossible to secure the joint strength, and sometimes it is necessary to remove the glass with hydrofluoric acid, etc. There were times when I had to.

Since the C1 joining work is an individual work, rationalization was difficult.

d. If the joint of the lead member is destroyed due to a welding error, the entire airtight terminal becomes defective.

The present invention has been made in view of the drawbacks of the manufacturing method according to the prior art.

In the manufacturing method of the present invention, the supporting member and the lead member are first joined and then hermetically sealed. The manufacturing method of the present invention has the following advantages.

a. The lead member and support member can be easily joined.

FIG. 2 is a perspective view showing the lead member (14) and the support member α3) being welded individually by batch processing. Lead members and support members 03) formed by press punching or etching can be joined to each other without separating them.
The joining time can be greatly shortened and the work is easy to do.

Since it is bonded before the b1 hermetic seal, there is no adhesion of foreign matter due to the hermetic seal, and the bonding strength is stable and the quality is stable.

Even if a C1 joint failure occurs, the entire airtight terminal does not have to be defective, and only the supporting member and/or the lead member need be replaced, and losses can be kept to a minimum.

As explained above, according to the method for manufacturing an airtight terminal of the present invention, the quality of the airtight terminal can be improved, and the yield can also be improved, so that manufacturing costs can be reduced.

In the experiment of the manufacturing method of the present invention, stainless steel (SUS 304) was used as the support member, and the hardness after hermetic sealing was about HV 750.

If it is better for the supporting member to be soft, it can be tempered, and heat treatment at 500'C to 600°C for about 30 minutes will result in H
The V was about 300, which sufficiently withstood the above requirements.

[Brief explanation of the drawing]

Figure 1 is a perspective view for explaining the structure of the vibrator, and Figure 2 is a perspective view.
The figure shows the welding of the lead member and the support member, and is a perspective view (1)...One piece of vibration (3), αa...Support member (4), 04...・・Lead member (5)・・J・
・Glass Diagram 1 Excellent Diagram 2

Claims (1)

[Claims] A method for manufacturing an airtight terminal for a vibrator comprising at least a metal outer ring, glass, a lead member, and a support member, characterized in that the lead member and the support member are hermetically sealed after being joined. manufacturing method.